SimulatorSystem.cs 87 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. namespace Venus_Simulator.Instances
  15. {
  16. public class SimulatorSystem : Singleton<SimulatorSystem>
  17. {
  18. private PeriodicJob _thread;
  19. private Random _rd = new Random();
  20. private RD_TRIG _trigATM = new RD_TRIG();
  21. private RD_TRIG _trigVAC = new RD_TRIG();
  22. private R_TRIG _trigLLExtend = new R_TRIG();
  23. private R_TRIG _trigLLRetract = new R_TRIG();
  24. private static int count = 0;
  25. private readonly float ATM_THRESHOLD = 750000;
  26. private readonly float ATM_PRESSURE = 760000;
  27. private readonly float ATM_LoadLock_PRESSURE = 760000;
  28. private readonly uint VAC_SW_PRESSURE = 9500;
  29. private readonly uint PROCESS_GAUGE = 10000;
  30. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  31. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  32. public SimulatorSystem()
  33. {
  34. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  35. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  36. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  37. // TODO
  38. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  39. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  40. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  41. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  42. }
  43. ~SimulatorSystem()
  44. {
  45. _thread?.Stop();
  46. }
  47. public void Initialize()
  48. {
  49. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  50. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  51. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  52. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  53. SetTMDefaultValue();
  54. SetSETMDefaultValue();
  55. Singleton<DataManager>.Instance.Initialize(false);
  56. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  57. }
  58. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  59. {
  60. switch (jetChamber)
  61. {
  62. case JetChamber.Venus:
  63. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  64. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  65. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  66. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  67. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  68. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  69. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  70. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  71. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  72. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  73. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  74. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  75. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  76. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  78. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  83. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  85. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  86. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  88. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  89. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  90. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  91. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  92. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  93. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  94. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  96. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  99. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  100. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  101. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  102. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  104. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  106. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  107. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  108. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  109. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  110. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  111. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  112. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  113. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  114. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  115. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  116. //// pressure
  117. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  118. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  119. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  120. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  121. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  122. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  123. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  124. //// Temperature
  125. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  126. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  127. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  128. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  129. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  130. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  131. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  132. //if (mod == ModuleName.PMA)
  133. //{
  134. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  135. //}
  136. //else if (mod == ModuleName.PMB)
  137. //{
  138. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  139. //}
  140. // Datetime
  141. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  142. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  143. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  144. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  145. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  146. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  147. break;
  148. case JetChamber.VenusSE:
  149. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  150. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  151. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  152. IO.DI[$"{mod}.DI_Plate_Water_Flow_Switch"].Value = true;
  153. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  154. IO.DI[$"{mod}.DI_Lift_Pin_Up_Position"].Value = false;
  155. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  156. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  157. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  158. IO.DI[$"{mod}.DI_Lift_Pin_Down_Position"].Value = true;
  159. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  160. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = false;
  161. IO.DI[$"{mod}.DI_Slit_Door_Open_Position"].Value = true;
  162. IO.DI[$"{mod}.DI_Slit_Door_Close_Position"].Value = false;
  163. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = false;
  164. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  165. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  167. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = false;
  168. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = false;
  169. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = false;
  170. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = false;
  171. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  172. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  173. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  174. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = true;
  175. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  176. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  177. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  178. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  179. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  180. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  184. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  185. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  186. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  188. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  189. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  190. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  194. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  195. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  200. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  201. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  202. //// pressure
