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EFEM
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e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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LLs
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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1 year ago |
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LPs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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PMs
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e511d1f387
1.添加PM控压功能
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1 year ago |
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Schedulers
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 year ago |
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TM
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 year ago |
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VCE
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 year ago |
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AutoCycle.cs
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6ac9eafd1d
FIX minor bug for log.
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1 year ago |
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Autotransfer_LP_FA.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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ManualTransfer.cs
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501997ac38
TM/EFEM robot single arm option.
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1 year ago |
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ResourceMonitor.cs
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0ed42d17d1
fix bugs for WaferOffset
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1 year ago |
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RouteManager.cs
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 year ago |
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SEManualTransfer.cs
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 year ago |
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SETMCycle.cs
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376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
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1 year ago |
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TMCycle.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
zhouhr
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM