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Kepler-Release
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Venus_RT
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TM
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DeviceModelVenus_MF.xml

DeviceModelVenus_MF.xml 34 KB
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  1. <?xml version="1.0" encoding="utf-16"?>
    2. 

  2. <DeviceModelDefine type="TM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
    3. 

  3. 	<IoValves>
    4. 

  4. 		<IoValve id="TMValveN2" display="N2 Valve" schematicId="N2" unit="" isNc="true"
    5. 

  5. 				isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />
    6. 

  6. 

  7. 		<IoValve id="TMSoftPumpValve" display="Soft Pump Valve" schematicId="SoftPump" unit="" isNc="true"
    8. 

  8. 				isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_TM" diCloseSensor="" diOpenSensor="" />
    9. 

  9. 		<IoValve id="TMFastPumpValve" display="Fast Pump Valve" schematicId="FastPump" unit="" isNc="true"
    10. 

  10. 				isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_TM" diCloseSensor="" diOpenSensor="" />
    11. 

  11. 

  12. 		<IoValve id="TMPurgeValve" display="Purge Valve" schematicId="Purge" unit="" isNc="true"
    13. 

  13. 				isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_TM" diCloseSensor="" diOpenSensor="" />
    14. 

  14. 		<IoValve id="TMVentValve" display="Vent Valve" schematicId="Vent" unit="" isNc="true"
    15. 

  15. 			  isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_TM" diCloseSensor="" diOpenSensor="" />
    16. 

  16. 

  17. 		<IoValve id="LLASoftPumpValve" display="LLA Soft Pump Valve" schematicId="SoftPumpLLA" unit="" isNc="true"
    18. 

  18. 				isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_LLA" diCloseSensor="" diOpenSensor="" />
    19. 

  19. 		<IoValve id="LLAFastPumpValve" display="LLA Fast Pump Valve" schematicId="FastPumpLLA" unit="" isNc="true"
    20. 

  20. 				isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_LLA" diCloseSensor="" diOpenSensor="" />
    21. 

  21. 

  22. 		<IoValve id="LLAPurgeValve" display="LLA Purge Valve" schematicId="PurgeLLA" unit="" isNc="true"
    23. 

  23. 				isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_LLA" diCloseSensor="" diOpenSensor="" />
    24. 

  24. 		<IoValve id="LLAVentValve" display="LLA Vent Valve" schematicId="VentLLA" unit="" isNc="true"
    25. 

  25. 				isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_LLA" diCloseSensor="" diOpenSensor="" />
    26. 

  26. 

  27. 

  28. 		<IoValve id="LLBSoftPumpValve" display="LLB Soft Pump Valve" schematicId="SoftPumpLLB" unit="" isNc="true"
    29. 

  29. 			isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_LLB" diCloseSensor="" diOpenSensor="" />
    30. 

  30. 		<IoValve id="LLBFastPumpValve" display="LLB Fast Pump Valve" schematicId="FastPumpLLB" unit="" isNc="true"
    31. 

  31. 				isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_LLB" diCloseSensor="" diOpenSensor="" />
    32. 

  32. 

  33. 		<IoValve id="LLBPurgeValve" display="LLB Purge Valve" schematicId="PurgeLLB" unit="" isNc="true"
    34. 

  34. 				isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_LLB" diCloseSensor="" diOpenSensor="" />
    35. 

  35. 		<IoValve id="LLBVentValve" display="LLB Vent Valve" schematicId="VentLLB" unit="" isNc="true"
    36. 

  36. 				isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_LLB" diCloseSensor="" diOpenSensor="" />
    37. 

  37. 

  38. 		<IoValve id="ValveWaterRelay" display="Water Relay Valve" schematicId="WaterRelay" unit="" isNc="true"
    39. 

  39. 				isDefaultOpen="false" diOpen="" doOpen="DO_Water_Valve_Relay" diCloseSensor="" diOpenSensor="" />
    40. 

  40. 

  41. 		<IoValve id="TMVacAtmMode" display="TM Vacuum/Atm Mode" schematicId="TMVacAtmMode" unit="" isNc="true"
    42. 

  42. 				isDefaultOpen="false" diOpen="" doOpen="DO_TM_VAC_ATM_MODE" diCloseSensor="" diOpenSensor="" />
    43. 

  43. 

