OverViewModel.cs 64 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. namespace Venus_MainPages.ViewModels
  21. {
  22. internal class OverViewModel : BindableBase
  23. {
  24. #region 私有字段
  25. private bool m_PVN21ValveIsOpen;
  26. private bool m_PVN22ValveIsOpen;
  27. private bool m_N2ValveIsOpen;
  28. private bool m_PV11ValveIsOpen;
  29. private bool m_PV12ValveIsOpen;
  30. private bool m_PV21ValveIsOpen;
  31. private bool m_PV22ValveIsOpen;
  32. private bool m_PV31ValveIsOpen;
  33. private bool m_PV32ValveIsOpen;
  34. private bool m_PV41ValveIsOpen;
  35. private bool m_PV42ValveIsOpen;
  36. private bool m_MFC1ValveIsOpen;
  37. private bool m_MFC2ValveIsOpen;
  38. private bool m_MFC3ValveIsOpen;
  39. private bool m_MFC4ValveIsOpen;
  40. private bool m_MFC5ValveIsOpen;
  41. private bool m_MFC6ValveIsOpen;
  42. private bool m_MFC7ValveIsOpen;
  43. private bool m_MFC8ValveIsOpen;
  44. private bool m_GasFinalValveIsOpen;
  45. private bool m_SoftPumpValveIsOpen;
  46. private bool m_FastPumpValveIsOpen;
  47. private bool m_PVHe1ValveIsOpen;
  48. private bool m_PVHe2ValveIsOpen;
  49. private bool m_TurboPumpPumpingValveIsOpen;
  50. private bool m_TurboPumpPurgeValveIsOpen;
  51. private bool m_GuageValveIsOpen;
  52. private bool m_PendulumValveIsOpen;
  53. private bool m_BRFIsOn;
  54. private bool m_SRFIsOn;
  55. private double m_HeGasSetpoint;
  56. private int m_HePressureSetpoint;
  57. private float m_SRFFwdPowerSetpoint;
  58. private float m_BRFFwdPowerSetpoint;
  59. private float m_SRFMatchC1;
  60. private float m_SRFMatchC2;
  61. private float m_BRFMatchC1;
  62. private float m_BRFMatchC2;
  63. private double m_MFC1SetPoint;
  64. private double m_MFC2SetPoint;
  65. private double m_MFC3SetPoint;
  66. private double m_MFC4SetPoint;
  67. private double m_MFC5SetPoint;
  68. private double m_MFC6SetPoint;
  69. private double m_MFC7SetPoint;
  70. private double m_MFC8SetPoint;
  71. private double m_N2SetPoint;
  72. private AITMfcData m_MFC1Data;
  73. private AITMfcData m_MFC2Data;
  74. private AITMfcData m_MFC3Data;
  75. private AITMfcData m_MFC4Data;
  76. private AITMfcData m_MFC5Data;
  77. private AITMfcData m_MFC6Data;
  78. private AITMfcData m_MFC7Data;
  79. private AITMfcData m_MFC8Data;
  80. private AITMfcData m_MFCHeData;
  81. private AITMfcData m_MFCN2Data;
  82. private AITHeaterData m_ValveHeaterData;
  83. private AITHeaterData m_ForelineHeaterData;
  84. private AITHeaterData m_WallHeaterData;
  85. private AITRfData m_SRFData;
  86. private AITRfData m_BRFData;
  87. private AITPendulumValveData m_PendulumValveData;
  88. private PMState m_PMCurrentState;
  89. private bool m_SourceRFFanInterlock;
  90. private bool m_IsWLK;
  91. private bool m_IsWaterFlowOk;
  92. private bool m_IsTurboPumpInterlock;
  93. private bool m_IsCDAOK;
  94. private bool m_SensorGasBoxDoor;
  95. private bool m_SensorGasBoxPressure;
  96. private bool m_PumpIsOpen;
  97. private bool m_TurboIsOpen;
  98. private bool m_IsATM;
  99. private bool m_IsVAC;
  100. private bool m_HVIsOn;
  101. private List<string> m_RtDataKeys;
  102. private Dictionary<string, object> m_RtDataValues;
  103. private int m_PositionValue;
  104. private bool m_IsPositionMode;
  105. private int m_ESCVoltage;
  106. private bool m_GasIsFlowing;
  107. private bool m_IsAutoMode;
  108. private string m_SelectedRecipe;
  109. private float m_ChillerTempSetpoint;
  110. private float m_WallTempSetpoint;
  111. private bool m_HeIsPressureMode;
  112. private bool m_ChillerIsOn;
  113. private float m_ProcessHighPressure;
  114. private float m_ProcessLowPressure;
  115. private float m_ForelinePressurePressure;
  116. private float m_ESCHePressure;
  117. ButterflyValveView butterflyValveMessageBox;
  118. HeaterView heaterView;
  119. private int m_TurboPumpRotationalSpeed;
  120. private bool m_LiftPinIsUp;
  121. private bool m_IsSlitDoorClosed;
  122. private bool m_IsLidClosed;
  123. private float m_ChillerTemperature;
  124. private int m_ESCHVOutputVoltage;
  125. //private float m_SRfReflectPower;
  126. //private float m_SRfForwardPowerFeedBack;
  127. //private float m_BRfReflectPower;
  128. //private float m_BRfForwardPowerFeedBack;
  129. //private int m_MatchWorkMode;
  130. //private int m_BiasMatchWorkMode;
  131. private float m_MatchC1;
  132. private float m_MatchC2;
  133. private float m_BiasMatchC1;
  134. private float m_BiasMatchC2;
  135. private float m_PendulumValvePosition;
  136. private bool m_IsTurboPumpAtSpeed;
  137. private bool m_TurboPumpWaterFlowSwitch;
  138. private bool m_IsHasWafer;
  139. private Recipe m_CurrentRecipe=new Recipe ();
  140. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  141. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  142. private double m_ChamberPressureFeedBack;
  143. #endregion
  144. #region 属性
  145. public Recipe CurrentRecipe
  146. {
  147. get { return m_CurrentRecipe; }
  148. set { SetProperty(ref m_CurrentRecipe, value); }
  149. }
  150. public RecipeResult CurrentRecipeResult
  151. {
  152. get { return m_CurrentRecipeResult; }
  153. set { SetProperty(ref m_CurrentRecipeResult, value); }
  154. }
  155. public RecipeStep CurrentRecipeStep
  156. {
  157. get { return m_CurrentRecipeStep; }
  158. set { SetProperty(ref m_CurrentRecipeStep, value); }
  159. }
  160. public bool IsHasWafer
  161. {
  162. get { return m_IsHasWafer; }
  163. set { SetProperty(ref m_IsHasWafer, value); }
  164. }
  165. public bool IsTurboPumpAtSpeed
  166. {
  167. get { return m_IsTurboPumpAtSpeed; }
  168. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  169. }
  170. public bool TurboPumpWaterFlowSwitch
  171. {
  172. get { return m_TurboPumpWaterFlowSwitch; }
  173. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  174. }
  175. public float PendulumValvePosition
  176. {
  177. get { return m_PendulumValvePosition; }
  178. set{SetProperty(ref m_PendulumValvePosition, value);}
  179. }
  180. public float BiasMatchC1
  181. {
  182. get { return m_BiasMatchC1; }
  183. set
  184. {
  185. SetProperty(ref m_BiasMatchC1, value);
  186. }
  187. }
  188. public float BiasMatchC2
  189. {
  190. get { return m_BiasMatchC2; }
  191. set
  192. {
  193. SetProperty(ref m_BiasMatchC2, value);
  194. }
  195. }
  196. public float MatchC1
  197. {
  198. get { return m_MatchC1; }
  199. set
  200. {
  201. SetProperty(ref m_MatchC1, value);
  202. }
  203. }
