| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using Venus_Core;using Venus_RT.Devices;using Venus_Unity;namespace Venus_RT.Modules.PMs{    public enum CMPressure    {        CM1,        CM2,    }    class PMVATPerformanceRoutine : PMRoutineBase, IRoutine    {        public StringBuilder m_sb = new StringBuilder();        int gasIndex;        //int GasMaxScale;        public int counter;        int gasTime;        int gasSetPoint;        ValveType[] valveTypes = new ValveType[4] { ValveType.PV11, ValveType.PV21, ValveType.PV31, ValveType.PV41 };        List<int> Positions = new List<int>() {50,100,150,200,250,300,350,400,450,500,550,600,650,700,750,800,850,900,950,1000};        public VATPerformanceResult m_VATPerformanceResult;        private CMPressure currentCMPressure = CMPressure.CM1;        private enum VATPerformanceStep        {            kDelay_1s,            kStartGas,            kReadChamberPressure,            kEnd,        }        public PMVATPerformanceRoutine(JetPM chamber) : base(chamber)        {            Name = "PMVATPerformance";        }        public RState Start(params object[] objs)        {            if (!CheckTurboPump())            {                return RState.Failed;            }            if (_chamber.GetPVPosition() == 0)            {                Stop("钟摆阀没有打开");                return RState.Failed;            }            _chamber.OpenValve(ValveType.Guage, true);            _chamber.OpenValve(ValveType.TurboPumpPumping, true);            _chamber.OpenValve(ValveType.TurboPumpPurge, true);            counter = 1;            Reset();            gasIndex = (int)objs[0];            gasTime = (int)objs[1];            gasSetPoint = (int)objs[2];            m_VATPerformanceResult = new VATPerformanceResult();            m_VATPerformanceResult.StartTime = DateTime.Now.ToString("yyyyMMddHHmm");            m_VATPerformanceResult.FlowTime = gasTime;            m_VATPerformanceResult.GasName = $"Gas{gasIndex.ToString()}";            currentCMPressure = CMPressure.CM1;            m_sb.Clear();            return Runner.Start(Module, Name);        }        public RState Monitor()        {            Runner.Delay((int)VATPerformanceStep.kDelay_1s, 1000 * 1)                  .LoopStart((int)VATPerformanceStep.kStartGas, "VAT Performance Test", Positions.Count, () => SetPositionGas(), gasTime)                  .LoopEnd((int)VATPerformanceStep.kReadChamberPressure, ReadChamberPressure, 2000)                  .End((int)VATPerformanceStep.kEnd, () =>                  {                      m_VATPerformanceResult.EndTime=DateTime.Now.ToString("yyyyMMddHHmm");                      _chamber.CloseValves();                      SerializeHelper.Instance.WriteToJsonFile<VATPerformanceResult>(m_VATPerformanceResult, $"VATPerformanceResult/{m_VATPerformanceResult.GasName}/{m_VATPerformanceResult.StartTime}.json");                      return true;                  }, 500);            return Runner.Status;        }        private  bool SetPositionGas()        {            if (!_chamber.SetPVPostion(Positions[counter - 1]))            {             return false;            }            if (gasIndex <= 4)            {                _chamber.OpenValve(valveTypes[gasIndex - 1], true);            }            _chamber.OpenValve(ValveType.GasFinal, true);            _chamber.FlowGas(gasIndex - 1, gasSetPoint);            return true;        }        private  bool ReadChamberPressure()        {            double pressureValue;            if (currentCMPressure == CMPressure.CM1)            {                pressureValue = _chamber.ProcessLowPressure;                if (Math.Abs(pressureValue - 100) < 3)                {                    pressureValue = _chamber.ProcessHighPressure;                    currentCMPressure = CMPressure.CM2;                }            }            else            {                pressureValue = _chamber.ProcessHighPressure;                if (pressureValue < 100)                {                    if (_chamber.IsGuageValveOpened == false)                    {                        _chamber.OpenValve(ValveType.Guage, true);                        System.Threading.Thread.Sleep(3000);                    }                    pressureValue = _chamber.ProcessLowPressure;                    currentCMPressure = CMPressure.CM1;                }            }            var value =Math.Round(gasSetPoint / pressureValue,3);            m_VATPerformanceResult.ValuePairs.Add(value);            m_sb.Append(value.ToString());            m_sb.Append(',');            counter += 1;            return true;        }        public void Abort()        {            _chamber.CloseValves();        }    }}
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