OverKepler2200AViewModel.cs 63 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. using MECF.Framework.Common.Equipment;
  23. namespace Venus_MainPages.ViewModels
  24. {
  25. internal class OverKepler2200AViewModel : BindableBase
  26. {
  27. #region 私有字段
  28. private List<string> m_CurrentModuleRecipes=new List<string>();
  29. private bool m_PVN21ValveIsOpen;
  30. private bool m_PVN22ValveIsOpen;
  31. private bool m_N2ValveIsOpen;
  32. private bool m_PV11ValveIsOpen;
  33. private bool m_PV12ValveIsOpen;
  34. private bool m_PV21ValveIsOpen;
  35. private bool m_PV22ValveIsOpen;
  36. private bool m_PV31ValveIsOpen;
  37. private bool m_PV32ValveIsOpen;
  38. private bool m_PV41ValveIsOpen;
  39. private bool m_PV42ValveIsOpen;
  40. private bool m_MFC1ValveIsOpen;
  41. private bool m_MFC2ValveIsOpen;
  42. private bool m_MFC3ValveIsOpen;
  43. private bool m_MFC4ValveIsOpen;
  44. private bool m_MFC5ValveIsOpen;
  45. private bool m_MFC6ValveIsOpen;
  46. private bool m_MFC7ValveIsOpen;
  47. private bool m_MFC8ValveIsOpen;
  48. private bool m_GasFinalValveIsOpen;
  49. private bool m_SoftPumpValveIsOpen;
  50. private bool m_FastPumpValveIsOpen;
  51. private bool m_PVHe1ValveIsOpen;
  52. private bool m_PVHe2ValveIsOpen;
  53. private bool m_TurboPumpPumpingValveIsOpen;
  54. private bool m_TurboPumpPurgeValveIsOpen;
  55. private bool m_GuageValveIsOpen;
  56. private bool m_PendulumValveIsOpen;
  57. //private bool m_BRFIsOn;
  58. //private bool m_SRFIsOn;
  59. private double m_HeGasSetpoint;
  60. private int m_HePressureSetpoint;
  61. private float m_SRFFwdPowerSetpoint;
  62. private float m_BRFFwdPowerSetpoint;
  63. private float m_SRFMatchC1;
  64. private float m_SRFMatchC2;
  65. private float m_BRFMatchC1;
  66. private float m_BRFMatchC2;
  67. private double m_MFC1SetPoint;
  68. private double m_MFC2SetPoint;
  69. private double m_MFC3SetPoint;
  70. private double m_MFC4SetPoint;
  71. private double m_MFC5SetPoint;
  72. private double m_MFC6SetPoint;
  73. private double m_MFC7SetPoint;
  74. private double m_MFC8SetPoint;
  75. private double m_N2SetPoint;
  76. private AITMfcData m_MFC1Data;
  77. private AITMfcData m_MFC2Data;
  78. private AITMfcData m_MFC3Data;
  79. private AITMfcData m_MFC4Data;
  80. private AITMfcData m_MFC5Data;
  81. private AITMfcData m_MFC6Data;
  82. private AITMfcData m_MFC7Data;
  83. private AITMfcData m_MFC8Data;
  84. private AITMfcData m_MFCHeData;
  85. private AITMfcData m_MFCN2Data;
  86. private AITHeaterData m_ValveHeaterData;
  87. private AITHeaterData m_ForelineHeaterData;
  88. private AITHeaterData m_WallHeaterData;
  89. private AITRfData m_SRFData;
  90. private AITRfData m_BRFData;
  91. private AITPendulumValveData m_PendulumValveData;
  92. //private AITHVData m_ESCHVData;
  93. private PMState m_PMCurrentState;
  94. private bool m_SourceRFFanInterlock;
  95. private bool m_IsWLK;
  96. private bool m_IsWaterFlowOk;
  97. private bool m_IsTurboPumpInterlock;
  98. private bool m_IsCDAOK;
  99. private bool m_SensorGasBoxDoor;
  100. private bool m_SensorGasBoxPressure;
  101. private bool m_PumpIsOpen;
  102. private bool m_TurboIsOpen;
  103. private bool m_IsATM;
  104. private bool m_IsVAC;
  105. private List<string> m_RtDataKeys;
  106. private Dictionary<string, object> m_RtDataValues;
  107. private int m_PositionValue;
  108. private bool m_IsPositionMode;
  109. private int m_ESCVoltage;
  110. private bool m_GasIsFlowing;
  111. private bool m_IsProcessing;
  112. private bool m_IsAutoMode;
  113. private string m_SelectedRecipe;
  114. private float m_ChillerTempSetpoint;
  115. private float m_WallTempSetpoint;
  116. private bool m_HeIsPressureMode=true;
  117. private bool m_ChillerIsOn;
  118. private float m_ProcessHighPressure;
  119. private float m_ProcessLowPressure;
  120. private float m_ForelinePressurePressure;
  121. private float m_ESCHePressure;
  122. ButterflyValveView butterflyValveMessageBox;
  123. HeaterView heaterView;
  124. private int m_TurboPumpRotationalSpeed;
  125. private bool m_LiftPinIsUp;
  126. private bool m_IsSlitDoorClosed;
  127. private bool m_IsLidClosed;
  128. private float m_ChillerTemperature;
  129. //private float m_HVTemperature;
  130. private int m_ESCHVOutputVoltage;
  131. //private float m_SRfReflectPower;
  132. //private float m_SRfForwardPowerFeedBack;
  133. //private float m_BRfReflectPower;
  134. //private float m_BRfForwardPowerFeedBack;
  135. //private int m_MatchWorkMode;
  136. //private int m_BiasMatchWorkMode;
  137. private float m_MatchC1;
  138. private float m_MatchC2;
  139. private float m_BiasMatchC1;
  140. private float m_BiasMatchC2;
  141. private float m_PendulumValvePosition;
  142. private bool m_IsTurboPumpAtSpeed;
  143. private bool m_TurboPumpWaterFlowSwitch;
  144. private bool m_IsHasWafer;
  145. private Recipe m_CurrentRecipe=new Recipe ();
  146. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  147. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  148. private double m_ChamberPressureFeedBack;
  149. private string m_WaferID;
  150. private string m_ModuleName;
  151. private int? currentRecipeNumber;
  152. #endregion
  153. #region 属性
  154. public List<string> CurrentModuleRecipes
  155. {
  156. get { return m_CurrentModuleRecipes; }
  157. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  158. }
  159. public Recipe CurrentRecipe
  160. {
  161. get { return m_CurrentRecipe; }
  162. set { SetProperty(ref m_CurrentRecipe, value); }
  163. }
  164. public RecipeResult CurrentRecipeResult
  165. {
  166. get { return m_CurrentRecipeResult; }
  167. set { SetProperty(ref m_CurrentRecipeResult, value); }
  168. }
  169. public RecipeStep CurrentRecipeStep
  170. {
  171. get { return m_CurrentRecipeStep; }
  172. set { SetProperty(ref m_CurrentRecipeStep, value); }
  173. }
  174. public bool IsHasWafer
  175. {
  176. get { return m_IsHasWafer; }
  177. set { SetProperty(ref m_IsHasWafer, value); }
  178. }
  179. public bool IsTurboPumpAtSpeed
  180. {
  181. get { return m_IsTurboPumpAtSpeed; }
  182. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  183. }
  184. public bool TurboPumpWaterFlowSwitch
