OverKepler2300ViewModel.cs 62 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. namespace Venus_MainPages.ViewModels
  23. {
  24. internal class OverKepler2300ViewModel : BindableBase
  25. {
  26. #region 私有字段
  27. private List<string> m_CurrentModuleRecipes=new List<string>();
  28. private bool m_PVN21ValveIsOpen;
  29. private bool m_PVN22ValveIsOpen;
  30. private bool m_N2ValveIsOpen;
  31. private bool m_PV11ValveIsOpen;
  32. private bool m_PV12ValveIsOpen;
  33. private bool m_PV21ValveIsOpen;
  34. private bool m_PV22ValveIsOpen;
  35. private bool m_PV31ValveIsOpen;
  36. private bool m_PV32ValveIsOpen;
  37. private bool m_PV41ValveIsOpen;
  38. private bool m_PV42ValveIsOpen;
  39. private bool m_MFC1ValveIsOpen;
  40. private bool m_MFC2ValveIsOpen;
  41. private bool m_MFC3ValveIsOpen;
  42. private bool m_MFC4ValveIsOpen;
  43. private bool m_MFC5ValveIsOpen;
  44. private bool m_MFC6ValveIsOpen;
  45. private bool m_MFC7ValveIsOpen;
  46. private bool m_MFC8ValveIsOpen;
  47. private bool m_GasFinalValveIsOpen;
  48. private bool m_SoftPumpValveIsOpen;
  49. private bool m_FastPumpValveIsOpen;
  50. private bool m_PVHe1ValveIsOpen;
  51. private bool m_PVHe2ValveIsOpen;
  52. private bool m_TurboPumpPumpingValveIsOpen;
  53. private bool m_TurboPumpPurgeValveIsOpen;
  54. private bool m_GuageValveIsOpen;
  55. private bool m_PendulumValveIsOpen;
  56. //private bool m_BRFIsOn;
  57. //private bool m_SRFIsOn;
  58. private double m_HeGasSetpoint;
  59. private int m_HePressureSetpoint;
  60. private float m_SRFFwdPowerSetpoint;
  61. private float m_BRFFwdPowerSetpoint;
  62. private float m_SRFMatchC1;
  63. private float m_SRFMatchC2;
  64. private float m_BRFMatchC1;
  65. private float m_BRFMatchC2;
  66. private double m_MFC1SetPoint;
  67. private double m_MFC2SetPoint;
  68. private double m_MFC3SetPoint;
  69. private double m_MFC4SetPoint;
  70. private double m_MFC5SetPoint;
  71. private double m_MFC6SetPoint;
  72. private double m_MFC7SetPoint;
  73. private double m_MFC8SetPoint;
  74. private double m_N2SetPoint;
  75. private AITMfcData m_MFC1Data;
  76. private AITMfcData m_MFC2Data;
  77. private AITMfcData m_MFC3Data;
  78. private AITMfcData m_MFC4Data;
  79. private AITMfcData m_MFC5Data;
  80. private AITMfcData m_MFC6Data;
  81. private AITMfcData m_MFC7Data;
  82. private AITMfcData m_MFC8Data;
  83. private AITMfcData m_MFCHeData;
  84. private AITMfcData m_MFCN2Data;
  85. private AITHeaterData m_ValveHeaterData;
  86. private AITHeaterData m_ForelineHeaterData;
  87. private AITHeaterData m_WallHeaterData;
  88. private AITRfData m_SRFData;
  89. private AITRfData m_BRFData;
  90. private AITPendulumValveData m_PendulumValveData;
  91. //private AITHVData m_ESCHVData;
  92. private PMState m_PMCurrentState;
  93. private bool m_SourceRFFanInterlock;
  94. private bool m_IsWLK;
  95. private bool m_IsWaterFlowOk;
  96. private bool m_IsTurboPumpInterlock;
  97. private bool m_IsCDAOK;
  98. private bool m_SensorGasBoxDoor;
  99. private bool m_SensorGasBoxPressure;
  100. private bool m_PumpIsOpen;
  101. private bool m_TurboIsOpen;
  102. private bool m_IsATM;
  103. private bool m_IsVAC;
  104. private List<string> m_RtDataKeys;
  105. private Dictionary<string, object> m_RtDataValues;
  106. private int m_PositionValue;
  107. private bool m_IsPositionMode;
  108. private int m_ESCVoltage;
  109. private bool m_GasIsFlowing;
  110. private bool m_IsProcessing;
  111. private bool m_IsAutoMode;
  112. private string m_SelectedRecipe;
  113. private float m_ChillerTempSetpoint;
  114. private float m_WallTempSetpoint;
  115. private bool m_HeIsPressureMode=true;
  116. private bool m_ChillerIsOn;
  117. private float m_ProcessHighPressure;
  118. private float m_ProcessLowPressure;
  119. private float m_ForelinePressurePressure;
  120. private float m_ESCHePressure;
  121. ButterflyValveView butterflyValveMessageBox;
  122. HeaterView heaterView;
  123. private int m_TurboPumpRotationalSpeed;
  124. private bool m_LiftPinIsUp;
  125. private bool m_IsSlitDoorClosed;
  126. private bool m_IsLidClosed;
  127. private float m_ChillerTemperature;
  128. //private float m_HVTemperature;
  129. private int m_ESCHVOutputVoltage;
  130. //private float m_SRfReflectPower;
  131. //private float m_SRfForwardPowerFeedBack;
  132. //private float m_BRfReflectPower;
  133. //private float m_BRfForwardPowerFeedBack;
  134. //private int m_MatchWorkMode;
  135. //private int m_BiasMatchWorkMode;
  136. private float m_MatchC1;
  137. private float m_MatchC2;
  138. private float m_BiasMatchC1;
  139. private float m_BiasMatchC2;
  140. private float m_PendulumValvePosition;
  141. private bool m_IsTurboPumpAtSpeed;
  142. private bool m_TurboPumpWaterFlowSwitch;
  143. private bool m_IsHasWafer;
  144. private Recipe m_CurrentRecipe=new Recipe ();
  145. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  146. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  147. private double m_ChamberPressureFeedBack;
  148. #endregion
  149. #region 属性
  150. public List<string> CurrentModuleRecipes
  151. {
  152. get { return m_CurrentModuleRecipes; }
  153. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  154. }
  155. public Recipe CurrentRecipe
  156. {
  157. get { return m_CurrentRecipe; }
  158. set { SetProperty(ref m_CurrentRecipe, value); }
  159. }
  160. public RecipeResult CurrentRecipeResult
  161. {
  162. get { return m_CurrentRecipeResult; }
  163. set { SetProperty(ref m_CurrentRecipeResult, value); }
  164. }
  165. public RecipeStep CurrentRecipeStep
  166. {
  167. get { return m_CurrentRecipeStep; }
  168. set { SetProperty(ref m_CurrentRecipeStep, value); }
  169. }
  170. public bool IsHasWafer
  171. {
  172. get { return m_IsHasWafer; }
  173. set { SetProperty(ref m_IsHasWafer, value); }
  174. }
  175. public bool IsTurboPumpAtSpeed
  176. {
  177. get { return m_IsTurboPumpAtSpeed; }
  178. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  179. }
  180. public bool TurboPumpWaterFlowSwitch
  181. {
  182. get { return m_TurboPumpWaterFlowSwitch; }
