Kepler-Release/Venus/Venus_RT/Devices/JetPM.cs

using System;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Device.Bases;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using Venus_RT.Devices.IODevices;
using Venus_Core;
namespace Venus_RT.Devices
{
    enum ValveType
    {
        PVN21,
        PVN22,
        PV11,
        PV12,
        PV21,
        PV22,
        PV31,
        PV32,
        PV41,
        PV42,
        N2,
        Mfc1,
        Mfc2,
        Mfc3,
        Mfc4,
        Mfc5,
        Mfc6,
        Mfc7,
        Mfc8,
        PVHe1,
        PVHe2,
        GasFinal,
        SoftPump,
        FastPump,
        CHBPurge,
        TurboPumpPumping,
        TurboPumpPurge,
        Guage,
        LoadlockVent,
        LoadlockPumping
    }
    class JetPM : PM
    {
        private readonly IoLid _Lid;
        private readonly IoLid _LidLoadlock;

        private readonly IoCylinder _slitDoor;
        private readonly IoCylinder _LiftPin;
        private readonly IoCylinder _LoadLockArm;

        private readonly IoValve _PVN21Valve;
        private readonly IoValve _PVN22Valve;
        private readonly IoValve _PV11Valve;
        private readonly IoValve _PV12Valve;
        private readonly IoValve _PV21Valve;
        private readonly IoValve _PV22Valve;
        private readonly IoValve _PV31Valve;
        private readonly IoValve _PV32Valve;
        private readonly IoValve _PV41Valve;
        private readonly IoValve _PV42Valve;
        private readonly IoValve _N2Valve;
        private readonly IoValve _Mfc1Valve;
        private readonly IoValve _Mfc2Valve;
        private readonly IoValve _Mfc3Valve;
        private readonly IoValve _Mfc4Valve;
        private readonly IoValve _Mfc5Valve;
        private readonly IoValve _Mfc6Valve;
        private readonly IoValve _Mfc7Valve;
        private readonly IoValve _Mfc8Valve;
        private readonly IoValve _PVHe1Valve;
        private readonly IoValve _PVHe2Valve;
        private readonly IoValve _GasFinalValve;
        private readonly IoValve _SoftPumpValve;
        private readonly IoValve _FastPumpValve;
        private readonly IoValve _TurboPumpPumpingValve;
        private readonly IoValve _TurboPumpPurgeValve;
        private readonly IoValve _GuageValve;
        private readonly IoValve _LoadlockVentValve;
        private readonly IoValve _LoadlockPumpingValve;

        private readonly IoSensor _ATM_sw;
        private readonly IoSensor _CDAPressure;
        private readonly IoSensor _ATM_Loadlock_sw;
        private readonly IoSensor _N2Pressure_sw;
        private readonly IoSensor _VAC_sw;
        private readonly IoSensor _WLK_sw;
        private readonly IoSensor _RFG_Interlock;

        private readonly PumpBase _MainPump;
        private readonly ESC5HighVoltage _ESCHV;
        private readonly AdixenTurboPump _TurboPump;
        private readonly PendulumValve _pendulumValve;

        private readonly SMCChiller _Chiller;

        private readonly IoSignalTower _SignalTower;

        private readonly IoHeater _ForelineTC;

        private readonly IoPressureControl _pressureController;

        private readonly IoGasStick[] _gasLines;
        private readonly IoGasStick _gasLineN2;
        private readonly IoGasStick _gasLineHe;

        // 盖子的状态
        public bool IsLidClosed => _Lid.OFFFeedback;
        public bool IsLidLoadlockClosed => _LidLoadlock.OFFFeedback;

        public bool IsSlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback;

        public bool IsPumpRunning => _MainPump.IsRunning;
        public bool IsTurboPumpRunning => _TurboPump.IsRunning;
        public bool IsTurboPumpAtSpeed => _TurboPump.AtSpeed;
        public bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning;

        public bool HasTurboPumpError => _TurboPump.IsError || !_TurboPump.IsRunning;

        public bool IsCDA_OK => _CDAPressure.Value;

