LLEntity.cs 21 KB

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  1. using System;
  2. using Aitex.Core.Util;
  3. using Aitex.Core.RT.Fsm;
  4. using Aitex.Core.RT.Log;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.SubstrateTrackings;
  7. using Venus_RT.Modules.TM;
  8. using Venus_RT.Devices;
  9. using Venus_Core;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.OperationCenter;
  12. using Aitex.Core.RT.Device;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.RT.Event;
  15. namespace Venus_RT.Modules
  16. {
  17. class LLEntity : Entity, IEntity, IModuleEntity
  18. {
  19. public enum LLStatus
  20. {
  21. Not_Ready,
  22. Ready_For_TM,
  23. Ready_For_EFEM,
  24. }
  25. public enum STATE
  26. {
  27. Unknown,
  28. Init,
  29. Initializing,
  30. Idle,
  31. Error,
  32. Pumping,
  33. Venting,
  34. Purging,
  35. LeakCheck,
  36. Prepare_For_TM,
  37. Prepare_For_EFEM,
  38. Ready_For_TM,
  39. Ready_For_EFEM,
  40. }
  41. public enum MSG
  42. {
  43. Home,
  44. Online,
  45. Offline,
  46. Pump,
  47. Vent,
  48. AutoPump,
  49. AutoVent,
  50. Purge,
  51. CyclePurge,
  52. LeakCheck,
  53. Prepare_TM,
  54. Prepare_EFEM,
  55. TM_Exchange_Ready,
  56. EFEM_Exchange_Ready,
  57. Error,
  58. Abort,
  59. }
  60. public ModuleName Module { get; private set; }
  61. public LLStatus Status { get; private set; }
  62. public bool Check(int msg, out string reason, params object[] args)
  63. {
  64. throw new NotImplementedException();
  65. }
  66. public bool IsIdle
  67. {
  68. get { return fsm.State == (int)STATE.Idle; }
  69. }
  70. public bool IsError
  71. {
  72. get { return fsm.State == (int)STATE.Error; }
  73. }
  74. public bool IsInit
  75. {
  76. get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
  77. }
  78. public bool IsBusy
  79. {
  80. get { return !IsInit && !IsError && !IsIdle; }
  81. }
  82. public bool IsOnline { get; internal set; }
  83. public bool IsInclude
  84. {
  85. get;
  86. private set;
  87. } = true;
  88. public bool IsVac { get { return _JetTM.IsModuleVaccum(Module); } }
  89. public bool IsATM { get { return _JetTM.IsModuleATM(Module); } }
  90. private readonly JetTM _JetTM;
  91. private readonly MFPumpRoutine _pumpingRoutine;
  92. private readonly MFVentRoutine _ventingRoutine;
  93. private readonly MFLeakCheckRoutine _leakCheckRoutine;
  94. private readonly MFPurgeRoutine _purgeRoutine;
  95. private readonly int _slotNumber = 4;
  96. private bool startControlPressureFlag = true;
  97. private int _controlPressureCheckPoint = 100;
  98. private int _controlPressureSetPoint = 90;
  99. private int _controlFlowSetPoint = 90;
  100. public LLEntity(ModuleName module)
  101. {
  102. Module = module;
  103. _JetTM = DEVICE.GetDevice<JetTM>("TM");
  104. _pumpingRoutine = new MFPumpRoutine(_JetTM, Module);
  105. _ventingRoutine = new MFVentRoutine(_JetTM, Module);
  106. _leakCheckRoutine = new MFLeakCheckRoutine(_JetTM, Module);
  107. _purgeRoutine = new MFPurgeRoutine(_JetTM, Module);
  108. _slotNumber = SC.GetValue<int>($"{module.ToString()}.SlotNumber");
  109. WaferManager.Instance.SubscribeLocation(Module, _slotNumber);
  110. InitFsmMap();
  111. }
  112. protected override bool Init()
  113. {
  114. OP.Subscribe($"{Module}.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
  115. OP.Subscribe($"{Module}.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
  116. OP.Subscribe($"{Module}.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
  117. OP.Subscribe($"{Module}.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.Purge));
  118. OP.Subscribe($"{Module}.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));
