SimulatorSystem.cs 130 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. using MECF.Framework.Common.CommonData;
  15. using MECF.Framework.Common.DataCenter;
  16. namespace Venus_Simulator.Instances
  17. {
  18. public class SimulatorSystem : Singleton<SimulatorSystem>
  19. {
  20. private PeriodicJob _thread;
  21. private Random _rd = new Random();
  22. ConfigType type;
  23. private RD_TRIG _trigATM = new RD_TRIG();
  24. private RD_TRIG _trigVAC = new RD_TRIG();
  25. private R_TRIG _trigLLExtend = new R_TRIG();
  26. private R_TRIG _trigLLRetract = new R_TRIG();
  27. private static int count = 0;
  28. private readonly float ATM_THRESHOLD = 750000;
  29. private readonly float ATM_PRESSURE = 760000;
  30. private readonly float ATM_LoadLock_PRESSURE = 760000;
  31. private readonly uint VAC_SW_PRESSURE = 9500;
  32. private readonly uint PROCESS_GAUGE = 10000;
  33. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  34. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  35. public SimulatorSystem()
  36. {
  37. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  38. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  39. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  40. // TODO
  41. type = ConfigType.Kepler2200;
  42. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  43. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  44. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  45. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  46. }
  47. ~SimulatorSystem()
  48. {
  49. _thread?.Stop();
  50. }
  51. public void Initialize()
  52. {
  53. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  54. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  55. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  56. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  57. if (type == ConfigType.Kepler2200 || type == ConfigType.Kepler2300 || type == ConfigType.Other)
  58. {
  59. SetTMDefaultValue();
  60. }
  61. else if (type == ConfigType.VenusSE)
  62. {
  63. SetSETMDefaultValue();
  64. }
  65. else if (type == ConfigType.VenusDE)
  66. {
  67. SetDETMDefaultValue();
  68. }
  69. Singleton<DataManager>.Instance.Initialize(false);
  70. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  71. }
  72. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  73. {
  74. switch (jetChamber)
  75. {
  76. case JetChamber.VenusSE:
  77. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  78. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  79. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  80. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  81. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  82. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  83. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  84. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  85. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  86. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  87. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  88. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  89. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  90. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  91. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  92. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  93. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  94. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  96. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  97. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  98. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  99. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  100. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  101. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  102. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  104. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  105. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  106. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  107. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  108. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  109. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  110. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  111. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  112. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  113. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  114. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  115. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  116. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  117. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  118. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  119. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  120. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  121. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  122. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  123. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  124. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  125. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  126. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  127. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  128. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  129. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  130. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  131. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  132. //// pressure
  133. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  134. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  135. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  136. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  137. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  138. //// Temperature
  139. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  140. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  141. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  142. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  143. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  144. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  145. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  146. // Datetime
  147. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  148. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  149. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  150. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  151. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  152. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  153. break;
  154. case JetChamber.VenusDE:
  155. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  156. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  157. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  158. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  159. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  160. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  161. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  162. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  163. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  164. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  165. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  166. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  167. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  168. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  169. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  170. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  171. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  172. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  173. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  174. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  175. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  176. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  177. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  178. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  179. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  180. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  181. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  182. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  183. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  184. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  185. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  186. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  188. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  189. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  190. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  195. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  200. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  201. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  202. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  203. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  204. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  205. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  206. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  207. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  208. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  209. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  210. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  211. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  212. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  213. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  214. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  215. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  216. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  217. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  218. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  219. //// pressure
  220. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  221. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  222. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  223. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  224. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  225. //// Temperature
  226. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  227. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  228. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  229. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  230. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  231. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  232. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  233. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  234. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  235. // Datetime
  236. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  237. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  238. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  239. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  240. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  241. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  242. break;
  243. case JetChamber.Kepler2300:
  244. // chamber
  245. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  246. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  247. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  248. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  249. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  250. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  251. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  252. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  253. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  254. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  255. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  256. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  257. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  258. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  259. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  260. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  261. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  262. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  263. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  264. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  265. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  266. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  267. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  268. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  269. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  270. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  271. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  272. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  273. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  274. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  275. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  276. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  277. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  279. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  281. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  282. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  283. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  284. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  285. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  286. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  287. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  288. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  289. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  290. //// pressure
  291. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  292. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  293. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  294. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  295. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  296. //// Temperature
  297. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  298. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  299. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  300. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  301. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  302. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  303. // Datetime
  304. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  305. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  306. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  307. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  308. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  309. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  310. break;
  311. case JetChamber.Kepler2200A:
  312. case JetChamber.Kepler2200B:
  313. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  314. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  315. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  316. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  317. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  318. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  319. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  320. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  321. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  322. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  323. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  324. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  325. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  326. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  327. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  328. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  329. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  330. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  331. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  332. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  333. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  334. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  335. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  336. IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true;
  337. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  338. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  339. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  340. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  341. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  342. //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  343. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  344. //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  345. //// pressure
  346. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  347. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  348. SetAiValue($"{mod}.AI_Process_Pressure_2t", 100);
  349. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  350. //// Temperature
  351. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  352. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  353. // Datetime
  354. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  355. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  356. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  357. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  358. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  359. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  360. break;
  361. }
  362. }
  363. private void SetTMDefaultValue()
  364. {
  365. ModuleName mod = ModuleName.TM;
  366. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  367. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  368. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  369. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  370. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  371. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  372. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  373. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  374. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  375. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  376. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  377. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  378. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  379. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  380. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  381. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  382. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  383. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  384. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  385. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  386. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  387. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  388. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  389. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  390. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  391. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  392. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  393. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  394. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  395. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  396. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  397. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  398. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  399. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  400. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  401. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  402. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  403. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  404. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  405. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  406. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  407. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  408. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  409. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  410. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  411. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  412. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  413. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  414. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  415. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  416. // Datetime
  417. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  418. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  419. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  420. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  421. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  422. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  423. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  424. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  425. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  426. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  427. {
  428. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  429. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  430. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  431. }
  432. else
  433. {
  434. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  435. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  436. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  437. }
  438. }
  439. private void SetSETMDefaultValue()
  440. {
  441. ModuleName mod = ModuleName.SETM;
  442. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  443. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  444. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  445. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  446. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  447. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  448. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  449. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  450. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  451. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  452. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  453. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  454. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  455. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  456. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  457. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  458. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  459. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  460. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  461. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  462. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  463. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  464. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  465. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  466. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  467. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  468. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  469. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  470. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  471. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  472. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  473. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  474. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  475. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  476. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  477. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  478. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  479. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  480. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  481. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  482. }