  183. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  184. }
  185. public float PendulumValvePosition
  186. {
  187. get { return m_PendulumValvePosition; }
  188. set{SetProperty(ref m_PendulumValvePosition, value);}
  189. }
  190. public float BiasMatchC1
  191. {
  192. get { return m_BiasMatchC1; }
  193. set
  194. {
  195. SetProperty(ref m_BiasMatchC1, value);
  196. }
  197. }
  198. public float BiasMatchC2
  199. {
  200. get { return m_BiasMatchC2; }
  201. set
  202. {
  203. SetProperty(ref m_BiasMatchC2, value);
  204. }
  205. }
  206. public float MatchC1
  207. {
  208. get { return m_MatchC1; }
  209. set
  210. {
  211. SetProperty(ref m_MatchC1, value);
  212. }
  213. }
  214. public float MatchC2
  215. {
  216. get { return m_MatchC2; }
  217. set
  218. {
  219. SetProperty(ref m_MatchC2, value);
  220. }
  221. }
  222. public AITPendulumValveData PendulumValveData
  223. {
  224. get { return m_PendulumValveData; }
  225. set
  226. {
  227. SetProperty(ref m_PendulumValveData, value);
  228. }
  229. }
  230. //public AITHVData ESCHVData
  231. //{
  232. // get { return m_ESCHVData; }
  233. // set
  234. // {
  235. // SetProperty(ref m_ESCHVData, value);
  236. // }
  237. //}
  238. public int ESCHVOutputVoltage
  239. {
  240. get { return m_ESCHVOutputVoltage; }
  241. set
  242. {
  243. SetProperty(ref m_ESCHVOutputVoltage, value);
  244. }
  245. }
  246. public float ChillerTemperature
  247. {
  248. get { return m_ChillerTemperature; }
  249. set
  250. {
  251. SetProperty(ref m_ChillerTemperature, value);
  252. }
  253. }
  254. //public float HVTemperature
  255. //{
  256. // get { return m_HVTemperature; }
  257. // set
  258. // {
  259. // SetProperty(ref m_HVTemperature, value);
  260. // }
  261. //}
  262. public bool IsLidClosed
  263. {
  264. get { return m_IsLidClosed; }
  265. set
  266. {
  267. SetProperty(ref m_IsLidClosed, value);
  268. }
  269. }
  270. public bool IsSlitDoorClosed
  271. {
  272. get { return m_IsSlitDoorClosed; }
  273. set
  274. {
  275. SetProperty(ref m_IsSlitDoorClosed, value);
  276. }
  277. }
  278. public bool LiftPinIsUp
  279. {
  280. get { return m_LiftPinIsUp; }
  281. set
  282. {
  283. SetProperty(ref m_LiftPinIsUp, value);
  284. }
  285. }
  286. public int TurboPumpRotationalSpeed
  287. {
  288. get { return m_TurboPumpRotationalSpeed; }
  289. set
  290. {
  291. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  292. }
  293. }
  294. public float ESCHePressure
  295. {
  296. get { return m_ESCHePressure; }
  297. set
  298. {
  299. SetProperty(ref m_ESCHePressure, value);
  300. }
  301. }
  302. public float ProcessHighPressure
  303. {
  304. get { return m_ProcessHighPressure; }
  305. set
  306. {
  307. SetProperty(ref m_ProcessHighPressure, value);
  308. }
  309. }
  310. public float ProcessLowPressure
  311. {
  312. get { return m_ProcessLowPressure; }
  313. set
  314. {
  315. SetProperty(ref m_ProcessLowPressure, value);
  316. }
  317. }
  318. public float ForelinePressure
  319. {
  320. get { return m_ForelinePressurePressure; }
  321. set
  322. {
  323. SetProperty(ref m_ForelinePressurePressure, value);
  324. }
  325. }
  326. public bool SourceRFFanInterlock
  327. {
  328. get { return m_SourceRFFanInterlock; }
  329. set
  330. {
  331. SetProperty(ref m_SourceRFFanInterlock, value);
  332. }
  333. }
  334. public bool IsWLK
  335. {
  336. get { return m_IsWLK; }
  337. set
  338. {
  339. SetProperty(ref m_IsWLK, value);
  340. }
  341. }
  342. public bool IsWaterFlowOk
  343. {
  344. get { return m_IsWaterFlowOk; }
  345. set
  346. {
  347. SetProperty(ref m_IsWaterFlowOk, value);
  348. }
  349. }
  350. public bool IsCDAOK
  351. {
  352. get { return m_IsCDAOK; }
  353. set
  354. {
  355. SetProperty(ref m_IsCDAOK, value);
  356. }
  357. }
  358. public bool SensorGasBoxDoor
  359. {
  360. get { return m_SensorGasBoxDoor; }
  361. set
  362. {
  363. SetProperty(ref m_SensorGasBoxDoor, value);
  364. }
  365. }
  366. public bool SensorGasBoxPressure
  367. {
  368. get { return m_SensorGasBoxPressure; }
  369. set
  370. {
  371. SetProperty(ref m_SensorGasBoxPressure, value);
  372. }
  373. }
  374. public bool IsTurboPumpInterlock
  375. {
  376. get { return m_IsTurboPumpInterlock; }
  377. set
  378. {
  379. SetProperty(ref m_IsTurboPumpInterlock, value);
  380. }
  381. }
  382. public string ModuleName { get; set; }
  383. public double MFC1SetPoint
  384. {
  385. get { return m_MFC1SetPoint; }
  386. set { SetProperty(ref m_MFC1SetPoint, value); }
  387. }
  388. public double MFC2SetPoint
  389. {
  390. get { return m_MFC2SetPoint; }
  391. set { SetProperty(ref m_MFC2SetPoint, value); }
  392. }
  393. public double MFC3SetPoint
  394. {
  395. get { return m_MFC3SetPoint; }
  396. set { SetProperty(ref m_MFC3SetPoint, value); }
  397. }
  398. public double MFC4SetPoint
  399. {
  400. get { return m_MFC4SetPoint; }
  401. set { SetProperty(ref m_MFC4SetPoint, value); }
  402. }
  403. public double MFC5SetPoint
  404. {
  405. get { return m_MFC5SetPoint; }
  406. set { SetProperty(ref m_MFC5SetPoint, value); }
  407. }
  408. public double MFC6SetPoint
  409. {
  410. get { return m_MFC6SetPoint; }
  411. set { SetProperty(ref m_MFC6SetPoint, value); }
  412. }
  413. public double MFC7SetPoint
  414. {
  415. get { return m_MFC7SetPoint; }
  416. set { SetProperty(ref m_MFC7SetPoint, value); }
  417. }
  418. public double MFC8SetPoint
  419. {
  420. get { return m_MFC8SetPoint; }
  421. set { SetProperty(ref m_MFC8SetPoint, value); }
  422. }
  423. public double N2SetPoint
  424. {
  425. get { return m_N2SetPoint; }
  426. set { SetProperty(ref m_N2SetPoint, value); }
  427. }
  428. public AITMfcData MFC1Data
  429. {
  430. get { return m_MFC1Data; }
  431. set { SetProperty(ref m_MFC1Data, value); }
  432. }
  433. public AITMfcData MFC2Data
  434. {
  435. get { return m_MFC2Data; }
  436. set { SetProperty(ref m_MFC2Data, value); }
  437. }
  438. public AITMfcData MFC3Data
  439. {
  440. get { return m_MFC3Data; }
