Kepler-Release/Venus/Venus_RT/Modules/VenusDispatcher.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Diagnostics;
using Aitex.Core.Common;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Sorter.Common;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.RecipeCenter;
using Aitex.Core.RT.Fsm;

using MECF.Framework.Common.Jobs;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.DBCore;

using Venus_Core;

using Venus_RT.Modules.Schedulers;
using Venus_RT.Scheduler;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;

namespace Venus_RT.Modules
{
    class VCETask : ModuleTask
    {
        public VCETask(ModuleName mod) : base(mod)
        {

        }
    }

    class VenusPMTask : ModuleTask
    {
        public enum RecipeJobType
        {
            PreClean,
            Process,
            PostClean,
            WtwClean,
        }

        public override int TimeToReady
        {
            get
            {
                switch (Status)
                {
                    case ModuleStatus.Idle:
                    case ModuleStatus.IdleClean:
                    case ModuleStatus.PreJobClean:
                    case ModuleStatus.PostJobClean:
                    case ModuleStatus.WTWClean:
                    case ModuleStatus.Processing:
                        {
                            return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
                        }
                }

                return int.MaxValue;
            }
        }

        private WaferTask _wafer;
        private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;

        Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> _pendingWaferTasks = new Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> ();    
        KeyValuePair<Guid, Queue<KeyValuePair <RecipeJobType, string>>> _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>> (Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());   

        public VenusPMTask(ModuleName mod) : base(mod)
        { }
        public override RState Run()
        {
            if(_runingWaferTask.Value.Count == 0)
            {
                if(_pendingWaferTasks.Count > 0)
                {
                    _runingWaferTask = _pendingWaferTasks.Dequeue();
                }
                else
                {
                    if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
                    {
                        if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
                        {
                            if (_pmScheduler.RunIdleCleanTask())  // Check Idle Clean
                            {
                                Status = ModuleStatus.StartIdleClean;
                            }
                        }
                    }
                }
            }
            else
            {
                if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
                {
                    switch(_runingWaferTask.Value.First().Key)
                    {
                        case RecipeJobType.PreClean:
                            {
                                if(WaferManager.Instance.CheckNoWafer(Module,0))
                                {
                                    if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
                                    {
                                        Status = ModuleStatus.StartPreJobClean;
                                    }
                                    else
                                    {
                                        LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe {_runingWaferTask.Value.First().Value} failed");
                                        TryDequeueRuningTask(Status);
                                        Status = ModuleStatus.Idle;
                                    }
                                }
                            }
                            break;
                        case RecipeJobType.Process:
                            {
                                if (WaferManager.Instance.CheckHasWafer(Module, 0))
                                {
                                    if(_wafer.waferId == _runingWaferTask.Key)
                                    {
                                        Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
                                        Status = ModuleStatus.StartProcess;
                                    }
                                    else
                                    {
                                        LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer id dismatch while launch {_wafer.sourceMod}.{_wafer.sourceSlot + 1} process recipe");
                                    }
                                }
                            }
                            break;
                        case RecipeJobType.PostClean:
                            {
                                if (WaferManager.Instance.CheckNoWafer(Module, 0))
                                {
                                    if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
                                    {
                                        Status = ModuleStatus.StartPostJobClean;
                                    }
                                    else
                                    {
                                        LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe {_runingWaferTask.Value.First().Value} failed");
                                        TryDequeueRuningTask(Status);
                                        Status = ModuleStatus.Idle;
                                    }
                                }
                            }
                            break;
                        case RecipeJobType.WtwClean:
                            {
                                if (WaferManager.Instance.CheckNoWafer(Module, 0))
                                {
                                    if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
                                    {
                                        Status = ModuleStatus.StartWTWClean;
                                    }
                                    else
                                    {
                                        LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW clean recipe {_runingWaferTask.Value.First().Value} failed");
                                        TryDequeueRuningTask(Status);
                                        Status = ModuleStatus.Idle;
                                    }
                                }
                            }
                            break;
                    }
                }
            }

            if(_runingWaferTask.Value.Count > 0 || Status != ModuleStatus.Idle)
            {
                if (Scheduler.IsIdle)
                {
                    switch (Status)
                    {
                        case ModuleStatus.Processing:
                            {
                                var wafer = WaferManager.Instance.GetWafer(Module, 0);
                                if (Scheduler.IsOnline)
                                {
                                    if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
                                    {
                                        _wafer.Return();
                                        TryDequeueRuningTask(Status);
                                        Status = ModuleStatus.Idle;
                                    }
                                }
                                else  // handle offline exception situation
                                {
                                    TryDequeueRuningTask(Status);
                                    Status = ModuleStatus.Idle;
                                }
                            }
                            break;
                        case ModuleStatus.PreJobClean:
                        case ModuleStatus.PostJobClean:
                        case ModuleStatus.WTWClean:
                            {
                                TryDequeueRuningTask(Status);
                                Status = ModuleStatus.Idle;
                            }
                            break;
                        case ModuleStatus.IdleClean:
                            {
                                Status = ModuleStatus.Idle;
                            }
                            break;
                        case ModuleStatus.StartProcess:
                            {
                                if (RouteManager.IsATMMode)
                                {
                                    Status = ModuleStatus.Processing;
                                }
                            }
                            break;
                    }
                }
                else
                {
                    switch (Status)
                    {
                        case ModuleStatus.StartProcess:
                            Status = ModuleStatus.Processing;
                            break;
                        case ModuleStatus.StartIdleClean:
                            Status = ModuleStatus.IdleClean;
                            break;
                        case ModuleStatus.StartPreJobClean:
                            Status = ModuleStatus.PreJobClean;
                            break;
                        case ModuleStatus.StartPostJobClean:
                            Status = ModuleStatus.PostJobClean;
                            break;
                        case ModuleStatus.StartWTWClean:
                            Status = ModuleStatus.WTWClean;
                            break;
                    }
                }
            }