  203. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  204. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  205. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  206. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  207. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  208. //// Temperature
  209. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  210. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  211. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  212. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  213. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  214. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  215. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  216. // Datetime
  217. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  218. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  219. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  220. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  221. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  222. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  223. break;
  224. case JetChamber.Kepler2300:
  225. // chamber
  226. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  227. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  228. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  229. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  230. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  231. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  232. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  233. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  234. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  235. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  236. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  237. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  238. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  239. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  240. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  241. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  242. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  243. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  244. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  245. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  246. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  247. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  248. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  249. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  250. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  251. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  252. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  253. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  254. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  255. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  256. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  257. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  258. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  259. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  260. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  261. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  262. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  264. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  265. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  266. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  267. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  268. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  269. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  270. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  271. //// pressure
  272. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  273. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  274. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  275. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  276. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  277. //// Temperature
  278. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  279. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  280. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  281. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  282. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  283. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  284. // Datetime
  285. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  286. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  287. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  288. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  289. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  290. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  291. break;
  292. case JetChamber.Kepler2200A:
  293. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  294. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  295. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  296. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  297. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  298. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  299. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  300. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  301. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  302. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  303. IO.DI[$"{mod}.DI_CHB_H-HT_Control_TC_Broken_Alarm"].Value = false;
  304. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = false;
  305. IO.DI[$"{mod}.DI_CHB_H-HT_OT_Switch_Alarm"].Value = false;
  306. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  307. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  308. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  309. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  310. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  311. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  312. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  313. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  314. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  315. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  316. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  317. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  318. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  319. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  320. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  321. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  322. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  323. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  324. //// pressure
  325. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  326. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  327. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  328. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  329. //// Temperature
  330. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  331. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", 28);
  332. // Datetime
  333. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  334. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  335. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  336. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  337. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  338. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  339. break;
  340. }
  341. }
  342. private void SetTMDefaultValue()
  343. {
  344. ModuleName mod = ModuleName.TM;