  204. public float MatchC2
  205. {
  206. get { return m_MatchC2; }
  207. set
  208. {
  209. SetProperty(ref m_MatchC2, value);
  210. }
  211. }
  212. public AITPendulumValveData PendulumValveData
  213. {
  214. get { return m_PendulumValveData; }
  215. set
  216. {
  217. SetProperty(ref m_PendulumValveData, value);
  218. }
  219. }
  220. public int ESCHVOutputVoltage
  221. {
  222. get { return m_ESCHVOutputVoltage; }
  223. set
  224. {
  225. SetProperty(ref m_ESCHVOutputVoltage, value);
  226. }
  227. }
  228. public float ChillerTemperature
  229. {
  230. get { return m_ChillerTemperature; }
  231. set
  232. {
  233. SetProperty(ref m_ChillerTemperature, value);
  234. }
  235. }
  236. public bool IsLidClosed
  237. {
  238. get { return m_IsLidClosed; }
  239. set
  240. {
  241. SetProperty(ref m_IsLidClosed, value);
  242. }
  243. }
  244. public bool IsSlitDoorClosed
  245. {
  246. get { return m_IsSlitDoorClosed; }
  247. set
  248. {
  249. SetProperty(ref m_IsSlitDoorClosed, value);
  250. }
  251. }
  252. public bool LiftPinIsUp
  253. {
  254. get { return m_LiftPinIsUp; }
  255. set
  256. {
  257. SetProperty(ref m_LiftPinIsUp, value);
  258. }
  259. }
  260. public int TurboPumpRotationalSpeed
  261. {
  262. get { return m_TurboPumpRotationalSpeed; }
  263. set
  264. {
  265. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  266. }
  267. }
  268. public float ESCHePressure
  269. {
  270. get { return m_ESCHePressure; }
  271. set
  272. {
  273. SetProperty(ref m_ESCHePressure, value);
  274. }
  275. }
  276. public float ProcessHighPressure
  277. {
  278. get { return m_ProcessHighPressure; }
  279. set
  280. {
  281. SetProperty(ref m_ProcessHighPressure, value);
  282. }
  283. }
  284. public float ProcessLowPressure
  285. {
  286. get { return m_ProcessLowPressure; }
  287. set
  288. {
  289. SetProperty(ref m_ProcessLowPressure, value);
  290. }
  291. }
  292. public float ForelinePressure
  293. {
  294. get { return m_ForelinePressurePressure; }
  295. set
  296. {
  297. SetProperty(ref m_ForelinePressurePressure, value);
  298. }
  299. }
  300. public bool SourceRFFanInterlock
  301. {
  302. get { return m_SourceRFFanInterlock; }
  303. set
  304. {
  305. SetProperty(ref m_SourceRFFanInterlock, value);
  306. }
  307. }
  308. public bool IsWLK
  309. {
  310. get { return m_IsWLK; }
  311. set
  312. {
  313. SetProperty(ref m_IsWLK, value);
  314. }
  315. }
  316. public bool IsWaterFlowOk
  317. {
  318. get { return m_IsWaterFlowOk; }
  319. set
  320. {
  321. SetProperty(ref m_IsWaterFlowOk, value);
  322. }
  323. }
  324. public bool IsCDAOK
  325. {
  326. get { return m_IsCDAOK; }
  327. set
  328. {
  329. SetProperty(ref m_IsCDAOK, value);
  330. }
  331. }
  332. public bool SensorGasBoxDoor
  333. {
  334. get { return m_SensorGasBoxDoor; }
  335. set
  336. {
  337. SetProperty(ref m_SensorGasBoxDoor, value);
  338. }
  339. }
  340. public bool SensorGasBoxPressure
  341. {
  342. get { return m_SensorGasBoxPressure; }
  343. set
  344. {
  345. SetProperty(ref m_SensorGasBoxPressure, value);
  346. }
  347. }
  348. public bool IsTurboPumpInterlock
  349. {
  350. get { return m_IsTurboPumpInterlock; }
  351. set
  352. {
  353. SetProperty(ref m_IsTurboPumpInterlock, value);
  354. }
  355. }
  356. public string ModuleName { get; set; }
  357. public double MFC1SetPoint
  358. {
  359. get { return m_MFC1SetPoint; }
  360. set { SetProperty(ref m_MFC1SetPoint, value); }
  361. }
  362. public double MFC2SetPoint
  363. {
  364. get { return m_MFC2SetPoint; }
  365. set { SetProperty(ref m_MFC2SetPoint, value); }
  366. }
  367. public double MFC3SetPoint
  368. {
  369. get { return m_MFC3SetPoint; }
  370. set { SetProperty(ref m_MFC3SetPoint, value); }
  371. }
  372. public double MFC4SetPoint
  373. {
  374. get { return m_MFC4SetPoint; }
  375. set { SetProperty(ref m_MFC4SetPoint, value); }
  376. }
  377. public double MFC5SetPoint
  378. {
  379. get { return m_MFC5SetPoint; }
  380. set { SetProperty(ref m_MFC5SetPoint, value); }
  381. }
  382. public double MFC6SetPoint
  383. {
  384. get { return m_MFC6SetPoint; }
  385. set { SetProperty(ref m_MFC6SetPoint, value); }
  386. }
  387. public double MFC7SetPoint
  388. {
  389. get { return m_MFC7SetPoint; }
  390. set { SetProperty(ref m_MFC7SetPoint, value); }
  391. }
  392. public double MFC8SetPoint
  393. {
  394. get { return m_MFC8SetPoint; }
  395. set { SetProperty(ref m_MFC8SetPoint, value); }
  396. }
  397. public double N2SetPoint
  398. {
  399. get { return m_N2SetPoint; }
  400. set { SetProperty(ref m_N2SetPoint, value); }
  401. }
  402. public AITMfcData MFC1Data
  403. {
  404. get { return m_MFC1Data; }
  405. set { SetProperty(ref m_MFC1Data, value); }
  406. }
  407. public AITMfcData MFC2Data
  408. {
  409. get { return m_MFC2Data; }
  410. set { SetProperty(ref m_MFC2Data, value); }
  411. }
  412. public AITMfcData MFC3Data
  413. {
  414. get { return m_MFC3Data; }
  415. set { SetProperty(ref m_MFC3Data, value); }
  416. }
  417. public AITMfcData MFC4Data
  418. {
  419. get { return m_MFC4Data; }
  420. set { SetProperty(ref m_MFC4Data, value); }
  421. }
  422. public AITMfcData MFC5Data
  423. {
  424. get { return m_MFC5Data; }
  425. set { SetProperty(ref m_MFC5Data, value); }
  426. }
  427. public AITMfcData MFC6Data
  428. {
  429. get { return m_MFC6Data; }
  430. set { SetProperty(ref m_MFC6Data, value); }
  431. }
  432. public AITMfcData MFC7Data
  433. {
  434. get { return m_MFC7Data; }
  435. set { SetProperty(ref m_MFC7Data, value); }
  436. }
  437. public AITMfcData MFC8Data
  438. {
  439. get { return m_MFC8Data; }
  440. set { SetProperty(ref m_MFC8Data, value); }
  441. }
  442. public AITMfcData MFCHeData
  443. {
  444. get { return m_MFCHeData; }
  445. set { SetProperty(ref m_MFCHeData, value); }
  446. }
  447. public AITMfcData MFCN2Data
  448. {
  449. get { return m_MFCN2Data; }
  450. set { SetProperty(ref m_MFCN2Data, value); }
  451. }
  452. public AITHeaterData ValveHeaterData
  453. {
  454. get { return m_ValveHeaterData; }
  455. set { SetProperty(ref m_ValveHeaterData, value); }
  456. }
  457. public AITHeaterData ForelineHeaterData
  458. {
  459. get { return m_ForelineHeaterData; }
  460. set { SetProperty(ref m_ForelineHeaterData, value); }
  461. }
  462. public AITHeaterData WallHeaterData
  463. {
  464. get { return m_WallHeaterData; }
