VenusDevice.cs 5.9 KB

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  1. namespace Venus_Core
  2. {
  3. public enum VenusDevice
  4. {
  5. ValveMfc1,
  6. ValveMfc2,
  7. ValveMfc3,
  8. ValveMfc4,
  9. ValveMfc5,
  10. ValveMfc6,
  11. ValveMfc7,
  12. ValveMfc8,
  13. ValvePVN21,
  14. ValvePVN22,
  15. ValvePV11,
  16. ValvePV12,
  17. ValvePV21,
  18. ValvePV22,
  19. ValvePV31,
  20. ValvePV32,
  21. ValvePV41,
  22. ValvePV42,
  23. ValveN2,
  24. ValvePVHe1,
  25. ValvePVHe2,
  26. ValvePVHe3,
  27. ValveHeISO,
  28. ValveGasFinal,
  29. ValveSoftPump,
  30. ValveFastPump,
  31. ValveCHBPurge,
  32. ValveTurboPumpPumping,
  33. ValveTurboPumpPurge,
  34. ValveGuage,
  35. ValveLoadlockVent,
  36. ValveLoadlockPumping,
  37. MfcGas1,
  38. MfcGas2,
  39. MfcGas3,
  40. MfcGas4,
  41. MfcGas5,
  42. GasStick1,
  43. GasStick2,
  44. GasStick3,
  45. TemperatureControl,
  46. ChamberLid,
  47. ATM_SW,
  48. VAC_SW,
  49. WaterFlow_SW,
  50. N2_Pressure,
  51. ProcessGauge,
  52. PressureGauge,
  53. ForelineGauge,
  54. MainPump,
  55. Chiller,
  56. Rf,
  57. BiasRf,
  58. Match,
  59. BiasMatch,
  60. PressureControl,
  61. ThrottleValve,
  62. HeaterChamber,
  63. ForelineHeater,
  64. Heartbeat,
  65. ResetPlcSignal,
  66. LiftPin,
  67. SlitDoor,
  68. SmallPin,
  69. MediumPin,
  70. LoadLockArm,
  71. StatisticsRfOnTime,
  72. StatisticsPumpOnTime,
  73. PlcDateTime,
  74. Lid,
  75. LidLoadlock,
  76. LidLocker,
  77. ESCHV,
  78. PendulumValve,
  79. TurboPump,
  80. EndPoint,
  81. TMLid,
  82. LLALid,
  83. LLBLid,
  84. LLATSlitDoor,
  85. LLBTSlitDoor,
  86. LLAESlitDoor,
  87. LLBESlitDoor,
  88. TMValveN2,
  89. TMSoftPumpValve,
  90. TMFastPumpValve,
  91. TMPurgeValve,
  92. //TMVentValve,
  93. TMSoftVentValve,
  94. TMFastVentValve,
  95. LLASoftPumpValve,
  96. LLAFastPumpValve,
  97. LLAPurgeValve,
  98. LLAVentValve,
  99. LLBSoftPumpValve,
  100. LLBFastPumpValve,
  101. LLBPurgeValve,
  102. LLBVentValve,
  103. ValveWaterRelay,
  104. TMPowerOn,
  105. TMInSafty,
  106. WaferLeakSensor,
  107. EFEMSideDoorClosed,
  108. TMPCWFlowSwitch,
  109. LLAPCWFlowSwitch,
  110. LLBPCWFlowSwitch,
  111. TMLidClosed,
  112. CDAPressureSwitch,
  113. VaccumPressureSwitch,
  114. N2PressureSwitch,
  115. TMPressureCtrl,
  116. TMRobotNotExtendPMA,
  117. TMRobotNotExtendPMB,
  118. TMRobotNotExtendPMC,
  119. TMRobotNotExtendPMD,
  120. TMRobotNotExtendLLA,
  121. TMRobotNotExtendLLB,
  122. EfemRobotNotExtendLLA,
  123. EfemRobotNotExtendLLB,
  124. TMVacSwitch,
  125. LLAVacSwitch,
  126. LLBVacSwitch,
  127. TMATMSwitch,
  128. LLAATMSwitch,
  129. LLBATMSwitch,
  130. LLAWaferSizeCheckSwitch,
  131. LLBWaferSizeCheckSwitch,
  132. PMAWaferSizeCheckSwitch,
  133. PMBWaferSizeCheckSwitch,
  134. PMCWaferSizeCheckSwitch,
  135. PMDWaferSizeCheckSwitch,
  136. }
  137. public enum StateData