  345. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  346. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  347. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  348. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  349. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  350. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  351. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  352. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  353. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  354. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  355. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  356. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  357. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  358. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  359. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  360. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  361. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  362. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  363. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  364. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  365. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  366. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  367. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  368. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  369. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  370. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  371. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  372. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  373. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  374. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  375. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  376. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  377. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  378. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  379. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  380. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  381. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  382. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  383. // Datetime
  384. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  385. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  386. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  387. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  388. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  389. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  390. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  391. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  392. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  393. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  394. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  395. }
  396. private void SetSETMDefaultValue()
  397. {
  398. ModuleName mod = ModuleName.SETM;
  399. IO.DI[$"{mod}.DI_TM_DI1"].Value = true;
  400. IO.DI[$"{mod}.DI_TM_DI2"].Value = true;
  401. IO.DI[$"{mod}.DI_TM_DI3"].Value = true;
  402. IO.DI[$"{mod}.DI_TM_DI5"].Value = true;
  403. IO.DI[$"{mod}.DI_TM_DI7"].Value = true;
  404. IO.DI[$"{mod}.DI_TM_DI8"].Value = true;
  405. IO.DI[$"{mod}.DI_TM_DI9"].Value = true;
  406. IO.DI[$"{mod}.DI_TM_DI10"].Value = true;
  407. IO.DI[$"{mod}.DI_SYS_C1"].Value = true;
  408. IO.DI[$"{mod}.DI_SYS_C2"].Value = false;
  409. IO.DI[$"{mod}.DI_SYS_C3"].Value = false;
  410. IO.DI[$"{mod}.DI_SYS_C4"].Value = false;
  411. IO.DI[$"{mod}.DI_TSYS_C5"].Value = false;
  412. IO.DI[$"{mod}.DI_TM_N2_1"].Value = true;
  413. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  414. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  415. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
  416. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  417. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
  418. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  419. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
  420. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  421. IO.DI[$"{mod}.DI_TM_HE"].Value = true;
  422. IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
  423. IO.DI[$"{mod}.DI_PMA_RB_RET"].Value = true;
  424. IO.DI[$"{mod}.DI_PMB_RB_RET"].Value = true;
  425. IO.DI[$"{mod}.DI_PMC_RB_RET"].Value = true;
  426. SetAiValue($"{mod}.AI_MFC_Flow_Setpoint", 3000);
  427. SetAiValue($"{mod}.VCE_Vacuum_Gauge", 3000);
  428. SetAiValue($"{mod}.VCE_Pipeline_Vacuum_Gauge", 3000);
  429. SetAiValue($"{mod}.TM_Pipeline_Vacuum_Gauge", 3000);
  430. SetAiValue($"{mod}.TM_Vacuum_Gauge", 3000);
  431. }
  432. private bool OnMonitor()
  433. {
  434. try
  435. {
  436. foreach (var item in jetChambers)
  437. {
  438. switch (item.Value)
  439. {
  440. case JetChamber.Venus:
  441. MonitorSlitDoor(item.Key);
  442. MonitorPin(item.Key);
  443. MonitorPressure(item.Key);
  444. MonitorExtendAndRetract(item.Key);
  445. MonitorGas(item.Key);
  446. this.SimulateHe(item.Key);
  447. //MonitorRF(item.Key);
  448. ChangeTime(item.Key);
  449. //MonitorIOPumpCtrl(item.Key);
  450. break;
  451. case JetChamber.Kepler2300:
  452. MonitorSlitDoor(item.Key);
  453. MonitorPin(item.Key);
  454. MonitorPressure_Kepler(item.Key);
  455. //MonitorTemperature(item.Key);
  456. MonitorGas(item.Key);
  457. this.SimulateHe(item.Key);
  458. //MonitorRF(item.Key);
  459. ChangeTime(item.Key);
  460. //MonitorIOPumpCtrl(item.Key);
  461. MonitorLid(item.Key);
  462. break;
  463. case JetChamber.Kepler2200A:
  464. MonitorSlitDoor(item.Key);
  465. MonitorPressure_Kepler2200A(item.Key);
  466. //MonitorTemperature(item.Key);
  467. MonitorGas(item.Key);
  468. // MonitorRF(item.Key);
  469. ChangeTime(item.Key);
  470. //MonitorIOPumpCtrl(item.Key);
  471. MonitorLid(item.Key);
  472. MonitorIOHighTemperatureHeater(item.Key);
  473. break;
  474. case JetChamber.Kepler2200B:
  475. break;
  476. }
  477. }
  478. ChangeTime(ModuleName.TM);
  479. MonitorMFSlitDoor();
  480. MonitorSEMFSlitDoor();
  481. MonitorMFPressure();
  482. }
  483. catch (Exception e)
  484. {
  485. LOG.WriteExeption(e);
  486. }
  487. return true;
  488. }
  489. private void ChangeTime(ModuleName mod)
  490. {
  491. // Heartbeat with PLC
  492. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  493. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  494. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  495. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  496. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  497. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  498. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  499. }
  500. void MonitorSlitDoor(ModuleName mod)
  501. {
  502. // slit door open
  503. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  504. {
  505. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  506. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  507. }
  508. // slit door close
  509. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  510. {
  511. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  512. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  513. }
  514. }
  515. void MonitorMFSlitDoor()
  516. {
  517. ModuleName mod = ModuleName.TM;
  518. // LLA T door open
  519. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  520. {
  521. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  522. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  523. }
  524. // LLB T door open
  525. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  526. {
  527. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  528. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  529. }
  530. // LLA E door open
  531. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  532. {
  533. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  534. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  535. }
  536. // LLB E door open
  537. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  538. {
  539. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  540. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  541. }
  542. // LLA T door close
  543. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  544. {
  545. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  546. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  547. }
  548. // LLB T door close
  549. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  550. {
  551. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  552. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  553. }
  554. // LLA E door close
  555. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  556. {
  557. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  558. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  559. }
  560. // LLB E door close
  561. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  562. {
  563. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  564. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  565. }
  566. }
  567. void MonitorSEMFSlitDoor()
  568. {
  569. ModuleName mod = ModuleName.SETM;
  570. // VCE T door open
  571. if (IO.DO[$"{mod}.DO_VCE_TM_OP"].Value)
  572. {
  573. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = true;
  574. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = false;
  575. }
  576. // VCE T door Close
  577. if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
  578. {
  579. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  580. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  581. }