  119. OP.Subscribe($"{Module}.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck));
  120. OP.Subscribe($"{Module}.{RtOperation.Online}", (cmd, args) => CheckToPostMessage((int)MSG.Online));
  121. OP.Subscribe($"{Module}.{RtOperation.Offline}", (cmd, args) => CheckToPostMessage((int)MSG.Offline));
  122. OP.Subscribe($"{Module}.{RtOperation.Include}", (cmd, args) => FnSetInclude());
  123. OP.Subscribe($"{Module}.{RtOperation.Exclude}", (cmd, args) => FnSetExclude());
  124. DATA.Subscribe($"{Module}.FsmState", () => (((STATE)fsm.State).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  125. DATA.Subscribe($"{Module}.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  126. DATA.Subscribe($"{Module}.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  127. DATA.Subscribe($"{Module}.IsOnline", () => IsOnline, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  128. DATA.Subscribe($"{Module}.IsInclude", () => IsInclude, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  129. return true;
  130. }
  131. private void InitFsmMap()
  132. {
  133. fsm = new StateMachine<LLEntity>(Module.ToString(), (int)STATE.Init, 50);
  134. fsm.EnableRepeatedMsg(true);
  135. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_TM, fnEnterTMReady, FSM_MSG.NONE, fnExitTMReady);
  136. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_EFEM, fnEnterEFEMReady, FSM_MSG.NONE, fnExitEFEMReady);
  137. //AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  138. AnyStateTransition(MSG.Error, fnError, STATE.Error);
  139. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  140. AnyStateTransition(MSG.Offline, fnOffline, FSM_STATE.SAME);
  141. AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
  142. // Home
  143. Transition(STATE.Initializing, FSM_MSG.TIMER, fnHoming, STATE.Idle);
  144. Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle);
  145. Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init);
  146. //vent sequence
  147. Transition(STATE.Idle, MSG.Vent, FnStartVent, STATE.Venting);
  148. Transition(STATE.Venting, FSM_MSG.TIMER, FnVentTimeout, STATE.Idle);
  149. Transition(STATE.Venting, MSG.Abort, FnAbortVent, STATE.Idle);
  150. //Pump sequence
  151. Transition(STATE.Idle, MSG.Pump, FnStartPump, STATE.Pumping);
  152. Transition(STATE.Pumping, FSM_MSG.TIMER, FnPumpTimeout, STATE.Idle);
  153. Transition(STATE.Pumping, MSG.Abort, FnAbortPump, STATE.Idle);
  154. // Purge sequence
  155. Transition(STATE.Idle, MSG.Purge, FnStartPurge, STATE.Purging);
  156. Transition(STATE.Purging, FSM_MSG.TIMER, FnPurgeTimeout, STATE.Idle);
  157. Transition(STATE.Purging, MSG.Abort, FnAbortPurge, STATE.Idle);
  158. // Leak check sequence
  159. Transition(STATE.Idle, MSG.LeakCheck, FnStartLeakCheck, STATE.LeakCheck);
  160. Transition(STATE.LeakCheck, FSM_MSG.TIMER, FnLeakCheckTimeout, STATE.Idle);
  161. Transition(STATE.LeakCheck, MSG.Abort, FnAbortLeakCheck, STATE.Idle);
  162. // Prepare TM Transfer
  163. Transition(STATE.Idle, MSG.Prepare_TM, FnStartPrepareTM, STATE.Prepare_For_TM);
  164. Transition(STATE.Prepare_For_TM, FSM_MSG.TIMER, FnPreparaTMTimeout, STATE.Ready_For_TM);
  165. Transition(STATE.Prepare_For_TM, MSG.Prepare_TM, null, STATE.Prepare_For_TM);
  166. Transition(STATE.Prepare_For_TM, MSG.Abort, FnAbortPreparaTM, STATE.Idle);
  167. Transition(STATE.Ready_For_TM, MSG.TM_Exchange_Ready, null, STATE.Idle);
  168. Transition(STATE.Ready_For_TM, MSG.Prepare_TM, null, STATE.Ready_For_TM);
  169. Transition(STATE.Ready_For_TM, MSG.Abort, null, STATE.Idle);
  170. Transition(STATE.Ready_For_TM, MSG.AutoVent, FnTryAutoVent, STATE.Venting);
  171. // Prepare EFEM Transfer