  441. set { SetProperty(ref m_MFC3Data, value); }
  442. }
  443. public AITMfcData MFC4Data
  444. {
  445. get { return m_MFC4Data; }
  446. set { SetProperty(ref m_MFC4Data, value); }
  447. }
  448. public AITMfcData MFC5Data
  449. {
  450. get { return m_MFC5Data; }
  451. set { SetProperty(ref m_MFC5Data, value); }
  452. }
  453. public AITMfcData MFC6Data
  454. {
  455. get { return m_MFC6Data; }
  456. set { SetProperty(ref m_MFC6Data, value); }
  457. }
  458. public AITMfcData MFC7Data
  459. {
  460. get { return m_MFC7Data; }
  461. set { SetProperty(ref m_MFC7Data, value); }
  462. }
  463. public AITMfcData MFC8Data
  464. {
  465. get { return m_MFC8Data; }
  466. set { SetProperty(ref m_MFC8Data, value); }
  467. }
  468. public AITMfcData MFCHeData
  469. {
  470. get { return m_MFCHeData; }
  471. set { SetProperty(ref m_MFCHeData, value); }
  472. }
  473. public AITMfcData MFCN2Data
  474. {
  475. get { return m_MFCN2Data; }
  476. set { SetProperty(ref m_MFCN2Data, value); }
  477. }
  478. public AITHeaterData ValveHeaterData
  479. {
  480. get { return m_ValveHeaterData; }
  481. set { SetProperty(ref m_ValveHeaterData, value); }
  482. }
  483. public AITHeaterData ForelineHeaterData
  484. {
  485. get { return m_ForelineHeaterData; }
  486. set { SetProperty(ref m_ForelineHeaterData, value); }
  487. }
  488. public AITHeaterData WallHeaterData
  489. {
  490. get { return m_WallHeaterData; }
  491. set { SetProperty(ref m_WallHeaterData, value); }
  492. }
  493. public AITRfData SRFData
  494. {
  495. get { return m_SRFData; }
  496. set { SetProperty(ref m_SRFData, value); }
  497. }
  498. public AITRfData BRFData
  499. {
  500. get { return m_BRFData; }
  501. set { SetProperty(ref m_BRFData, value); }
  502. }
  503. public PMState PMCurrentState
  504. {
  505. get { return m_PMCurrentState; }
  506. set { SetProperty(ref m_PMCurrentState, value); }
  507. }
  508. #region 阀
  509. public bool GasFinalValveIsOpen
  510. {
  511. get { return m_GasFinalValveIsOpen; }
  512. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  513. }
  514. public bool PVN21ValveIsOpen
  515. {
  516. get { return m_PVN21ValveIsOpen; }
  517. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  518. }
  519. public bool PVN22ValveIsOpen
  520. {
  521. get { return m_PVN22ValveIsOpen; }
  522. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  523. }
  524. public bool N2ValveIsOpen
  525. {
  526. get { return m_N2ValveIsOpen; }
  527. set { SetProperty(ref m_N2ValveIsOpen, value); }
  528. }
  529. public bool PV11ValveIsOpen
  530. {
  531. get { return m_PV11ValveIsOpen; }
  532. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  533. }
  534. public bool PV12ValveIsOpen
  535. {
  536. get { return m_PV12ValveIsOpen; }
  537. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  538. }
  539. public bool MFC1ValveIsOpen
  540. {
  541. get { return m_MFC1ValveIsOpen; }
  542. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  543. }
  544. public bool PV21ValveIsOpen
  545. {
  546. get { return m_PV21ValveIsOpen; }
  547. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  548. }
  549. public bool PV22ValveIsOpen
  550. {
  551. get { return m_PV22ValveIsOpen; }
  552. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  553. }
  554. public bool MFC2ValveIsOpen
  555. {
  556. get { return m_MFC2ValveIsOpen; }
  557. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  558. }
  559. public bool PV31ValveIsOpen
  560. {
  561. get { return m_PV31ValveIsOpen; }
  562. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  563. }
  564. public bool PV32ValveIsOpen
  565. {
  566. get { return m_PV32ValveIsOpen; }
  567. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  568. }
  569. public bool MFC3ValveIsOpen
  570. {
  571. get { return m_MFC3ValveIsOpen; }
  572. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  573. }
  574. public bool PV41ValveIsOpen
  575. {
  576. get { return m_PV41ValveIsOpen; }
  577. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  578. }
  579. public bool PV42ValveIsOpen
  580. {
  581. get { return m_PV42ValveIsOpen; }
  582. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  583. }
  584. public bool MFC4ValveIsOpen
  585. {
  586. get { return m_MFC4ValveIsOpen; }
  587. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  588. }
  589. public bool MFC5ValveIsOpen
  590. {
  591. get { return m_MFC5ValveIsOpen; }
  592. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  593. }
  594. public bool MFC6ValveIsOpen
  595. {
  596. get { return m_MFC6ValveIsOpen; }
  597. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  598. }
  599. public bool MFC7ValveIsOpen
  600. {
  601. get { return m_MFC7ValveIsOpen; }
  602. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  603. }
  604. public bool MFC8ValveIsOpen
  605. {
  606. get { return m_MFC8ValveIsOpen; }
  607. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  608. }
  609. public bool PVHe1ValveIsOpen
  610. {
  611. get { return m_PVHe1ValveIsOpen; }
  612. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  613. }
  614. public bool PVHe2ValveIsOpen
  615. {
  616. get { return m_PVHe2ValveIsOpen; }
  617. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  618. }
  619. public bool TurboPumpPumpingValveIsOpen
  620. {
  621. get { return m_TurboPumpPumpingValveIsOpen; }
  622. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  623. }
  624. public bool TurboPumpPurgeValveIsOpen
  625. {
  626. get { return m_TurboPumpPurgeValveIsOpen; }
  627. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  628. }
  629. public bool SoftPumpValveIsOpen
  630. {
  631. get { return m_SoftPumpValveIsOpen; }
  632. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  633. }
  634. public bool FastPumpValveIsOpen
  635. {
  636. get { return m_FastPumpValveIsOpen; }
  637. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  638. }
  639. public bool GuageValveIsOpen
  640. {
  641. get { return m_GuageValveIsOpen; }
  642. set { SetProperty(ref m_GuageValveIsOpen, value); }