  44. 		<IoValve id="TMVentExhaustValve" display="TM Vent Exhaust Valve" schematicId="TMVentExhaustValve" unit="" isNc="true"
    45. 

  45. 				isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Exhaust_Valve_TM" diCloseSensor="" diOpenSensor="" />
    46. 

  46. 

  47. 		<IoValve id="LLAVentExhaustValve" display="LLA Vent Exhaust Valve" schematicId="LLAVentExhaustValve" unit="" isNc="true"
    48. 

  48. 				isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Exhaust_Valve_LLA" diCloseSensor="" diOpenSensor="" />
    49. 

  49. 

  50. 		<IoValve id="LLBVentExhaustValve" display="LLB Vent Exhaust Valve" schematicId="LLBVentExhaustValve" unit="" isNc="true"
    51. 

  51. 				isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Exhaust_Valve_LLB" diCloseSensor="" diOpenSensor="" />
    52. 

  52. 

  53. 	</IoValves>
    54. 

  54. 

  55. 	<IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
    56. 

  56. 		<IoMfc id="TM_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
    57. 

  57. 				aiFlow="AI_TM_MFC1_Flow" aoFlow="AO_TM_MFC1_Flow_Setpoint" diOffline="" aoRange=""
    58. 

  58. 				diPressureAlarm="DI_N2_Pressure_Switch"/>
    59. 

  59. 		<IoMfc id="LLA_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
    60. 

  60. 				aiFlow="AI_LLA_MFC1_Flow" aoFlow="AO_LLA_MFC1_Flow_Setpoint" diOffline="" aoRange=""
    61. 

  61. 				diPressureAlarm="DI_N2_Pressure_Switch"/>
    62. 

  62. 		<IoMfc id="LLB_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
    63. 

  63. 				aiFlow="AI_LLB_MFC1_Flow" aoFlow="AO_LLB_MFC1_Flow_Setpoint" diOffline="" aoRange=""
    64. 

  64. 				diPressureAlarm="DI_N2_Pressure_Switch"/>
    65. 

  65. 	</IoMfcs>
    66. 

  66. 

  67. 	<IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
    68. 

  68. 		<IoGasStick id="GasStickMFC1" display="" mfc ="TM_MFC1" downvalve="TMValveN2" />
    69. 

  69. 	</IoGasSticks>
    70. 

  70. 

  71. 	<IoSensors>
    72. 

  72. 		<IoSensor id="TMPowerOn" display="TM Power On"  schematicId="" unit="" di="DI_TM_Power_On" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="TM Power Off" />
    73. 

  73. 		<IoSensor id="TMInSafty" display="TM In Safty"  schematicId="" unit="" di="DI_TM_In_Safety" isLowAsNormal="" textOutTrigValue="false"
    74. 

  74. 				  infoText="" warningText="" alarmText="TM Safty Alarm" />
    75. 

  75. 		<IoSensor id="WaferLeakSensor" display="Water Leak Sensor"  schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
    76. 

  76. 				  infoText="" warningText="" alarmText="TM Wafer Leak" />
    77. 

  77. 		<IoSensor id="EFEMSideDoorClosed" display="EFEM Side Door Closed"  schematicId="" unit="" di="DI_EFEM_Side_Door_Closed" isLowAsNormal="" textOutTrigValue="false"
    78. 

  78. 				  infoText="" warningText="" alarmText="EFEM Side Door Not Closed" />
    79. 

  79. 		<IoSensor id="TMPCWFlowSwitch" display="TM PCW Flow Switch"  schematicId="" unit="" di="DI_TM_CHB_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
    80. 

  80. 				  infoText="" warningText="TM PCW Flow Switch abnormal" alarmText="" />
    81. 

  81. 		<IoSensor id="LLAPCWFlowSwitch" display="LLA PCW Flow Switch"  schematicId="" unit="" di="DI_LLA_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
    82. 

  82. 				  infoText="" warningText="LLA PCW Flow Switch abnormal" alarmText="" />
    83. 

  83. 		<IoSensor id="LLBPCWFlowSwitch" display="LLB PCW Flow Switch"  schematicId="" unit="" di="DI_LLB_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
    84. 

  84. 				  infoText="" warningText="LLB PCW Flow Switch abnormal" alarmText="" />
    85. 