  185. {
  186. get { return m_TurboPumpWaterFlowSwitch; }
  187. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  188. }
  189. public float PendulumValvePosition
  190. {
  191. get { return m_PendulumValvePosition; }
  192. set{SetProperty(ref m_PendulumValvePosition, value);}
  193. }
  194. public float BiasMatchC1
  195. {
  196. get { return m_BiasMatchC1; }
  197. set
  198. {
  199. SetProperty(ref m_BiasMatchC1, value);
  200. }
  201. }
  202. public float BiasMatchC2
  203. {
  204. get { return m_BiasMatchC2; }
  205. set
  206. {
  207. SetProperty(ref m_BiasMatchC2, value);
  208. }
  209. }
  210. public float MatchC1
  211. {
  212. get { return m_MatchC1; }
  213. set
  214. {
  215. SetProperty(ref m_MatchC1, value);
  216. }
  217. }
  218. public float MatchC2
  219. {
  220. get { return m_MatchC2; }
  221. set
  222. {
  223. SetProperty(ref m_MatchC2, value);
  224. }
  225. }
  226. public AITPendulumValveData PendulumValveData
  227. {
  228. get { return m_PendulumValveData; }
  229. set
  230. {
  231. SetProperty(ref m_PendulumValveData, value);
  232. }
  233. }
  234. //public AITHVData ESCHVData
  235. //{
  236. // get { return m_ESCHVData; }
  237. // set
  238. // {
  239. // SetProperty(ref m_ESCHVData, value);
  240. // }
  241. //}
  242. public int ESCHVOutputVoltage
  243. {
  244. get { return m_ESCHVOutputVoltage; }
  245. set
  246. {
  247. SetProperty(ref m_ESCHVOutputVoltage, value);
  248. }
  249. }
  250. public float ChillerTemperature
  251. {
  252. get { return m_ChillerTemperature; }
  253. set
  254. {
  255. SetProperty(ref m_ChillerTemperature, value);
  256. }
  257. }
  258. //public float HVTemperature
  259. //{
  260. // get { return m_HVTemperature; }
  261. // set
  262. // {
  263. // SetProperty(ref m_HVTemperature, value);
  264. // }
  265. //}
  266. public bool IsLidClosed
  267. {
  268. get { return m_IsLidClosed; }
  269. set
  270. {
  271. SetProperty(ref m_IsLidClosed, value);
  272. }
  273. }
  274. public bool IsSlitDoorClosed
  275. {
  276. get { return m_IsSlitDoorClosed; }
  277. set
  278. {
  279. SetProperty(ref m_IsSlitDoorClosed, value);
  280. }
  281. }
  282. public bool LiftPinIsUp
  283. {
  284. get { return m_LiftPinIsUp; }
  285. set
  286. {
  287. SetProperty(ref m_LiftPinIsUp, value);
  288. }
  289. }
  290. public int TurboPumpRotationalSpeed
  291. {
  292. get { return m_TurboPumpRotationalSpeed; }
  293. set
  294. {
  295. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  296. }
  297. }
  298. public float ESCHePressure
  299. {
  300. get { return m_ESCHePressure; }
  301. set
  302. {
  303. SetProperty(ref m_ESCHePressure, value);
  304. }
  305. }
  306. public float ProcessHighPressure
  307. {
  308. get { return m_ProcessHighPressure; }
  309. set
  310. {
  311. SetProperty(ref m_ProcessHighPressure, value);
  312. }
  313. }
  314. public float ProcessLowPressure
  315. {
  316. get { return m_ProcessLowPressure; }
  317. set
  318. {
  319. SetProperty(ref m_ProcessLowPressure, value);
  320. }
  321. }
  322. public float ForelinePressure
  323. {
  324. get { return m_ForelinePressurePressure; }
  325. set
  326. {
  327. SetProperty(ref m_ForelinePressurePressure, value);
  328. }
  329. }
  330. public bool SourceRFFanInterlock
  331. {
  332. get { return m_SourceRFFanInterlock; }
  333. set
  334. {
  335. SetProperty(ref m_SourceRFFanInterlock, value);
  336. }
  337. }
  338. public bool IsWLK
  339. {
  340. get { return m_IsWLK; }
  341. set
  342. {
  343. SetProperty(ref m_IsWLK, value);
  344. }
  345. }
  346. public bool IsWaterFlowOk
  347. {
  348. get { return m_IsWaterFlowOk; }
  349. set
  350. {
  351. SetProperty(ref m_IsWaterFlowOk, value);
  352. }
  353. }
  354. public bool IsCDAOK
  355. {
  356. get { return m_IsCDAOK; }
  357. set
  358. {
  359. SetProperty(ref m_IsCDAOK, value);
  360. }
  361. }
  362. public bool SensorGasBoxDoor
  363. {
  364. get { return m_SensorGasBoxDoor; }
  365. set
  366. {
  367. SetProperty(ref m_SensorGasBoxDoor, value);
  368. }
  369. }
  370. public bool SensorGasBoxPressure
  371. {
  372. get { return m_SensorGasBoxPressure; }
  373. set
  374. {
  375. SetProperty(ref m_SensorGasBoxPressure, value);
  376. }
  377. }
  378. public bool IsTurboPumpInterlock
  379. {
  380. get { return m_IsTurboPumpInterlock; }
  381. set
  382. {
  383. SetProperty(ref m_IsTurboPumpInterlock, value);
  384. }
  385. }
  386. public string ModuleName
  387. {
  388. get { return m_ModuleName; }
  389. set
  390. {
  391. SetProperty(ref m_ModuleName, value);
  392. }
  393. }
  394. public double MFC1SetPoint
  395. {
  396. get { return m_MFC1SetPoint; }
  397. set { SetProperty(ref m_MFC1SetPoint, value); }
  398. }
  399. public double MFC2SetPoint
  400. {
  401. get { return m_MFC2SetPoint; }
  402. set { SetProperty(ref m_MFC2SetPoint, value); }
  403. }
  404. public double MFC3SetPoint
  405. {
  406. get { return m_MFC3SetPoint; }
  407. set { SetProperty(ref m_MFC3SetPoint, value); }
  408. }
  409. public double MFC4SetPoint
  410. {
  411. get { return m_MFC4SetPoint; }
  412. set { SetProperty(ref m_MFC4SetPoint, value); }
  413. }
  414. public double MFC5SetPoint
  415. {
  416. get { return m_MFC5SetPoint; }
  417. set { SetProperty(ref m_MFC5SetPoint, value); }
  418. }
  419. public double MFC6SetPoint
  420. {
  421. get { return m_MFC6SetPoint; }
  422. set { SetProperty(ref m_MFC6SetPoint, value); }
  423. }
  424. public double MFC7SetPoint
  425. {
  426. get { return m_MFC7SetPoint; }
  427. set { SetProperty(ref m_MFC7SetPoint, value); }
  428. }
  429. public double MFC8SetPoint
  430. {
  431. get { return m_MFC8SetPoint; }
  432. set { SetProperty(ref m_MFC8SetPoint, value); }
  433. }
  434. public double N2SetPoint
  435. {
  436. get { return m_N2SetPoint; }
  437. set { SetProperty(ref m_N2SetPoint, value); }
  438. }
  439. public AITMfcData MFC1Data
  440. {
  441. get { return m_MFC1Data; }
  442. set { SetProperty(ref m_MFC1Data, value); }
  443. }
  444. public AITMfcData MFC2Data
  445. {
  446. get { return m_MFC2Data; }
  447. set { SetProperty(ref m_MFC2Data, value); }