        public bool IsFastPumpOpened => _FastPumpValve.Status;
        public bool IsSoftPumpOpened => _SoftPumpValve.Status;
        public bool IsMfc1ValveOpened => _Mfc1Valve.Status;
        public bool IsMfc2ValveOpened => _Mfc2Valve.Status;
        public bool IsMfc3ValveOpened => _Mfc3Valve.Status;
        public bool IsMfc4ValveOpened => _Mfc4Valve.Status;
        public bool IsMfc5ValveOpened => _Mfc5Valve.Status;
        public bool IsMfc6ValveOpened => _Mfc6Valve.Status;
        public bool IsMfc7ValveOpened => _Mfc7Valve.Status;
        public bool IsMfc8ValveOpened => _Mfc8Valve.Status;
        // 压力信号
        public bool IsATM => _ATM_sw.Value;
        public bool IsATMLoadlock => _ATM_Loadlock_sw.Value;
        public bool IsVACLoadLock => LoadlockPressure <= 1000;
        public bool IsVAC => _VAC_sw.Value;
        public bool IsWLK => _WLK_sw.Value;
        public bool IsRFGInterlockOn => _RFG_Interlock.Value;

        public double ProcessPressure => _pressureController.ProcessGauge.Value;
        public override double ChamberPressure => _pressureController.PressureGauge.Value;
        public double ForelinePressure => _pressureController.ForelineGauge.Value;
        public double TargetPressure => _pressureController.TargetPressure;
        public double LoadlockPressure => _pressureController.LoadLockGauge.Value;
        public double ESCHePressure => _pressureController.ESCHeGauge.Value;

        public float CoolantInletTempFB => _Chiller.CoolantInletTcFeedback;
        public float CoolantOutletTempFB => _Chiller.CoolantOutletTcFeedback;

        //Loadlock_Arm
        public bool IsLoadlockArmRetract => _LoadLockArm.OFFFeedback;
        public bool IsLoadlockArmExtend => _LoadLockArm.ONFeedback;
        //Loadlock_Arm DO
        public bool LoadlockArmRetract => _LoadLockArm.OFFSetPoint;
        public bool LoadlockArmExtend => _LoadLockArm.ONSetPoint;

        public new ModuleName Module { get; }

        public MovementPosition LiftPinPosition
        {
            get
            {
                MovementPosition pos = MovementPosition.Unknown;
                if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback)
                {
                    pos = MovementPosition.Up;
                }
                else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback)
                {
                    pos = MovementPosition.Down;
                }
                return pos;
            }
        }

        public override bool CheckAtm()
        {
            return _ATM_sw.Value && ChamberPressure > 700000;
        }
        public bool CheckSlitDoorOpen()
        {
            return _slitDoor.State == CylinderState.Open;
        }

        public bool CheckSlitDoorClose()
        {
            return _slitDoor.State == CylinderState.Close;
        }

        public bool CheckLiftUp()
        {
            return _LiftPin.State == CylinderState.Open;
        }

        public bool CheckLiftDown()
        {
            return _LiftPin.State == CylinderState.Close;
        }
        public double TotalGasSetpoint
        {
            get
            {
                double sum = 0;
                foreach (var gas in _gasLines)
                {
                    sum += gas.FlowSP;
                }
                return sum;
            }
        }

        public bool HasGasOutOfRange
        {
            get
            {
                foreach (var gas in _gasLines)
                {
                    if (!gas.IsOutOfRange)
                        return false;
                }
                return true;
            }
        }

        public JetPM(ModuleName mod) : base(mod.ToString())
        {
            Module = mod;

            _Lid = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.Lid}");
            _LidLoadlock = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.LidLoadlock}");

            _slitDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.SlitDoor}");
            _LiftPin = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LiftPin}");
            _LoadLockArm = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LoadLockArm}");

            _PVN21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN21}");
            _PVN22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN22}");
            _PV11Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV11}");
            _PV12Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV12}");
            _PV21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV21}");
            _PV22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV22}");
            _PV31Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV31}");
            _PV32Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV32}");
            _PV41Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV41}");
            _PV42Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV42}");
            _N2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveN2}");
            _Mfc1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc1}");
            _Mfc2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
            _Mfc3Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
            _Mfc4Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
            _Mfc5Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
            _Mfc6Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
            _Mfc7Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
            _Mfc8Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
            _PVHe1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe1}");
            _PVHe2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe2}");
            _GasFinalValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGasFinal}");
            _SoftPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveSoftPump}");
            _FastPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveFastPump}");
            _TurboPumpPumpingValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPumping}");
            _TurboPumpPurgeValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPurge}");
            _GuageValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGuage}");
            _LoadlockVentValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveLoadlockVent}");
            _LoadlockPumpingValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveLoadlockPumping}");

