| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652 | using System;using System.Collections.Generic;using Aitex.Core.RT.Fsm;using Aitex.Core.RT.Log;using Aitex.Core.Util;using Venus_Core;using Aitex.Sorter.Common;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using Venus_RT.Devices;using Venus_RT.Modules.TM;using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.OperationCenter;using MECF.Framework.Common.Schedulers;using MECF.Framework.Common.CommonData;namespace Venus_RT.Modules{    class TMEntity : Entity, IModuleEntity    {        public enum STATE        {            Unknown,            Init,            Initializing,              Idle,                    Error,                   Pumping,            Venting,            Purging,            Leakchecking,            Picking,                     Placing,              Swaping,            PMPicking,            PMPlacing,            PMSwaping,            Aligning,                  Mapping,                 Extending,                Retracting,               Swapping,            Gotoing,        }        public enum MSG        {            Home,              Online,            Offline,            Pump,            Vent,            Purge,            CyclePurge,            LeakCheck,            Pick,             Place,            Swap,            DoublePick,            DoublePlace,            DoubleSwap,            PMPick,            PMPlace,            PMSwap,            Extend,            Retract,            Error,            Abort,        }        public bool IsIdle        {            get { return fsm.State == (int)STATE.Idle; }        }        public bool IsError        {            get { return fsm.State == (int)STATE.Error; }        }        public bool IsInit        {            get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }        }        public bool IsBusy        {            get { return !IsInit && !IsError && !IsIdle; }        }        public bool IsOnline { get; internal set; }        private readonly JetTM _tm;        private readonly ITransferRobot _robot;        private readonly MFHomeRoutine _homeRoutine;        private readonly MFPumpRoutine _pumpingRoutine;        private readonly MFVentRoutine _ventingRoutine;        private readonly MFLeakCheckRoutine _leakCheckRoutine;        private readonly MFPurgeRoutine _purgeRoutine;        private readonly MFPickRoutine _pickRoutine;        private readonly MFPlaceRoutine _placeRoutine;        private readonly MFSwapRoutine _swapRoutine;        private readonly MFPMPickRoutine _pmPickRoutine;        private readonly MFPMPlaceRoutine _pmPlaceRoutine;        private readonly MFPMSwapRoutine _pmSwapRoutine;        public TMEntity()        {            _tm                 = Singleton<JetTM>.Instance;            _robot              = new SIASUNRobot();            _homeRoutine    = new MFHomeRoutine(_tm, _robot);            _pickRoutine    = new MFPickRoutine(_tm, _robot);            _placeRoutine   = new MFPlaceRoutine(_tm, _robot);            _swapRoutine    = new MFSwapRoutine(_tm, _robot);            _pmPickRoutine  = new MFPMPickRoutine(_tm, _robot);            _pmPlaceRoutine = new MFPMPlaceRoutine(_tm, _robot);            _pmSwapRoutine  = new MFPMSwapRoutine(_tm, _robot);            _pumpingRoutine     = new MFPumpRoutine(_tm, ModuleName.TM);            _ventingRoutine     = new MFVentRoutine(_tm, ModuleName.TM);            _leakCheckRoutine   = new MFLeakCheckRoutine(_tm, ModuleName.TM);            _purgeRoutine       = new MFPurgeRoutine(_tm, ModuleName.TM);            WaferManager.Instance.SubscribeLocation(ModuleName.TM, 2);            InitFsmMap();        }        protected override bool Init()        {            OP.Subscribe("TM.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));            OP.Subscribe($"TM.{RtOperation.LLPick}", (cmd, args) => CheckToPostMessage((int)MSG.Pick, args));            OP.Subscribe($"TM.{RtOperation.LLPlace}", (cmd, args) => CheckToPostMessage((int)MSG.Place, args));            OP.Subscribe($"TM.{RtOperation.PMPick}", (cmd, args) => CheckToPostMessage((int)MSG.PMPick, args));            OP.Subscribe($"TM.{RtOperation.PMPlace}", (cmd, args) => CheckToPostMessage((int)MSG.PMPlace, args));            OP.Subscribe($"TM.{RtOperation.Extend}", (cmd, args) => CheckToPostMessage((int)MSG.Extend, args));            OP.Subscribe($"TM.{RtOperation.Retract}", (cmd, args) => CheckToPostMessage((int)MSG.Retract, args));            //OP.Subscribe($"TM.{RtOperation.LLPlace}", (cmd, args) => CheckToPostMessage((int)MSG.Place, args));            OP.Subscribe($"TM.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));            OP.Subscribe($"TM.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));            OP.Subscribe($"TM.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck));            OP.Subscribe($"TM.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.Purge));            OP.Subscribe($"TM.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));            DATA.Subscribe("TM.FsmState", () => (((STATE)fsm.State).ToString()));            DATA.Subscribe("TM.