  465. set { SetProperty(ref m_WallHeaterData, value); }
  466. }
  467. public AITRfData SRFData
  468. {
  469. get { return m_SRFData; }
  470. set { SetProperty(ref m_SRFData, value); }
  471. }
  472. public AITRfData BRFData
  473. {
  474. get { return m_BRFData; }
  475. set { SetProperty(ref m_BRFData, value); }
  476. }
  477. public PMState PMCurrentState
  478. {
  479. get { return m_PMCurrentState; }
  480. set { SetProperty(ref m_PMCurrentState, value); }
  481. }
  482. #region 阀
  483. public bool GasFinalValveIsOpen
  484. {
  485. get { return m_GasFinalValveIsOpen; }
  486. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  487. }
  488. public bool PVN21ValveIsOpen
  489. {
  490. get { return m_PVN21ValveIsOpen; }
  491. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  492. }
  493. public bool PVN22ValveIsOpen
  494. {
  495. get { return m_PVN22ValveIsOpen; }
  496. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  497. }
  498. public bool N2ValveIsOpen
  499. {
  500. get { return m_N2ValveIsOpen; }
  501. set { SetProperty(ref m_N2ValveIsOpen, value); }
  502. }
  503. public bool PV11ValveIsOpen
  504. {
  505. get { return m_PV11ValveIsOpen; }
  506. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  507. }
  508. public bool PV12ValveIsOpen
  509. {
  510. get { return m_PV12ValveIsOpen; }
  511. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  512. }
  513. public bool MFC1ValveIsOpen
  514. {
  515. get { return m_MFC1ValveIsOpen; }
  516. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  517. }
  518. public bool PV21ValveIsOpen
  519. {
  520. get { return m_PV21ValveIsOpen; }
  521. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  522. }
  523. public bool PV22ValveIsOpen
  524. {
  525. get { return m_PV22ValveIsOpen; }
  526. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  527. }
  528. public bool MFC2ValveIsOpen
  529. {
  530. get { return m_MFC2ValveIsOpen; }
  531. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  532. }
  533. public bool PV31ValveIsOpen
  534. {
  535. get { return m_PV31ValveIsOpen; }
  536. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  537. }
  538. public bool PV32ValveIsOpen
  539. {
  540. get { return m_PV32ValveIsOpen; }
  541. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  542. }
  543. public bool MFC3ValveIsOpen
  544. {
  545. get { return m_MFC3ValveIsOpen; }
  546. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  547. }
  548. public bool PV41ValveIsOpen
  549. {
  550. get { return m_PV41ValveIsOpen; }
  551. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  552. }
  553. public bool PV42ValveIsOpen
  554. {
  555. get { return m_PV42ValveIsOpen; }
  556. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  557. }
  558. public bool MFC4ValveIsOpen
  559. {
  560. get { return m_MFC4ValveIsOpen; }
  561. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  562. }
  563. public bool MFC5ValveIsOpen
  564. {
  565. get { return m_MFC5ValveIsOpen; }
  566. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  567. }
  568. public bool MFC6ValveIsOpen
  569. {
  570. get { return m_MFC6ValveIsOpen; }
  571. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  572. }
  573. public bool MFC7ValveIsOpen
  574. {
  575. get { return m_MFC7ValveIsOpen; }
  576. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  577. }
  578. public bool MFC8ValveIsOpen
  579. {
  580. get { return m_MFC8ValveIsOpen; }
  581. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  582. }
  583. public bool PVHe1ValveIsOpen
  584. {
  585. get { return m_PVHe1ValveIsOpen; }
  586. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  587. }
  588. public bool PVHe2ValveIsOpen
  589. {
  590. get { return m_PVHe2ValveIsOpen; }
  591. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  592. }
  593. public bool TurboPumpPumpingValveIsOpen
  594. {
  595. get { return m_TurboPumpPumpingValveIsOpen; }
  596. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  597. }
  598. public bool TurboPumpPurgeValveIsOpen
  599. {
  600. get { return m_TurboPumpPurgeValveIsOpen; }
  601. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  602. }
  603. public bool SoftPumpValveIsOpen
  604. {
  605. get { return m_SoftPumpValveIsOpen; }
  606. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  607. }
  608. public bool FastPumpValveIsOpen
  609. {
  610. get { return m_FastPumpValveIsOpen; }
  611. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  612. }
  613. public bool GuageValveIsOpen
  614. {
  615. get { return m_GuageValveIsOpen; }
  616. set { SetProperty(ref m_GuageValveIsOpen, value); }
  617. }
  618. #endregion
  619. public Dictionary<string, object> RtDataValues
  620. {
  621. get { return m_RtDataValues; }
  622. set { SetProperty(ref m_RtDataValues, value); }
  623. }
  624. public bool PumpIsOpen
  625. {
  626. get { return m_PumpIsOpen; }
  627. set { SetProperty(ref m_PumpIsOpen, value); }
  628. }
  629. public bool PendulumValveIsOpen
  630. {
  631. get { return m_PendulumValveIsOpen; }
  632. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  633. }
  634. public bool TurboIsOpen
  635. {
  636. get { return m_TurboIsOpen; }
  637. set { SetProperty(ref m_TurboIsOpen, value); }
  638. }
  639. public bool IsATM
  640. {
  641. get { return m_IsATM; }
  642. set { SetProperty(ref m_IsATM, value); }
  643. }
  644. public bool IsVAC
  645. {
  646. get { return m_IsVAC; }
  647. set { SetProperty(ref m_IsVAC, value); }
  648. }
  649. public bool BRFIsOn
  650. {
  651. get { return m_BRFIsOn; }
  652. set { SetProperty(ref m_BRFIsOn, value); }
  653. }
  654. public bool SRFIsOn
  655. {
  656. get { return m_SRFIsOn; }
  657. set { SetProperty(ref m_SRFIsOn, value); }
  658. }
  659. public int PositionValue
  660. {
  661. get { return m_PositionValue; }
  662. set { SetProperty(ref m_PositionValue, value); }
  663. }
  664. public bool IsPositionMode
  665. {
  666. get { return m_IsPositionMode; }
  667. set { SetProperty(ref m_IsPositionMode, value); }
  668. }
  669. public double HeGasSetpoint
  670. {
  671. get { return m_HeGasSetpoint; }
  672. set
  673. {
  674. SetProperty(ref m_HeGasSetpoint, value);
  675. }
  676. }
  677. public int HePressureSetpoint
  678. {
  679. get { return m_HePressureSetpoint; }
  680. set
  681. {
  682. SetProperty(ref m_HePressureSetpoint, value);
  683. }
  684. }
  685. public float SRFFwdPowerSetpoint