  483. private void SetDETMDefaultValue()
  484. {
  485. ModuleName mod = ModuleName.DETM;
  486. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  487. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  488. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  489. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  490. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  491. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  492. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  493. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  494. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  495. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  496. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  497. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  498. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  499. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  500. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  501. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  502. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  503. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  504. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  505. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  506. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  507. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  508. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  509. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  510. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  511. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  512. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  513. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  514. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  515. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  516. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  517. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  518. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  519. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  520. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  521. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  522. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  523. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  524. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  525. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  526. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  527. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  528. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  529. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  530. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  531. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  532. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  533. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  534. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  535. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  536. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  537. IO.DI[$"{mod}.DI_Safty_Alarm"].Value = false;
  538. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  539. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  540. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  541. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  542. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  543. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  544. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  545. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  546. }
  547. private bool OnMonitor()
  548. {
  549. try
  550. {
  551. foreach (var item in jetChambers)
  552. {
  553. switch (item.Value)
  554. {
  555. case JetChamber.Kepler2300:
  556. MonitorSlitDoorInTM(item.Key);
  557. MonitorPin(item.Key);
  558. MonitorPressure_Kepler(item.Key);
  559. //MonitorTemperature(item.Key);
  560. MonitorGas(item.Key);
  561. this.SimulateHe(item.Key);
  562. //MonitorRF(item.Key);
  563. ChangeTime(item.Key);
  564. //MonitorIOPumpCtrl(item.Key);
  565. MonitorLid(item.Key);
  566. break;
  567. case JetChamber.Kepler2200A:
  568. case JetChamber.Kepler2200B:
  569. MonitorSlitDoorInTM(item.Key);
  570. MonitorPressure_Kepler2200A(item.Key);
  571. //MonitorTemperature(item.Key);
  572. MonitorGas(item.Key);
  573. // MonitorRF(item.Key);
  574. ChangeTime(item.Key);
  575. //MonitorIOPumpCtrl(item.Key);
  576. MonitorLid(item.Key);
  577. MonitorIOHighTemperatureHeater(item.Key);
  578. MonitorKepler2200Heater(item.Key);
  579. break;
  580. case JetChamber.VenusSE:
  581. MonitorPin(item.Key);
  582. //MonitorVenuSESlitDoor(item.Key);
  583. MonitorSEPressure(item.Key);
  584. MonitorSEGas(item.Key);
  585. ChangeTime(item.Key);
  586. this.SimulateSEHe(item.Key);
  587. break;
  588. case JetChamber.VenusDE:
  589. MonitorPin(item.Key);
  590. MonitorDEGas(item.Key);
  591. //MonitorVenuDESlitDoor(item.Key);
  592. MonitorDEPressure(item.Key);
  593. ChangeTime(item.Key);
  594. MonitorLinerDoor(item.Key);
  595. this.SimulateDEHe(item.Key);
  596. break;
  597. }
  598. }
  599. ChangeTime(ModuleName.TM);
  600. if (type == ConfigType.Kepler2200 || type == ConfigType.Kepler2300 || type == ConfigType.Other)
  601. {
  602. MonitorMFSlitDoor();
  603. MonitorMFPressure();
  604. }
  605. else if (type == ConfigType.VenusSE)
  606. {
  607. MonitorSEMFSlitDoor();
  608. MonitorSEMFPressure();
  609. }
  610. else if (type == ConfigType.VenusDE)
  611. {
  612. MonitorDEMFSlitDoor();
  613. MonitorDEMFPressure();
  614. }
  615. }
  616. catch (Exception e)
  617. {
  618. LOG.WriteExeption(e);
  619. }
  620. return true;
  621. }
  622. private void ChangeTime(ModuleName mod)
  623. {
  624. // Heartbeat with PLC
  625. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  626. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  627. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  628. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  629. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  630. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  631. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  632. }
  633. //void MonitorVenuSESlitDoor(ModuleName mod)
  634. //{
  635. //}
  636. void MonitorSlitDoorInPM(ModuleName mod)
  637. {
  638. // slit door open
  639. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  640. {
  641. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  642. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  643. }
  644. // slit door close
  645. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  646. {
  647. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  648. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  649. }
  650. }
  651. void MonitorLinerDoor(ModuleName mod)
  652. {
  653. // slit door open
  654. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  655. {
  656. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  657. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  658. }
  659. // slit door close
  660. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  661. {
  662. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  663. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  664. }
  665. }
  666. void MonitorSlitDoorInTM(ModuleName mod)
  667. {
  668. // slit door open
  669. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  670. {
  671. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  672. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  673. }
  674. // slit door close
  675. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  676. {
  677. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  678. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  679. }
  680. }
  681. void MonitorMFSlitDoor()
  682. {
  683. ModuleName mod = ModuleName.TM;
  684. // LLA T door open
  685. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  686. {
  687. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  688. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  689. }
  690. // LLB T door open
  691. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  692. {
  693. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  694. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  695. }
  696. // LLA E door open
  697. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  698. {
  699. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  700. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  701. }
  702. // LLB E door open
  703. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  704. {
  705. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  706. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  707. }
  708. // LLA T door close
  709. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  710. {
  711. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  712. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  713. }
  714. // LLB T door close
  715. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  716. {
  717. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  718. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  719. }
  720. // LLA E door close
  721. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  722. {
  723. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  724. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  725. }
  726. // LLB E door close
  727. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  728. {
  729. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  730. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  731. }
  732. // PMA slitdoor door close/open
  733. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  734. {
  735. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  736. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  737. }
  738. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  739. {
  740. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  741. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  742. }
  743. // PMB slitdoor door close/open
  744. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  745. {
  746. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  747. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  748. }
  749. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  750. {
  751. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  752. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  753. }
  754. // PMC slitdoor door close/open
  755. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  756. {
  757. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  758. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  759. }
  760. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  761. {
  762. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  763. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  764. }
  765. // PMD slitdoor door close/open
  766. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  767. {
  768. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  769. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  770. }
  771. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  772. {
  773. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  774. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  775. }
  776. }
  777. void MonitorSEMFSlitDoor()
  778. {
  779. ModuleName mod = ModuleName.SETM;
  780. // VCE T door open
  781. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  782. {
  783. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  784. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  785. }
  786. // VCE T door Close
  787. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  788. {
  789. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  790. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  791. }
  792. //pma
  793. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  794. {
  795. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  796. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  797. }
  798. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  799. {
  800. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  801. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  802. }
  803. //pmb
  804. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  805. {
  806. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  807. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  808. }
  809. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  810. {
  811. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  812. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  813. }
  814. //pmc
  815. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  816. {
  817. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  818. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  819. }
  820. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  821. {
  822. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  823. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  824. }
  825. }
  826. void MonitorDEMFSlitDoor()
  827. {
  828. ModuleName mod = ModuleName.DETM;
  829. // VCE L door open
  830. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  831. {
  832. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  833. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  834. }
  835. // VCE R door open
  836. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  837. {
  838. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  839. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  840. }
  841. // VCE L door Close
  842. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  843. {
  844. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  845. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  846. }
  847. // VCE R door Close
  848. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  849. {
  850. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  851. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  852. }
  853. //pma
  854. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  855. {
  856. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  857. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  858. }
  859. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  860. {
  861. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  862. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  863. }
  864. //pmb
  865. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  866. {
  867. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  868. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  869. }
  870. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  871. {
  872. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  873. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  874. }
  875. //pmc
  876. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  877. {
  878. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  879. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  880. }
  881. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  882. {
  883. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  884. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  885. }
  886. }
  887. void MonitorPin(ModuleName mod)
  888. {
  889. // lift pin up
  890. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  891. {
  892. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  893. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  894. }
  895. }
  896. void MonitorLid(ModuleName mod)
  897. {
  898. // lift pin up
  899. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  900. {
  901. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  902. }
  903. }
  904. void MonitorExtendAndRetract(ModuleName mod)
  905. {
  906. // Extend
  907. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  908. if (_trigLLExtend.Q)
  909. {
  910. _trigLLRetract.RST = true;
  911. Thread.Sleep(500);
  912. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  913. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  914. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  915. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  916. }
  917. // Retract
  918. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  919. if (_trigLLRetract.Q)
  920. {
  921. count++;
  922. _trigLLExtend.RST = true;
  923. Thread.Sleep(500);
  924. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  925. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  926. if (count == 1)
  927. {
  928. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  929. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  930. }
  931. else if (count == 2)
  932. {
  933. count = 0;
  934. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  935. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  936. }
  937. }
  938. }
  939. void MonitorPressure(ModuleName mod)
  940. {
  941. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  942. // Loadlock pressure
  943. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  944. // Foreline
  945. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  946. {
  947. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  948. }
  949. else
  950. {
  951. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  952. }
  953. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  954. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  955. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  956. //float chamber_pressure = GetMockChamberPressure(mod);
  957. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  958. // soft pump & fast pump
  959. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  960. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  961. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  962. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  963. {
  964. //任意泵打开
  965. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  966. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  967. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  968. {//开双泵
  969. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  970. {
  971. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  972. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  973. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  974. }
  975. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  976. {
  977. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  978. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  979. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  980. }
  981. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  982. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  983. }
  984. else if (fast_pump_vlv.Value)//开
  985. {
  986. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  987. {
  988. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  989. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  990. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  991. }
  992. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  993. {
  994. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  995. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  996. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  997. }
  998. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  999. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1000. }
  1001. else if (soft_pump_vlv.Value)
  1002. {
  1003. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1004. {
  1005. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1006. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1007. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1008. }
  1009. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1010. {
  1011. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1012. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1013. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1014. }
  1015. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1016. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1017. }
  1018. else if (turbo_pump_vlv.Value)
  1019. {
  1020. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1021. if ((getAiValue_ChamberPressure - 500) >= 0)
  1022. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1023. else
  1024. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1025. if ((getAiValue_ProcessPressure - 500) >= 0)
  1026. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1027. else
  1028. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1029. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1030. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1031. }
  1032. }
  1033. // fast vent & purge
  1034. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1035. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  1036. //if (vent_vlv.Value || purge_vlv.Value)
  1037. //{
  1038. // if (vent_vlv.Value && purge_vlv.Value)
  1039. // {
  1040. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1041. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1042. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1043. // {
  1044. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1045. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1046. // }
  1047. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1048. // {
  1049. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1050. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1051. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1052. // }
  1053. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1054. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1055. // }
  1056. // else
  1057. //
  1058. if (vent_vlv.Value)
  1059. {
  1060. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1061. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1062. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1063. {
  1064. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1065. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1066. }
  1067. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1068. {