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()));            DATA.Subscribe("TM.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()));            DATA.Subscribe("TM.RobotMoveAction.ArmTarget", () =>   _robot.TMRobotMoveInfo.ArmTarget.ToString()) ;            DATA.Subscribe("TM.RobotMoveAction.BladeTarget", () => _robot.TMRobotMoveInfo.BladeTarget);            DATA.Subscribe("TM.RobotMoveAction.RobotAction", () => _robot.TMRobotMoveInfo.Action.ToString());            return true;        }        private void InitFsmMap()        {            fsm = new StateMachine<TMEntity>("TM", (int)STATE.Init, 50);            //AnyStateTransition(FSM_MSG.TIMER,   fnMonitor,      FSM_STATE.SAME);            AnyStateTransition(MSG.Error,       fnError,        STATE.Error);            AnyStateTransition(MSG.Online,      fnOnline,       FSM_STATE.SAME);            AnyStateTransition(MSG.Offline,     fnOffline,      FSM_STATE.SAME);            AnyStateTransition(MSG.Home,        fnHome,         STATE.Initializing);            // Home            Transition(STATE.Initializing,      FSM_MSG.TIMER,      fnHoming,           STATE.Idle);            Transition(STATE.Idle,              FSM_MSG.TIMER,      fnMonitor,          STATE.Idle);            Transition(STATE.Init,              FSM_MSG.TIMER,      fnMonitor,          STATE.Init);            // Vent sequence            Transition(STATE.Idle,              MSG.Vent,           FnStartVent,        STATE.Venting);            Transition(STATE.Venting,           FSM_MSG.TIMER,      FnVentTimeout,      STATE.Idle);            Transition(STATE.Venting,           MSG.Abort,          FnAbortVent,        STATE.Idle);            // Pump sequence            Transition(STATE.Idle,              MSG.Pump,           FnStartPump,        STATE.Pumping);            Transition(STATE.Pumping,           FSM_MSG.TIMER,      FnPumpTimeout,      STATE.Idle);            Transition(STATE.Pumping,           MSG.Abort,          FnAbortPump,        STATE.Idle);            // Purge sequence            Transition(STATE.Idle,              MSG.CyclePurge,     FnStartPurge,       STATE.Purging);            Transition(STATE.Purging,           FSM_MSG.TIMER,      FnPurgeTimeout,     STATE.Idle);            Transition(STATE.Purging,           MSG.Abort,          FnAbortPurge,       STATE.Idle);            // Leak check sequence            Transition(STATE.Idle,              MSG.LeakCheck,      FnStartLeakCheck,   STATE.Leakchecking);            Transition(STATE.Leakchecking,      FSM_MSG.TIMER,      FnLeakCheckTimeout, STATE.Idle);            Transition(STATE.Leakchecking,      MSG.Abort,          FnAbortLeakCheck,   STATE.Idle);            // Pick wafer from LL sequence            Transition(STATE.Idle,              MSG.Pick,           FnStartPick,        STATE.Picking);            Transition(STATE.Picking,           FSM_MSG.TIMER,      FnPickTimeout,      STATE.Idle);            Transition(STATE.Picking,           MSG.Abort,          FnAbortPick,        STATE.Idle);            // Place wafer to LL sequence            Transition(STATE.Idle,              MSG.Place,          FnStartPlace,       STATE.Placing);            Transition(STATE.Placing,           FSM_MSG.TIMER,      FnPlaceTimeout,     STATE.Idle);            Transition(STATE.Placing,           MSG.Abort,          FnAbortPlace,       STATE.Idle);            // Swap wafer with LL sequence            Transition(STATE.Idle,              MSG.Swap,           FnStartSwap,        STATE.Swaping);            Transition(STATE.Swaping,           FSM_MSG.TIMER,      FnSwapTimeout,      STATE.Idle);            Transition(STATE.Swaping,           MSG.Abort,          FnAbortSwap,        STATE.Idle);            // Pick wafer from PM sequence            Transition(STATE.Idle,              MSG.PMPick,         FnStartPMPick,      STATE.PMPicking);            Transition(STATE.PMPicking,         FSM_MSG.TIMER,      FnPMPickTimeout,    STATE.Idle);            Transition(STATE.PMPicking,         MSG.Abort,          FnAbortPMPick,      STATE.Idle);            // Place wafer to PM sequence            Transition(STATE.Idle,              MSG.PMPlace,        FnStartPMPlace,     STATE.PMPlacing);            Transition(STATE.PMPlacing,         FSM_MSG.TIMER,      FnPMPlaceTimeout,   STATE.Idle);            Transition(STATE.PMPlacing,         MSG.Abort,          FnAbortPMPlace,     STATE.Idle);            // Swap wafer with PM sequence            Transition(STATE.Idle,              MSG.PMSwap,         FnStartPMSwap,      STATE.PMSwaping);            Transition(STATE.PMSwaping,         FSM_MSG.TIMER,      FnPMSwapTimeout,    STATE.Idle);            Transition(STATE.PMSwaping,         MSG.Abort,          FnAbortPMSwap,      STATE.Idle);            Running = true;        }        private bool fnMonitor(object[] param)        {            _debugRoutine();            return true;        }        private bool fnError(object[] param)        {            IsOnline = false;            return true;        }        private bool fnOnline(object[] param)        {            return true;        }        private bool fnOffline(object[] param)        {            