  582. // VCE T door Close
  583. if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
  584. {
  585. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  586. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  587. }
  588. }
  589. void MonitorPin(ModuleName mod)
  590. {
  591. // lift pin up
  592. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  593. {
  594. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  595. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  596. }
  597. }
  598. void MonitorLid(ModuleName mod)
  599. {
  600. // lift pin up
  601. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  602. {
  603. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  604. }
  605. }
  606. void MonitorExtendAndRetract(ModuleName mod)
  607. {
  608. // Extend
  609. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  610. if (_trigLLExtend.Q)
  611. {
  612. _trigLLRetract.RST = true;
  613. Thread.Sleep(500);
  614. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  615. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  616. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  617. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  618. }
  619. // Retract
  620. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  621. if (_trigLLRetract.Q)
  622. {
  623. count++;
  624. _trigLLExtend.RST = true;
  625. Thread.Sleep(500);
  626. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  627. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  628. if (count == 1)
  629. {
  630. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  631. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  632. }
  633. else if (count == 2)
  634. {
  635. count = 0;
  636. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  637. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  638. }
  639. }
  640. }
  641. void MonitorPressure(ModuleName mod)
  642. {
  643. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  644. // Loadlock pressure
  645. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  646. // Foreline
  647. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  648. {
  649. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  650. }
  651. else
  652. {
  653. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  654. }
  655. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  656. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  657. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  658. //float chamber_pressure = GetMockChamberPressure(mod);
  659. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  660. // soft pump & fast pump
  661. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  662. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  663. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  664. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  665. {
  666. //任意泵打开
  667. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  668. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  669. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  670. {//开双泵
  671. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  672. {
  673. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  674. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  675. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  676. }
  677. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  678. {
  679. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  680. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  681. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  682. }
  683. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  684. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  685. }
  686. else if (fast_pump_vlv.Value)//开
  687. {
  688. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  689. {
  690. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  691. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  692. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  693. }
  694. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  695. {
  696. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  697. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  698. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  699. }
  700. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  701. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  702. }
  703. else if (soft_pump_vlv.Value)
  704. {
  705. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  706. {
  707. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  708. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  709. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  710. }
  711. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  712. {
  713. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  714. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  715. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  716. }
  717. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  718. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  719. }
  720. else if (turbo_pump_vlv.Value)
  721. {
  722. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  723. if ((getAiValue_ChamberPressure - 500) >= 0)
  724. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  725. else
  726. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  727. if ((getAiValue_ProcessPressure - 500) >= 0)
  728. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  729. else
  730. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  731. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  732. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  733. }
  734. }
  735. // fast vent & purge
  736. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  737. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  738. //if (vent_vlv.Value || purge_vlv.Value)
  739. //{
  740. // if (vent_vlv.Value && purge_vlv.Value)
  741. // {
  742. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  743. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  744. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  745. // {
  746. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  747. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  748. // }
  749. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  750. // {
  751. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  752. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  753. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  754. // }
  755. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  756. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  757. // }
  758. // else
  759. //
  760. if (vent_vlv.Value)
  761. {
  762. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  763. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  764. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  765. {
  766. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  767. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  768. }
  769. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  770. {
  771. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  772. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  773. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  774. }
  775. else
  776. {
  777. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  778. }
  779. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  780. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  781. }
  782. // Loadlock Pumping Valve
  783. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  784. if (Loadlock_pump_vlv.Value)
  785. {
  786. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  787. }
  788. // Loadlock vent
  789. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  790. if (Loadlock_vent_vlv.Value)
  791. {
  792. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  793. }
  794. // 压力值越界,复位
  795. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  796. if (chamber_pressure1 > ATM_PRESSURE)
  797. {
  798. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  799. }
  800. else if (chamber_pressure1 < 20)
  801. {
  802. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  803. }
  804. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  805. if (process_pressure1 > PROCESS_GAUGE)
  806. {
  807. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  808. }
  809. else if (process_pressure1 < 20)
  810. {
  811. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  812. }