  172. Transition(STATE.Idle, MSG.Prepare_EFEM, FnStartPrepareEFEM, STATE.Prepare_For_EFEM);
  173. Transition(STATE.Prepare_For_EFEM, FSM_MSG.TIMER, FnPrepareEFEMTimeout, STATE.Ready_For_EFEM);
  174. Transition(STATE.Prepare_For_EFEM, MSG.Abort, FnAbortPrepareEFEM, STATE.Idle);
  175. Transition(STATE.Ready_For_EFEM, MSG.EFEM_Exchange_Ready, null, STATE.Idle);
  176. Transition(STATE.Ready_For_EFEM, MSG.Prepare_EFEM, null, STATE.Ready_For_EFEM);
  177. Transition(STATE.Ready_For_EFEM, MSG.Abort, null, STATE.Idle);
  178. Transition(STATE.Ready_For_EFEM, MSG.AutoPump, FnTryAutoPump, STATE.Pumping);
  179. //AnyStateTransition(FSM_MSG.TIMER, LLControlPressureTimer_Elapsed, FSM_STATE.SAME);
  180. Running = true;
  181. }
  182. public int Invoke(string function, params object[] args)
  183. {
  184. switch (function)
  185. {
  186. case "Home":
  187. CheckToPostMessage((int)MSG.Home);
  188. return (int)MSG.Home;
  189. }
  190. return (int)FSM_MSG.NONE;
  191. }
  192. public bool CheckAcked(int msg)
  193. {
  194. return fsm.CheckExecuted(msg);
  195. }
  196. public bool CheckToPostMessage(int msg, params object[] args)
  197. {
  198. if (!fsm.FindTransition(fsm.State, msg))
  199. {
  200. LOG.Write(eEvent.WARN_FSM_WARN, Module, $"{Module} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
  201. return false;
  202. }
  203. Running = true;
  204. fsm.PostMsg(msg, args);
  205. return true;
  206. }
  207. public (int processed, int unprocessed) GetWaferProcessStatus()
  208. {
  209. int processedCount = 0;
  210. int unprocessCount = 0;
  211. for (int i = 0; i < _slotNumber; i++)
  212. {
  213. var wafer = WaferManager.Instance.GetWafer(Module, i);
  214. if (!wafer.IsEmpty)
  215. {
  216. if (wafer.ProcessState == Aitex.Core.Common.EnumWaferProcessStatus.Completed)
  217. {
  218. processedCount++;
  219. }
  220. else
  221. {
  222. unprocessCount++;
  223. }
  224. }
  225. }
  226. return (processedCount, unprocessCount);
  227. }
  228. private bool fnEnterTMReady(object[] param)
  229. {
  230. if (RouteManager.IsATMMode)
  231. {
  232. Status = LLStatus.Ready_For_TM;
  233. return true;
  234. }
  235. startControlPressureFlag = false;
  236. _controlPressureCheckPoint = SC.GetValue<int>($"{Module}.ControlPressureCheckPoint");
  237. _controlPressureSetPoint = SC.GetValue<int>($"{Module}.ControlPressureSetPoint");
  238. _controlFlowSetPoint = SC.GetValue<int>($"{Module}.{Module}_MFC1.DefaultSetPoint");
  239. _JetTM.TurnFastPumpValve(Module, true);
  240. _JetTM.TurnPurgeValve(Module, true);
  241. if (Module == ModuleName.LLA)
  242. {
  243. _JetTM.SwitchLLAPressureMode(true);
  244. _JetTM.SetLLAPressure(_controlPressureSetPoint);
  245. }
  246. else if (Module == ModuleName.LLB)
  247. {
  248. _JetTM.SwitchLLBPressureMode(true);
  249. _JetTM.SetLLBPressure(_controlPressureSetPoint);
  250. }
  251. Status = LLStatus.Ready_For_TM;
  252. return true;
  253. }
  254. private bool fnExitTMReady(object[] param)
  255. {
  256. if (RouteManager.IsATMMode)
  257. {
  258. Status = LLStatus.Not_Ready;
  259. return true;
  260. }
  261. _JetTM.TurnFastPumpValve(Module, false);
  262. _JetTM.TurnPurgeValve(Module, false);
  263. if (Module == ModuleName.LLA)
  264. {
  265. _JetTM.SwitchLLAPressureMode(false);
  266. _JetTM.SetLLAPressure(0);
  267. }
  268. else if (Module == ModuleName.LLB)
  269. {
  270. _JetTM.SwitchLLBPressureMode(false);
  271. _JetTM.SetLLBPressure(0);
  272. }
  273. Status = LLStatus.Not_Ready;
  274. return true;
  275. }
  276. private bool fnEnterEFEMReady(object[] param)
  277. {
  278. Status = LLStatus.Ready_For_EFEM;
  279. return true;
  280. }