  686. {
  687. get { return m_SRFFwdPowerSetpoint; }
  688. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  689. }
  690. public float BRFFwdPowerSetpoint
  691. {
  692. get { return m_BRFFwdPowerSetpoint; }
  693. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  694. }
  695. public int ESCVoltage
  696. {
  697. get { return m_ESCVoltage; }
  698. set { SetProperty(ref m_ESCVoltage, value); }
  699. }
  700. public bool HVIsOn
  701. {
  702. get { return m_HVIsOn; }
  703. set { SetProperty(ref m_HVIsOn, value); }
  704. }
  705. public float SRFMatchC1
  706. {
  707. get { return m_SRFMatchC1; }
  708. set { SetProperty(ref m_SRFMatchC1, value); }
  709. }
  710. public float SRFMatchC2
  711. {
  712. get { return m_SRFMatchC2; }
  713. set { SetProperty(ref m_SRFMatchC2, value); }
  714. }
  715. public float BRFMatchC1
  716. {
  717. get { return m_BRFMatchC1; }
  718. set { SetProperty(ref m_BRFMatchC1, value); }
  719. }
  720. public float BRFMatchC2
  721. {
  722. get { return m_BRFMatchC2; }
  723. set { SetProperty(ref m_BRFMatchC2, value); }
  724. }
  725. public bool GasIsFlowing
  726. {
  727. get { return m_GasIsFlowing; }
  728. set { SetProperty(ref m_GasIsFlowing, value); }
  729. }
  730. public bool IsAutoMode
  731. {
  732. get { return m_IsAutoMode; }
  733. set { SetProperty(ref m_IsAutoMode, value); }
  734. }
  735. public string SelectedRecipe
  736. {
  737. get { return m_SelectedRecipe; }
  738. set { SetProperty(ref m_SelectedRecipe, value); }
  739. }
  740. public float ChillerTempSetpoint
  741. {
  742. get { return m_ChillerTempSetpoint; }
  743. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  744. }
  745. public float WallTempSetpoint
  746. {
  747. get { return m_WallTempSetpoint; }
  748. set { SetProperty(ref m_WallTempSetpoint, value); }
  749. }
  750. public bool HeIsPressureMode
  751. {
  752. get { return m_HeIsPressureMode; }
  753. set { SetProperty(ref m_HeIsPressureMode, value); }
  754. }
  755. public bool ChillerIsOn
  756. {
  757. get { return m_ChillerIsOn; }
  758. set { SetProperty(ref m_ChillerIsOn, value); }
  759. }
  760. public double ChamberPressureFeedBack
  761. {
  762. get { return m_ChamberPressureFeedBack; }
  763. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  764. }
  765. #endregion
  766. #region 命令
  767. private DelegateCommand _PMInitCommnad;
  768. public DelegateCommand PMInitCommnad =>
  769. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  770. private DelegateCommand _PMAbortCommnad;
  771. public DelegateCommand PMAbortCommnad =>
  772. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  773. private DelegateCommand _GasCommand;
  774. public DelegateCommand GasCommand =>
  775. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  776. private DelegateCommand _HeCommand;
  777. public DelegateCommand HeCommand =>
  778. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  779. private DelegateCommand _RfCommand;
  780. public DelegateCommand RfCommand =>
  781. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  782. private DelegateCommand _PurgeCommand;
  783. public DelegateCommand PurgeCommand =>
  784. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  785. private DelegateCommand _VentCommand;
  786. public DelegateCommand VentCommand =>
  787. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  788. private DelegateCommand _PumpCommand;
  789. public DelegateCommand PumpCommand =>
  790. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  791. private DelegateCommand _OpenPumpCommand;
  792. public DelegateCommand OpenPumpCommand =>
  793. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  794. private DelegateCommand _ClosePumpCommand;
  795. public DelegateCommand ClosePumpCommand =>
  796. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  797. private DelegateCommand _OpenTurboPumpCommand;
  798. public DelegateCommand OpenTurboPumpCommand =>
  799. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  800. private DelegateCommand _CloseTurboPumpCommand;
  801. public DelegateCommand CloseTurboPumpCommand =>
  802. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  803. private DelegateCommand _OpenPendulumValveCommand;
  804. public DelegateCommand OpenPendulumValveCommand =>
  805. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  806. private DelegateCommand _ClosePendulumValveCommand;
  807. public DelegateCommand ClosePendulumValveCommand =>
  808. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  809. private DelegateCommand<object> _PinUpDownCommand;
  810. public DelegateCommand<object> PinUpDownCommand =>
  811. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  812. private DelegateCommand _SetSRfCommand;
  813. public DelegateCommand SetSRfCommand =>
  814. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  815. private DelegateCommand _SetBRfCommand;
  816. public DelegateCommand SetBRfCommand =>
  817. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  818. private DelegateCommand _OpenButterflyValveViewCommand;
  819. public DelegateCommand OpenButterflyValveViewCommand =>
  820. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  821. private DelegateCommand _HVCommand;
  822. public DelegateCommand HVCommand =>
  823. _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  824. private DelegateCommand _HVSetCommand;
  825. public DelegateCommand HVSetCommand =>
  826. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  827. private DelegateCommand _LoadRecipeCommand;
  828. public DelegateCommand LoadRecipeCommand =>
  829. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  830. private DelegateCommand<object> _ControlValveCommand;
  831. public DelegateCommand<object> ControlValveCommand =>
  832. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  833. private DelegateCommand<object> _RunRecipeCommand;
  834. public DelegateCommand<object> RunRecipeCommand =>
  835. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  836. private DelegateCommand _SetChillerTempCommand;
  837. public DelegateCommand SetChillerTempCommand =>
  838. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  839. private DelegateCommand _OnOffChillerCommand;
  840. public DelegateCommand OnOffChillerCommand =>
  841. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  842. private DelegateCommand<object> _HeaterCommand;
  843. public DelegateCommand<object> HeaterCommand =>