            return RState.Running;
        }

        void TryDequeueRuningTask( ModuleStatus status)
        {
            bool bMatch = false;
            if (_runingWaferTask.Value.Count > 0) 
            {
                switch(status)
                {
                    case ModuleStatus.PreJobClean:
                        if(_runingWaferTask.Value.First().Key == RecipeJobType.PreClean)
                        {
                            _runingWaferTask.Value.Dequeue();
                            bMatch = true;  
                        }
                        break;
                    case ModuleStatus.Processing:
                        if(_runingWaferTask.Value.First().Key == RecipeJobType.Process) 
                        {
                            _runingWaferTask.Value.Dequeue();
                            bMatch = true;  
                        }
                        break;
                    case ModuleStatus.PostJobClean:
                        if(_runingWaferTask.Value.First().Key == RecipeJobType.PostClean)
                        {
                            _runingWaferTask.Value.Dequeue();
                            bMatch = true;  
                        }
                        break;
                    case ModuleStatus.WTWClean:
                        if(_runingWaferTask.Value.First().Key == RecipeJobType.WtwClean)
                        {
                            _runingWaferTask.Value.Dequeue();
                            bMatch = true;
                        }
                        break;
                    case ModuleStatus.WaitPreJobClean:
                    case ModuleStatus.WaitProcess:
                    case ModuleStatus.WaitPostJobClean:
                    case ModuleStatus.WaitWTWClean:
                    case ModuleStatus.Idle:
                        _runingWaferTask.Value.Dequeue();
                        break;
                }
            }

            if(!bMatch)
            {
                string runingTask = _runingWaferTask.Value.Count > 0 ? _runingWaferTask.Value.First().ToString() : "Empty";
                LOG.Write(eEvent.WARN_ROUTER, Module, $"TryDequeueRuningTask() failed, PM Status: {status}, runing task : {runingTask}");
            }
        }

        public override void WaferArrived(WaferTask wafer, int slot)
        {
            _wafer = wafer;
        }

        public override void WaferLeaved(WaferTask wafer, int slot)
        {
            _wafer = null;
        }

        public void SubscribeWaferTask(WaferTask waferTask)
        {
            var waferRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();

            if (!string.IsNullOrWhiteSpace(waferTask.processRecipe))
            {
                waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.Process, waferTask.processRecipe));
            }

            if (!string.IsNullOrWhiteSpace(waferTask.wtwCleanRecipe))
            {
                waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.WtwClean, waferTask.wtwCleanRecipe));
            }

            if(_runingWaferTask.Key == waferTask.waferId || _pendingWaferTasks.ToList().Exists(kv => kv.Key == waferTask.waferId))
            {
                LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer {waferTask.sourceMod}.{waferTask.sourceSlot + 1} already subscribe job task.");
            }
            else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
            {
                _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes);
            }
            else
            {
                _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes));
            }
        }

        public void SubscribeLotCleanTask(ControlJobInfo cj, RecipeJobType cleanType)
        {
            var lotCleanRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();

            if(cleanType == RecipeJobType.PreClean && !string.IsNullOrWhiteSpace(cj.PreJobClean))
            {
                lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PreJobClean));
            }
            else if(cleanType == RecipeJobType.PostClean && !string.IsNullOrWhiteSpace (cj.PostJobClean))
            {
                lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PostJobClean));
            }
            else
            {
                return;
            }

            if ((_runingWaferTask.Key == cj.InnerId && _runingWaferTask.Value.ToList().Exists(pv => pv.Key == cleanType)) || _pendingWaferTasks.ToList().Exists(task => task.Key == cj.InnerId && task.Value.ToList().Exists(pv => pv.Key == cleanType)))
            {
                LOG.Write(eEvent.WARN_ROUTER, Module, $"Control job {cj.Name} already subscribe {cleanType} task.");
            }
            else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
            {
                _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes);
            }
            else
            {
                _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes));
            }
        }

        public bool ReadyMoveIn(WaferTask wafer)
        {
            return _runingWaferTask.Key == wafer.waferId && _runingWaferTask.Value.Count > 0 && _runingWaferTask.Value.First().Key == RecipeJobType.Process;
        }

        public bool IsAllJobCompleted()
        {
            return Status == ModuleStatus.Idle && (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0) && _pendingWaferTasks.Count == 0;
        }

        public override void ResetTask()
        {
            base.ResetTask();

            _wafer = null;
            _pendingWaferTasks.Clear();
            _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
        }
    }

    class PreAlignTask : ModuleTask
    {
        private WaferTask _wafer;
        public PreAlignTask(ModuleName aligner) : base(aligner)
        {

        }

        public override RState Run()
        {
            var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
            if (tmRobot == null || !tmRobot.IsAvailable)
                return RState.Running;

            switch (Status)
            {
                case ModuleStatus.WaitAlign:
                    {
                        tmRobot.Align(0);
                        Status = ModuleStatus.Aligning;
                    }
                    break;
                case ModuleStatus.Aligning:
                    {
                        _wafer.IsAligned = true;
                        Status = ModuleStatus.Idle;
                    }
                    break;
            }

            return RState.Running;
        }

        public override void WaferArrived(WaferTask wafer, int slot)
        {
            _wafer = wafer;
            Status = ModuleStatus.WaitAlign;
        }

        public override void WaferLeaved(WaferTask wafer, int slot)
        {
            _wafer = null;
        }
    }

    class VenusTMRobotTask : ModuleTask
    {
        public VenusTMRobotTask(ModuleName mod) : base(mod) { }

        public override RState Run()
        {
            return base.Run();
        }
    }

    class VenusDispatcher : ICycle
    {
        private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).RobotStatus; } }

        private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
        private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();

        private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
        private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
        private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();

        private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();
        private List<MoveItem> _curTmAction = new List<MoveItem>();

        private bool _isCycleMode;
        private int _cycleSetPoint = 0;
        private int _cycledCount = 0;
        private int _cycledWafer = 0;
        private float _throughput = 0.0f;


        private int _tmRobotSingleArmOption = 0;
        private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int>();
        private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int>();
        private Stopwatch _cycleWatch = new Stopwatch();

        private SchedulerFACallback _faCallback;
        private SchedulerDBCallback _dbCallback;

        public SequenceLLInOutPath LLInOutPath => SequenceLLInOutPath.DInDOut;
        public bool HasJobRunning => _lstControlJobs.Count > 0;

        private RState _cycleState = RState.Init;
        public RState CycleState => _cycleState;

        private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();
        public List<string> InUseRecipes = new List<string>();

        public VenusDispatcher()
        {
            _faCallback = new SchedulerFACallback();
            _dbCallback = new SchedulerDBCallback();