  448. }
  449. public AITMfcData MFC3Data
  450. {
  451. get { return m_MFC3Data; }
  452. set { SetProperty(ref m_MFC3Data, value); }
  453. }
  454. public AITMfcData MFC4Data
  455. {
  456. get { return m_MFC4Data; }
  457. set { SetProperty(ref m_MFC4Data, value); }
  458. }
  459. public AITMfcData MFC5Data
  460. {
  461. get { return m_MFC5Data; }
  462. set { SetProperty(ref m_MFC5Data, value); }
  463. }
  464. public AITMfcData MFC6Data
  465. {
  466. get { return m_MFC6Data; }
  467. set { SetProperty(ref m_MFC6Data, value); }
  468. }
  469. public AITMfcData MFC7Data
  470. {
  471. get { return m_MFC7Data; }
  472. set { SetProperty(ref m_MFC7Data, value); }
  473. }
  474. public AITMfcData MFC8Data
  475. {
  476. get { return m_MFC8Data; }
  477. set { SetProperty(ref m_MFC8Data, value); }
  478. }
  479. public AITMfcData MFCHeData
  480. {
  481. get { return m_MFCHeData; }
  482. set { SetProperty(ref m_MFCHeData, value); }
  483. }
  484. public AITMfcData MFCN2Data
  485. {
  486. get { return m_MFCN2Data; }
  487. set { SetProperty(ref m_MFCN2Data, value); }
  488. }
  489. public AITHeaterData ValveHeaterData
  490. {
  491. get { return m_ValveHeaterData; }
  492. set { SetProperty(ref m_ValveHeaterData, value); }
  493. }
  494. public AITHeaterData ForelineHeaterData
  495. {
  496. get { return m_ForelineHeaterData; }
  497. set { SetProperty(ref m_ForelineHeaterData, value); }
  498. }
  499. public AITHeaterData WallHeaterData
  500. {
  501. get { return m_WallHeaterData; }
  502. set { SetProperty(ref m_WallHeaterData, value); }
  503. }
  504. public AITRfData SRFData
  505. {
  506. get { return m_SRFData; }
  507. set { SetProperty(ref m_SRFData, value); }
  508. }
  509. public AITRfData BRFData
  510. {
  511. get { return m_BRFData; }
  512. set { SetProperty(ref m_BRFData, value); }
  513. }
  514. public PMState PMCurrentState
  515. {
  516. get { return m_PMCurrentState; }
  517. set { SetProperty(ref m_PMCurrentState, value); }
  518. }
  519. #region 阀
  520. public bool GasFinalValveIsOpen
  521. {
  522. get { return m_GasFinalValveIsOpen; }
  523. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  524. }
  525. public bool PVN21ValveIsOpen
  526. {
  527. get { return m_PVN21ValveIsOpen; }
  528. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  529. }
  530. public bool PVN22ValveIsOpen
  531. {
  532. get { return m_PVN22ValveIsOpen; }
  533. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  534. }
  535. public bool N2ValveIsOpen
  536. {
  537. get { return m_N2ValveIsOpen; }
  538. set { SetProperty(ref m_N2ValveIsOpen, value); }
  539. }
  540. public bool PV11ValveIsOpen
  541. {
  542. get { return m_PV11ValveIsOpen; }
  543. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  544. }
  545. public bool PV12ValveIsOpen
  546. {
  547. get { return m_PV12ValveIsOpen; }
  548. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  549. }
  550. public bool MFC1ValveIsOpen
  551. {
  552. get { return m_MFC1ValveIsOpen; }
  553. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  554. }
  555. public bool PV21ValveIsOpen
  556. {
  557. get { return m_PV21ValveIsOpen; }
  558. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  559. }
  560. public bool PV22ValveIsOpen
  561. {
  562. get { return m_PV22ValveIsOpen; }
  563. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  564. }
  565. public bool MFC2ValveIsOpen
  566. {
  567. get { return m_MFC2ValveIsOpen; }
  568. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  569. }
  570. public bool PV31ValveIsOpen
  571. {
  572. get { return m_PV31ValveIsOpen; }
  573. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  574. }
  575. public bool PV32ValveIsOpen
  576. {
  577. get { return m_PV32ValveIsOpen; }
  578. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  579. }
  580. public bool MFC3ValveIsOpen
  581. {
  582. get { return m_MFC3ValveIsOpen; }
  583. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  584. }
  585. public bool PV41ValveIsOpen
  586. {
  587. get { return m_PV41ValveIsOpen; }
  588. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  589. }
  590. public bool PV42ValveIsOpen
  591. {
  592. get { return m_PV42ValveIsOpen; }
  593. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  594. }
  595. public bool MFC4ValveIsOpen
  596. {
  597. get { return m_MFC4ValveIsOpen; }
  598. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  599. }
  600. public bool MFC5ValveIsOpen
  601. {
  602. get { return m_MFC5ValveIsOpen; }
  603. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  604. }
  605. public bool MFC6ValveIsOpen
  606. {
  607. get { return m_MFC6ValveIsOpen; }
  608. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  609. }
  610. public bool MFC7ValveIsOpen
  611. {
  612. get { return m_MFC7ValveIsOpen; }
  613. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  614. }
  615. public bool MFC8ValveIsOpen
  616. {
  617. get { return m_MFC8ValveIsOpen; }
  618. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  619. }
  620. public bool PVHe1ValveIsOpen
  621. {
  622. get { return m_PVHe1ValveIsOpen; }
  623. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  624. }
  625. public bool PVHe2ValveIsOpen
  626. {
  627. get { return m_PVHe2ValveIsOpen; }
  628. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  629. }
  630. public bool TurboPumpPumpingValveIsOpen
  631. {
  632. get { return m_TurboPumpPumpingValveIsOpen; }
  633. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  634. }
  635. public bool TurboPumpPurgeValveIsOpen
  636. {
  637. get { return m_TurboPumpPurgeValveIsOpen; }
  638. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  639. }
  640. public bool SoftPumpValveIsOpen
  641. {
  642. get { return m_SoftPumpValveIsOpen; }
  643. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  644. }
  645. public bool FastPumpValveIsOpen
  646. {
  647. get { return m_FastPumpValveIsOpen; }
  648. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  649. }
  650. public bool GuageValveIsOpen
  651. {
  652. get { return m_GuageValveIsOpen; }