            _ATM_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorATMSwitch");
            _ATM_Loadlock_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorLoadlockATMSwitch");
            _N2Pressure_sw = DEVICE.GetDevice<IoSensor>($"{Module}.N2PressureOk");
            _VAC_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorVacSwitch");
            _WLK_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterLeakOk");
            _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
            _RFG_Interlock = DEVICE.GetDevice<IoSensor>($"{Module}.GeneratorInterlock");

            _ForelineTC = DEVICE.GetDevice<IoHeater>($"{Module}.ForelineHeater");

            _SignalTower = DEVICE.GetDevice<IoSignalTower>($"{Module}.SignalTower");

            _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
            _pressureController = DEVICE.GetDevice<IoPressureControl>($"{Module}.{VenusDevice.PressureControl}");

            _gasLines = new IoGasStick[8];
            for (int index = 0; index < 8; index++)
            {
                _gasLines[index] = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStick{index + 1}");
            }

            _gasLineN2 = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStickN2");
            _gasLineHe = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStickHe");

            _MainPump = DEVICE.GetDevice<PumpBase>($"{Module}.{VenusDevice.MainPump}");

            // RS232 Dry pump, SKY
            if (SC.GetValue<int>($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
            {
                if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY)
                {
                    _MainPump = DEVICE.GetDevice<SkyPump>($"{Module}.{VenusDevice.MainPump}");
                }
                else if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
                {
                    _MainPump = DEVICE.GetDevice<EdwardsPump>($"{Module}.{VenusDevice.MainPump}");
                }
            }

            _ESCHV          = DEVICE.GetDevice<ESC5HighVoltage>($"{Module}.{VenusDevice.ESCHV}");
            _TurboPump      = DEVICE.GetDevice<AdixenTurboPump>($"{Module}.{VenusDevice.TurboPump}");
            _pendulumValve  = DEVICE.GetDevice<PendulumValve>($"{ Module}.{VenusDevice.PendulumValve}");

            if (SC.GetValue<bool>($"{mod}.Chiller.EnableChiller") &&
                SC.GetValue<int>($"{mod}.Chiller.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{mod}.Chiller.MFG") == (int)ChillerMFG.SMC)
            {
                _Chiller = DEVICE.GetDevice<SMCChiller>($"{Module}.{VenusDevice.Chiller}");
            }
        }


        public void CloseValves()
        {
            _PVN21Valve.TurnValve(false, out _);
            _PVN22Valve.TurnValve(false, out _);
            _PV11Valve.TurnValve(false, out _);
            _PV12Valve.TurnValve(false, out _);
            _PV21Valve.TurnValve(false, out _);
            _PV22Valve.TurnValve(false, out _);
            _PV31Valve.TurnValve(false, out _);
            _PV32Valve.TurnValve(false, out _);
            _PV41Valve.TurnValve(false, out _);
            _PV42Valve.TurnValve(false, out _);

            _PVHe1Valve.TurnValve(false, out _);
            _PVHe2Valve.TurnValve(false, out _);
            _GasFinalValve.TurnValve(false, out _);
            _SoftPumpValve.TurnValve(false, out _);
            _FastPumpValve.TurnValve(false, out _);
            _TurboPumpPumpingValve.TurnValve(false, out _);
            _TurboPumpPurgeValve.TurnValve(false, out _);
            _GuageValve.TurnValve(false, out _);
            _LoadlockVentValve.TurnValve(false, out _);
            _LoadlockPumpingValve.TurnValve(false, out _);

            _N2Valve.TurnValve(false, out _);
            _FastPumpValve.TurnValve(false, out _);

            _Mfc1Valve.TurnValve(false, out _);
            _Mfc2Valve.TurnValve(false, out _);
            _Mfc3Valve.TurnValve(false, out _);
            _Mfc4Valve.TurnValve(false, out _);
            _Mfc5Valve.TurnValve(false, out _);
            _Mfc6Valve.TurnValve(false, out _);
            _Mfc7Valve.TurnValve(false, out _);
            _Mfc8Valve.TurnValve(false, out _);

            foreach (var stick in _gasLines)
            {
                stick.Stop();
            }
        }

        public void TurnDryPump(bool on)
        {
            //_pressureController.StartPump(on);
            _MainPump?.SetPumpOnOff(on);
        }

        public void TurnTurboPump(bool on)
        {
            _TurboPump?.SetPumpOnOff(on);
        }