  643. }
  644. #endregion
  645. public Dictionary<string, object> RtDataValues
  646. {
  647. get { return m_RtDataValues; }
  648. set { SetProperty(ref m_RtDataValues, value); }
  649. }
  650. public bool PumpIsOpen
  651. {
  652. get { return m_PumpIsOpen; }
  653. set { SetProperty(ref m_PumpIsOpen, value); }
  654. }
  655. public bool PendulumValveIsOpen
  656. {
  657. get { return m_PendulumValveIsOpen; }
  658. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  659. }
  660. public bool TurboIsOpen
  661. {
  662. get { return m_TurboIsOpen; }
  663. set { SetProperty(ref m_TurboIsOpen, value); }
  664. }
  665. public bool IsATM
  666. {
  667. get { return m_IsATM; }
  668. set { SetProperty(ref m_IsATM, value); }
  669. }
  670. public bool IsVAC
  671. {
  672. get { return m_IsVAC; }
  673. set { SetProperty(ref m_IsVAC, value); }
  674. }
  675. //public bool BRFIsOn
  676. //{
  677. // get { return m_BRFIsOn; }
  678. // set { SetProperty(ref m_BRFIsOn, value); }
  679. //}
  680. //public bool SRFIsOn
  681. //{
  682. // get { return m_SRFIsOn; }
  683. // set { SetProperty(ref m_SRFIsOn, value); }
  684. //}
  685. public int PositionValue
  686. {
  687. get { return m_PositionValue; }
  688. set { SetProperty(ref m_PositionValue, value); }
  689. }
  690. public bool IsPositionMode
  691. {
  692. get { return m_IsPositionMode; }
  693. set { SetProperty(ref m_IsPositionMode, value); }
  694. }
  695. public double HeGasSetpoint
  696. {
  697. get { return m_HeGasSetpoint; }
  698. set
  699. {
  700. SetProperty(ref m_HeGasSetpoint, value);
  701. }
  702. }
  703. public int HePressureSetpoint
  704. {
  705. get { return m_HePressureSetpoint; }
  706. set
  707. {
  708. SetProperty(ref m_HePressureSetpoint, value);
  709. }
  710. }
  711. public float SRFFwdPowerSetpoint
  712. {
  713. get { return m_SRFFwdPowerSetpoint; }
  714. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  715. }
  716. public float BRFFwdPowerSetpoint
  717. {
  718. get { return m_BRFFwdPowerSetpoint; }
  719. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  720. }
  721. public int ESCVoltage
  722. {
  723. get { return m_ESCVoltage; }
  724. set { SetProperty(ref m_ESCVoltage, value); }
  725. }
  726. public float SRFMatchC1
  727. {
  728. get { return m_SRFMatchC1; }
  729. set { SetProperty(ref m_SRFMatchC1, value); }
  730. }
  731. public float SRFMatchC2
  732. {
  733. get { return m_SRFMatchC2; }
  734. set { SetProperty(ref m_SRFMatchC2, value); }
  735. }
  736. public float BRFMatchC1
  737. {
  738. get { return m_BRFMatchC1; }
  739. set { SetProperty(ref m_BRFMatchC1, value); }
  740. }
  741. public float BRFMatchC2
  742. {
  743. get { return m_BRFMatchC2; }
  744. set { SetProperty(ref m_BRFMatchC2, value); }
  745. }
  746. public bool GasIsFlowing
  747. {
  748. get { return m_GasIsFlowing; }
  749. set { SetProperty(ref m_GasIsFlowing, value); }
  750. }
  751. public bool IsProcessing
  752. {
  753. get { return m_IsProcessing; }
  754. set { SetProperty(ref m_IsProcessing, value); }
  755. }
  756. public bool IsAutoMode
  757. {
  758. get { return m_IsAutoMode; }
  759. set { SetProperty(ref m_IsAutoMode, value); }
  760. }
  761. public string SelectedRecipe
  762. {
  763. get { return m_SelectedRecipe; }
  764. set { SetProperty(ref m_SelectedRecipe, value); }
  765. }
  766. public float ChillerTempSetpoint
  767. {
  768. get { return m_ChillerTempSetpoint; }
  769. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  770. }
  771. public float WallTempSetpoint
  772. {
  773. get { return m_WallTempSetpoint; }
  774. set { SetProperty(ref m_WallTempSetpoint, value); }
  775. }
  776. public bool HeIsPressureMode
  777. {
  778. get { return m_HeIsPressureMode; }
  779. set { SetProperty(ref m_HeIsPressureMode, value); }
  780. }
  781. public bool ChillerIsOn
  782. {
  783. get { return m_ChillerIsOn; }
  784. set { SetProperty(ref m_ChillerIsOn, value); }
  785. }
  786. public double ChamberPressureFeedBack
  787. {
  788. get { return m_ChamberPressureFeedBack; }
  789. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  790. }
  791. #endregion
  792. #region 命令
  793. private DelegateCommand _PMInitCommnad;
  794. public DelegateCommand PMInitCommnad =>
  795. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  796. private DelegateCommand _PMAbortCommnad;
  797. public DelegateCommand PMAbortCommnad =>
  798. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  799. private DelegateCommand _GasCommand;
  800. public DelegateCommand GasCommand =>
  801. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  802. private DelegateCommand _HeCommand;
  803. public DelegateCommand HeCommand =>
  804. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  805. private DelegateCommand _RfCommand;
  806. public DelegateCommand RfCommand =>
  807. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  808. private DelegateCommand _PurgeCommand;
  809. public DelegateCommand PurgeCommand =>
  810. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  811. private DelegateCommand _VentCommand;
  812. public DelegateCommand VentCommand =>
  813. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  814. private DelegateCommand _PumpCommand;
  815. public DelegateCommand PumpCommand =>
  816. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  817. private DelegateCommand _OpenPumpCommand;
  818. public DelegateCommand OpenPumpCommand =>
  819. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  820. private DelegateCommand _ClosePumpCommand;
  821. public DelegateCommand ClosePumpCommand =>
  822. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  823. private DelegateCommand _OpenTurboPumpCommand;
  824. public DelegateCommand OpenTurboPumpCommand =>
  825. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  826. private DelegateCommand _CloseTurboPumpCommand;
  827. public DelegateCommand CloseTurboPumpCommand =>
  828. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  829. private DelegateCommand _OpenPendulumValveCommand;