  653. set { SetProperty(ref m_GuageValveIsOpen, value); }
  654. }
  655. #endregion
  656. public Dictionary<string, object> RtDataValues
  657. {
  658. get { return m_RtDataValues; }
  659. set { SetProperty(ref m_RtDataValues, value); }
  660. }
  661. public bool PumpIsOpen
  662. {
  663. get { return m_PumpIsOpen; }
  664. set { SetProperty(ref m_PumpIsOpen, value); }
  665. }
  666. public bool PendulumValveIsOpen
  667. {
  668. get { return m_PendulumValveIsOpen; }
  669. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  670. }
  671. public bool TurboIsOpen
  672. {
  673. get { return m_TurboIsOpen; }
  674. set { SetProperty(ref m_TurboIsOpen, value); }
  675. }
  676. public bool IsATM
  677. {
  678. get { return m_IsATM; }
  679. set { SetProperty(ref m_IsATM, value); }
  680. }
  681. public bool IsVAC
  682. {
  683. get { return m_IsVAC; }
  684. set { SetProperty(ref m_IsVAC, value); }
  685. }
  686. //public bool BRFIsOn
  687. //{
  688. // get { return m_BRFIsOn; }
  689. // set { SetProperty(ref m_BRFIsOn, value); }
  690. //}
  691. //public bool SRFIsOn
  692. //{
  693. // get { return m_SRFIsOn; }
  694. // set { SetProperty(ref m_SRFIsOn, value); }
  695. //}
  696. public int PositionValue
  697. {
  698. get { return m_PositionValue; }
  699. set { SetProperty(ref m_PositionValue, value); }
  700. }
  701. public bool IsPositionMode
  702. {
  703. get { return m_IsPositionMode; }
  704. set { SetProperty(ref m_IsPositionMode, value); }
  705. }
  706. public double HeGasSetpoint
  707. {
  708. get { return m_HeGasSetpoint; }
  709. set
  710. {
  711. SetProperty(ref m_HeGasSetpoint, value);
  712. }
  713. }
  714. public int HePressureSetpoint
  715. {
  716. get { return m_HePressureSetpoint; }
  717. set
  718. {
  719. SetProperty(ref m_HePressureSetpoint, value);
  720. }
  721. }
  722. public float SRFFwdPowerSetpoint
  723. {
  724. get { return m_SRFFwdPowerSetpoint; }
  725. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  726. }
  727. public float BRFFwdPowerSetpoint
  728. {
  729. get { return m_BRFFwdPowerSetpoint; }
  730. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  731. }
  732. public int ESCVoltage
  733. {
  734. get { return m_ESCVoltage; }
  735. set { SetProperty(ref m_ESCVoltage, value); }
  736. }
  737. public float SRFMatchC1
  738. {
  739. get { return m_SRFMatchC1; }
  740. set { SetProperty(ref m_SRFMatchC1, value); }
  741. }
  742. public float SRFMatchC2
  743. {
  744. get { return m_SRFMatchC2; }
  745. set { SetProperty(ref m_SRFMatchC2, value); }
  746. }
  747. public float BRFMatchC1
  748. {
  749. get { return m_BRFMatchC1; }
  750. set { SetProperty(ref m_BRFMatchC1, value); }
  751. }
  752. public float BRFMatchC2
  753. {
  754. get { return m_BRFMatchC2; }
  755. set { SetProperty(ref m_BRFMatchC2, value); }
  756. }
  757. public bool GasIsFlowing
  758. {
  759. get { return m_GasIsFlowing; }
  760. set { SetProperty(ref m_GasIsFlowing, value); }
  761. }
  762. public bool IsProcessing
  763. {
  764. get { return m_IsProcessing; }
  765. set { SetProperty(ref m_IsProcessing, value); }
  766. }
  767. public bool IsAutoMode
  768. {
  769. get { return m_IsAutoMode; }
  770. set { SetProperty(ref m_IsAutoMode, value); }
  771. }
  772. public string SelectedRecipe
  773. {
  774. get { return m_SelectedRecipe; }
  775. set { SetProperty(ref m_SelectedRecipe, value); }
  776. }
  777. public float ChillerTempSetpoint
  778. {
  779. get { return m_ChillerTempSetpoint; }
  780. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  781. }
  782. public float WallTempSetpoint
  783. {
  784. get { return m_WallTempSetpoint; }
  785. set { SetProperty(ref m_WallTempSetpoint, value); }
  786. }
  787. public bool HeIsPressureMode
  788. {
  789. get { return m_HeIsPressureMode; }
  790. set { SetProperty(ref m_HeIsPressureMode, value); }
  791. }
  792. public bool ChillerIsOn
  793. {
  794. get { return m_ChillerIsOn; }
  795. set { SetProperty(ref m_ChillerIsOn, value); }
  796. }
  797. public double ChamberPressureFeedBack
  798. {
  799. get { return m_ChamberPressureFeedBack; }
  800. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  801. }
  802. public string WaferID
  803. {
  804. get { return m_WaferID; }
  805. set { SetProperty(ref m_WaferID, value); }
  806. }
  807. #endregion
  808. #region 命令
  809. private DelegateCommand _PMInitCommnad;
  810. public DelegateCommand PMInitCommnad =>
  811. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  812. private DelegateCommand _PMAbortCommnad;
  813. public DelegateCommand PMAbortCommnad =>
  814. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  815. private DelegateCommand _GasCommand;
  816. public DelegateCommand GasCommand =>
  817. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  818. private DelegateCommand _HeCommand;
  819. public DelegateCommand HeCommand =>
  820. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  821. private DelegateCommand _RfCommand;
  822. public DelegateCommand RfCommand =>
  823. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  824. private DelegateCommand _PurgeCommand;
  825. public DelegateCommand PurgeCommand =>
  826. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  827. private DelegateCommand _VentCommand;
  828. public DelegateCommand VentCommand =>
  829. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  830. private DelegateCommand _PumpCommand;
  831. public DelegateCommand PumpCommand =>
  832. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  833. private DelegateCommand _OpenPumpCommand;
  834. public DelegateCommand OpenPumpCommand =>
  835. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  836. private DelegateCommand _ClosePumpCommand;
  837. public DelegateCommand ClosePumpCommand =>
  838. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  839. private DelegateCommand _OpenTurboPumpCommand;
  840. public DelegateCommand OpenTurboPumpCommand =>
  841. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  842. private DelegateCommand _CloseTurboPumpCommand;
  843. public DelegateCommand CloseTurboPumpCommand =>
