RtState.cs 1.5 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace Venus_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. ReturningCassette,
  19. Cycle,
  20. PrepareCycle,
  21. PostCycle,
  22. SetSpeed,
  23. Error,
  24. Reset,
  25. Processing,
  26. PostProcess,
  27. PauseProcess,
  28. //Maintenance,
  29. //WaferMapping,
  30. //Cycling,
  31. ReturnWafer,
  32. }
  33. public enum PMState
  34. {
  35. Init,
  36. Idle,
  37. Homing,
  38. GasFlowing,
  39. RfPowering,
  40. Heating,
  41. LaunchingPump,
  42. LaunchingTurboPump,
  43. Pumping,
  44. Venting,
  45. Purging,
  46. GasLinePurge,
  47. PumpingLoadLock,
  48. VentingLoadLock,
  49. PurgingLoadLock,
  50. LoadLockLeakCheck,
  51. MoveLift,
  52. Purge,
  53. // transfer
  54. LLPlacing,
  55. LLPicking,
  56. Transfer,
  57. Error,
  58. PrepareTransfer,
  59. PostTransfer,
  60. TransferHandoff,
  61. //Process,
  62. LeakCheck,
  63. GasBoxLeakCheck,
  64. LiftpinMoving,
  65. LiftpinWaiting,
  66. GuidePinMoving,
  67. PreClean,
  68. LoadProcessRecipe,
  69. PreProcess,
  70. Processing,
  71. PostProcess,
  72. OpeningLid,
  73. ClosingLid,
  74. MFCVerification,
  75. AllMFCVerification,
  76. }
  77. }