IsOnline = false;            return true;        }        private bool fnAbort(object[] param)        {            _robot.Halt();            return true;        }        private bool fnHome(object[] param)        {            return _homeRoutine.Start() == RState.Running;        }        private bool fnHoming(object[] param)        {            RState ret = _homeRoutine.Monitor();            if (ret == RState.Failed || ret == RState.Timeout)            {                PostMsg(MSG.Error);                return false;            }            return ret == RState.End;        }        private bool FnStartVent(object[] param)        {            return _ventingRoutine.Start() == RState.Running ;        }        private bool FnVentTimeout(object[] param)        {            RState ret = _ventingRoutine.Monitor();            if (ret == RState.Failed || ret == RState.Timeout)            {                _ventingRoutine.Abort();                PostMsg(MSG.Error);                return false;            }            return ret == RState.End;        }        private bool FnAbortVent(object[] param)        {            _ventingRoutine.Abort();            return true;        }        private bool FnStartPump(object[] param)        {            return _pumpingRoutine.Start() == RState.Running;        }        private bool FnPumpTimeout(object[] param)        {            RState ret = _pumpingRoutine.Monitor();            if (ret == RState.Failed || ret == RState.Timeout)            {                _pumpingRoutine.Abort();                PostMsg(MSG.Error);                return false;            }            return ret == RState.End;        }        private bool FnAbortPump(object[] param)        {            _pumpingRoutine.Abort();            return true;        }        private bool FnStartPurge(object[] param)        {            return _purgeRoutine.Start() == RState.Running;        }        private bool FnPurgeTimeout(object[] param)        {            RState ret = _purgeRoutine.Monitor();            if (ret == RState.Failed || ret == RState.Timeout)            {                PostMsg(MSG.Error);                return false;            }            return ret == RState.End;        }        private bool FnAbortPurge(object[] param)        {            _purgeRoutine.Abort();            return true;        }        private bool FnStartLeakCheck(object[] param)        {            return _leakCheckRoutine.Start() == RState.Running;        }        private bool FnLeakCheckTimeout(object[] param)        {            RState ret = _leakCheckRoutine.Monitor();            if (ret == RState.Failed || ret == RState.Timeout)            {                PostMsg(MSG.Error);                return false;            }            return ret == RState.End;        }        private bool FnAbortLeakCheck(object[] param)        {            _leakCheckRoutine.Abort();            return true;        }        private bool FnStartPick(object[] param)        {            return _pickRoutine.Start(param) == RState.Running;        }        private bool FnPickTimeout(object[] param)        {            RState ret = _pickRoutine.Monitor();            if (ret == RState.Failed || ret == RState.Timeout)            {                PostMsg(MSG.Error);                return false;            }            return ret == RState.End;        }        private bool FnAbortPick(object[] param)        {            _pickRoutine.Abort();            return true;        }        private bool FnStartPlace(object[] param)        {            return _placeRoutine.Start(param) == RState.Running;        }        private bool FnPlaceTimeout(object[] param)        {            RState ret = _placeRoutine.Monitor();            if (ret == RState.Failed || ret == RState.Timeout)            {                PostMsg(MSG.Error);                return false;            }            return ret == RState.End;        }        private bool FnAbortPlace(object[] param)        {            _placeRoutine.Abort();            return true;        }        private bool FnStartSwap(object[] param)        {            return _swapRoutine.Start(param) == RState.Running;        }        private bool FnSwapTimeout(object[] param)        {            RState ret = _swapRoutine.Monitor();            if (ret == RState.Failed || ret == RState.Timeout)            {                PostMsg(MSG.Error);                return false;            }            return ret == RState.End;        }        private bool FnAbortSwap(object[] param)        {            _swapRoutine.Abort();            return true;        }        private bool FnStartPMPick(object[] param)        {            return _pmPickRoutine.Start(param) == RState.Running;        }        private bool FnPMPickTimeout(object[] param)        {            RState ret = _pmPickRoutine.Monitor();            if (ret == RState.Failed || ret == RState.Timeout)            {                PostMsg(MSG.Error);                return false;            }            return ret == RState.End;        }        private bool FnAbortPMPick(object[] param)        {            _pmPickRoutine.Abort();            