  844. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  845. private DelegateCommand _OpenPendulumValveCommand;
  846. public DelegateCommand OpenPendulumValveCommand =>
  847. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  848. private DelegateCommand _ClosePendulumValveCommand;
  849. public DelegateCommand ClosePendulumValveCommand =>
  850. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  851. private DelegateCommand<object> _PinUpDownCommand;
  852. public DelegateCommand<object> PinUpDownCommand =>
  853. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  854. private DelegateCommand<object> _LidUpDownCommand;
  855. public DelegateCommand<object> LidUpDownCommand =>
  856. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  857. private DelegateCommand _SetSRfCommand;
  858. public DelegateCommand SetSRfCommand =>
  859. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  860. private DelegateCommand _SetBRfCommand;
  861. public DelegateCommand SetBRfCommand =>
  862. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  863. private DelegateCommand _OpenButterflyValveViewCommand;
  864. public DelegateCommand OpenButterflyValveViewCommand =>
  865. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  866. //private DelegateCommand _HVCommand;
  867. //public DelegateCommand HVCommand =>
  868. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  869. private DelegateCommand _HVSetCommand;
  870. public DelegateCommand HVSetCommand =>
  871. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  872. private DelegateCommand _LoadRecipeCommand;
  873. public DelegateCommand LoadRecipeCommand =>
  874. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  875. private DelegateCommand<object> _ControlValveCommand;
  876. public DelegateCommand<object> ControlValveCommand =>
  877. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  878. private DelegateCommand<object> _RunRecipeCommand;
  879. public DelegateCommand<object> RunRecipeCommand =>
  880. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  881. private DelegateCommand _SetChillerTempCommand;
  882. public DelegateCommand SetChillerTempCommand =>
  883. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  884. private DelegateCommand _OnOffChillerCommand;
  885. public DelegateCommand OnOffChillerCommand =>
  886. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  887. private DelegateCommand<object> _HeaterCommand;
  888. public DelegateCommand<object> HeaterCommand =>
  889. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  890. private DelegateCommand _EndStepCommand;
  891. public DelegateCommand EndStepCommand =>
  892. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  893. #endregion
  894. #region 构造函数
  895. public OverKepler2200AViewModel()
  896. {
  897. m_RtDataKeys = new List<string>();
  898. m_IsATM = true;
  899. ModuleName = "PMA";
  900. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  901. DispatcherTimer timer = new DispatcherTimer();
  902. timer.Interval = TimeSpan.FromSeconds(0.5);
  903. timer.Tick += timer_Tick;
  904. timer.Start();
  905. }
  906. #endregion
  907. #region 命令方法
  908. private void OnControlValve(object obj)
  909. {
  910. CommonValveControl commonValveControl = (CommonValveControl)obj;
  911. if (commonValveControl.IsCanEdit == true)
  912. {
  913. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  914. }
  915. }
  916. private void OnPMInit()
  917. {
  918. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  919. }
  920. private async void OnGas()
  921. {
  922. await Task.Run(async () =>
  923. {
  924. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  925. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  926. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  927. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  928. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  929. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  930. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  931. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  932. await Task.Delay(1000);
  933. object[] mfc = new object[8];
  934. string[] mfcSetPoint = new string[8];
  935. mfc[0] = MFC1Data.SetPoint;
  936. mfc[1] = MFC2Data.SetPoint;
  937. mfc[2] = MFC3Data.SetPoint;
  938. mfc[3] = MFC4Data.SetPoint;
  939. mfc[4] = MFC5Data.SetPoint;
  940. mfc[5] = MFC6Data.SetPoint;
  941. mfc[6] = MFC7Data.SetPoint;
  942. mfc[7] = MFC8Data.SetPoint;
  943. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  944. });
  945. }
  946. private void OnHe()
  947. {
  948. if (PVHe1ValveIsOpen == true)
  949. {
  950. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  951. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  952. }
  953. else
  954. {
  955. if (HeIsPressureMode)
  956. {
  957. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  958. }
  959. else
  960. {
  961. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  962. }
  963. }
  964. }
  965. private void OnRf()
  966. {
  967. if (PMCurrentState == PMState.RfPowering)
  968. {
  969. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  970. }
  971. else
  972. {
  973. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  974. }
  975. }
  976. private void OnPurge()
  977. {
  978. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  979. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  980. //{
  981. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  982. // await Task.Delay(1000);
  983. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  984. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  985. //}
  986. //else
  987. //{
  988. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  989. // await Task.Delay(1000);
  990. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  991. //}
  992. if (PMCurrentState == PMState.Purging)
  993. {
  994. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  995. //await Task.Delay(1000);
  996. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  997. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  998. }
  999. else
  1000. {
  1001. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1002. //await Task.Delay(1000);