            InitModules();

            DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount, SubscriptionAttribute.FLAG.IgnoreSaveDB);
            DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer, SubscriptionAttribute.FLAG.IgnoreSaveDB);
            DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint, SubscriptionAttribute.FLAG.IgnoreSaveDB);
            DATA.Subscribe("Scheduler.Throughput", () => _throughput, SubscriptionAttribute.FLAG.IgnoreSaveDB);


            DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
            DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());
            DATA.Subscribe("Scheduler.InUsingRecipe", () => InUseRecipes);
            for (int i = 1; i <= 3; i++)
            {
                _loadportControlJobDic[$"LP{i}"] = null;
                string lp = $"LP{i}";
                DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
            }
        }

        #region public interface

        /// <summary>
        /// 获取lp当前的ControlJob
        /// </summary>
        /// <param name="lp"></param>
        /// <returns></returns>
        public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
        {
            if (ModuleHelper.IsLoadPort(lp))
            {
                return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
            }
            else
            {
                return null;
            }
        }

        public RState Start(params object[] objs)
        {
            if (WaferManager.Instance.HasDuplicatedWafer)
            {
                LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, "System has dummy wafers, please verify all the wafer position, and delete the invalid wafer");
                return RState.Failed;
            }

            _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
            _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
            _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
            _cycledWafer = 0;
            _cycledCount = 0;
            _throughput = 0;

            Clear();
            _cycleWatch.Stop();
            _lpCycleWafer.Clear();
            _lpCycleCount.Clear();

            return RState.Running;
        }
        public bool CreateJob(Dictionary<string, object> param, out string reason)
        {
            reason = "";
            _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
            _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;


            string[] slotSequence = (string[])param["SlotSequence"];
            string jobId = (string)param["JobId"];
            string module = (string)param["Module"];
            if (string.IsNullOrEmpty(jobId))
            {
                jobId = "CJ_Local_" + module;
            }
            //bool autoStart        = (bool)param["AutoStart"];
            string lotId = jobId;
            if (param.ContainsKey("LotId"))
                lotId = (string)param["LotId"];

            string preCleanRecipe = param.ContainsKey("PreCleanRecipeName") ? (string)param["PreCleanRecipeName"] : string.Empty;
            string postCleanRecipe = param.ContainsKey("PostCleanRecipeName") ? (string)param["PostCleanRecipeName"] : string.Empty;

            if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
            {
                reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
            {
                reason = $"{module} should be LoadPort";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            if (_lstControlJobs.Exists(x => x.Name == jobId))
            {
                reason = $"{jobId} already created";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            ControlJobInfo cj = new ControlJobInfo();
            cj.Name = jobId;
            cj.Module = module;
            cj.LotName = lotId;
            cj.LotInnerId = Guid.NewGuid();
            cj.LotWafers = new List<WaferInfo>();
            cj.SetState(EnumControlJobState.WaitingForStart);
            cj.JetState = EnumJetCtrlJobState.Created;
            cj.PreJobClean = preCleanRecipe;
            cj.PostJobClean = postCleanRecipe;
            cj.SequenceNameList = slotSequence;

            Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
            Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
            Dictionary<string, string> indexSequence = new Dictionary<string, string>();

            bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
            for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
            {
                if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
                    continue;

                string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
                indexSequence[groupName] = slotSequence[i];
                if (!seqSlot.ContainsKey(groupName))
                {
                    seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
                }
                if (!seqSlotWafers.ContainsKey(groupName))
                {
                    seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
                }
                seqSlot[groupName][i] = true;

                if (!WaferManager.Instance.CheckHasWafer(module, i))
                {
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
                    return false;
                }
                if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
                {
                    reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }

                if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
                {
                    reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }
                //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
                WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
                cj.LotWafers.Add(waferInfo);
                waferInfo.SequenceName = slotSequence[i];
                waferInfo.LotId = lotId;
                //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---

                seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));

                cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;

                LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
            }

            if (seqSlotWafers.Count == 0)
            {
                reason = $"job has not assign wafer";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
            string[] seqs = seqSlot.Keys.ToArray();
            for (int i = 0; i < seqs.Length; i++)
            {
                ProcessJobInfo pj = new ProcessJobInfo();
                pj.Name = jobId + "_" + (i + 1);
                pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
                if (pj.Sequence == null)
                {
                    reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
                    return false;
                }
                pj.ControlJobName = cj.Name;
                pj.LotName = lotId;
                pj.SlotWafers = seqSlotWafers[seqs[i]];
                pj.SetState(EnumProcessJobState.Queued);

                if (!CheckSequencePmReady(pj.Sequence, out reason))
                {
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }

                if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
                {
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }

                pjs.Add(pj);
            }

            _dbCallback.LotUpdate(cj);
            foreach (var pj in pjs)
            {
                cj.ProcessJobNameList.Add(pj.Name);
                _lstProcessJobs.Add(pj);
            }

            _lstControlJobs.Add(cj);
            //AssociatedPMWithLP(cj);
            _loadportControlJobDic[cj.Module] = cj;

            _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
            return true;
        }
        public bool CheckAllJobDone()
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State != EnumControlJobState.Completed)
                    return false;
            }

            InUseRecipes.Clear();
            return true;
        }

        public bool CheckJobJustDone(out string sJobName)
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
                {
                    //LP;WaferSize;Lot;Number;Start;End;
                    sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
                    cj.BeenPosted = true;
                    return true;
                }
            }

            sJobName = "NULL";
            return false;
        }

        public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
        {
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                    return pj;
            }

            return null;
        }

        public bool AbortJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"abort job rejected, not found job with id {jobName}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                return false;
            }