  844. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  845. private DelegateCommand _EndStepCommand;
  846. public DelegateCommand EndStepCommand =>
  847. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  848. #endregion
  849. #region 构造函数
  850. public OverViewModel()
  851. {
  852. //RTData.init();
  853. //m_RtConfigKeys = new List<string>();
  854. m_RtDataKeys = new List<string>();
  855. m_IsATM = true;
  856. ModuleName = "PMA";
  857. //addConfigKeys();
  858. //addDataKeys();
  859. DispatcherTimer timer = new DispatcherTimer();
  860. timer.Interval = TimeSpan.FromSeconds(0.5);
  861. timer.Tick += timer_Tick;
  862. timer.Start();
  863. }
  864. #endregion
  865. #region 命令方法
  866. private void OnControlValve(object obj)
  867. {
  868. CommonValveControl commonValveControl = (CommonValveControl)obj;
  869. if (commonValveControl.IsCanEdit == true)
  870. {
  871. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  872. }
  873. }
  874. private void OnPMInit()
  875. {
  876. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  877. }
  878. private async void OnGas()
  879. {
  880. await Task.Run(async () =>
  881. {
  882. //if (GasIsFlowing==true)
  883. //{
  884. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  885. //}
  886. //else
  887. //{
  888. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  889. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  890. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  891. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  892. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  893. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  894. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  895. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  896. await Task.Delay(1000);
  897. object[] mfc = new object[8];
  898. string[] mfcSetPoint = new string[8];
  899. //for (int index = 0; index < mfc.Length; index++)
  900. //{
  901. // mfc[index] = RtDataValues[$"{ModuleName}.MfcGas{index + 1}.SetPoint"];
  902. //}
  903. mfc[0] = MFC1Data.SetPoint;
  904. mfc[1] = MFC2Data.SetPoint;
  905. mfc[2] = MFC3Data.SetPoint;
  906. mfc[3] = MFC4Data.SetPoint;
  907. mfc[4] = MFC5Data.SetPoint;
  908. mfc[5] = MFC6Data.SetPoint;
  909. mfc[6] = MFC7Data.SetPoint;
  910. mfc[7] = MFC8Data.SetPoint;
  911. //if (((Math.Abs((double)mfc[0] - (double)_oldmfc[0]) < 0.01) && (Math.Abs((double)mfc[1] - (double)_oldmfc[1]) < 0.01) && (Math.Abs((double)mfc[2] - (double)_oldmfc[2])) < 0.01)
  912. // || ((Math.Abs((double)mfc[0]) <= 0.01 && Math.Abs((double)mfc[1]) <= 0.01 && Math.Abs((double)mfc[2]) <= 0.01)))
  913. //{
  914. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  915. // return;
  916. //}
  917. //_oldmfc = mfc;
  918. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  919. //}
  920. });
  921. }
  922. private void OnHe()
  923. {
  924. if (PVHe1ValveIsOpen == true)
  925. {
  926. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  927. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  928. }
  929. else
  930. {
  931. if (HeIsPressureMode)
  932. {
  933. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  934. }
  935. else
  936. {
  937. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  938. }
  939. }
  940. }
  941. private void OnRf()
  942. {
  943. if (PMCurrentState == PMState.RfPowering)
  944. {
  945. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  946. }
  947. else
  948. {
  949. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  950. }
  951. }
  952. private void OnPurge()
  953. {
  954. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  955. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  956. //{
  957. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  958. // await Task.Delay(1000);
  959. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  960. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  961. //}
  962. //else
  963. //{
  964. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  965. // await Task.Delay(1000);
  966. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  967. //}
  968. if (PMCurrentState == PMState.Purging)
  969. {
  970. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  971. //await Task.Delay(1000);
  972. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  973. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  974. }
  975. else
  976. {
  977. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  978. //await Task.Delay(1000);
  979. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  980. }
  981. }
  982. private void OnVent()
  983. {
  984. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  985. if (PMCurrentState == PMState.Venting)
  986. {
  987. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  988. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  989. }
  990. else
  991. {
  992. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  993. }
  994. }
  995. private void OnPump()
  996. {
  997. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  998. if (PMCurrentState==PMState.Pumping)
  999. {
  1000. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1001. return;
  1002. }
  1003. //if (PMCurrentState == PMState.pum)
  1004. //{
  1005. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1006. // return;
  1007. //}
  1008. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1009. //{
  1010. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1011. //}
  1012. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1013. //{
  1014. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1015. //}
  1016. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1017. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1018. // 设置底压
  1019. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1020. if (basePressure <= 0.01 || basePressure >= 1000)
  1021. {
  1022. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1023. return;
  1024. }
  1025. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1026. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1027. {
  1028. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1029. return;
  1030. }
  1031. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1032. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1033. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1034. }
  1035. private void OnOpenPump()
  1036. {
  1037. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1038. if (PMCurrentState==PMState.LaunchingPump)