  1003. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1004. }
  1005. }
  1006. private void OnVent()
  1007. {
  1008. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1009. if (PMCurrentState == PMState.Venting)
  1010. {
  1011. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1012. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1013. }
  1014. else
  1015. {
  1016. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1017. }
  1018. }
  1019. private void OnPump()
  1020. {
  1021. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1022. if (PMCurrentState==PMState.Pumping)
  1023. {
  1024. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1025. return;
  1026. }
  1027. //if (PMCurrentState == PMState.pum)
  1028. //{
  1029. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1030. // return;
  1031. //}
  1032. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1033. //{
  1034. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1035. //}
  1036. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1037. //{
  1038. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1039. //}
  1040. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1041. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1042. // 设置底压
  1043. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1044. if (basePressure <= 0.01 || basePressure >= 1000)
  1045. {
  1046. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1047. return;
  1048. }
  1049. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1050. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1051. {
  1052. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1053. return;
  1054. }
  1055. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1056. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1057. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1058. }
  1059. private void OnOpenPump()
  1060. {
  1061. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1062. if (PMCurrentState==PMState.LaunchingPump)
  1063. {
  1064. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1065. return;
  1066. }
  1067. //if (PumpIsOpen == true)
  1068. //{
  1069. // return;
  1070. //}
  1071. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1072. }
  1073. private void OnClosePump()
  1074. {
  1075. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1076. }
  1077. private void OnOpenTurboPump()
  1078. {
  1079. //TurboIsOpen = true;
  1080. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1081. if (PMCurrentState == PMState.LaunchingTurboPump)
  1082. {
  1083. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1084. return;
  1085. }
  1086. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1087. }
  1088. private void OnCloseTurboPump()
  1089. {
  1090. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1091. }
  1092. private void OnOpenPendulumValve()
  1093. {
  1094. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1095. }
  1096. private void OnClosePendulumValve()
  1097. {
  1098. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1099. }
  1100. private void OnPinUpDown(object upDown)
  1101. {
  1102. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1103. }
  1104. private void OnLidUpDown(object upDown)
  1105. {
  1106. //var value = (bool)upDown;
  1107. if (upDown.ToString()== "Up")
  1108. {
  1109. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1110. }
  1111. else
  1112. {
  1113. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1114. }
  1115. }
  1116. private async void OnSetSRf()
  1117. {
  1118. if (SRFData.IsRfOn == true)
  1119. {
  1120. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1121. }
  1122. else
  1123. {
  1124. if (GasIsFlowing == true)
  1125. {
  1126. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1127. await Task.Delay(100);
  1128. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1129. }
  1130. }
  1131. }
  1132. private async void OnSetBRf()
  1133. {
  1134. if (BRFData.IsRfOn == true)
  1135. {
  1136. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1137. }
  1138. else
  1139. {
  1140. if (GasIsFlowing == true)
  1141. {
  1142. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1143. await Task.Delay(100);
  1144. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1145. }
  1146. }
  1147. }
  1148. private void OnPMAbort()
  1149. {
  1150. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1151. }
  1152. private void OnOpenButterflyValveView()
  1153. {
  1154. //if (butterflyValveMessageBox == null)
  1155. //{
  1156. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1157. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1158. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1159. butterflyValveMessageBox.Left = 700;
  1160. butterflyValveMessageBox.Top = 600;
  1161. butterflyValveMessageBox.Show();
  1162. butterflyValveMessageBox.Owner = _mainWindow;
  1163. //}
  1164. }
  1165. private void OnLoadRecipe()
  1166. {
  1167. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1168. }
  1169. //private async void OnHV()
  1170. //{
  1171. // if (ESCHVData.IsOn == true)
  1172. // {
  1173. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1174. // }
  1175. // else
  1176. // {
  1177. // await Task.Run(async () =>
  1178. // {
  1179. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1180. // await Task.Delay(1000);
  1181. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1182. // });
  1183. // }
  1184. //}
  1185. private void OnHVSet()
  1186. {
  1187. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1188. }
  1189. private void OnRunRecipe(object obj)
  1190. {
  1191. string recipeName = SelectedRecipe;
  1192. if (recipeName == null)
  1193. {
  1194. return;
  1195. }
  1196. ClearData();
  1197. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1198. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1199. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1200. }
  1201. private void OnSetChillerTemp()
  1202. {
  1203. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1204. float x;
  1205. float.TryParse(value, out x);
  1206. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerType.Chiller.ToString(), ChillerTempSetpoint, x);