            List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    pj.SetState(EnumProcessJobState.Aborting);
                    pjAbortList.Add(pj);

                    int unprocessed = 0;
                    int aborted = 0;
                    WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
                    foreach (var waferInfo in wafers)
                    {
                        waferInfo.ProcessJob = null;
                        waferInfo.NextSequenceStep = 0;
                        if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
                            unprocessed++;
                    }
                    JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
                }
            }

            _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
            _dbCallback.LotFinished(cj);
            foreach (var pj in pjAbortList)
            {
                _lstProcessJobs.Remove(pj);
            }

            _lstControlJobs.Remove(cj);
            if (_loadportControlJobDic.ContainsKey(cj.Module))
            {
                _loadportControlJobDic[cj.Module] = null;
            }
            return true;
        }

        public bool StopJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"stop job rejected, not found job with id {jobName}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                return false;
            }

            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    pj.SetState(EnumProcessJobState.Stopping);
                }
            }

            _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
            _dbCallback.LotFinished(cj);
            if (_loadportControlJobDic.ContainsKey(cj.Module))
            {
                _loadportControlJobDic[cj.Module] = null;
            }
            return true;
        }

        public bool ResumeJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"resume job rejected, not found job with id {jobName}";
                //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
                return false;
            }

            if (cj.State == EnumControlJobState.Paused)
            {
                cj.SetState(EnumControlJobState.Executing);
            }

            _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
            _cycleState = RState.Running;
            return true;
        }

        public bool PauseJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"pause job rejected, not found job with id {jobName}";
                //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
                return false;
            }

            if (cj.State == EnumControlJobState.Executing)
            {
                cj.SetState(EnumControlJobState.Paused);
            }
            _faCallback.JobPaused(cj, GetFirstProcessJob(cj));


            if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
                _cycleState = RState.Paused;
            return true;
        }

        public bool StartJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"start job rejected, not found job with id {jobName}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                return false;
            }


            if (cj.State == EnumControlJobState.WaitingForStart)
            {
                cj.SetState(EnumControlJobState.Queued);
                //PreJobClean(cj);


                cj.StartTime = DateTime.Now;

                _dbCallback.LotCreated(cj);
                _faCallback.JobStarted(cj, GetFirstProcessJob(cj));

                //if (!_blockingWatcher.IsRunning)
                //    _blockingWatcher.Restart();

                //ResetTraceFlag();
            }

            if (!_cycleWatch.IsRunning)
            {
                _cycleWatch.Restart();
            }

            if (!_lpCycleWafer.Keys.Contains(ModuleHelper.Converter(cj.Module)))
            {
                _lpCycleCount.Add(ModuleHelper.Converter(cj.Module), 0);
                _lpCycleWafer.Add(ModuleHelper.Converter(cj.Module), 0);
            }

            _cycleState = RState.Running;
            return true;
        }
        public RState Monitor()
        {
            prelude();

            RunWaferTask();
            RunModuleTasks();

            RoutingWafers();

            epilogue();

            return _cycleState;
        }
       
        public void Abort()
        {

        }

        public void Clear()
        {
            foreach (var module in _dictModuleTask)
            {
                module.Value.Status = ModuleStatus.Idle;
                module.Value.Scheduler.ResetTask();
                module.Value.ResetTask();
            }

            List<string> keys = _loadportControlJobDic.Keys.ToList();
            foreach (var key in keys)
            {
                _loadportControlJobDic[key] = null;
            }

            _lstWaferTasks.Clear();
            _tmSchdActions.Clear();
            _curTmAction.Clear();
            _lstControlJobs.Clear();
            _lstProcessJobs.Clear();
            InUseRecipes.Clear();
            _cycleState = RState.End;
        }

        #endregion

        #region manual return wafer

        // manual return one wafer while system is auto running
        public bool ManualReturnWafer(object[] objs)
        {
            ModuleName SourceModule = (ModuleName)objs[0];
            int SourceSlot = (int)objs[1];

            if (!_dictModuleTask.Keys.Contains(SourceModule))
            {
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
                return false;
            }

            if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
            {
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
                return false;
            }

            if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
            {
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
                return false;
            }

            var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
            LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return  wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");

            _qeReturnWafers.Enqueue(wafer);
            return true;
        }

        public RState CheckManualReturnWafer()
        {
            var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
            var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
            if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
            {
                LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
                return RState.Failed;
            }

            foreach (var mod in _dictModuleTask)
            {
                if (ModuleHelper.IsLoadPort(mod.Key))
                    continue;

                if (!ModuleHelper.IsAligner(mod.Key) && !mod.Value.Scheduler.IsIdle)
                {
                    LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
                    return RState.Failed;
                }

                int nSlotNumber = (ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1);
                for (int slot = 0; slot < nSlotNumber; slot++)
                {
                    var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
                    if (wafer.IsEmpty)
                        continue;

                    var destLP = (ModuleName)wafer.OriginStation;
                    if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
                    {
                        LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
                        return RState.Failed;
                    }

                    if (!ModuleHelper.IsLoadPort(destLP))
                    {
                        LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
                        return RState.Failed;
                    }
                }
            }

            Clear();
            return RState.Running;
        }

        public RState ReturnAllWafers()
        {
            int systemWaferCount = 0;
            foreach (var mod in _dictModuleTask)
            {
                if (ModuleHelper.IsLoadPort(mod.Key))
                    continue;

                int nSlotNumber = ModuleHelper.IsTMRobot(mod.Key) ?  2 : 1;
                for (int slot = 0; slot < nSlotNumber; slot++)
                {
                    var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
                    if (!wafer.IsEmpty)
                        systemWaferCount++;
                }

            }

            if (systemWaferCount == 0)
                return RState.End;