  281. private bool fnExitEFEMReady(object[] param)
  282. {
  283. Status = LLStatus.Not_Ready;
  284. return true;
  285. }
  286. private bool fnMonitor(object[] param)
  287. {
  288. _debugRoutine();
  289. return true;
  290. }
  291. private bool fnError(object[] param)
  292. {
  293. IsOnline = false;
  294. return true;
  295. }
  296. private bool fnOnline(object[] param)
  297. {
  298. IsOnline = true;
  299. return true;
  300. }
  301. private bool fnOffline(object[] param)
  302. {
  303. IsOnline = false;
  304. return true;
  305. }
  306. private bool FnSetInclude()
  307. {
  308. if (IsOnline == true)
  309. {
  310. LOG.Write(eEvent.WARN_LL, Module, $"{Module} is online,can not set Include");
  311. return false;
  312. }
  313. IsInclude = true;
  314. LOG.Write(eEvent.INFO_LL, Module, $"{Module} Set Include Success");
  315. return true;
  316. }
  317. private bool FnSetExclude()
  318. {
  319. if (IsOnline == true)
  320. {
  321. LOG.Write(eEvent.WARN_LL, Module, $"{Module} is online,can not set Exclude");
  322. return false;
  323. }
  324. IsInclude = false;
  325. LOG.Write(eEvent.INFO_LL, Module, $"{Module} Set Exclude Success");
  326. return true;
  327. }
  328. private bool fnAbort(object[] param)
  329. {
  330. return true;
  331. }
  332. private bool fnHome(object[] param)
  333. {
  334. IsOnline = true;
  335. return true;
  336. }
  337. private bool fnHoming(object[] param)
  338. {
  339. return true;
  340. }
  341. private bool FnStartVent(object[] param)
  342. {
  343. return _ventingRoutine.Start() == RState.Running;
  344. }
  345. private bool FnTryAutoVent(object[] param)
  346. {
  347. if (RouteManager.IsATMMode)
  348. {
  349. PostMsg(MSG.TM_Exchange_Ready);
  350. return false;
  351. }
  352. return _ventingRoutine.Start() == RState.Running;
  353. }
  354. private bool FnVentTimeout(object[] param)
  355. {
  356. RState ret = _ventingRoutine.Monitor();
  357. if (ret == RState.Failed || ret == RState.Timeout)
  358. {
  359. PostMsg(MSG.Error);
  360. return false;
  361. }
  362. return ret == RState.End;
  363. }
  364. private bool FnAbortVent(object[] param)
  365. {
  366. _ventingRoutine.Abort();
  367. return true;
  368. }
  369. private bool FnStartPump(object[] param)
  370. {
  371. return _pumpingRoutine.Start() == RState.Running;
  372. }
  373. private bool FnPumpTimeout(object[] param)
  374. {
  375. RState ret = _pumpingRoutine.Monitor();
  376. if (ret == RState.Failed || ret == RState.Timeout)
  377. {
  378. PostMsg(MSG.Error);
  379. return false;
  380. }
  381. return ret == RState.End;
  382. }
  383. private bool FnAbortPump(object[] param)
  384. {
  385. _pumpingRoutine.Abort();
  386. return true;
  387. }
  388. private bool FnTryAutoPump(object[] param)
  389. {
  390. if (_JetTM.LLPumpStatus != JetTM.LLPumpState.Idle || RouteManager.IsATMMode)
  391. {
  392. PostMsg(MSG.EFEM_Exchange_Ready);
  393. return false;
  394. }
  395. return _pumpingRoutine.Start() == RState.Running;
  396. }
  397. private bool FnStartPurge(object[] param)
  398. {
  399. return _purgeRoutine.Start() == RState.Running;
  400. }
  401. private bool FnPurgeTimeout(object[] param)
  402. {
  403. RState ret = _purgeRoutine.Monitor();
  404. if (ret == RState.Failed || ret == RState.Timeout)
  405. {
  406. PostMsg(MSG.Error);
  407. return false;
  408. }
  409. return ret == RState.End;
  410. }
  411. private bool FnAbortPurge(object[] param)
  412. {
  413. _purgeRoutine.Abort();
  414. return true;
  415. }
  416. private bool FnStartLeakCheck(object[] param)
  417. {
  418. return _leakCheckRoutine.Start() == RState.Running;
  419. }