  1039. {
  1040. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1041. return;
  1042. }
  1043. //if (PumpIsOpen == true)
  1044. //{
  1045. // return;
  1046. //}
  1047. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1048. }
  1049. private void OnClosePump()
  1050. {
  1051. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1052. }
  1053. private void OnOpenTurboPump()
  1054. {
  1055. //TurboIsOpen = true;
  1056. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1057. if (PMCurrentState == PMState.LaunchingTurboPump)
  1058. {
  1059. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1060. return;
  1061. }
  1062. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1063. }
  1064. private void OnCloseTurboPump()
  1065. {
  1066. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1067. }
  1068. private void OnOpenPendulumValve()
  1069. {
  1070. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1071. }
  1072. private void OnClosePendulumValve()
  1073. {
  1074. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1075. }
  1076. private void OnPinUpDown(object upDown)
  1077. {
  1078. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1079. }
  1080. private async void OnSetSRf()
  1081. {
  1082. //if (!GasIsFlowing == true) return;
  1083. if (SRFIsOn == true)
  1084. {
  1085. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1086. }
  1087. else
  1088. {
  1089. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1090. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPositionC2}", SRFMatchC2);
  1091. var t = Task.Run(async delegate
  1092. {
  1093. await Task.Delay(100);
  1094. return 42;
  1095. });
  1096. await t;
  1097. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1098. }
  1099. }
  1100. private async void OnSetBRf()
  1101. {
  1102. //if (!GasIsFlowing == true) return;
  1103. if (BRFIsOn == true)
  1104. {
  1105. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1106. }
  1107. else
  1108. {
  1109. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1,BRFMatchC2);
  1110. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPositionC2}", BRFMatchC2);
  1111. //Thread.Sleep(100);
  1112. var t = Task.Run(async delegate
  1113. {
  1114. await Task.Delay(100);
  1115. return 42;
  1116. });
  1117. await t;
  1118. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1119. }
  1120. }
  1121. private void OnPMAbort()
  1122. {
  1123. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1124. }
  1125. private void OnOpenButterflyValveView()
  1126. {
  1127. //if (butterflyValveMessageBox == null)
  1128. //{
  1129. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1130. butterflyValveMessageBox = new ButterflyValveView();
  1131. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1132. butterflyValveMessageBox.Left = 700;
  1133. butterflyValveMessageBox.Top = 600;
  1134. butterflyValveMessageBox.Show();
  1135. butterflyValveMessageBox.Owner = _mainWindow;
  1136. //}
  1137. }
  1138. private void OnLoadRecipe()
  1139. {
  1140. OpenFileDialog dialog = new OpenFileDialog();
  1141. dialog.ShowReadOnly = true;
  1142. dialog.Filter = ".rcp|*.rcp";
  1143. dialog.InitialDirectory = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes");
  1144. if (dialog.ShowDialog() == false) return;
  1145. SelectedRecipe = dialog.SafeFileName.Split('.')[0];
  1146. }
  1147. private async void OnHV()
  1148. {
  1149. if (HVIsOn == true)
  1150. {
  1151. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1152. }
  1153. else
  1154. {
  1155. await Task.Run(async () =>
  1156. {
  1157. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1158. await Task.Delay(1000);
  1159. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1160. });
  1161. }
  1162. }
  1163. private void OnHVSet()
  1164. {
  1165. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1166. }
  1167. //private void OnSetMatchMode(object obj)
  1168. //{
  1169. // switch (obj.ToString())
  1170. // {
  1171. // case "SRFManual":
  1172. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Manual.ToString());
  1173. // break;
  1174. // case "SRFAuto":
  1175. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Auto.ToString());
  1176. // break;
  1177. // case "BRFManual":
  1178. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Manual.ToString());
  1179. // break;
  1180. // case "BRFAuto":
  1181. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Auto.ToString());
  1182. // break;
  1183. // }
  1184. //}
  1185. private void OnRunRecipe(object obj)
  1186. {
  1187. string recipeName = SelectedRecipe;
  1188. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1189. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1190. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1191. }
  1192. private void OnSetChillerTemp()
  1193. {
  1194. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1195. float x;
  1196. float.TryParse(value, out x);
  1197. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerTempSetpoint, x);
  1198. }
  1199. private void OnOffChiller()
  1200. {
  1201. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", !ChillerIsOn);
  1202. }
  1203. private void OnHeater(object obj)
  1204. {
  1205. AITHeaterData heaterData = obj as AITHeaterData;
  1206. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1207. heaterView = new HeaterView(heaterData);
  1208. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1209. heaterView.Owner = _mainWindow;
  1210. heaterView.Show();
  1211. }
  1212. private void OnEndStep()
  1213. {
  1214. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1215. {
  1216. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1217. }
  1218. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1219. {
  1220. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1221. }
  1222. }
  1223. #endregion
  1224. #region 私有方法
  1225. void timer_Tick(object sender, EventArgs e)
  1226. {
  1227. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1228. if (RtDataValues==null)
  1229. {
  1230. return;
  1231. }