            ReturnInternalWafers();

            return RState.Running;
        }
        #endregion

        #region internal implementation

        private void InitModules()
        {
            foreach (var module in ModuleHelper.InstalledModules)
            {
                if (ModuleHelper.IsInstalled(module))
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        _dictModuleTask[module] = new VenusPMTask(module);
                    }
                    else if (ModuleHelper.IsTMRobot(module))
                    {
                        _dictModuleTask[module] = new VenusTMRobotTask(module);
                    }
                    else if (ModuleHelper.IsAligner(module))
                    {
                        _dictModuleTask[module] = new PreAlignTask(module);
                    }
                    else if (ModuleHelper.IsLoadPort(module))
                    {
                        _dictModuleTask[module] = new LoadPortTask(module);
                    }
                }
            }
        }

        private void prelude()
        {
            bool available = true;
            foreach (var mod in _dictModuleTask)
            {
                available = mod.Value.Scheduler.IsAvailable; // force scheduler update
            }
        }

        private void epilogue()
        {
            UpdateProcessJobStatus();
            UpdateControlJobStatus();

            CreateNewWaferTask();
            _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
        }


        private void RunWaferTask()
        {
            foreach (var task in _lstWaferTasks)
            {
                task.Run();
            }
        }

        private void RunModuleTasks()
        {
            foreach (var task in _dictModuleTask)
            {
                task.Value.Run();
            }
        }

        private void RoutingWafers()
        {
            if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
            {
                RunSchdTMActions();
                return;
            }

            if (_tmRobotStatus != RState.End)
                return;

            if (_tmRobotSingleArmOption != 0)
            {
                RoutingWaferWithSingleArm();
                return;
            }

            var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
            var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
            var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
            var robotWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList();
            var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();

            if(robotWafers.Count == 0)
            {
                if(readyReturnWafers.Count > 0)
                {
                    if(readyReturnWafers.Count == 1)
                    {
                        // return one wafer
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, Hand.Blade1) });
                    }
                    else
                    {
                        // return two wafer
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[0].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[1].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });

                        var doublePlaceActions = new List<MoveItem>
                        {
                            new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers[0].destMod, readyReturnWafers[0].destSlot, Hand.Blade1),
                            new MoveItem(ModuleName.TMRobot, (int)Hand.Blade2, readyReturnWafers[1].destMod, readyReturnWafers[1].destSlot, Hand.Blade2)
                        };

                        _tmSchdActions.Enqueue(doublePlaceActions);
                    }
                }
                else if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
                {
                    var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
                    if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
                    {
                        var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
                        if(pmTask.ReadyMoveIn(alignerWafer))
                        {
                            // move aligner wafer to PM
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, alignerWafer.destMod, alignerWafer.destSlot, Hand.Blade1) });
                        }
                    }
                }
                else
                {
                    if(emptyAndReadyIn20sPMs.Count >= 2 && waitInWafers.Count >= 2)
                    {
                        var doublePickActions = new List<MoveItem>()
                        {
                            new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1),
                            new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2)
                        };

                        _tmSchdActions.Enqueue(doublePickActions);

                        if(aligner.Count > 0)
                        {
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
                        }
                    }
                    else if(emptyAndReadyIn20sPMs.Count >= 1 && waitInWafers.Count >= 1)
                    {
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
                        if (aligner.Count > 0)
                        {
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
                        }
                    }
                }
            }
            else if(robotWafers.Count == 1)
            {
                var freeHand = robotWafers.First().currentSlot == 0 ? Hand.Blade2 : Hand.Blade1;
                if (readyReturnWafers.Count >= 1)
                {
                    // return one wafer
                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand) });
                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand) });
                }
                else
                {
                    if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
                    {
                        var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)freeHand, freeHand) });

                        if(!robotWafers.First().IsAligned)
                        {
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
                        }

                        if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
                        {
                            var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
                            if (pmTask.ReadyMoveIn(alignerWafer))
                            {
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, alignerWafer.destMod, alignerWafer.destSlot, freeHand) });
                            }
                        }
                    }
                    else
                    {
                        if (ModuleHelper.IsPm(robotWafers.First().destMod))
                        {
                            if (!robotWafers.First().IsAligned)
                            {
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
                            }
                            else if (emptyAndReadyIn20sPMs.Contains(robotWafers.First().destMod))
                            {
                                var pmTask = _dictModuleTask[robotWafers.First().destMod] as VenusPMTask;
                                if (pmTask.ReadyMoveIn(robotWafers.First()))
                                {
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
                                }   
                            }
                        }
                        else if (ModuleHelper.IsLoadPort(robotWafers.First().destMod) && _dictModuleTask[robotWafers.First().destMod].Scheduler.IsAvailable)
                        {
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
                        }
                    }
                }
            }
            else  // had better not go here
            {
                foreach(var wafer in robotWafers)
                {
                    if (ModuleHelper.IsPm(wafer.destMod))
                    {
                        if (!wafer.IsAligned)
                        {
                            if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
                            {
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
                            }
                        }
                        else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
                        {
                            var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
                            if (pmTask.ReadyMoveIn(wafer))
                            {
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
                            }
                        }
                    }
                    else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
                    {
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
                    }
                }
            }
        }

        private void RoutingWaferWithSingleArm()
        {
            var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
            var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
            var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
            var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();

            var validHand = _tmRobotSingleArmOption == 1 ? Hand.Blade1 : Hand.Blade2;
            var robotWafers = _lstWaferTasks.Where(wt => wt.currentMod == ModuleName.TMRobot && wt.currentSlot == (int)validHand).ToList();

            if (robotWafers.Count == 0)
            {
                if (readyReturnWafers.Count > 0)
                {
                    // return one wafer
                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, validHand) });
                }
                else
                {
                    if(_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
                    {
                        var alignerWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsAligner(wt.currentMod));
                        if(emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
                        {
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });

                            // move aligner wafer to PM
                            var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
                            if (pmTask.ReadyMoveIn(alignerWafer))
                            {
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, alignerWafer.destMod, alignerWafer.destSlot, validHand) });
                            }
                        }
                    }
                    else
                    {
                        foreach(var wafer in waitInWafers)
                        {
                            if(emptyAndReadyIn20sPMs.Contains(wafer.destMod))
                            {
                                // move one wafer from LP to aligner
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, aligner.First().Key, 0, validHand) });
                            }
                        }
                    }
                }
            }
            else 
            {
                var wafer = robotWafers[0];
                if (ModuleHelper.IsPm(wafer.destMod))
                {
                    if (!wafer.IsAligned)
                    {
                        if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
                        {
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
                        }
                    }
                    else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
                    {
                        var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
                        if (pmTask.ReadyMoveIn(wafer))
                        {
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
                        }
                    }
                }
                else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
                {
                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
                }
            }
        }

        private void RunSchdTMActions()
        {
            if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
            {
                if (_tmSchdActions.Count > 0)
                {
                    if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
                    {
                        var nextActions = _tmSchdActions.First();
                        if (nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
                            return;

                        if (ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle)  /// wait PMTask status update to idle
                            return;

                        _curTmAction = _tmSchdActions.Dequeue();
                        foreach (var action in _curTmAction)
                        {
                            var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
                            waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
                        }

                        (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).SendMoveItems(_curTmAction.ToArray());
                    }
                }
                else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
                {
                    _curTmAction.Clear();
                }
            }
        }

        private bool isReturnActionsDone(List<MoveItem> items)
        {
            foreach (var item in items)
            {
                if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
                    return false;
            }
            return true;
        }
        private bool IsMovingActionsDone(List<MoveItem> actions)
        {
            bool CheckWaferExistence(ModuleName mod, int slot)
            {
                return ModuleHelper.IsLoadPort(mod) ? WaferManager.Instance.CheckHasWafer(mod, slot) : _lstWaferTasks.Exists(wt => wt.currentMod == mod && wt.currentSlot == slot);
            }

            if (actions.Count == 1)
            {
                if (CheckWaferExistence(actions.First().SourceModule, actions.First().SourceSlot) ||
                    !CheckWaferExistence(actions.First().DestinationModule, actions.First().DestinationSlot))
                    return false;
            }
            else
            {
                // initialize all the wafer existance before move
                var slotWafers = new Dictionary<KeyValuePair<ModuleName, int>, bool>();
                foreach (var ac in actions)
                {
                    var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
                    var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);

                    if (!slotWafers.ContainsKey(scrSlot))
                    {
                        slotWafers[scrSlot] = true;
                    }

                    if (!slotWafers.ContainsKey(destSlot))
                    {
                        slotWafers[destSlot] = false;
                    }
                }

                // simulate moved result
                foreach (var ac in actions)
                {
                    var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
                    var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);

                    if (!slotWafers[scrSlot])
                    {
                        LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[scrSlot]} do not has a wafer");
                    }
                    else
                    {
                        slotWafers[scrSlot] = false;
                    }

                    if (slotWafers[destSlot])
                    {
                        LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[destSlot]}  has a wafer");
                    }
                    else
                    {
                        slotWafers[destSlot] = true;
                    }
                }

                foreach (var slot in slotWafers)
                {
                    if (slot.Value != CheckWaferExistence(slot.Key.Key, slot.Key.Value))
                        return false;
                }
            }

            return true;
        }

        private void WaferArrived(WaferTask wafer, MoveItem item)
        {
            _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);

            //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
            if (ModuleHelper.IsLoadPort(item.DestinationModule))
            {
                ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
                if (currentControlJob != null)
                {
                    _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
                }
            }
            //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
        }

        private void WaferLeaved(WaferTask wafer, MoveItem item)
        {
            _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);

            //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
            if (ModuleHelper.IsLoadPort(item.SourceModule))
            {
                (_dictModuleTask[wafer.destMod] as VenusPMTask).SubscribeWaferTask(wafer);
                ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
                if (currentControlJob != null)
                {
                    _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
                }
            }
            //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
        }

        private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
        {
            bool allWaferReturn = true;
            foreach (var slot in pj.SlotWafers)
            {
                var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
                if (wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
                {
                    allWaferReturn = false;
                    break;
                }
            }

            return allWaferReturn;
        }

        private void ReturnInternalWafers()
        {
            if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
            {
                RunSchdTMReturnActions();
                return;
            }

            if (_tmRobotStatus != RState.End)
                return;

            for (int i = 0; i < 2; i++) 
            {
                if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, i))
                {
                    var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, i);
                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
                    return;
                }
            }

            foreach(var mod in _dictModuleTask)
            {
                if (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsLoadPort(mod.Key))
                    continue;

                if(WaferManager.Instance.CheckHasWafer(mod.Key, 0))
                {
                    var wafer = WaferManager.Instance.GetWafer(mod.Key, 0);
                    var freeHands = GetTMFreeHand();
                    if(freeHands.Count > 0) 
                    {
                        var hand = freeHands[0];
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(mod.Key, 0, ModuleName.TMRobot, (int)hand, hand) });
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hand, (ModuleName)wafer.OriginStation, wafer.OriginSlot, hand) });
                        return;
                    }
                }
            }
        }

        private List<Hand> GetTMFreeHand()
        {
            var lstHands = new List<Hand>();
            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
                lstHands.Add(Hand.Blade1);

            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
                lstHands.Add(Hand.Blade2);

            return lstHands;
        }

        private void UpdateProcessJobStatus()
        {
            if (_tmRobotStatus == RState.Running)
                return;

            foreach (var pj in _lstProcessJobs)
            {
                if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
                {
                    pj.SetState(EnumProcessJobState.ProcessingComplete);
                    JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
                }
            }
        }

        private void UpdateControlJobStatus()
        {
            if (_lstControlJobs.Count == 0 || _tmRobotStatus == RState.Running)
                return;

            bool allControlJobComplete = true;
            List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();

            var runingJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Executing);
            foreach(var runingjob in  runingJobs) 
            {
                int countProcessed = 0;
                foreach (var pjName in runingjob.ProcessJobNameList)
                {
                    var pj = _lstProcessJobs.Find(x => x.Name == pjName);
                    if (pj == null)
                    {
                        LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {runingjob.Name}");
                        continue;
                    }