  420. private bool FnLeakCheckTimeout(object[] param)
  421. {
  422. RState ret = _leakCheckRoutine.Monitor();
  423. if (ret == RState.Failed || ret == RState.Timeout)
  424. {
  425. PostMsg(MSG.Error);
  426. return false;
  427. }
  428. return ret == RState.End;
  429. }
  430. private bool FnAbortLeakCheck(object[] param)
  431. {
  432. _leakCheckRoutine.Abort();
  433. return true;
  434. }
  435. private bool FnStartPrepareTM(object[] param)
  436. {
  437. if (RouteManager.IsATMMode)
  438. return true;
  439. return _pumpingRoutine.Start() == RState.Running;
  440. }
  441. private bool FnPreparaTMTimeout(object[] param)
  442. {
  443. if (RouteManager.IsATMMode)
  444. {
  445. if (fsm.ElapsedTime > 10000)
  446. {
  447. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  448. PostMsg(MSG.Error);
  449. return true;
  450. }
  451. return _JetTM.IsModuleATM(Module);
  452. }
  453. RState ret = _pumpingRoutine.Monitor();
  454. if (ret == RState.Failed || ret == RState.Timeout)
  455. {
  456. PostMsg(MSG.Error);
  457. return false;
  458. }
  459. return ret == RState.End;
  460. }
  461. private bool FnAbortPreparaTM(object[] param)
  462. {
  463. _pumpingRoutine.Abort();
  464. return true;
  465. }
  466. private bool FnStartPrepareEFEM(object[] param)
  467. {
  468. if (RouteManager.IsATMMode)
  469. return true;
  470. return _ventingRoutine.Start() == RState.Running;
  471. }
  472. private bool FnPrepareEFEMTimeout(object[] param)
  473. {
  474. if (RouteManager.IsATMMode)
  475. {
  476. if (fsm.ElapsedTime > 10000)
  477. {
  478. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  479. PostMsg(MSG.Error);
  480. return true;
  481. }
  482. return _JetTM.IsModuleATM(Module);
  483. }
  484. RState ret = _ventingRoutine.Monitor();
  485. if (ret == RState.Failed || ret == RState.Timeout)
  486. {
  487. PostMsg(MSG.Error);
  488. return false;
  489. }
  490. return ret == RState.End;
  491. }
  492. private bool FnAbortPrepareEFEM(object[] param)
  493. {
  494. _ventingRoutine.Abort();
  495. return true;
  496. }
  497. private void _debugRoutine()
  498. {
  499. int flag = 0;
  500. // Test Home routine
  501. if (flag == 1)
  502. {
  503. PostMsg(MSG.Home);
  504. }
  505. else if (flag == 2)
  506. {
  507. PostMsg(MSG.Vent);
  508. }
  509. else if (flag == 3)
  510. {
  511. PostMsg(MSG.Pump);
  512. }
  513. //else if (flag == 4)
  514. //{
  515. // PostMsg(MSG.PumpLoadLock);
  516. //}
  517. //else if (flag == 5)
  518. //{
  519. // PostMsg(MSG.VentLoadLock);
  520. //}
  521. //else if (flag == 6)
  522. //{
  523. // PostMsg(MSG.PurgeLoadLock);
  524. //}
  525. //else if (flag == 7)
  526. //{
  527. // PostMsg(MSG.LaunchPump);
  528. //}
  529. //else if (flag == 8)
  530. //{
  531. // PostMsg(MSG.LaunchTurboPump);
  532. //}
  533. //else if (flag == 9)
  534. //{
  535. // PostMsg(MSG.LoadLockLeakCheck);
  536. //}
  537. else if (flag == 10)
  538. {
  539. PostMsg(MSG.CyclePurge);
  540. }
  541. //else if (flag == 11)
  542. //{
  543. // PostMsg(MSG.GasLinePurge);
  544. //}
  545. //else if (flag == 12)
  546. //{
  547. // PostMsg(MSG.LeakCheck);
  548. //}
  549. //else if (flag == 13)
  550. //{
  551. // PostMsg(MSG.GasLeakCheck);
  552. //}
  553. //else if (flag == 14)
  554. //{
  555. // PostMsg(MSG.LLPlace);
  556. //}
  557. //else if (flag == 15)
  558. //{
  559. // PostMsg(MSG.LLPick);
  560. //}
  561. //else if (flag == 16)
  562. //{
  563. // PostMsg(MSG.RunRecipe, "7777");
  564. //}
  565. //else if (flag == 17)
  566. //{
  567. // PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);
  568. //}
  569. }
  570. }
  571. }