  1069. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1070. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1071. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1072. }
  1073. else
  1074. {
  1075. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1076. }
  1077. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1078. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1079. }
  1080. // Loadlock Pumping Valve
  1081. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1082. if (Loadlock_pump_vlv.Value)
  1083. {
  1084. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1085. }
  1086. // Loadlock vent
  1087. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1088. if (Loadlock_vent_vlv.Value)
  1089. {
  1090. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1091. }
  1092. // 压力值越界,复位
  1093. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1094. if (chamber_pressure1 > ATM_PRESSURE)
  1095. {
  1096. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1097. }
  1098. else if (chamber_pressure1 < 20)
  1099. {
  1100. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1101. }
  1102. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1103. if (process_pressure1 > PROCESS_GAUGE)
  1104. {
  1105. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1106. }
  1107. else if (process_pressure1 < 20)
  1108. {
  1109. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1110. }
  1111. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1112. if (foreline_pressure > 10000)
  1113. {
  1114. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1115. }
  1116. else if (foreline_pressure < 150)
  1117. {
  1118. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1119. }
  1120. // 模拟压力计漂移
  1121. //int p1 = (int)GetMockChamberPressure(mod);
  1122. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1123. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1124. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1125. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1126. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1127. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1128. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1129. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1130. // 根据当前压力值设定信号
  1131. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1132. // ATM switch
  1133. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1134. // VAC switch
  1135. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1136. // Throttle valve
  1137. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1138. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1139. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1140. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1141. // 压力值
  1142. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1143. //{
  1144. // short increase = (short)_rd.Next(20, 30);
  1145. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1146. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1147. // {
  1148. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1149. // }
  1150. //}
  1151. //else
  1152. //{
  1153. // short increase = (short)_rd.Next(20, 30);
  1154. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1155. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1156. // {
  1157. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1158. // }
  1159. //}
  1160. //// 位置值
  1161. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1162. //{
  1163. // short increase = (short)_rd.Next(20, 30);
  1164. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1165. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1166. // {
  1167. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1168. // }
  1169. //}
  1170. //else
  1171. //{
  1172. // short increase = (short)_rd.Next(20, 30);
  1173. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1174. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1175. // {
  1176. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1177. // }
  1178. //}
  1179. }
  1180. void MonitorSEPressure(ModuleName mod)
  1181. {
  1182. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1183. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1184. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1185. // Foreline
  1186. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1187. {
  1188. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1189. }
  1190. else
  1191. {
  1192. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1193. }
  1194. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1195. // soft pump & fast pump
  1196. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1197. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1198. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1199. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1200. {
  1201. //任意泵打开
  1202. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1203. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1204. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1205. {//开双泵
  1206. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1207. {
  1208. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1209. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1210. }
  1211. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1212. {
  1213. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1214. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1215. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1216. }
  1217. }
  1218. else if (fast_pump_vlv.Value)//开
  1219. {
  1220. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1221. {
  1222. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1223. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1224. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1225. }
  1226. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1227. {
  1228. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1229. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1230. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1231. }
  1232. }
  1233. else if (soft_pump_vlv.Value)
  1234. {
  1235. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1236. {
  1237. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1238. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1239. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1240. }
  1241. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1242. {
  1243. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1244. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1245. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1246. }
  1247. }
  1248. else if (turbo_pump_vlv.Value)
  1249. {
  1250. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1251. if ((getAiValue_ChamberPressure - 500) >= 0)
  1252. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1253. else
  1254. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1255. if ((getAiValue_ProcessPressure - 500) >= 0)
  1256. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1257. else
  1258. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1259. }
  1260. }
  1261. // fast vent & purge
  1262. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1263. if (vent_vlv.Value)
  1264. {
  1265. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1266. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1267. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1268. {
  1269. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1270. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1271. }
  1272. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1273. {
  1274. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1275. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1276. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1277. }
  1278. else
  1279. {
  1280. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1281. }
  1282. }
  1283. // Loadlock Pumping Valve
  1284. // 压力值越界,复位
  1285. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1286. if (chamber_pressure1 > ATM_PRESSURE)
  1287. {
  1288. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1289. }
  1290. else if (chamber_pressure1 < 20)
  1291. {
  1292. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1293. }
  1294. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1295. if (process_pressure1 > PROCESS_GAUGE)
  1296. {
  1297. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1298. }
  1299. else if (process_pressure1 < 20)
  1300. {
  1301. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1302. }
  1303. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1304. if (foreline_pressure > 1999)
  1305. {
  1306. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1307. }
  1308. else if (foreline_pressure < 150)
  1309. {
  1310. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1311. }
  1312. // ATM switch
  1313. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1314. // VAC switch
  1315. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1316. }
  1317. void MonitorDEPressure(ModuleName mod)
  1318. {
  1319. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1320. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1321. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1322. // Foreline
  1323. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1324. {
  1325. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1326. }
  1327. else
  1328. {
  1329. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1330. }
  1331. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1332. // soft pump & fast pump
  1333. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1334. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1335. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1336. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1337. {
  1338. //任意泵打开
  1339. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1340. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1341. if (fast_pump_vlv.Value)
  1342. {//开双泵
  1343. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1344. {
  1345. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1346. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1347. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1348. }
  1349. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1350. {
  1351. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1352. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1353. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1354. }
  1355. }
  1356. else if (turbo_pump_vlv.Value)
  1357. {
  1358. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1359. if ((getAiValue_ChamberPressure - 500) >= 0)
  1360. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1361. else
  1362. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1363. if ((getAiValue_ProcessPressure - 500) >= 0)
  1364. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1365. else
  1366. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1367. }
  1368. }
  1369. // fast vent & purge
  1370. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1371. if (vent_vlv.Value)
  1372. {
  1373. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1374. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1375. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1376. {
  1377. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1378. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1379. }
  1380. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1381. {
  1382. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1383. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1384. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1385. }