  813. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  814. if (foreline_pressure > 10000)
  815. {
  816. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  817. }
  818. else if (foreline_pressure < 150)
  819. {
  820. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  821. }
  822. // 模拟压力计漂移
  823. //int p1 = (int)GetMockChamberPressure(mod);
  824. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  825. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  826. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  827. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  828. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  829. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  830. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  831. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  832. // 根据当前压力值设定信号
  833. //float chamber_pressure2 = GetMockChamberPressure(mod);
  834. // ATM switch
  835. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  836. // VAC switch
  837. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  838. // Throttle valve
  839. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  840. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  841. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  842. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  843. // 压力值
  844. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  845. //{
  846. // short increase = (short)_rd.Next(20, 30);
  847. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  848. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  849. // {
  850. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  851. // }
  852. //}
  853. //else
  854. //{
  855. // short increase = (short)_rd.Next(20, 30);
  856. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  857. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  858. // {
  859. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  860. // }
  861. //}
  862. //// 位置值
  863. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  864. //{
  865. // short increase = (short)_rd.Next(20, 30);
  866. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  867. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  868. // {
  869. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  870. // }
  871. //}
  872. //else
  873. //{
  874. // short increase = (short)_rd.Next(20, 30);
  875. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  876. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  877. // {
  878. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  879. // }
  880. //}
  881. }
  882. void MonitorPressure_Kepler(ModuleName mod)
  883. {
  884. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  885. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  886. {
  887. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  888. }
  889. else
  890. {
  891. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  892. }
  893. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  894. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  895. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  896. //float chamber_pressure = GetMockChamberPressure(mod);
  897. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  898. // soft pump & fast pump
  899. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  900. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  901. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  902. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  903. {
  904. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  905. {
  906. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  907. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  908. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  909. {
  910. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  911. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  912. }
  913. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  914. {
  915. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  916. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  917. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  918. }
  919. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  920. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  921. }
  922. else if (fast_pump_vlv.Value)
  923. {
  924. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  925. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  926. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  927. {
  928. float targetPressure = getAiValue_ChamberPressure > 26000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000 : 20;
  929. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  930. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  931. }
  932. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  933. {
  934. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  935. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  936. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  937. }
  938. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  939. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  940. }
  941. else if (soft_pump_vlv.Value)
  942. {
  943. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  944. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  945. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  946. {
  947. float targetPressure = getAiValue_ChamberPressure > 23000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000 : 20;
  948. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  949. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  950. }
  951. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  952. {
  953. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  954. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  955. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  956. }
  957. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  958. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  959. }
  960. else if (turbo_pump_vlv.Value)
  961. {
  962. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  963. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  964. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  965. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  966. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  967. }
  968. }
  969. // fast vent & purge
  970. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  971. if (vent_vlv.Value)
  972. {
  973. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  974. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  975. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  976. {
  977. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  978. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  979. }
  980. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  981. {
  982. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  983. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  984. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  985. }
  986. else
  987. {
  988. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  989. }
  990. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  991. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  992. }
  993. // Loadlock Pumping Valve
  994. // 压力值越界,复位
  995. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  996. if (chamber_pressure1 > ATM_PRESSURE)
  997. {
  998. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  999. }
  1000. else if (chamber_pressure1 < 20)
  1001. {
  1002. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1003. }
  1004. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1005. if (process_pressure1 > PROCESS_GAUGE)
  1006. {
  1007. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1008. }
  1009. else if (process_pressure1 < 20)
  1010. {
  1011. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1012. }
  1013. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1014. if (foreline_pressure > 10000)
  1015. {
  1016. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1017. }
  1018. else if (foreline_pressure < 150)
  1019. {
  1020. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1021. }
  1022. // ATM switch
  1023. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1024. // VAC switch
  1025. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1026. }
  1027. void MonitorPressure_Kepler2200A(ModuleName mod)
  1028. {