  830. public DelegateCommand OpenPendulumValveCommand =>
  831. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  832. private DelegateCommand _ClosePendulumValveCommand;
  833. public DelegateCommand ClosePendulumValveCommand =>
  834. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  835. private DelegateCommand<object> _PinUpDownCommand;
  836. public DelegateCommand<object> PinUpDownCommand =>
  837. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  838. private DelegateCommand<object> _LidUpDownCommand;
  839. public DelegateCommand<object> LidUpDownCommand =>
  840. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  841. private DelegateCommand _SetSRfCommand;
  842. public DelegateCommand SetSRfCommand =>
  843. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  844. private DelegateCommand _SetBRfCommand;
  845. public DelegateCommand SetBRfCommand =>
  846. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  847. private DelegateCommand _OpenButterflyValveViewCommand;
  848. public DelegateCommand OpenButterflyValveViewCommand =>
  849. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  850. //private DelegateCommand _HVCommand;
  851. //public DelegateCommand HVCommand =>
  852. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  853. private DelegateCommand _HVSetCommand;
  854. public DelegateCommand HVSetCommand =>
  855. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  856. private DelegateCommand _LoadRecipeCommand;
  857. public DelegateCommand LoadRecipeCommand =>
  858. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  859. private DelegateCommand<object> _ControlValveCommand;
  860. public DelegateCommand<object> ControlValveCommand =>
  861. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  862. private DelegateCommand<object> _RunRecipeCommand;
  863. public DelegateCommand<object> RunRecipeCommand =>
  864. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  865. private DelegateCommand _SetChillerTempCommand;
  866. public DelegateCommand SetChillerTempCommand =>
  867. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  868. private DelegateCommand _OnOffChillerCommand;
  869. public DelegateCommand OnOffChillerCommand =>
  870. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  871. private DelegateCommand<object> _HeaterCommand;
  872. public DelegateCommand<object> HeaterCommand =>
  873. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  874. private DelegateCommand _EndStepCommand;
  875. public DelegateCommand EndStepCommand =>
  876. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  877. #endregion
  878. #region 构造函数
  879. public OverKepler2300ViewModel()
  880. {
  881. m_RtDataKeys = new List<string>();
  882. m_IsATM = true;
  883. ModuleName = "PMA";
  884. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  885. DispatcherTimer timer = new DispatcherTimer();
  886. timer.Interval = TimeSpan.FromSeconds(0.5);
  887. timer.Tick += timer_Tick;
  888. timer.Start();
  889. }
  890. #endregion
  891. #region 命令方法
  892. private void OnControlValve(object obj)
  893. {
  894. CommonValveControl commonValveControl = (CommonValveControl)obj;
  895. if (commonValveControl.IsCanEdit == true)
  896. {
  897. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  898. }
  899. }
  900. private void OnPMInit()
  901. {
  902. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  903. }
  904. private async void OnGas()
  905. {
  906. await Task.Run(async () =>
  907. {
  908. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  909. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  910. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  911. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  912. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  913. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  914. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  915. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  916. await Task.Delay(1000);
  917. object[] mfc = new object[8];
  918. string[] mfcSetPoint = new string[8];
  919. mfc[0] = MFC1Data.SetPoint;
  920. mfc[1] = MFC2Data.SetPoint;
  921. mfc[2] = MFC3Data.SetPoint;
  922. mfc[3] = MFC4Data.SetPoint;
  923. mfc[4] = MFC5Data.SetPoint;
  924. mfc[5] = MFC6Data.SetPoint;
  925. mfc[6] = MFC7Data.SetPoint;
  926. mfc[7] = MFC8Data.SetPoint;
  927. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  928. });
  929. }
  930. private void OnHe()
  931. {
  932. if (PVHe1ValveIsOpen == true)
  933. {
  934. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  935. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  936. }
  937. else
  938. {
  939. if (HeIsPressureMode)
  940. {
  941. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  942. }
  943. else
  944. {
  945. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  946. }
  947. }
  948. }
  949. private void OnRf()
  950. {
  951. if (PMCurrentState == PMState.RfPowering)
  952. {
  953. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  954. }
  955. else
  956. {
  957. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  958. }
  959. }
  960. private void OnPurge()
  961. {
  962. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  963. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  964. //{
  965. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  966. // await Task.Delay(1000);
  967. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  968. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  969. //}
  970. //else
  971. //{
  972. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  973. // await Task.Delay(1000);
  974. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  975. //}
  976. if (PMCurrentState == PMState.Purging)
  977. {
  978. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  979. //await Task.Delay(1000);
  980. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  981. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  982. }
  983. else
  984. {
  985. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  986. //await Task.Delay(1000);