  85. 		<IoSensor id="TMLidClosed" display="TM Lid Closed"  schematicId="" unit="" di="DI_TM_CHB_Door_Closed" isLowAsNormal="" textOutTrigValue="false"
    86. 

  86. 				  infoText="" warningText="" alarmText="TM Lid Not Closed" />
    87. 

  87. 		<IoSensor id="CDAPressureSwitch" display="CDA pressure Switch"  schematicId="" unit="" di="DI_CDA_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
    88. 

  88. 				  infoText="" warningText="" alarmText="TM CDA pressure abnormal" />
    89. 

  89. 		<IoSensor id="VaccumPressureSwitch" display="Vaccum Pressure Switch"  schematicId="" unit="" di="DI_Vaccum_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
    90. 

  90. 			   infoText="" warningText="" alarmText="Vaccum Pressure Switch abnormal" />
    91. 

  91. 		<IoSensor id="N2PressureSwitch" display="N2 Pressure Switch"  schematicId="" unit="" di="DI_N2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="N2 Pressure Switch abnormal" />
    92. 

  92. 

  93. 		<IoSensor id="TMRobotNotExtendPMA" display="TM Robot Not Extend To PMA"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMA" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    94. 

  94. 		<IoSensor id="TMRobotNotExtendPMB" display="TM Robot Not Extend To PMB"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMB" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    95. 

  95. 		<IoSensor id="TMRobotNotExtendPMC" display="TM Robot Not Extend To PMC"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMC" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    96. 

  96. 		<IoSensor id="TMRobotNotExtendPMD" display="TM Robot Not Extend To PMD"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMD" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    97. 

  97. 		<IoSensor id="TMRobotNotExtendLLA" display="TM Robot Not Extend To LLA"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_LLA" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    98. 

  98. 		<IoSensor id="TMRobotNotExtendLLB" display="TM Robot Not Extend To LLB"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_LLB" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    99. 

  99. 		<IoSensor id="EfemRobotNotExtendLLA" display="EFEM Robot Not Extend To LLA"  schematicId="" unit="" di="DI_EFEM_RB_Not_Extend_LLA" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    100. 

  100. 		<IoSensor id="EfemRobotNotExtendLLB" display="EFEM Robot Not Extend To LLB"  schematicId="" unit="" di="DI_EFEM_RB_Not_Extend_LLB" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    101. 

  101. 

  102. 		<IoSensor id="TMVacSwitch" display="TM Vaccum Switch"  schematicId="" unit="" di="DI_TM_VAC_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    103. 

  103. 		<IoSensor id="LLAVacSwitch" display="LLA Vaccum Switch"  schematicId="" unit="" di="DI_LLA_VAC_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    104. 

  104. 		<IoSensor id="LLBVacSwitch" display="LLB Vaccum Switch"  schematicId="" unit="" di="DI_LLB_VAC_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    105. 

  105. 		<IoSensor id="TMATMSwitch" display="TM ATM Switch"  schematicId="" unit="" di="DI_TM_ATM_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    106. 

  106. 		<IoSensor id="LLAATMSwitch" display="LLA ATM Switch"  schematicId="" unit="" di="DI_LLA_ATM_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    107. 

  107. 		<IoSensor id="LLBATMSwitch" display="LLB ATM Switch"  schematicId="" unit="" di="DI_LLB_ATM_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    108. 

  108. 

  109. 	</IoSensors>
    110. 

  110. 

  111. 	<IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
    112. 

  112. 		<IoPressureMeter id="TMProcessGauge" display="TM Pressure" schematicId="" unit="mTorr"
    113. 

  113. 						    aiValue="AI_TM_CHB_Pressure" diGaugeFail="DI_TM_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
    114. 

  114. 		<IoPressureMeter id="TMForelineGauge" display="TM Foreline Pressure" schematicId="" unit="mTorr"
    115. 

  115. 						    aiValue="AI_TM_Foreline_Pressure" diGaugeFail="TMForelineGaugeAlarm" scPrecision="" scOffset=""/>
    116. 

  116. 		<IoPressureMeter id="LLAPressureGauge" display="LLA Pressure" schematicId="" unit="mTorr"
    117. 

  117. 						    aiValue="AI_LLA_CHB_Pressure" diGaugeFail="DI_LLA_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
    118. 