  1386. else
  1387. {
  1388. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1389. }
  1390. }
  1391. // Loadlock Pumping Valve
  1392. // 压力值越界,复位
  1393. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1394. if (chamber_pressure1 > ATM_PRESSURE)
  1395. {
  1396. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1397. }
  1398. else if (chamber_pressure1 < 20)
  1399. {
  1400. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1401. }
  1402. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1403. if (process_pressure1 > PROCESS_GAUGE)
  1404. {
  1405. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1406. }
  1407. else if (process_pressure1 < 20)
  1408. {
  1409. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1410. }
  1411. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1412. if (foreline_pressure > 10000)
  1413. {
  1414. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1415. }
  1416. else if (foreline_pressure < 150)
  1417. {
  1418. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1419. }
  1420. // ATM switch
  1421. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1422. // VAC switch
  1423. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1424. }
  1425. void MonitorPressure_Kepler(ModuleName mod)
  1426. {
  1427. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1428. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1429. {
  1430. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1431. }
  1432. else
  1433. {
  1434. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1435. }
  1436. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1437. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1438. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1439. //float chamber_pressure = GetMockChamberPressure(mod);
  1440. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1441. // soft pump & fast pump
  1442. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1443. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1444. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1445. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1446. {
  1447. //任意泵打开
  1448. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1449. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1450. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1451. {//开双泵
  1452. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1453. {
  1454. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1455. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1456. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1457. }
  1458. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1459. {
  1460. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1461. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1462. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1463. }
  1464. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1465. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1466. }
  1467. else if (fast_pump_vlv.Value)//开
  1468. {
  1469. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1470. {
  1471. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1472. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1473. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1474. }
  1475. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1476. {
  1477. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1478. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1479. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1480. }
  1481. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1482. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1483. }
  1484. else if (soft_pump_vlv.Value)
  1485. {
  1486. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1487. {
  1488. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1489. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1490. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1491. }
  1492. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1493. {
  1494. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1495. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1496. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1497. }
  1498. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1499. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1500. }
  1501. else if (turbo_pump_vlv.Value)
  1502. {
  1503. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1504. if ((getAiValue_ChamberPressure - 500) >= 0)
  1505. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1506. else
  1507. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1508. if ((getAiValue_ProcessPressure - 500) >= 0)
  1509. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1510. else
  1511. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1512. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1513. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1514. }
  1515. }
  1516. // fast vent & purge
  1517. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1518. if (vent_vlv.Value)
  1519. {
  1520. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1521. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1522. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1523. {
  1524. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1525. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1526. }
  1527. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1528. {
  1529. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1530. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1531. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1532. }
  1533. else
  1534. {
  1535. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1536. }
  1537. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1538. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1539. }
  1540. // Loadlock Pumping Valve
  1541. // 压力值越界,复位
  1542. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1543. if (chamber_pressure1 > ATM_PRESSURE)
  1544. {
  1545. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1546. }
  1547. else if (chamber_pressure1 < 20)
  1548. {
  1549. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1550. }
  1551. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1552. if (process_pressure1 > PROCESS_GAUGE)
  1553. {
  1554. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1555. }
  1556. else if (process_pressure1 < 20)
  1557. {
  1558. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1559. }
  1560. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1561. if (foreline_pressure > 10000)
  1562. {
  1563. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1564. }
  1565. else if (foreline_pressure < 150)
  1566. {
  1567. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1568. }
  1569. // ATM switch
  1570. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1571. // VAC switch
  1572. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1573. }
  1574. void MonitorPressure_Kepler2200A(ModuleName mod)
  1575. {
  1576. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1577. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1578. {
  1579. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1580. }
  1581. else
  1582. {
  1583. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1584. }
  1585. //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
  1586. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1587. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1588. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1589. //float chamber_pressure = GetMockChamberPressure(mod);
  1590. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1591. // soft pump & fast pump
  1592. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1593. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1594. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1595. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1596. {
  1597. //任意泵打开
  1598. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1599. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1600. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1601. {//开双泵
  1602. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1603. {
  1604. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1605. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1606. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1607. }
  1608. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1609. {
  1610. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1611. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1612. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1613. }
  1614. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1615. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1616. }
  1617. else if (fast_pump_vlv.Value)//开
  1618. {
  1619. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1620. {
  1621. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1622. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1623. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1624. }
  1625. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1626. {
  1627. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1628. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1629. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1630. }
  1631. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1632. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1633. }
  1634. else if (soft_pump_vlv.Value)
  1635. {
  1636. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1637. {
  1638. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1639. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1640. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1641. }
  1642. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1643. {
  1644. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1645. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1646. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1647. }
  1648. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1649. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1650. }
  1651. else if (turbo_pump_vlv.Value)
  1652. {
  1653. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1654. if ((getAiValue_ChamberPressure - 500) >= 0)
  1655. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1656. else
  1657. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1658. if ((getAiValue_ProcessPressure - 500) >= 0)
  1659. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1660. else
  1661. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1662. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1663. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1664. }
  1665. }
  1666. // fast vent & purge
  1667. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1668. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1669. if (vent_vlv.Value && gas_final_vlv.Value)
  1670. {
  1671. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1672. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1673. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1674. {
  1675. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1676. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1677. }
  1678. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1679. {
  1680. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1681. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1682. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1683. }
  1684. else
  1685. {