  138. {
  139. RecipeProcessTime,
  140. RecipeStepNo,
  141. RecipeStepMode,
  142. RecipeName,
  143. RecipeBaseName,
  144. RecipeStepTimeElapsed,
  145. RecipeStepTimeSetPoint,
  146. RecipeStepRfTimeSetPoint,
  147. RecipeStepElectrodeTemp,
  148. SmallWafer,
  149. MidWafer,
  150. BigWafer,
  151. RfTimeElapsed,
  152. PumpTime,
  153. PMState,
  154. TMState,
  155. IsAutoMode,
  156. IsPmOnline,
  157. IsTmOnline,
  158. PMJobState,
  159. TMJobState,
  160. PmPlatformState,
  161. JobState,
  162. JobTmRecipe,
  163. JobPmRecipe,
  164. JobStartTime,
  165. JobStopTime,
  166. JobProcessCount,
  167. IsPumpingOkForProcess,
  168. IsCoolingOkForProcess,
  169. IsGasFlowingOkForProcess,
  170. IsRfPowering,
  171. TotalCycle,
  172. ProcessStatus,
  173. AlarmEvent,
  174. LeakCheckElapseTime,
  175. DataLogName,
  176. LotName,
  177. CurrentMagazineType,
  178. SchedulerRecipe,
  179. SchedulerState,
  180. SchedulerLoadStationInSubstrate,
  181. SchedulerRailInSubstrate,
  182. SchedulerPmSubstrate,
  183. SchedulerRailOutSubstrate,
  184. SchedulerLoadStationOutSubstrate,
  185. }
  186. public enum RtOperation
  187. {
  188. DeviceOperation,
  189. LockLid,
  190. UnlockLid,
  191. StartPump,
  192. StartTurboPump,
  193. Pump,
  194. PumpLoadLock,
  195. StopPump,
  196. GasFlow,
  197. StopGasFlow,
  198. Cooling,
  199. StopCooling,
  200. /// <summary>
  201. ///
  202. /// 0:Step mode
  203. /// 1:Power on time
  204. /// 2:Electrode temperature
  205. /// 3:Electrode Critical temperature
  206. /// </summary>
  207. RfPower,
  208. Vent,
  209. VentLoadLock,
  210. Purge,
  211. PurgeLoadLock,
  212. Abort,
  213. Heat,
  214. SetConfig,
  215. SetPMBChillerState,
  216. SetHardwareConfig,
  217. LLPlace,
  218. LLPick,
  219. PMPick,
  220. PMPlace,
  221. Extend,
  222. Retract,
  223. RunRecipe,
  224. SkipCurrentStep,
  225. ResumeRecipe,
  226. AbortRecipe,
  227. Reset,
  228. LeakCheck,
  229. GasLeakCheck,
  230. DeleteLeakCheck,
  231. MFCVerification,
  232. AllMFCVerification,
  233. SwitchOffBuzzer,
  234. // Lift pin & Guide pin
  235. MoveLiftPin,
  236. MoveGuidePin,
  237. StartAutoRun,
  238. StopAutoRun,
  239. PauseAutoRun,
  240. ResumeAutoRun,
  241. InitAll,
  242. AckError,
  243. TmRun,
  244. TmStop,
  245. PmAuto,
  246. PmManual,
  247. PmOnline,
  248. PmOffline,
  249. JobAuto,
  250. JobManual,
  251. JobRun,
  252. JobStop,
  253. JobAbort,
  254. JobPmLoadRecipe,
  255. JobTmLoadRecipe,
  256. JobTmRun,
  257. JobTmStop,
  258. JobPmOnline,
  259. JobPmOffline,
  260. JobPmProcessDone,
  261. JobTmRecovered,
  262. Cycle
  263. }
  264. public enum MovementPosition
  265. {
  266. Down, Up, Left, Right, Middle, Unknown
  267. }
  268. public enum RState
  269. {
  270. Init,
  271. Running,
  272. End,
  273. Failed,
  274. Timeout,
  275. }
  276. }