  987. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  988. }
  989. }
  990. private void OnVent()
  991. {
  992. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  993. if (PMCurrentState == PMState.Venting)
  994. {
  995. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  996. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  997. }
  998. else
  999. {
  1000. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1001. }
  1002. }
  1003. private void OnPump()
  1004. {
  1005. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1006. if (PMCurrentState==PMState.Pumping)
  1007. {
  1008. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1009. return;
  1010. }
  1011. //if (PMCurrentState == PMState.pum)
  1012. //{
  1013. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1014. // return;
  1015. //}
  1016. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1017. //{
  1018. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1019. //}
  1020. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1021. //{
  1022. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1023. //}
  1024. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1025. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1026. // 设置底压
  1027. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1028. if (basePressure <= 0.01 || basePressure >= 1000)
  1029. {
  1030. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1031. return;
  1032. }
  1033. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1034. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1035. {
  1036. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1037. return;
  1038. }
  1039. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1040. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1041. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1042. }
  1043. private void OnOpenPump()
  1044. {
  1045. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1046. if (PMCurrentState==PMState.LaunchingPump)
  1047. {
  1048. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1049. return;
  1050. }
  1051. //if (PumpIsOpen == true)
  1052. //{
  1053. // return;
  1054. //}
  1055. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1056. }
  1057. private void OnClosePump()
  1058. {
  1059. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1060. }
  1061. private void OnOpenTurboPump()
  1062. {
  1063. //TurboIsOpen = true;
  1064. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1065. if (PMCurrentState == PMState.LaunchingTurboPump)
  1066. {
  1067. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1068. return;
  1069. }
  1070. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1071. }
  1072. private void OnCloseTurboPump()
  1073. {
  1074. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1075. }
  1076. private void OnOpenPendulumValve()
  1077. {
  1078. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1079. }
  1080. private void OnClosePendulumValve()
  1081. {
  1082. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1083. }
  1084. private void OnPinUpDown(object upDown)
  1085. {
  1086. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1087. }
  1088. private void OnLidUpDown(object upDown)
  1089. {
  1090. //var value = (bool)upDown;
  1091. if (upDown.ToString()== "Up")
  1092. {
  1093. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1094. }
  1095. else
  1096. {
  1097. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1098. }
  1099. }
  1100. private async void OnSetSRf()
  1101. {
  1102. if (SRFData.IsRfOn == true)
  1103. {
  1104. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1105. }
  1106. else
  1107. {
  1108. if (GasIsFlowing == true)
  1109. {
  1110. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1111. await Task.Delay(100);
  1112. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1113. }
  1114. }
  1115. }
  1116. private async void OnSetBRf()
  1117. {
  1118. if (BRFData.IsRfOn == true)
  1119. {
  1120. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1121. }
  1122. else
  1123. {
  1124. if (GasIsFlowing == true)
  1125. {
  1126. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1127. await Task.Delay(100);
  1128. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1129. }
  1130. }
  1131. }
  1132. private void OnPMAbort()
  1133. {
  1134. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1135. }
  1136. private void OnOpenButterflyValveView()
  1137. {
  1138. //if (butterflyValveMessageBox == null)
  1139. //{
  1140. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1141. butterflyValveMessageBox = new ButterflyValveView();
  1142. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1143. butterflyValveMessageBox.Left = 700;
  1144. butterflyValveMessageBox.Top = 600;
  1145. butterflyValveMessageBox.Show();
  1146. butterflyValveMessageBox.Owner = _mainWindow;
  1147. //}
  1148. }
  1149. private void OnLoadRecipe()
  1150. {
  1151. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1152. }
  1153. //private async void OnHV()
  1154. //{
  1155. // if (ESCHVData.IsOn == true)
  1156. // {
  1157. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1158. // }
  1159. // else
  1160. // {
  1161. // await Task.Run(async () =>
  1162. // {
  1163. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1164. // await Task.Delay(1000);
  1165. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1166. // });
  1167. // }
  1168. //}
  1169. private void OnHVSet()
  1170. {
  1171. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1172. }
  1173. private void OnRunRecipe(object obj)
  1174. {
  1175. string recipeName = SelectedRecipe;
  1176. if (recipeName == null)
  1177. {
  1178. return;
  1179. }
  1180. ClearData();
  1181. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1182. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1183. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1184. }
  1185. private void OnSetChillerTemp()
  1186. {
  1187. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1188. float x;
  1189. float.TryParse(value, out x);