  118. 		<IoPressureMeter id="LLBPressureGauge" display="LLB Pressure" schematicId="" unit="mTorr"
    119. 

  119. 						    aiValue="AI_LLB_CHB_Pressure" diGaugeFail="DI_LLB_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
    120. 

  120. 		<IoPressureMeter id="LLAForelineGauge" display="Loadlock A Foreline Pressure" schematicId="" unit="mTorr"
    121. 

  121. 						    aiValue="AI_LLA_Foreline_Pressure" diGaugeFail="DI_LLA_Foreline_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
    122. 

  122. 		<IoPressureMeter id="LLBForelineGauge" display="Loadlock B Foreline Pressure" schematicId="" unit="mTorr"
    123. 

  123. 						    aiValue="AI_LLB_Foreline_Pressure" diGaugeFail="DI_LLB_Foreline_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
    124. 

  124. 	</IoPressureMeters>
    125. 

  125. 

  126. 	<IoTMPressureCtrls assembly="Venus_RT" classType="Venus_RT.Devices.IoTMPressureCtrl">
    127. 

  127. 		<IoTMPressureCtrl id="TMPressureCtrl" display="MFPressureControl" schematicId="MFPressureControl" unit="mTorr"
    128. 

  128. 						   aoMFPressure="AO_TM_CHB_Pressure"
    129. 

  129. 						   aoLLAPressure="AO_LLA_CHB_Pressure"
    130. 

  130. 						   aoLLBPressure="AO_LLB_CHB_Pressure"
    131. 

  131. 						  
    132. 

  132. 						   MFPressureMeter ="TMProcessGauge" LLAPressureMeter="LLAPressureGauge" LLBPressureMeter="LLBPressureGauge" MFForelineMeter="TMForelineGauge" LLAForelineMeter="LLAForelineGauge" LLBForelineMeter="LLBForelineGauge"/>
    133. 

  133. 	</IoTMPressureCtrls>
    134. 

  134. 

  135. 	<IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
    136. 

  136. 		<IoHeartbeat  id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
    137. 

  137. 	</IoHeartbeats>
    138. 

  138. 

  139. 	<IoPlcDateTimes>
    140. 

  140. 		<IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
    141. 

  141. 					  aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
    142. 

  142. 	</IoPlcDateTimes>
    143. 

  143. 

  144. 	<IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
    145. 

  145. 

  146. 		<IoCylinder id="LLAESlitDoor" display="LLA EFEM Side Door" schematicId="" unit="" doMotorRelay=""
    147. 

  147. 					doON="DO_LLA_Slit_Door_E_Open" doOFF="DO_LLA_Slit_Door_E_Close" diON="DI_LLA_E_Slit_Door_open_Position" diOFF="DI_LLA_E_Slit_Door_close_Position" />
    148. 

  148. 		<IoCylinder id="LLBESlitDoor" display="LLB EFEM Side Door" schematicId="" unit="" doMotorRelay=""
    149. 

  149. 					doON="DO_LLB_Slit_Door_E_Open" doOFF="DO_LLB_Slit_Door_E_Close" diON="DI_LLB_E_Slit_Door_open_Position" diOFF="DI_LLB_E_Slit_Door_close_Position" />
    150. 

  150. 		<IoCylinder id="LLATSlitDoor" display="LLA TM Side Door" schematicId="" unit="" doMotorRelay=""
    151. 

  151. 					doON="DO_LLA_Slit_Door_T_Open" doOFF="DO_LLA_Slit_Door_T_Close" diON="DI_LLA_T_Slit_Door_open_Position" diOFF="DI_LLA_T_Slit_Door_close_Position" />
    152. 

  152. 		<IoCylinder id="LLBTSlitDoor" display="LLB TM Side Door" schematicId="" unit="" doMotorRelay=""
    153. 

  153. 					doON="DO_LLB_Slit_Door_T_Open" doOFF="DO_LLB_Slit_Door_T_Close" diON="DI_LLB_T_Slit_Door_open_Position" diOFF="DI_LLB_T_Slit_Door_close_Position" />
    154. 

  154. 

  155. 		<IoCylinder id="PMASlitDoor" display="PMA Slit door" schematicId="" unit="" doMotorRelay=""
    156. 

  156. 						doON="DO_PMA_SlitDoor_Open" doOFF="DO_PMA_SlitDoor_Close" diON="DI_PMA_SlitDoor_Open_Position" diOFF="DI_PMA_SlitDoor_Close_Position" />
    157. 

