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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_Core;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using System;
- using System.Text;
- using System.Collections.Generic;
- using MECF.Framework.Common.Schedulers;
- namespace Venus_RT.Modules.TM
- {
- class MFSwapRoutine : ModuleRoutineBase, IRoutine
- {
- private enum SwapStep
- {
- WaitModuleReady,
- ModulePrepare,
- OpenSlitDoor,
- MoveWafer,
- WaitMaferMoved,
- CloseSlitDoor,
- NotifyDone,
- }
- private readonly JetTM _JetTM;
- private readonly ITransferRobot _robot;
- private int _swapTimeout = 120 * 1000;
- private ModuleName _targetModule;
- private LLEntity _llModule;
- Queue<MoveItem> _actionList = new Queue<MoveItem>();
- MoveItem _currentAction;
- public MFSwapRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TM)
- {
- _JetTM = tm;
- _robot = robot;
- Name = "Swap";
- }
- public RState Start(params object[] objs)
- {
- if (!_robot.IsHomed)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
- return RState.Failed;
- }
- _actionList = (Queue<MoveItem>)objs[0];
- var firtItem = _actionList.Peek();
- if (ModuleHelper.IsLoadLock(firtItem.SourceModule))
- _targetModule = firtItem.SourceModule;
- else if (ModuleHelper.IsLoadLock(firtItem.DestinationModule))
- _targetModule = firtItem.DestinationModule;
- else
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Invalid move parameter: {firtItem.SourceModule},{firtItem.SourceSlot} => {firtItem.DestinationModule},{firtItem.DestinationSlot} ");
- return RState.Failed;
- }
- _llModule = Singleton<RouteManager>.Instance.GetLL(_targetModule);
- if(_llModule == null)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Invalid Loadlock: {_targetModule}, maybe not installed");
- return RState.Failed;
- }
- Reset();
- _swapTimeout = SC.GetValue<int>($"{Module}.SwapTimeout") * 1000;
- return Runner.Start(Module, $"Swap with {_targetModule}");
- }
- public RState Monitor()
- {
- Runner.Wait((int)SwapStep.WaitModuleReady, () => _llModule.IsIdle, _delay_60s)
- .Run((int)SwapStep.ModulePrepare, ModulePrepare, IsModulePrepareReady)
- .Run((int)SwapStep.OpenSlitDoor, OpenSlitDoor, IsSlitDoorOpen)
- .LoopStart((int)SwapStep.MoveWafer, loopName(), _actionList.Count, MoveWafer)
- .LoopEnd((int)SwapStep.WaitMaferMoved, NullFun, WaitWaferMoved)
- .Run((int)SwapStep.CloseSlitDoor, CloseSlitDoor, IsSlitDoorClosed)
- .End((int)SwapStep.NotifyDone, NotifyLLDone, _delay_50ms);
- return Runner.Status;
- }
- private bool ModulePrepare()
- {
- _llModule.PostMsg(LLEntity.MSG.Prepare_TM);
- return true;
- }
- private string loopName()
- {
- return "LoadLock Swap" ;
- }
- private bool IsModulePrepareReady()
- {
- return _llModule.Status == LLEntity.LLStatus.Ready_For_TM;
- }
- private bool OpenSlitDoor()
- {
- return _JetTM.TurnMFSlitDoor(_targetModule, true, out _);
- }
- private bool CloseSlitDoor()
- {
- return _JetTM.TurnMFSlitDoor(_targetModule, false, out _);
- }
- private bool IsSlitDoorOpen()
- {
- if (_targetModule == ModuleName.LLA)
- return _JetTM.IsLLASlitDoorOpen;
- else
- return _JetTM.IsLLBSlitDoorOpen;
- }
- private bool IsSlitDoorClosed()
- {
- if (_targetModule == ModuleName.LLA)
- return _JetTM.IsLLASlitDoorClosed;
- else
- return _JetTM.IsLLBSlitDoorClosed;
- }
- private bool VerifyWaferExistence(MoveItem item)
- {
- if (WaferManager.Instance.CheckHasWafer(item.DestinationModule, item.DestinationSlot))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot move wafer as desitination {_currentAction.DestinationModule},{_currentAction.DestinationSlot} already a wafer: ");
- return false;
- }
- if (WaferManager.Instance.CheckNoWafer(_currentAction.SourceModule, _currentAction.SourceSlot))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot move wafer as source {_currentAction.SourceModule}, {_currentAction.SourceSlot} has no wafer");
- return false;
- }
- return true;
- }
- private bool MoveWafer()
- {
- _currentAction = _actionList.Dequeue();
- if (!VerifyWaferExistence(_currentAction))
- return false;
- var wafer = WaferManager.Instance.GetWafer(_currentAction.SourceModule, _currentAction.SourceSlot);
- LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TM, $"{wafer.WaferOrigin} will be move from {_currentAction.SourceModule} {_currentAction.SourceSlot + 1} to {_currentAction.DestinationModule} {_currentAction.DestinationSlot + 1}");
- if (ModuleHelper.IsLoadLock(_currentAction.SourceModule) && ModuleHelper.IsTM(_currentAction.DestinationModule))
- {
- return _robot.Pick(_currentAction.SourceModule, _currentAction.SourceSlot, (Hand)_currentAction.DestinationSlot);
- }
- else if(ModuleHelper.IsTM(_currentAction.SourceModule) && ModuleHelper.IsLoadLock(_currentAction.DestinationModule))
- {
- return _robot.Place(_currentAction.DestinationModule, _currentAction.DestinationSlot, (Hand)_currentAction.SourceSlot);
- }
- else
- {
- LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TM, $"Invalid move parameter, source:{_currentAction.SourceModule},{_currentAction.SourceSlot}, destination: {_currentAction.DestinationModule}, {_currentAction.DestinationSlot}");
- return false;
- }
- }
- private bool WaitWaferMoved()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(_currentAction.SourceModule, _currentAction.SourceSlot, _currentAction.DestinationModule, _currentAction.DestinationSlot);
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot moving wafer failed, {_robot.Status}");
- return true;
- }
- }
- private bool NotifyLLDone()
- {
- _llModule.PostMsg(LLEntity.MSG.TM_Exchange_Ready);
- return true;
- }
- public void Abort()
- {
- _robot.Halt();
- }
- }
- }
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