  1686. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1687. }
  1688. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1689. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1690. }
  1691. // Loadlock Pumping Valve
  1692. // 压力值越界,复位
  1693. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1694. if (chamber_pressure1 > ATM_PRESSURE)
  1695. {
  1696. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1697. }
  1698. else if (chamber_pressure1 < 20)
  1699. {
  1700. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1701. }
  1702. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1703. if (process_pressure1 > PROCESS_GAUGE)
  1704. {
  1705. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1706. }
  1707. else if (process_pressure1 < 20)
  1708. {
  1709. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1710. }
  1711. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1712. if (foreline_pressure > 10000)
  1713. {
  1714. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1715. }
  1716. else if (foreline_pressure < 150)
  1717. {
  1718. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1719. }
  1720. // ATM switch
  1721. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1722. // VAC switch
  1723. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1724. SetAiValue($"{mod}.AI_Process_Pressure_2t", 1995);
  1725. }
  1726. void MonitorSEMFPressure()
  1727. {
  1728. ModuleName mod = ModuleName.SETM;
  1729. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1730. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1731. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1732. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1733. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1734. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1735. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1736. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1737. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1738. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1739. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1740. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1741. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1742. {
  1743. if (getAiValue_TM_ChamberPressure > 10000)
  1744. {
  1745. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1746. }
  1747. else if (getAiValue_TM_ChamberPressure <= 10000)
  1748. {
  1749. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1750. }
  1751. }
  1752. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1753. {
  1754. if (getAiValue_TM_ChamberPressure > 10000)
  1755. {
  1756. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1757. }
  1758. else if (getAiValue_TM_ChamberPressure <= 10000)
  1759. {
  1760. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1761. }
  1762. }
  1763. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1764. {
  1765. if (getAiValue_VCE_ChamberPressure > 10000)
  1766. {
  1767. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1768. }
  1769. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1770. {
  1771. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1772. }
  1773. }
  1774. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1775. {
  1776. if (getAiValue_VCE_ChamberPressure > 10000)
  1777. {
  1778. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1779. }
  1780. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1781. {
  1782. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1783. }
  1784. }
  1785. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1786. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1787. {
  1788. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1789. }
  1790. else if (getAiValue_VCE_ChamberPressure < 20)
  1791. {
  1792. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1793. }
  1794. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1795. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1796. {
  1797. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1798. }
  1799. else if (getAiValue_TM_ChamberPressure < 20)
  1800. {
  1801. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1802. }
  1803. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1804. // VAC switch
  1805. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1806. }
  1807. void MonitorDEMFPressure()
  1808. {
  1809. ModuleName mod = ModuleName.DETM;
  1810. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1811. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1812. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1813. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1814. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1815. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1816. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1817. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1818. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1819. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1820. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1821. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1822. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1823. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1824. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1825. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1826. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1827. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1828. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1829. {
  1830. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1831. {
  1832. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1833. }
  1834. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1835. {
  1836. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1837. }
  1838. }
  1839. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1840. {
  1841. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1842. {
  1843. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1844. }
  1845. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1846. {
  1847. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1848. }
  1849. }
  1850. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1851. {
  1852. if (getAiValue_TM_ChamberPressure > 10000)
  1853. {
  1854. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1855. }
  1856. else if (getAiValue_TM_ChamberPressure <= 10000)
  1857. {
  1858. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1859. }
  1860. }
  1861. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  1862. {
  1863. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1864. {
  1865. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  1866. }
  1867. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1868. {
  1869. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  1870. }
  1871. }
  1872. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  1873. {
  1874. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1875. {
  1876. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  1877. }
  1878. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1879. {
  1880. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  1881. }
  1882. }
  1883. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1884. {
  1885. if (getAiValue_TM_ChamberPressure > 10000)
  1886. {
  1887. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1888. }
  1889. else if (getAiValue_TM_ChamberPressure <= 10000)
  1890. {
  1891. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1892. }
  1893. }
  1894. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1895. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  1896. {
  1897. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  1898. }
  1899. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  1900. {
  1901. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  1902. }
  1903. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1904. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  1905. {
  1906. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  1907. }
  1908. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  1909. {
  1910. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  1911. }
  1912. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1913. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1914. {
  1915. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1916. }
  1917. else if (getAiValue_TM_ChamberPressure < 20)
  1918. {
  1919. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1920. }
  1921. // ATM switch
  1922. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1923. // VAC switch
  1924. // ATM switch
  1925. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  1926. // ATM switch
  1927. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  1928. }
  1929. void MonitorMFPressure()
  1930. {
  1931. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  1932. //{
  1933. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1934. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1935. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1936. ModuleName mod = ModuleName.TM;
  1937. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1938. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1939. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1940. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1941. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1942. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1943. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1944. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1945. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1946. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1947. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1948. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1949. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1950. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1951. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1952. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1953. {
  1954. if (getAiValue_LLA_ChamberPressure > 10000)
  1955. {
  1956. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1957. }
  1958. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1959. {
  1960. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1961. }
  1962. }
  1963. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1964. {
  1965. if (getAiValue_LLB_ChamberPressure > 10000)
  1966. {
  1967. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1968. }
  1969. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1970. {
  1971. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1972. }
  1973. }
  1974. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1975. {
  1976. if (getAiValue_TM_ChamberPressure > 10000)
  1977. {
  1978. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1979. }
  1980. else if (getAiValue_TM_ChamberPressure <= 10000)
  1981. {
  1982. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1983. }
  1984. }
  1985. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1986. {
  1987. if (getAiValue_LLA_ChamberPressure > 10000)
  1988. {
  1989. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1990. }
  1991. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1992. {
  1993. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1994. }
  1995. }
  1996. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1997. {
  1998. if (getAiValue_LLB_ChamberPressure > 10000)
  1999. {
  2000. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2001. }
