Kepler-Release/Venus/Venus_RT/Modules/PMs/PMGaslinePurgeRoutine.cs

using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Venus_RT.Devices;
using MECF.Framework.Common.Routine;
using Venus_Core;

namespace Venus_RT.Modules.PMs
{
    class PMGaslinePurgeRoutine : PMRoutineBase, IRoutine
    {
        private enum GaslinePurgeStep
        {
            kPreTurnValves,
            kOpenPVN21_PV12_1,
            kFlowMFC1_2,
            kClosePV12_3,
            kOpenPV22_4,
            kFlowMFC2_5,
            kClosePV22_6,
            kOpenPV32_7,
            kFlowMFC3_8,
            kClosePV32_9,
            kOpenPV42_10,
            kFlowMFC4_11,
            kClosePV42_12,
            kClosePVN21_13,
            kOpenMFC1_14,
            kCloseMFC1_15,
            kOpenMFC2_16,
            kCloseMFC2_17,
            kOpenMFC3_18,
            kCloseMFC3_19,
            kOpenMFC4_20,
            kCloseMFC4_21,
            kEnd,
        }

        public int PurgeCounter { get; private set; }

        private int _gasPurgeFlowTime = 5;
        private int _gasPurgePumpTime = 10;
        private int _gasPurgeCycleCount = 30;
        private readonly double _GasFlow = 1.0;

        bool Flow_MFC1() => _chamber.FlowGas(1, _GasFlow);
        bool Flow_MFC2() => _chamber.FlowGas(2, _GasFlow);
        bool Flow_MFC3() => _chamber.FlowGas(3, _GasFlow);
        bool Flow_MFC4() => _chamber.FlowGas(4, _GasFlow);


        public PMGaslinePurgeRoutine(JetPMBase chamber) : base(chamber)
        {
            Name = "GasLine Purge";
        }

        public RState Start(params object[] objs)
        {
            if (CheckLidLoadLock() &&
                CheckSlitDoor() &&
                CheckDryPump() &&
                CheckTurboPump())
            {
                _gasPurgeFlowTime = SC.GetValue<int>($"{Module}.Purge.GasPurgeFlowTime");
                _gasPurgePumpTime = SC.GetValue<int>($"{Module}.Purge.GasPurgePumpTime");
                _gasPurgeCycleCount = SC.GetValue<int>($"{Module}.Purge.GasPurgeCycleCount");

                Reset();

                PreTurnValves();

                PurgeCounter = 0;
                return Runner.Start(Module, Name);
            }
            return RState.Failed;
        }
        public RState Monitor()
        {
            Runner.Delay((int)GaslinePurgeStep.kPreTurnValves,      _delay_1s)
                .LoopStart((int)GaslinePurgeStep.kOpenPVN21_PV12_1, "Gas Purge Cycle",    _gasPurgeCycleCount, OpenPVN21_PV12,     _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kFlowMFC1_2,         Flow_MFC1,                                                      _gasPurgeFlowTime * 1000)
                .LoopRun((int)GaslinePurgeStep.kClosePV12_3,        HOFs.WrapAction(_chamber.OpenValve, ValveType.PV12, false),     _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kOpenPV22_4,         HOFs.WrapAction(_chamber.OpenValve, ValveType.PV22, true),      _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kFlowMFC2_5,         Flow_MFC2,                                                      _gasPurgeFlowTime * 1000)
                .LoopRun((int)GaslinePurgeStep.kClosePV22_6,        HOFs.WrapAction(_chamber.OpenValve, ValveType.PV22, false),     _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kOpenPV32_7,         HOFs.WrapAction(_chamber.OpenValve, ValveType.PV32, true),      _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kFlowMFC3_8,         Flow_MFC3,                                                      _gasPurgeFlowTime * 1000)
                .LoopRun((int)GaslinePurgeStep.kClosePV32_9,        HOFs.WrapAction(_chamber.OpenValve, ValveType.PV32, false),     _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kOpenPV42_10,        HOFs.WrapAction(_chamber.OpenValve, ValveType.PV42, true),      _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kFlowMFC4_11,        Flow_MFC4,                                                      _gasPurgeFlowTime * 1000)
                .LoopRun((int)GaslinePurgeStep.kClosePV42_12,       HOFs.WrapAction(_chamber.OpenValve, ValveType.PV42, false),     _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kClosePVN21_13,      HOFs.WrapAction(_chamber.OpenValve, ValveType.PV21, false),     _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kOpenMFC1_14,        HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc1, true),      _gasPurgePumpTime * 1000)
                .LoopRun((int)GaslinePurgeStep.kCloseMFC1_15,       HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc1, false),     _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kOpenMFC2_16,        HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc2, true),      _gasPurgePumpTime * 1000)
                .LoopRun((int)GaslinePurgeStep.kCloseMFC2_17,       HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc2, false),     _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kOpenMFC3_18,        HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc3, true),      _gasPurgePumpTime * 1000)
                .LoopRun((int)GaslinePurgeStep.kCloseMFC3_19,       HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc3, false),     _delay_1s)
                .LoopRun((int)GaslinePurgeStep.kOpenMFC4_20,        HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc4, true),      _gasPurgePumpTime * 1000)
                .LoopEnd((int)GaslinePurgeStep.kCloseMFC4_21,       StopAllGas,                                                     _delay_1s)
                .End((int)GaslinePurgeStep.kEnd,                    NullFun,                                                        _delay_50ms);

            return Runner.Status;
        }

        public void Abort()
        {
            CloseAllValves();
        }

        private void PreTurnValves()
        {
            _chamber.OpenValve(ValveType.Guage, false);
            _chamber.OpenValve(ValveType.SoftPump, false);
            _chamber.OpenValve(ValveType.FastPump, false);

            _chamber.TurnPendulumValve(false);

            _chamber.OpenValve(ValveType.GasFinal, false);
            _chamber.OpenValve(ValveType.N2, false);
            _chamber.OpenValve(ValveType.PVN22, false);

            _chamber.OpenValve(ValveType.TurboPumpPumping, true);
            _chamber.OpenValve(ValveType.TurboPumpPurge, true);
        }

        private bool OpenPVN21_PV12()
        {
            _chamber.OpenValve(ValveType.PVN21, true);
            _chamber.OpenValve(ValveType.PV12, true);

            return true;
        }

        private bool StopAllGas()
        {
            _chamber.StopGas(1);
            _chamber.StopGas(2);
            _chamber.StopGas(3);
            _chamber.StopGas(4);

            PurgeCounter++;
            return true;
        }
    }
}