  1232. var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1233. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1234. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1235. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1236. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1237. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1238. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1239. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1240. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1241. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1242. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1243. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1244. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1245. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1246. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1247. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1248. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1249. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1250. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1251. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1252. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1253. SoftPumpValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveSoftPump.IsOpen"];
  1254. FastPumpValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveFastPump.IsOpen"];
  1255. GuageValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveGuage.IsOpen"];
  1256. PVHe1ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVHe1.IsOpen"];
  1257. PVHe2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVHe2.IsOpen"];
  1258. PVN21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN21.IsOpen"];
  1259. PVN22ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN22.IsOpen"];
  1260. TurboPumpPumpingValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveTurboPumpPumping.IsOpen"];
  1261. TurboPumpPurgeValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveTurboPumpPurge.IsOpen"];
  1262. HVIsOn = (bool)RtDataValues[$"{ModuleName}.ESCHV.IsOn"];
  1263. PumpIsOpen = (bool)RtDataValues[$"{ModuleName}.PumpIsRunning"];
  1264. TurboIsOpen = (bool)RtDataValues[$"{ModuleName}.TurboPumpIsRunning"];
  1265. //BRFIsOn = (bool)RtDataValues[$"{ModuleName}.BRfIsOn"];
  1266. //SRFIsOn = (bool)RtDataValues[$"{ModuleName}.SRfIsOn"];
  1267. LiftPinIsUp= (bool)RtDataValues[$"{ModuleName}.LiftPinIsUp"];
  1268. IsSlitDoorClosed = (bool)RtDataValues[$"{ModuleName}.IsSlitDoorClosed"];
  1269. IsLidClosed = (bool)RtDataValues[$"{ModuleName}.IsLidClosed"];
  1270. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
  1271. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1272. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1273. PMState currentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1274. if (PMCurrentState != currentState)
  1275. {
  1276. PMCurrentState = currentState;
  1277. }
  1278. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1279. //MFC1Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas1"];
  1280. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1281. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1282. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1283. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1284. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1285. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1286. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1287. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1288. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1289. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1290. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1291. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1292. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1293. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1294. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1295. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1296. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1297. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1298. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1299. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1300. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1301. //PendulumValveIsOpen = (bool)RtDataValues[$"{ModuleName}.PendulumValve.IsOpen"];
  1302. ChillerIsOn = (bool)RtDataValues[$"{ModuleName}.Chiller.IsOn"];
  1303. SourceRFFanInterlock= (bool)RtDataValues[$"{ModuleName}.SourceRFFanInterlock"];
  1304. IsWLK= (bool)RtDataValues[$"{ModuleName}.IsWLK"];
  1305. IsWaterFlowOk= (bool)RtDataValues[$"{ModuleName}.IsWaterFlowOk"];
  1306. IsTurboPumpInterlock= (bool)RtDataValues[$"{ModuleName}.IsTurboPumpInterlock"];
  1307. IsCDAOK= (bool)RtDataValues[$"{ModuleName}.IsCDA_OK"];
  1308. SensorGasBoxDoor= (bool)RtDataValues[$"{ModuleName}.GasBoxDoorSW.Value"];
  1309. SensorGasBoxPressure= (bool)RtDataValues[$"{ModuleName}.GasBoxPressureSW.Value"];
  1310. IsATM= (bool)RtDataValues[$"{ModuleName}.IsATM"];
  1311. IsVAC = (bool)RtDataValues[$"{ModuleName}.IsVAC"];
  1312. ESCHVOutputVoltage= (int)RtDataValues[$"{ModuleName}.ESCHV.OutputVoltage"];
  1313. //SRfReflectPower= float.Parse(RtDataValues[$"{ModuleName}.SRfReflectPower"].ToString());
  1314. //SRfReflectPower = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.SRfReflectPower");
  1315. //SRfForwardPowerFeedBack = float.Parse(RtDataValues[$"{ModuleName}.SRfForwardPowerFeedBack"].ToString());
  1316. //SRfForwardPowerFeedBack= CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.SRfForwardPowerFeedBack");
  1317. //BRfReflectPower = float.Parse(RtDataValues[$"{ModuleName}.BRfReflectPower"].ToString());
  1318. //BRfForwardPowerFeedBack = float.Parse(RtDataValues[$"{ModuleName}.BRfForwardPowerFeedBack"].ToString());
  1319. //MatchWorkMode=RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.WorkMode") ? (int)RtDataValues[$"{ModuleName}.{VenusDevice.Match}.WorkMode"] : 0;
  1320. //BiasMatchWorkMode = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.WorkMode") ? (int)RtDataValues[$"{ ModuleName}.{VenusDevice.BiasMatch}.WorkMode"]:0;
  1321. //MatchC1= RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.C1") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.Match}.C1"].ToString()):0;
  1322. //MatchC2 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.C2") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.Match}.C2"].ToString()) : 0;
  1323. MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
  1324. MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
  1325. //BiasMatchC1 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.C1") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.BiasMatch}.C1"].ToString()):0;
