VenusDispatcher.cs 90 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Diagnostics;
  5. using Aitex.Core.Common;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Sorter.Common;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Util;
  11. using Aitex.Core.RT.DataCenter;
  12. using Aitex.Core.RT.RecipeCenter;
  13. using Aitex.Core.RT.Fsm;
  14. using MECF.Framework.Common.Jobs;
  15. using MECF.Framework.Common.Routine;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.Common.SubstrateTrackings;
  18. using MECF.Framework.Common.Schedulers;
  19. using MECF.Framework.Common.DBCore;
  20. using Venus_Core;
  21. using Venus_RT.Modules.Schedulers;
  22. using Venus_RT.Scheduler;
  23. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  24. namespace Venus_RT.Modules
  25. {
  26. class VCETask : ModuleTask
  27. {
  28. public VCETask(ModuleName mod) : base(mod)
  29. {
  30. }
  31. }
  32. class VenusPMTask : ModuleTask
  33. {
  34. public enum RecipeJobType
  35. {
  36. PreClean,
  37. Process,
  38. PostClean,
  39. WtwClean,
  40. }
  41. public override int TimeToReady
  42. {
  43. get
  44. {
  45. switch (Status)
  46. {
  47. case ModuleStatus.Idle:
  48. case ModuleStatus.IdleClean:
  49. case ModuleStatus.PreJobClean:
  50. case ModuleStatus.PostJobClean:
  51. case ModuleStatus.WTWClean:
  52. case ModuleStatus.Processing:
  53. {
  54. return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  55. }
  56. }
  57. return int.MaxValue;
  58. }
  59. }
  60. private WaferTask _wafer;
  61. private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
  62. Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> _pendingWaferTasks = new Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> ();
  63. KeyValuePair<Guid, Queue<KeyValuePair <RecipeJobType, string>>> _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>> (Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  64. public VenusPMTask(ModuleName mod) : base(mod)
  65. { }
  66. public override RState Run()
  67. {
  68. if(_runingWaferTask.Value.Count == 0)
  69. {
  70. if(_pendingWaferTasks.Count > 0)
  71. {
  72. _runingWaferTask = _pendingWaferTasks.Dequeue();
  73. }
  74. else
  75. {
  76. if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  77. {
  78. if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
  79. {
  80. if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
  81. {
  82. Status = ModuleStatus.StartIdleClean;
  83. }
  84. }
  85. }
  86. }
  87. }
  88. else
  89. {
  90. if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  91. {
  92. switch(_runingWaferTask.Value.First().Key)
  93. {
  94. case RecipeJobType.PreClean:
  95. {
  96. if(WaferManager.Instance.CheckNoWafer(Module,0))
  97. {
  98. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  99. {
  100. Status = ModuleStatus.StartPreJobClean;
  101. }
  102. else
  103. {
  104. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe {_runingWaferTask.Value.First().Value} failed");
  105. TryDequeueRuningTask(Status);
  106. Status = ModuleStatus.Idle;
  107. }
  108. }
  109. }
  110. break;
  111. case RecipeJobType.Process:
  112. {
  113. if (WaferManager.Instance.CheckHasWafer(Module, 0))
  114. {
  115. if(_wafer.waferId == _runingWaferTask.Key)
  116. {
  117. Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
  118. Status = ModuleStatus.StartProcess;
  119. }
  120. else
  121. {
  122. LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer id dismatch while launch {_wafer.sourceMod}.{_wafer.sourceSlot + 1} process recipe");
  123. }
  124. }
  125. }
  126. break;
  127. case RecipeJobType.PostClean:
  128. {
  129. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  130. {
  131. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  132. {
  133. Status = ModuleStatus.StartPostJobClean;
  134. }
  135. else
  136. {
  137. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe {_runingWaferTask.Value.First().Value} failed");
  138. TryDequeueRuningTask(Status);
  139. Status = ModuleStatus.Idle;
  140. }
  141. }
  142. }
  143. break;
  144. case RecipeJobType.WtwClean:
  145. {
  146. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  147. {
  148. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  149. {
  150. Status = ModuleStatus.StartWTWClean;
  151. }
  152. else
  153. {
  154. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW clean recipe {_runingWaferTask.Value.First().Value} failed");
  155. TryDequeueRuningTask(Status);
  156. Status = ModuleStatus.Idle;
  157. }
  158. }
  159. }
  160. break;
  161. }
  162. }
  163. }
  164. if(_runingWaferTask.Value.Count > 0 || Status != ModuleStatus.Idle)
  165. {
  166. if (Scheduler.IsIdle)
  167. {
  168. switch (Status)
  169. {
  170. case ModuleStatus.Processing:
  171. {
  172. var wafer = WaferManager.Instance.GetWafer(Module, 0);