        public void OpenValve(ValveType vlvType, bool on)
        {
            switch (vlvType)
            {
                case ValveType.PVN21:
                    _PVN21Valve.TurnValve(on, out _);
                    break;
                case ValveType.PVN22:
                    _PVN22Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV11:
                    _PV11Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV12:
                    _PV12Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV21:
                    _PV21Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV22:
                    _PV22Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV31:
                    _PV31Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV32:
                    _PV32Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV41:
                    _PV41Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV42:
                    _PV42Valve.TurnValve(on, out _);
                    break;
                case ValveType.N2:
                    _N2Valve.TurnValve(on, out _);
                    break;
                case ValveType.PVHe1:
                    _PVHe1Valve.TurnValve(on, out _);
                    break;
                case ValveType.PVHe2:
                    _PVHe2Valve.TurnValve(on, out _);
                    break;
                case ValveType.GasFinal:
                    _GasFinalValve.TurnValve(on, out _);
                    break;
                case ValveType.SoftPump:
                    _SoftPumpValve.TurnValve(on, out _);
                    break;
                case ValveType.FastPump:
                    _FastPumpValve.TurnValve(on, out _);
                    break;
                case ValveType.TurboPumpPumping:
                    _TurboPumpPumpingValve.TurnValve(on, out _);
                    break;
                case ValveType.TurboPumpPurge:
                    _TurboPumpPurgeValve.TurnValve(on, out _);
                    break;
                case ValveType.Guage:
                    _GuageValve.TurnValve(on, out _);
                    break;
                case ValveType.LoadlockVent:
                    _LoadlockVentValve.TurnValve(on, out _);
                    break;
                case ValveType.LoadlockPumping:
                    _LoadlockPumpingValve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc1:
                    _Mfc1Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc2:
                    _Mfc2Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc3:
                    _Mfc3Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc4:
                    _Mfc4Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc5:
                    _Mfc5Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc6:
                    _Mfc6Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc7:
                    _Mfc7Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc8:
                    _Mfc8Valve.TurnValve(on, out _);
                    break;
                default:
                    throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}");
            }
        }

        public override void Monitor()
        {
            foreach (var gas in _gasLines)
            {
                gas.Monitor();
            }
        }

        public void BuzzerBlinking(double time)
        {
            _SignalTower.BuzzerBlinking(time);
        }

        public void SwitchOnBuzzerAndRed()
        {
            _SignalTower.SwitchOnBuzzerAndRed("", null);
        }

        public override void Home()
        {
            // 与yp讨论过，PM 初始化不需要

            SetLiftPin(MovementPosition.Down, out _);

            SetSlitDoor(false, out _);
        }

        public bool SetLiftPin(MovementPosition dirt, out string reason)
        {
            reason = string.Empty;

            switch (dirt)
            {
                case MovementPosition.Down:
                    return _LiftPin.SetCylinder(false, out reason);
                case MovementPosition.Up:
                    return _LiftPin.SetCylinder(true, out reason);
                case MovementPosition.Left:
                case MovementPosition.Right:
                case MovementPosition.Middle:
                    throw new ArgumentException("Movement argument error");
            }

            return true;
        }

        public void SetSlitDoor(bool open, out string reason)
        {
            reason = string.Empty;

            _slitDoor.SetCylinder(open, out reason);
        }

        public bool RetractWafer()
        {
            return _LoadLockArm.SetCylinder(false, out _);
        }
        public bool ExtendWafer()
        {
            return _LoadLockArm.SetCylinder(true, out _);
        }
        public bool FlowGas(int gasNum, double val)
        {
            if (_gasLines.Length <= gasNum)
                return false;

            _gasLines[gasNum].Flow(val);
            return true;
        }

        public bool StopGas(int gasNum)
        {
            if (_gasLines.Length <= gasNum)
                return false;

            _gasLines[gasNum].Stop();
            return true;
        }

        public void StopAllGases()
        {
            foreach (var line in _gasLines)
            {
                line.Stop();
            }
        }

        public bool TurnPendulumValve(bool on)
        {
            return _pendulumValve.TurnValve(on);
        }

        public bool SetPVPressure(int pressure)
        {
            return _pendulumValve.SetPressure(pressure);
        }

        public bool SetPVPostion(int position)
        {
            return _pendulumValve.SetPosition(position);
        }

        public void HeatChiller(double value, double offset)
        {
            _Chiller?.SetChillerTemp((float)value, (float)offset);
            _Chiller?.SetChillerOnOff(true);
        }

        public bool CheckChillerStatus()
        {
            return _Chiller != null && _Chiller.IsRunning && !_Chiller.IsError;
        }
    }
}