  1326. //BiasMatchC2 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.C2") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.BiasMatch}.C2"].ToString()) : 0;
  1327. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1328. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1329. TurboPumpWaterFlowSwitch = (bool)(RtDataValues[$"{ModuleName}.TurboPumpWaterFlowSwitch.Value"]);
  1330. IsTurboPumpAtSpeed = (bool)RtDataValues[$"{ModuleName}.IsTurboPumpAtSpeed"];
  1331. IsHasWafer= (bool)RtDataValues[$"{ModuleName}.HasWafer"];
  1332. if (PMCurrentState == PMState.Processing)
  1333. {
  1334. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1335. if (CurrentRecipeResult.RecipeStepNumber != null)
  1336. {
  1337. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32( CurrentRecipeResult.RecipeStepNumber) - 1];
  1338. }
  1339. }
  1340. else
  1341. {
  1342. CurrentRecipeResult = null;
  1343. CurrentRecipeStep = null;
  1344. }
  1345. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
  1346. {
  1347. ChamberPressureFeedBack = ProcessLowPressure;
  1348. }
  1349. else
  1350. {
  1351. ChamberPressureFeedBack = ProcessHighPressure;
  1352. }
  1353. }
  1354. public void addDataKeys()
  1355. {
  1356. m_RtDataKeys.Clear();
  1357. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1358. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1359. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1360. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1361. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1362. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1363. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1364. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1365. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1366. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1367. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1368. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1369. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1370. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1371. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1372. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1373. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1374. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1375. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1376. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1377. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1378. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1379. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1380. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1381. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1382. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1383. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1384. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1385. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1386. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1387. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1388. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1389. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1390. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1391. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1392. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1393. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1394. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1395. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1396. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1397. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1398. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1399. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1400. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1401. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1402. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1403. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1404. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1405. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1406. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1407. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1408. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1409. //m_RtDataKeys.Add($"{ModuleName}.SRfIsOn");
  1410. //m_RtDataKeys.Add($"{ModuleName}.SRfForwardPowerFeedBack");
  1411. //m_RtDataKeys.Add($"{ModuleName}.SRfReflectPower");
  1412. //m_RtDataKeys.Add($"{ModuleName}.BRfIsOn");
  1413. //m_RtDataKeys.Add($"{ModuleName}.BRfForwardPowerFeedBack");
  1414. //m_RtDataKeys.Add($"{ModuleName}.BRfReflectPower");
  1415. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1416. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1417. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1418. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1419. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1420. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1421. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1422. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.WorkMode");
  1423. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1424. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1425. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1426. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1427. m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1428. m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1429. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1430. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1431. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1432. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1433. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1434. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1435. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1436. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1437. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1438. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1439. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1440. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1441. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1442. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1443. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1444. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1445. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1446. }
  1447. #endregion
  1448. }
  1449. }