  173. if (Scheduler.IsOnline)
  174. {
  175. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  176. {
  177. _wafer.Return();
  178. TryDequeueRuningTask(Status);
  179. Status = ModuleStatus.Idle;
  180. }
  181. }
  182. else // handle offline exception situation
  183. {
  184. TryDequeueRuningTask(Status);
  185. Status = ModuleStatus.Idle;
  186. }
  187. }
  188. break;
  189. case ModuleStatus.PreJobClean:
  190. case ModuleStatus.PostJobClean:
  191. case ModuleStatus.WTWClean:
  192. {
  193. TryDequeueRuningTask(Status);
  194. Status = ModuleStatus.Idle;
  195. }
  196. break;
  197. case ModuleStatus.IdleClean:
  198. {
  199. Status = ModuleStatus.Idle;
  200. }
  201. break;
  202. case ModuleStatus.StartProcess:
  203. {
  204. if (RouteManager.IsATMMode)
  205. {
  206. Status = ModuleStatus.Processing;
  207. }
  208. }
  209. break;
  210. }
  211. }
  212. else
  213. {
  214. switch (Status)
  215. {
  216. case ModuleStatus.StartProcess:
  217. Status = ModuleStatus.Processing;
  218. break;
  219. case ModuleStatus.StartIdleClean:
  220. Status = ModuleStatus.IdleClean;
  221. break;
  222. case ModuleStatus.StartPreJobClean:
  223. Status = ModuleStatus.PreJobClean;
  224. break;
  225. case ModuleStatus.StartPostJobClean:
  226. Status = ModuleStatus.PostJobClean;
  227. break;
  228. case ModuleStatus.StartWTWClean:
  229. Status = ModuleStatus.WTWClean;
  230. break;
  231. }
  232. }
  233. }
  234. return RState.Running;
  235. }
  236. void TryDequeueRuningTask( ModuleStatus status)
  237. {
  238. bool bMatch = false;
  239. if (_runingWaferTask.Value.Count > 0)
  240. {
  241. switch(status)
  242. {
  243. case ModuleStatus.PreJobClean:
  244. if(_runingWaferTask.Value.First().Key == RecipeJobType.PreClean)
  245. {
  246. _runingWaferTask.Value.Dequeue();
  247. bMatch = true;
  248. }
  249. break;
  250. case ModuleStatus.Processing:
  251. if(_runingWaferTask.Value.First().Key == RecipeJobType.Process)
  252. {
  253. _runingWaferTask.Value.Dequeue();
  254. bMatch = true;
  255. }
  256. break;
  257. case ModuleStatus.PostJobClean:
  258. if(_runingWaferTask.Value.First().Key == RecipeJobType.PostClean)
  259. {
  260. _runingWaferTask.Value.Dequeue();
  261. bMatch = true;
  262. }
  263. break;
  264. case ModuleStatus.WTWClean:
  265. if(_runingWaferTask.Value.First().Key == RecipeJobType.WtwClean)
  266. {
  267. _runingWaferTask.Value.Dequeue();
  268. bMatch = true;
  269. }
  270. break;
  271. case ModuleStatus.WaitPreJobClean:
  272. case ModuleStatus.WaitProcess:
  273. case ModuleStatus.WaitPostJobClean:
  274. case ModuleStatus.WaitWTWClean:
  275. case ModuleStatus.Idle:
  276. _runingWaferTask.Value.Dequeue();
  277. break;
  278. }
  279. }
  280. if(!bMatch)
  281. {
  282. string runingTask = _runingWaferTask.Value.Count > 0 ? _runingWaferTask.Value.First().ToString() : "Empty";
  283. LOG.Write(eEvent.WARN_ROUTER, Module, $"TryDequeueRuningTask() failed, PM Status: {status}, runing task : {runingTask}");
  284. }
  285. if(_runingWaferTask.Value.Count == 0 && _runingWaferTask.Key != Guid.Empty)
  286. {
  287. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  288. }
  289. }
  290. public override void WaferArrived(WaferTask wafer, int slot)
  291. {
  292. _wafer = wafer;
  293. }
  294. public override void WaferLeaved(WaferTask wafer, int slot)
  295. {
  296. _wafer = null;
  297. }
  298. public void SubscribeWaferTask(WaferTask waferTask)
  299. {
  300. var waferRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  301. if (!string.IsNullOrWhiteSpace(waferTask.processRecipe))
  302. {
  303. waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.Process, waferTask.processRecipe));
  304. }
  305. if (!string.IsNullOrWhiteSpace(waferTask.wtwCleanRecipe))
  306. {
  307. waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.WtwClean, waferTask.wtwCleanRecipe));
  308. }
  309. if(_runingWaferTask.Key == waferTask.waferId || _pendingWaferTasks.ToList().Exists(kv => kv.Key == waferTask.waferId))
  310. {
  311. LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer {waferTask.sourceMod}.{waferTask.sourceSlot + 1} already subscribe job task.");
  312. }
  313. else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  314. {
  315. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes);
  316. }
  317. else
  318. {
  319. _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes));
  320. }
  321. }
  322. public void SubscribeLotCleanTask(ControlJobInfo cj, RecipeJobType cleanType)
  323. {
  324. var lotCleanRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  325. if(cleanType == RecipeJobType.PreClean && !string.IsNullOrWhiteSpace(cj.PreJobClean))
  326. {
  327. lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PreJobClean));
  328. }