                    // caculate process wafer by process
                    if (_isCycleMode && _cycledCount < (_isCycleMode ? _cycleSetPoint : 0))
                    {
                        foreach (var pjSlotWafer in pj.SlotWafers)
                        {
                            WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
                            if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
                                countProcessed++;
                        }
                    }
                }

                int lpCycleWafer = _lpCycleCount[ModuleHelper.Converter(runingjob.Module)] * runingjob.LotWafers.Count + (runingjob.State ==  EnumControlJobState.Completed&& runingjob.LotWafers.Count == countProcessed ? 0 : countProcessed);
                if (_lpCycleCount[ModuleHelper.Converter(runingjob.Module)] != _cycledCount || lpCycleWafer != _lpCycleWafer[ModuleHelper.Converter(runingjob.Module)])
                {
                    _lpCycleWafer[ModuleHelper.Converter(runingjob.Module)] = lpCycleWafer;
                }

                if (IsAllProcessJobComplete(runingjob))
                {
                    var PMs = GetWaitPreCleanPMsByCtrlJob(runingjob);
                    if (runingjob.JetState == EnumJetCtrlJobState.Processing)
                    {
                        // subscribe clean task
                        foreach (var pm in PMs)
                        {
                            var pmTask = _dictModuleTask[pm] as VenusPMTask;
                            if (pmTask != null && pmTask.Scheduler.IsOnline)
                            {
                                pmTask.SubscribeLotCleanTask(runingjob, VenusPMTask.RecipeJobType.PostClean);
                            }
                        }

                        runingjob.JetState = EnumJetCtrlJobState.PostJobClean;
                    }
                    else if (runingjob.JetState == EnumJetCtrlJobState.PostJobClean)
                    {
                        foreach (var pm in PMs)
                        {
                            var pmTask = _dictModuleTask[pm] as VenusPMTask;
                            if (pmTask != null && pmTask.Scheduler.IsOnline && !pmTask.IsAllJobCompleted())
                                return;
                        }

                        runingjob.JetState = EnumJetCtrlJobState.Completed;
                        runingjob.SetState(EnumControlJobState.Completed);
                        runingjob.EndTime = DateTime.Now;

                        _faCallback.JobFinished(runingjob, GetFirstProcessJob(runingjob));
                        _dbCallback.LotFinished(runingjob);

                        if (!(_isCycleMode && _cycledCount < _cycleSetPoint))
                            (Singleton<TransferModule>.Instance.GetScheduler(ModuleHelper.Converter(runingjob.Module)) as SchedulerLoadPort).NoteJobComplete();

                        _lpCycleCount[ModuleHelper.Converter(runingjob.Module)]++;
                    }
                }
            }

            var pendingJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Queued).OrderBy(cj => cj.StartTime);
            if(pendingJobs.Count() > 0)
            {
                if (runingJobs.Count == 0)
                {
                    pendingJobs.First().JetState = EnumJetCtrlJobState.Processing;
                    ActiveControlJob(pendingJobs.First());

                    // subscribe clean task
                    var PMs = GetWaitPreCleanPMsByCtrlJob(pendingJobs.First());
                    foreach (var pm in PMs)
                    {
                        var pmTask = _dictModuleTask[pm] as VenusPMTask;
                        if (pmTask != null && pmTask.Scheduler.IsOnline)
                        {
                            pmTask.SubscribeLotCleanTask(pendingJobs.First(), VenusPMTask.RecipeJobType.PreClean);
                        }
                    }
                }
            }

            foreach(var cj in _lstControlJobs)
            {
                LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
                if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
                {
                    cjRemoveList.Add(cj);
                }

                allControlJobComplete = allControlJobComplete && cj.State == EnumControlJobState.Completed;
            }


            if (_isCycleMode && _cycledCount < (_isCycleMode ? _cycleSetPoint : 0))
            {
                int totolCycleWafer = _lpCycleWafer.Sum(item => item.Value);
                if (totolCycleWafer != _cycledWafer || _lpCycleCount.Sum(item => item.Value) > 0 && _throughput < 0.01)  // refresh _throughput in time
                {
                    _cycledWafer = totolCycleWafer;
                    if (_cycledCount > 0 || allControlJobComplete)
                    {
                        _throughput = (float)(_cycledWafer / _cycleWatch.Elapsed.TotalHours);
                    }
                    else
                    {
                        _throughput = 0;
                    }
                }

                if (allControlJobComplete)
                {
                    _cycledCount++;

                    LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Cycle Count: {_cycledCount}, Total Processed Wafer: {_cycledWafer}, Throughput: {_throughput}");
                    if (_cycledCount < _cycleSetPoint)
                    {
                        foreach (var cj in _lstControlJobs)
                        {
                            cj.SetState(EnumControlJobState.Queued);

                            cj.LotInnerId = Guid.NewGuid();

                            _dbCallback.LotCreated(cj);
                        }
                        foreach (var pj in _lstProcessJobs)
                        {
                            pj.SetState(EnumProcessJobState.Queued);
                            pj.InnerId = Guid.NewGuid();
                            foreach (var pjSlotWafer in pj.SlotWafers)
                            {
                                WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);

                                wafer.ProcessJob = null;
                                wafer.NextSequenceStep = 0;
                                wafer.ProcessState = EnumWaferProcessStatus.Idle;
                            }
                        }

                        _lstWaferTasks.Clear();
                    }
                    else
                    {
                        _cycleState = RState.End;
                    }
                        
                }
            }

            foreach (var cj in cjRemoveList)
            {
                List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
                foreach (var pj in _lstProcessJobs)
                {
                    if (pj.ControlJobName == cj.Name)
                        pjRemoveList.Add(pj);
                }

                foreach (var pj in pjRemoveList)
                {
                    _lstProcessJobs.Remove(pj);
                }