  2002. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2003. {
  2004. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2005. }
  2006. }
  2007. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2008. {
  2009. if (getAiValue_TM_ChamberPressure > 10000)
  2010. {
  2011. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2012. }
  2013. else if (getAiValue_TM_ChamberPressure <= 10000)
  2014. {
  2015. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2016. }
  2017. }
  2018. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2019. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  2020. {
  2021. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  2022. }
  2023. else if (getAiValue_LLA_ChamberPressure < 20)
  2024. {
  2025. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2026. }
  2027. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2028. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2029. {
  2030. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2031. }
  2032. else if (getAiValue_LLB_ChamberPressure < 20)
  2033. {
  2034. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2035. }
  2036. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2037. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2038. {
  2039. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2040. }
  2041. else if (getAiValue_TM_ChamberPressure < 20)
  2042. {
  2043. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2044. }
  2045. // ATM switch
  2046. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2047. // VAC switch
  2048. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2049. // ATM switch
  2050. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2051. // VAC switch
  2052. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2053. // ATM switch
  2054. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2055. // VAC switch
  2056. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2057. // }
  2058. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2059. //{
  2060. // ModuleName mod = ModuleName.TM;
  2061. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2062. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2063. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2064. //}
  2065. }
  2066. void SetAiValue(string name, float value)
  2067. {
  2068. byte[] flow = BitConverter.GetBytes(value);
  2069. short high1 = BitConverter.ToInt16(flow, 0);
  2070. short low1 = BitConverter.ToInt16(flow, 2);
  2071. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2072. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2073. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2074. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2075. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2076. }
  2077. float GetAiValue(string name)
  2078. {
  2079. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2080. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2081. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2082. return flow;
  2083. }
  2084. float GetAoValue(string name)
  2085. {
  2086. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2087. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2088. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2089. return flow;
  2090. }
  2091. void MonitorTemperature(ModuleName mod)
  2092. {
  2093. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2094. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2095. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2096. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2097. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2098. // 底座
  2099. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2100. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2101. //{
  2102. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2103. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2104. //}
  2105. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2106. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2107. //{
  2108. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2109. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2110. //}
  2111. // Foreline
  2112. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2113. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2114. {
  2115. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2116. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2117. }
  2118. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2119. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2120. {
  2121. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2122. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2123. }
  2124. // Wall
  2125. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2126. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2127. {
  2128. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2129. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2130. }
  2131. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2132. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2133. {
  2134. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2135. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2136. }
  2137. }
  2138. void MonitorGas(ModuleName mod)
  2139. {
  2140. // gas
  2141. this.SimulateMFC(mod, 1);
  2142. this.SimulateMFC(mod, 2);
  2143. this.SimulateMFC(mod, 3);
  2144. this.SimulateMFC(mod, 4);
  2145. this.SimulateMFC(mod, 5);
  2146. this.SimulateMFC(mod, 6);
  2147. this.SimulateMFC(mod, 7);
  2148. this.SimulateMFC(mod, 8);
  2149. this.SimulateN2(mod);
  2150. }
  2151. void MonitorSEGas(ModuleName mod)
  2152. {
  2153. SimulateMFC(mod, 1);
  2154. SimulateMFC(mod, 2);
  2155. SimulateMFC(mod, 3);
  2156. SimulateMFC(mod, 4);
  2157. SimulateMFC(mod, 5);
  2158. SimulateMFC(mod, 6);
  2159. SimulateMFC(mod, 7);
  2160. SimulateMFC(mod, 8);
  2161. SimulateMFC(mod, 9);
  2162. SimulateMFC(mod, 10);
  2163. SimulateMFC(mod, 11);
  2164. SimulateMFC(mod, 12);
  2165. }
  2166. void MonitorDEGas(ModuleName mod)
  2167. {
  2168. SimulateMFC(mod, 1);
  2169. SimulateMFC(mod, 2);
  2170. SimulateMFC(mod, 3);
  2171. SimulateMFC(mod, 4);
  2172. SimulateMFC(mod, 5);
  2173. SimulateMFC(mod, 6);
  2174. SimulateMFC(mod, 7);
  2175. SimulateMFC(mod, 8);
  2176. SimulateMFC(mod, 9);
  2177. SimulateMFC(mod, 10);
  2178. SimulateMFC(mod, 11);
  2179. SimulateMFC(mod, 12);
  2180. }
  2181. private void SimulateMFC(ModuleName mod, byte gasNum)
  2182. {
  2183. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2184. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2185. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2186. }
  2187. private void SimulateN2(ModuleName mod)
  2188. {
  2189. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2190. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2191. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2192. }
  2193. private void SimulateSEHe(ModuleName mod)
  2194. {
  2195. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2196. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2197. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2198. }
  2199. private void SimulateDEHe(ModuleName mod)
  2200. {
  2201. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2202. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2203. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2204. }
  2205. private void SimulateHe(ModuleName mod)
  2206. {
  2207. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2208. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2209. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2210. }
  2211. void MonitorRF(ModuleName mod)
  2212. {
  2213. // RF generator
  2214. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2215. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2216. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2217. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2218. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2219. }
  2220. void MonitorIOPumpCtrl(ModuleName mod)
  2221. {
  2222. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2223. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2224. }
  2225. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2226. {
  2227. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2228. {
  2229. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2230. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2231. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2232. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2233. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2234. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2235. }
  2236. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2237. {
  2238. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2239. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2240. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2241. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2242. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2243. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2244. }
  2245. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2246. {
  2247. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2248. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2249. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2250. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2251. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2252. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2253. }
  2254. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2255. {
  2256. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2257. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2258. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2259. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2260. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2261. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2262. }
  2263. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2264. {
  2265. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2266. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2267. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2268. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2269. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2270. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2271. }
  2272. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2273. {
  2274. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2275. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2276. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2277. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2278. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2279. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2280. }
  2281. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2282. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2283. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2284. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2285. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2286. }
  2287. void MonitorKepler2200Heater(ModuleName mod)
  2288. {
  2289. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2290. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
  2291. }
  2292. public void Terminate()
  2293. {
  2294. _thread.Stop();
  2295. }
  2296. public void SetCoolantOutletTemp(string module, int Temp)
  2297. {
  2298. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2299. //{
  2300. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2301. //}
  2302. }
  2303. }
  2304. }