  1029. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1030. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1031. {
  1032. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1033. }
  1034. else
  1035. {
  1036. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1037. }
  1038. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1039. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1040. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1041. //float chamber_pressure = GetMockChamberPressure(mod);
  1042. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1043. // soft pump & fast pump
  1044. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1045. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1046. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1047. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1048. {
  1049. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1050. {
  1051. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1052. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1053. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1054. {
  1055. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1056. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1057. }
  1058. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1059. {
  1060. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1061. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1062. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1063. }
  1064. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1065. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1066. }
  1067. else if (fast_pump_vlv.Value)
  1068. {
  1069. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1070. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1071. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1072. {
  1073. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  1074. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1075. }
  1076. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1077. {
  1078. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1079. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1080. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1081. }
  1082. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1083. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1084. }
  1085. else if (soft_pump_vlv.Value)
  1086. {
  1087. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1088. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1089. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1090. {
  1091. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  1092. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1093. }
  1094. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1095. {
  1096. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1097. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1098. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1099. }
  1100. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1101. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1102. }
  1103. else if (turbo_pump_vlv.Value)
  1104. {
  1105. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1106. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1107. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1108. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1109. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1110. }
  1111. }
  1112. // fast vent & purge
  1113. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1114. if (vent_vlv.Value)
  1115. {
  1116. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1117. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1118. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1119. {
  1120. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1121. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1122. }
  1123. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1124. {
  1125. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1126. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1127. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1128. }
  1129. else
  1130. {
  1131. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1132. }
  1133. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1134. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1135. }
  1136. // Loadlock Pumping Valve
  1137. // 压力值越界,复位
  1138. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1139. if (chamber_pressure1 > ATM_PRESSURE)
  1140. {
  1141. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1142. }
  1143. else if (chamber_pressure1 < 20)
  1144. {
  1145. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1146. }
  1147. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1148. if (process_pressure1 > PROCESS_GAUGE)
  1149. {
  1150. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1151. }
  1152. else if (process_pressure1 < 20)
  1153. {
  1154. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1155. }
  1156. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1157. if (foreline_pressure > 10000)
  1158. {
  1159. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1160. }
  1161. else if (foreline_pressure < 150)
  1162. {
  1163. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1164. }
  1165. // ATM switch
  1166. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1167. // VAC switch
  1168. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1169. }
  1170. void MonitorMFPressure()
  1171. {
  1172. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  1173. //{
  1174. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1175. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1176. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1177. ModuleName mod = ModuleName.TM;
  1178. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1179. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1180. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1181. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1182. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1183. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1184. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1185. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1186. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1187. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1188. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1189. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1190. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1191. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1192. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1193. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1194. {
  1195. if (getAiValue_LLA_ChamberPressure > 10000)
  1196. {
  1197. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1198. }
  1199. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1200. {
  1201. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1202. }
  1203. }
  1204. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1205. {
  1206. if (getAiValue_LLB_ChamberPressure > 10000)
  1207. {
  1208. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1209. }
  1210. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1211. {
  1212. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1213. }
  1214. }
  1215. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1216. {
  1217. if (getAiValue_TM_ChamberPressure > 10000)
  1218. {
  1219. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1220. }
  1221. else if (getAiValue_TM_ChamberPressure <= 10000)
  1222. {
  1223. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1224. }
  1225. }
  1226. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1227. {
  1228. if (getAiValue_LLA_ChamberPressure > 10000)
  1229. {
  1230. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1231. }
  1232. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1233. {
  1234. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1235. }
  1236. }
  1237. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1238. {
  1239. if (getAiValue_LLB_ChamberPressure > 10000)
  1240. {
  1241. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1242. }
  1243. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1244. {
  1245. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1246. }
  1247. }
  1248. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1249. {
  1250. if (getAiValue_TM_ChamberPressure > 10000)
  1251. {
  1252. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1253. }