  1190. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerTempSetpoint, x);
  1191. }
  1192. private void OnOffChiller()
  1193. {
  1194. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", !ChillerIsOn);
  1195. }
  1196. private void OnHeater(object obj)
  1197. {
  1198. AITHeaterData heaterData = obj as AITHeaterData;
  1199. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1200. heaterView = new HeaterView(heaterData);
  1201. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1202. heaterView.Owner = _mainWindow;
  1203. heaterView.Show();
  1204. }
  1205. private void OnEndStep()
  1206. {
  1207. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1208. {
  1209. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1210. }
  1211. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1212. {
  1213. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1214. }
  1215. }
  1216. #endregion
  1217. #region 私有方法
  1218. private void ClearData()
  1219. {
  1220. ESCVoltage = 0;
  1221. SRFFwdPowerSetpoint = 0;
  1222. SRFMatchC1 = 0;
  1223. SRFMatchC2 = 0;
  1224. BRFFwdPowerSetpoint = 0;
  1225. BRFMatchC1 = 0;
  1226. BRFMatchC2 = 0;
  1227. HeGasSetpoint = 0;
  1228. MFC1SetPoint = 0;
  1229. MFC2SetPoint = 0;
  1230. MFC3SetPoint = 0;
  1231. MFC4SetPoint = 0;
  1232. MFC5SetPoint = 0;
  1233. MFC6SetPoint = 0;
  1234. MFC7SetPoint = 0;
  1235. MFC8SetPoint = 0;
  1236. }
  1237. private IEnumerable<string> GetFilesNames(string path)
  1238. {
  1239. return Directory.GetFiles(path, "*.rcp")
  1240. .Select(Path.GetFileNameWithoutExtension);
  1241. }
  1242. void timer_Tick(object sender, EventArgs e)
  1243. {
  1244. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1245. if (RtDataValues==null)
  1246. {
  1247. return;
  1248. }
  1249. var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1250. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1251. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1252. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1253. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1254. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1255. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1256. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1257. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1258. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1259. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1260. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1261. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1262. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1263. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1264. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1265. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1266. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1267. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1268. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1269. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1270. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1271. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1272. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1273. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1274. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1275. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1276. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1277. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1278. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1279. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1280. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1281. LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1282. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1283. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1284. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
  1285. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1286. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1287. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1288. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1289. IsProcessing=PMCurrentState == PMState.Processing;
  1290. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1291. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1292. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1293. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1294. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1295. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1296. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1297. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1298. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1299. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1300. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1301. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1302. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1303. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1304. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1305. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1306. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1307. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1308. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1309. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1310. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1311. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1312. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1313. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1314. SourceRFFanInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1315. IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1316. IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1317. IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1318. IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1319. SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1320. SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1321. IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1322. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1323. ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1324. MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