  329. else if(cleanType == RecipeJobType.PostClean && !string.IsNullOrWhiteSpace (cj.PostJobClean))
  330. {
  331. lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PostJobClean));
  332. }
  333. else
  334. {
  335. return;
  336. }
  337. if ((_runingWaferTask.Key == cj.InnerId && _runingWaferTask.Value.ToList().Exists(pv => pv.Key == cleanType)) || _pendingWaferTasks.ToList().Exists(task => task.Key == cj.InnerId && task.Value.ToList().Exists(pv => pv.Key == cleanType)))
  338. {
  339. LOG.Write(eEvent.WARN_ROUTER, Module, $"Control job {cj.Name} already subscribe {cleanType} task.");
  340. }
  341. else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  342. {
  343. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes);
  344. }
  345. else
  346. {
  347. _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes));
  348. }
  349. }
  350. public bool ReadyMoveIn(WaferTask wafer)
  351. {
  352. return _runingWaferTask.Key == wafer.waferId && _runingWaferTask.Value.Count > 0 && _runingWaferTask.Value.First().Key == RecipeJobType.Process;
  353. }
  354. public bool IsAllJobCompleted()
  355. {
  356. return Status == ModuleStatus.Idle && (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0) && _pendingWaferTasks.Count == 0;
  357. }
  358. public override void ResetTask()
  359. {
  360. base.ResetTask();
  361. _wafer = null;
  362. _pendingWaferTasks.Clear();
  363. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  364. }
  365. }
  366. class PreAlignTask : ModuleTask
  367. {
  368. private WaferTask _wafer;
  369. public PreAlignTask(ModuleName aligner) : base(aligner)
  370. {
  371. }
  372. public override RState Run()
  373. {
  374. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  375. if (tmRobot == null || !tmRobot.IsAvailable)
  376. return RState.Running;
  377. switch (Status)
  378. {
  379. case ModuleStatus.WaitAlign:
  380. {
  381. tmRobot.Align(0);
  382. Status = ModuleStatus.Aligning;
  383. }
  384. break;
  385. case ModuleStatus.Aligning:
  386. {
  387. _wafer.IsAligned = true;
  388. Status = ModuleStatus.Idle;
  389. }
  390. break;
  391. }
  392. return RState.Running;
  393. }
  394. public override void WaferArrived(WaferTask wafer, int slot)
  395. {
  396. _wafer = wafer;
  397. Status = ModuleStatus.WaitAlign;
  398. }
  399. public override void WaferLeaved(WaferTask wafer, int slot)
  400. {
  401. _wafer = null;
  402. }
  403. }
  404. class VenusTMRobotTask : ModuleTask
  405. {
  406. public VenusTMRobotTask(ModuleName mod) : base(mod) { }
  407. public override RState Run()
  408. {
  409. return base.Run();
  410. }
  411. }
  412. class VenusDispatcher : ICycle
  413. {
  414. private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).RobotStatus; } }
  415. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  416. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  417. private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
  418. private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
  419. private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();
  420. private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();
  421. private List<MoveItem> _curTmAction = new List<MoveItem>();
  422. private bool _isCycleMode;
  423. private int _cycleSetPoint = 0;
  424. private int _cycledCount = 0;
  425. private int _cycledWafer = 0;
  426. private float _throughput = 0.0f;
  427. private int _tmRobotSingleArmOption = 0;
  428. private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int>();
  429. private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int>();
  430. private Dictionary<ModuleName, int> _lpCycleSP = new Dictionary<ModuleName, int>();
  431. private Dictionary<ModuleName, float> _lpThroughput = new Dictionary<ModuleName, float>();
  432. private Stopwatch _cycleWatch = new Stopwatch();
  433. private SchedulerFACallback _faCallback;
  434. private SchedulerDBCallback _dbCallback;
  435. public SequenceLLInOutPath LLInOutPath => SequenceLLInOutPath.DInDOut;
  436. public bool HasJobRunning => _lstControlJobs.Count > 0;
  437. private RState _cycleState = RState.Init;
  438. public RState CycleState => _cycleState;
  439. private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();
  440. public List<string> InUseRecipes = new List<string>();
  441. public VenusDispatcher()
  442. {
  443. _faCallback = new SchedulerFACallback();
  444. _dbCallback = new SchedulerDBCallback();
  445. InitModules();
  446. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  447. DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());
  448. DATA.Subscribe("Scheduler.InUsingRecipe", () => InUseRecipes);
  449. foreach (var lp in new List<ModuleName> { ModuleName.LP1, ModuleName.LP2, ModuleName.LP3 })
  450. {
  451. _loadportControlJobDic[lp.ToString()] = null;