  157. 		<IoCylinder id="PMBSlitDoor" display="PMB Slit door" schematicId="" unit="" doMotorRelay=""
    158. 

  158. 					doON="DO_PMB_SlitDoor_Open" doOFF="DO_PMB_SlitDoor_Close" diON="DI_PMB_SlitDoor_Open_Position" diOFF="DI_PMB_SlitDoor_Close_Position" />
    159. 

  159. 		<IoCylinder id="PMCSlitDoor" display="PMC Slit door" schematicId="" unit="" doMotorRelay=""
    160. 

  160. 						doON="DO_PMC_SlitDoor_Open" doOFF="DO_PMC_SlitDoor_Close" diON="DI_PMC_SlitDoor_Open_Position" diOFF="DI_PMC_SlitDoor_Close_Position" />
    161. 

  161. 		<IoCylinder id="PMDSlitDoor" display="PMD Slit door" schematicId="" unit="" doMotorRelay=""
    162. 

  162. 						doON="DO_PMD_SlitDoor_Open" doOFF="DO_PMD_SlitDoor_Close" diON="DI_PMD_SlitDoor_Open_Position" diOFF="DI_PMD_SlitDoor_Close_Position" />
    163. 

  163. 	</IoCylinders>
    164. 

  164. 

  165. 	<IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
    166. 

  166. 		<IoLid id="TMLid" display="TM Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_TM_CHB_Door_Closed" />
    167. 

  167. 		<IoLid id="LLALid" display="LoadLock A Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_LLA_Lid_Door_Closed" />
    168. 

  168. 		<IoLid id="LLBLid" display="LoadLock B Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_LLB_Lid_Door_Closed" />
    169. 

  169. 		<IoLid id="PMALid" display="PMA Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_PMA_Lid_Closed" />
    170. 

  170. 		<IoLid id="PMBLid" display="PMB Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_PMB_Lid_Closed" />
    171. 

  171. 		<IoLid id="PMCLid" display="PMC Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_PMC_Lid_Closed" />
    172. 

  172. 		<IoLid id="PMDLid" display="PMD Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_PMD_Lid_Closed" />
    173. 

  173. 	</IoLids>
    174. 

  174. 

  175. 	<IoSwitchs assembly="Venus_RT" classType="Venus_RT.Devices.IoSwitch">
    176. 

  176. 		<IoSwitch id="LLAWaferSizeCheckSwitch" display="LLA Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    177. 

  177.                 do="DO_LLA_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    178. 

  178. 		<IoSwitch id="LLBWaferSizeCheckSwitch" display="LLB Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    179. 

  179.                 do="DO_LLB_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    180. 

  180. 		<IoSwitch id="PMAWaferSizeCheckSwitch" display="PMA Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    181. 

  181.                 do="DO_PMA_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    182. 

  182. 		<IoSwitch id="PMBWaferSizeCheckSwitch" display="PMB Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    183. 

  183.                 do="DO_PMB_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    184. 

  184. 		<IoSwitch id="PMCWaferSizeCheckSwitch" display="PMC Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    185. 

  185.                 do="DO_PMC_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    186. 

  186. 		<IoSwitch id="PMDWaferSizeCheckSwitch" display="PMD Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    187. 

  187.                 do="DO_PMD_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    188. 

  188. 		<IoSwitch id="TMPressureModeSwitch" display="Pressure Mode Switch" schematicId="" unit="" doMotorRelay=""
    189. 

  189.                 do="DO_TM_MFC_FLOW_MODE_PRESSURE_MODE"  di="" />
    190. 

  190. 		<IoSwitch id="LLAPressureModeSwitch" display="Pressure Mode Switch" schematicId="" unit="" doMotorRelay=""
    191. 

  191.                 do="DO_LLA_MFC_FLOW_MODE_PRESSURE_MODE"  di="" />
    192. 

  192. 		<IoSwitch id="LLBPressureModeSwitch" display="Pressure Mode Switch" schematicId="" unit="" doMotorRelay=""
    193. 

  193.                 do="DO_LLB_MFC_FLOW_MODE_PRESSURE_MODE"  di="" />
    194. 

  194. 	</IoSwitchs>
    195. 

  195. 

  196. </DeviceModelDefine>
    197.