                _lstControlJobs.Remove(cj);
            }
        }

        private bool ActiveProcessJob(ProcessJobInfo pj)
        {
            foreach (var pjSlotWafer in pj.SlotWafers)
            {
                WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);

                wafer.ProcessJob = pj;
                wafer.NextSequenceStep = 0;

                WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
            }

            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);

            CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
            JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);

            pj.SetState(EnumProcessJobState.Processing);

            return true;
        }

        private bool ActiveControlJob(ControlJobInfo cj)
        {
            cj.SetState(EnumControlJobState.Executing);
            foreach (var pjName in cj.ProcessJobNameList)
            {
                var pj = _lstProcessJobs.Find(x => x.Name == pjName);
                if (pj == null)
                {
                    LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
                    continue;
                }

                if (pj.State == EnumProcessJobState.Queued)
                {
                    ActiveProcessJob(pj);
                }
            }

            return true;
        }

        private bool IsAllProcessJobComplete(ControlJobInfo cj)
        {
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
                {
                    return false;
                }
            }

            return true;
        }

        private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
        {
            List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
            int original = (int)ModuleHelper.Converter(cj.Module);
            foreach (var mod in allModules)
            {
                if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
                    continue;

                var wafers = WaferManager.Instance.GetWafers(mod);
                foreach (var wafer in wafers)
                {
                    if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
                        continue;

                    if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
                        return false; ;
                }
            }

            return true;
        }

        private ModuleName GetComingAvailablePM(ControlJobInfo cj)
        {
            var lstInProcessPMs = new List<ModuleName>();
            foreach (var wafer in cj.LotWafers)
            {
                if (!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
                {
                    foreach (var pm in wafer.ProcessJob.Sequence.PMs)
                    {
                        if (!lstInProcessPMs.Contains(pm) && _dictModuleTask[pm].Scheduler.IsOnline)
                            lstInProcessPMs.Add(pm);
                    }
                }
            }

            Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
            foreach (var mod in _dictModuleTask)
            {
                if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
                {
                    pmAssociatedWaferCount[mod.Key] = 0;
                }
            }

            var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
            foreach (var wafer in unprocessedWafer)
            {
                if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
                {
                    pmAssociatedWaferCount[wafer.destMod]++;
                }
            }

            var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
            if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
                return oderedPMCount.First().Key;

            return ModuleName.System;
        }

        private void CreateNewWaferTask()
        {
            var cj = _lstControlJobs.Find(job => job.State == EnumControlJobState.Executing);
            if (cj != null)
            {
                var pm = GetComingAvailablePM(cj);
                if (pm != ModuleName.System)
                {
                    foreach (var wafer in cj.LotWafers)
                    {
                        if (wafer.IsEmpty || wafer.ProcessJob == null)
                            continue;

                        if (wafer.ProcessJob.Sequence.PMs.Contains(pm) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
                        {
                            CreateWaferTasks(wafer, pm);
                            return;
                        }
                    }
                }
            }
        }

        private void CreateWaferTasks(WaferInfo wafer, ModuleName pm)
        {
            var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
            var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
            Recipe recipe = Recipe.Load(recipeContent);
            int temperature = 0;

            if (int.TryParse(recipe.Header.Temperature, out int temp))
            {
                temperature = temp;
            }

            var waferTask = new WaferTask((ModuleName)wafer.OriginStation,
                                            wafer.OriginSlot,
                                            pm,
                                            0,
                                            temperature,
                                            wafer.InnerId,
                                            recipeName,
                                            wafer.ProcessJob.Sequence.WTWCleanRecipe,
                                            wafer.ProcessJob.Sequence.LLInOutPath,
                                            wafer.ProcessJob.Sequence.LLDelayTime,
                                            IsSequenceNeedAlign(wafer.ProcessJob.Sequence));  // post clean

            waferTask.OnWaferArrived += WaferArrived;
            waferTask.OnWaferLeaved += WaferLeaved;

            _lstWaferTasks.Add(waferTask);
        }

        private bool IsSequenceNeedAlign(SequenceInfo sequence)
        {
            // check wether need align
            foreach (var step in sequence.Steps)
            {
                foreach (var mod in step.StepModules)
                {
                    if (ModuleHelper.IsAligner(mod))
                        return true;
                }
            }

            return false;
        }

        private void RunSchdTMReturnActions()
        {
            var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
            if (tmRobot == null || !tmRobot.IsAvailable)
                return;

            if (_tmSchdActions.Count > 0)
            {
                if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
                {
                    var nextActions = _tmSchdActions.First();

                    var nextModule = nextActions.First().Module;

                    if (!_dictModuleTask[nextModule].IsIdle)
                        return;

                    _curTmAction = _tmSchdActions.Dequeue();

                    tmRobot.SendMoveItems(_curTmAction.ToArray());
                }
            }
            else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
            {
                _curTmAction.Clear();
            }
        }


        #endregion internal implementation

        #region sequence/recipe validation
        private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
        {
            reason = "";

            foreach (var pm in seq.PMs)
            {
                if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
                    return true;
            }

            reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);

            return false;
        }

        private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
        {
            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                foreach (var module in stepInfo.StepModules)
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        string attr = $"{module}Recipe";
                        if (stepInfo.StepParameter.ContainsKey(attr)
                            && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
                        {
                            var recipeName = (string)stepInfo.StepParameter[attr];
                            if (!string.IsNullOrWhiteSpace(recipeName))
                            {
                                var recipeContent =
                                    RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
                                if (string.IsNullOrWhiteSpace(recipeContent))
                                {
                                    reason = $"Can not find recipe file{recipeName}";
                                    return false;
                                }
                            }
                        }
                    }
                }
            }

            reason = "";
            return true;
        }

        private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
        {
            var pmlist = new List<ModuleName>();
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    foreach (var pm in pj.Sequence.PMs)
                    {
                        if (!pmlist.Contains(pm))
                            pmlist.Add(pm);
                    }
                }
            }

            return pmlist;
        }

        #endregion
    }
}