return true;        }        private bool FnStartPMPlace(object[] param)        {            return _pmPlaceRoutine.Start(param) == RState.Running;        }        private bool FnPMPlaceTimeout(object[] param)        {            RState ret = _pmPlaceRoutine.Monitor();            if (ret == RState.Failed || ret == RState.Timeout)            {                PostMsg(MSG.Error);                return false;            }            return ret == RState.End;        }        private bool FnAbortPMPlace(object[] param)        {            _pmPlaceRoutine.Abort();            return true;        }        private bool FnStartPMSwap(object[] param)        {            return _pmSwapRoutine.Start(param) == RState.Running;        }        private bool FnPMSwapTimeout(object[] param)        {            RState ret = _pmSwapRoutine.Monitor();            if (ret == RState.Failed || ret == RState.Timeout)            {                PostMsg(MSG.Error);                return false;            }            return ret == RState.End;        }        private bool FnAbortPMSwap(object[] param)        {            _pmSwapRoutine.Abort();            return true;        }        public bool Check(int msg, out string reason, params object[] args)        {            reason = "";            return true;        }        public int Invoke(string function, params object[] args)        {            switch (function)            {                case "Home":                    CheckToPostMessage((int)MSG.Home);                    return (int)MSG.Home;            }            return (int)FSM_MSG.NONE;        }        public bool CheckAcked(int msg)        {            return fsm.CheckExecuted(msg);        }        public bool CheckToPostMessage(int msg, params object[] args)        {            if (!fsm.FindTransition(fsm.State, msg))            {                LOG.Write(eEvent.WARN_FSM_WARN, ModuleName.TM, $"TM is in {(STATE)fsm.State} state,can not do {(MSG)msg}");                return false;            }            Running = true;            fsm.PostMsg(msg, args);            return true;        }        private void _debugRoutine()        {            int flag = 0;            // Test Home routine            if (flag == 1)            {                PostMsg(MSG.Home);            }            else if (flag == 2)            {                PostMsg(MSG.Vent);            }            else if (flag == 3)            {                PostMsg(MSG.Pump);            }            else if(flag == 4)            {                PostMsg(MSG.Pick, ModuleName.LLA, 0, 0);            }            else if(flag == 5)            {                PostMsg(MSG.Place, ModuleName.LLA, 0, 0);            }            else if(flag == 6)            {                Queue<MoveItem> items = new Queue<MoveItem>();                items.Enqueue(new MoveItem(ModuleName.TM, 0, ModuleName.LLA, 0, Hand.Blade1));                items.Enqueue(new MoveItem(ModuleName.TM, 1, ModuleName.LLA, 1, Hand.Blade2));                items.Enqueue(new MoveItem(ModuleName.LLA, 0, ModuleName.TM, 0, Hand.Blade1));                items.Enqueue(new MoveItem(ModuleName.LLA, 1, ModuleName.TM, 1, Hand.Blade2));                PostMsg(MSG.Swap,items);            }            else if(flag == 7)            {                PostMsg(MSG.PMPick, ModuleName.PMA, 0, 0);            }            else if(flag == 8)            {                PostMsg(MSG.PMPlace, ModuleName.PMA, 0, 0);            }            else if(flag == 9)            {                PostMsg(MSG.PMSwap, ModuleName.PMA, 0, 0, 0, 0);            }            //else if (flag == 4)            //{            //    PostMsg(MSG.PumpLoadLock);            //}            //else if (flag == 5)            //{            //    PostMsg(MSG.VentLoadLock);            //}            //else if (flag == 6)            //{            //    PostMsg(MSG.PurgeLoadLock);            //}            //else if (flag == 7)            //{            //    PostMsg(MSG.LaunchPump);            //}            //else if (flag == 8)            //{            //    PostMsg(MSG.LaunchTurboPump);            //}            //else if (flag == 9)            //{            //    PostMsg(MSG.LoadLockLeakCheck);            //}            //else if (flag == 10)            //{            //    PostMsg(MSG.CyclePurge);            //}            //else if (flag == 11)            //{            //    PostMsg(MSG.GasLinePurge);            //}            //else if (flag == 12)            //{            //    PostMsg(MSG.LeakCheck);            //}            //else if (flag == 13)            //{            //    PostMsg(MSG.GasLeakCheck);            //}            //else if (flag == 14)            //{            //    PostMsg(MSG.LLPlace);            //}            //else if (flag == 15)            //{            //    PostMsg(MSG.LLPick);            //}            //else if (flag == 16)            //{            //    PostMsg(MSG.RunRecipe, "7777");            //}            //else if (flag == 17)            //{            //    PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);            //}        }    }}
 |