  1207. }
  1208. private void OnOffChiller()
  1209. {
  1210. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", ChillerType.Chiller.ToString(),!ChillerIsOn);
  1211. }
  1212. private void OnHeater(object obj)
  1213. {
  1214. AITHeaterData heaterData = obj as AITHeaterData;
  1215. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1216. heaterView = new HeaterView(heaterData);
  1217. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1218. heaterView.Owner = _mainWindow;
  1219. heaterView.Show();
  1220. }
  1221. private void OnEndStep()
  1222. {
  1223. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1224. {
  1225. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1226. }
  1227. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1228. {
  1229. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1230. }
  1231. }
  1232. #endregion
  1233. #region 私有方法
  1234. private void ClearData()
  1235. {
  1236. ESCVoltage = 0;
  1237. SRFFwdPowerSetpoint = 0;
  1238. SRFMatchC1 = 0;
  1239. SRFMatchC2 = 0;
  1240. BRFFwdPowerSetpoint = 0;
  1241. BRFMatchC1 = 0;
  1242. BRFMatchC2 = 0;
  1243. HeGasSetpoint = 0;
  1244. MFC1SetPoint = 0;
  1245. MFC2SetPoint = 0;
  1246. MFC3SetPoint = 0;
  1247. MFC4SetPoint = 0;
  1248. MFC5SetPoint = 0;
  1249. MFC6SetPoint = 0;
  1250. MFC7SetPoint = 0;
  1251. MFC8SetPoint = 0;
  1252. }
  1253. private IEnumerable<string> GetFilesNames(string path)
  1254. {
  1255. return Directory.GetFiles(path, "*.rcp")
  1256. .Select(Path.GetFileNameWithoutExtension);
  1257. }
  1258. void timer_Tick(object sender, EventArgs e)
  1259. {
  1260. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1261. if (RtDataValues==null)
  1262. {
  1263. return;
  1264. }
  1265. var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1266. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1267. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1268. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1269. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1270. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1271. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1272. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1273. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1274. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1275. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1276. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1277. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1278. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1279. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1280. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1281. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1282. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1283. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1284. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1285. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1286. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1287. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1288. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1289. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1290. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1291. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1292. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1293. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1294. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1295. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1296. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1297. LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1298. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1299. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1300. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
  1301. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1302. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1303. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1304. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1305. IsProcessing=PMCurrentState == PMState.Processing;
  1306. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1307. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1308. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1309. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1310. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1311. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1312. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1313. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1314. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1315. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1316. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1317. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1318. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1319. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1320. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1321. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1322. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1323. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1324. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1325. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1326. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1327. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1328. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1329. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1330. SourceRFFanInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1331. IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1332. IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1333. IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1334. IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1335. SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1336. SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1337. IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1338. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1339. ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1340. MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