  1325. MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
  1326. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1327. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1328. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1329. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1330. IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1331. if (PMCurrentState == PMState.Processing)
  1332. {
  1333. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1334. if (CurrentRecipeResult.RecipeStepNumber != null)
  1335. {
  1336. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32( CurrentRecipeResult.RecipeStepNumber) - 1];
  1337. }
  1338. }
  1339. else
  1340. {
  1341. CurrentRecipeResult = null;
  1342. CurrentRecipeStep = null;
  1343. }
  1344. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
  1345. {
  1346. ChamberPressureFeedBack = ProcessLowPressure;
  1347. }
  1348. else
  1349. {
  1350. ChamberPressureFeedBack = ProcessHighPressure;
  1351. }
  1352. }
  1353. public void addDataKeys()
  1354. {
  1355. m_RtDataKeys.Clear();
  1356. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1357. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1358. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1359. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1360. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1361. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1362. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1363. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1364. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1365. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1366. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1367. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1368. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1369. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1370. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1371. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1372. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1373. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1374. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1375. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1376. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1377. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1378. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1379. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1380. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1381. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1382. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1383. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1384. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1385. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1386. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1387. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1388. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1389. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1390. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1391. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1392. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1393. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1394. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1395. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1396. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1397. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1398. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1399. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1400. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1401. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1402. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1403. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1404. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1405. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1406. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1407. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1408. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1409. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1410. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1411. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1412. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1413. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1414. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1415. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1416. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1417. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1418. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1419. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1420. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1421. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1422. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1423. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1424. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1425. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1426. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1427. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1428. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1429. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1430. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1431. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1432. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1433. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1434. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1435. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1436. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1437. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1438. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1439. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1440. }
  1441. #endregion
  1442. }
  1443. }