  1254. else if (getAiValue_TM_ChamberPressure <= 10000)
  1255. {
  1256. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1257. }
  1258. }
  1259. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1260. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1261. {
  1262. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1263. }
  1264. else if (getAiValue_LLA_ChamberPressure < 20)
  1265. {
  1266. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  1267. }
  1268. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1269. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  1270. {
  1271. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  1272. }
  1273. else if (getAiValue_LLB_ChamberPressure < 20)
  1274. {
  1275. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  1276. }
  1277. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1278. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1279. {
  1280. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1281. }
  1282. else if (getAiValue_TM_ChamberPressure < 20)
  1283. {
  1284. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1285. }
  1286. // ATM switch
  1287. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1288. // VAC switch
  1289. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1290. // ATM switch
  1291. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1292. // VAC switch
  1293. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1294. // ATM switch
  1295. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1296. // VAC switch
  1297. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1298. // }
  1299. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  1300. //{
  1301. // ModuleName mod = ModuleName.TM;
  1302. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1303. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1304. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1305. //}
  1306. }
  1307. void SetAiValue(string name, float value)
  1308. {
  1309. byte[] flow = BitConverter.GetBytes(value);
  1310. short high1 = BitConverter.ToInt16(flow, 0);
  1311. short low1 = BitConverter.ToInt16(flow, 2);
  1312. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1313. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1314. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1315. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1316. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1317. }
  1318. float GetAiValue(string name)
  1319. {
  1320. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1321. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1322. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1323. return flow;
  1324. }
  1325. float GetAoValue(string name)
  1326. {
  1327. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1328. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1329. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1330. return flow;
  1331. }
  1332. void MonitorTemperature(ModuleName mod)
  1333. {
  1334. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1335. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1336. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1337. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1338. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1339. // 底座
  1340. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1341. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1342. //{
  1343. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1344. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1345. //}
  1346. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1347. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1348. //{
  1349. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1350. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1351. //}
  1352. // Foreline
  1353. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1354. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1355. {
  1356. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1357. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1358. }
  1359. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1360. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1361. {
  1362. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1363. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1364. }
  1365. // Wall
  1366. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1367. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1368. {
  1369. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1370. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1371. }
  1372. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1373. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1374. {
  1375. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1376. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1377. }
  1378. }
  1379. void MonitorGas(ModuleName mod)
  1380. {
  1381. // gas
  1382. this.SimulateMFC(mod, 1);
  1383. this.SimulateMFC(mod, 2);
  1384. this.SimulateMFC(mod, 3);
  1385. this.SimulateMFC(mod, 4);
  1386. this.SimulateMFC(mod, 5);
  1387. this.SimulateMFC(mod, 6);
  1388. this.SimulateMFC(mod, 7);
  1389. this.SimulateMFC(mod, 8);
  1390. this.SimulateN2(mod);
  1391. }
  1392. private void SimulateMFC(ModuleName mod, byte gasNum)
  1393. {
  1394. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1395. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1396. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  1397. }
  1398. private void SimulateN2(ModuleName mod)
  1399. {
  1400. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1401. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1402. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  1403. }
  1404. private void SimulateHe(ModuleName mod)
  1405. {
  1406. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1407. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1408. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1409. }
  1410. void MonitorRF(ModuleName mod)
  1411. {
  1412. // RF generator
  1413. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1414. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1415. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1416. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1417. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1418. }
  1419. void MonitorIOPumpCtrl(ModuleName mod)
  1420. {
  1421. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1422. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1423. }
  1424. void MonitorIOHighTemperatureHeater(ModuleName mod)
  1425. {
  1426. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  1427. {
  1428. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  1429. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1430. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1431. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1432. }
  1433. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  1434. {
  1435. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1436. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  1437. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1438. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1439. }
  1440. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  1441. {
  1442. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1443. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1444. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  1445. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1446. }
  1447. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  1448. {
  1449. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1450. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1451. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1452. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  1453. }
  1454. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_H-HT_Heater_On"].Value;
  1455. var sp = GetAoValue($"{mod}.AO_CHB_H-HT_Temperature_Setpoint");
  1456. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  1457. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1458. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", (float)mock_fb);
  1459. }
  1460. public void Terminate()
  1461. {
  1462. _thread.Stop();
  1463. }
  1464. public void SetCoolantOutletTemp(string module, int Temp)
  1465. {
  1466. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1467. //{
  1468. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1469. //}
  1470. }
  1471. }
  1472. }