  1341. MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
  1342. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1343. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1344. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1345. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1346. IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1347. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1348. if (PMCurrentState == PMState.Processing)
  1349. {
  1350. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1351. if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1352. {
  1353. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeName + ".rcp");
  1354. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1355. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1356. }
  1357. currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1358. }
  1359. else
  1360. {
  1361. CurrentRecipeResult = null;
  1362. CurrentRecipeStep = null;
  1363. }
  1364. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
  1365. {
  1366. ChamberPressureFeedBack = ProcessLowPressure;
  1367. }
  1368. else
  1369. {
  1370. ChamberPressureFeedBack = ProcessHighPressure;
  1371. }
  1372. }
  1373. public void addDataKeys()
  1374. {
  1375. m_RtDataKeys.Clear();
  1376. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1377. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1378. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1379. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1380. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1381. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1382. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1383. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1384. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1385. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1386. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1387. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1388. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1389. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1390. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1391. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1392. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1393. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1394. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1395. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1396. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1397. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1398. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1399. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1400. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1401. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1402. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1403. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1404. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1405. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1406. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1407. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1408. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1409. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1410. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1411. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1412. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1413. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1414. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1415. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1416. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1417. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1418. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1419. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1420. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1421. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1422. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1423. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1424. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1425. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1426. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1427. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1428. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1429. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1430. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1431. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1432. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1433. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1434. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1435. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1436. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1437. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1438. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1439. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1440. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1441. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1442. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1443. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1444. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1445. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1446. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1447. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1448. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1449. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1450. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1451. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1452. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1453. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1454. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1455. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1456. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1457. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1458. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1459. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1460. }
  1461. #endregion
  1462. }
  1463. }