  452. DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp.ToString()], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  453. DATA.Subscribe($"{lp}.CycledCount", () => _lpCycleCount[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  454. DATA.Subscribe($"{lp}.CycledWafer", () => _lpCycleWafer[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  455. DATA.Subscribe($"{lp}.CycleSetPoint", () => _lpCycleSP[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  456. DATA.Subscribe($"{lp}.Throughput", () => _lpThroughput[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  457. }
  458. }
  459. #region public interface
  460. /// <summary>
  461. /// 获取lp当前的ControlJob
  462. /// </summary>
  463. /// <param name="lp"></param>
  464. /// <returns></returns>
  465. public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
  466. {
  467. if (ModuleHelper.IsLoadPort(lp))
  468. {
  469. return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
  470. }
  471. else
  472. {
  473. return null;
  474. }
  475. }
  476. public RState Start(params object[] objs)
  477. {
  478. if (WaferManager.Instance.HasDuplicatedWafer)
  479. {
  480. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, "System has dummy wafers, please verify all the wafer position, and delete the invalid wafer");
  481. return RState.Failed;
  482. }
  483. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  484. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  485. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  486. _cycledWafer = 0;
  487. _cycledCount = 0;
  488. _throughput = 0;
  489. Clear();
  490. _cycleWatch.Stop();
  491. _lpCycleWafer.Clear();
  492. _lpCycleCount.Clear();
  493. return RState.Running;
  494. }
  495. public bool CreateJob(Dictionary<string, object> param, out string reason)
  496. {
  497. reason = "";
  498. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  499. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  500. string[] slotSequence = (string[])param["SlotSequence"];
  501. string jobId = (string)param["JobId"];
  502. string module = (string)param["Module"];
  503. if (string.IsNullOrEmpty(jobId))
  504. {
  505. jobId = "CJ_Local_" + module;
  506. }
  507. //bool autoStart = (bool)param["AutoStart"];
  508. string lotId = jobId;
  509. if (param.ContainsKey("LotId"))
  510. lotId = (string)param["LotId"];
  511. string preCleanRecipe = param.ContainsKey("PreCleanRecipeName") ? (string)param["PreCleanRecipeName"] : string.Empty;
  512. string postCleanRecipe = param.ContainsKey("PostCleanRecipeName") ? (string)param["PostCleanRecipeName"] : string.Empty;
  513. if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  514. {
  515. reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
  516. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  517. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  518. return false;
  519. }
  520. if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
  521. {
  522. reason = $"{module} should be LoadPort";
  523. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  524. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  525. return false;
  526. }
  527. if (_lstControlJobs.Exists(x => x.Name == jobId))
  528. {
  529. reason = $"{jobId} already created";
  530. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  531. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  532. return false;
  533. }
  534. ControlJobInfo cj = new ControlJobInfo();
  535. cj.Name = jobId;
  536. cj.Module = module;
  537. cj.LotName = lotId;
  538. cj.LotInnerId = Guid.NewGuid();
  539. cj.LotWafers = new List<WaferInfo>();
  540. cj.SetState(EnumControlJobState.WaitingForStart);
  541. cj.JetState = EnumJetCtrlJobState.Quequed;
  542. cj.PreJobClean = preCleanRecipe;
  543. cj.PostJobClean = postCleanRecipe;
  544. cj.SequenceNameList = slotSequence;
  545. cj.CycleNumber = SC.GetValue<int>("System.CycleCount"); // only for temperary debug
  546. Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
  547. Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
  548. Dictionary<string, string> indexSequence = new Dictionary<string, string>();
  549. bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
  550. for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
  551. {
  552. if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
  553. continue;
  554. string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
  555. indexSequence[groupName] = slotSequence[i];
  556. if (!seqSlot.ContainsKey(groupName))
  557. {
  558. seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
  559. }
  560. if (!seqSlotWafers.ContainsKey(groupName))
  561. {
  562. seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
  563. }
  564. seqSlot[groupName][i] = true;
  565. if (!WaferManager.Instance.CheckHasWafer(module, i))
  566. {
  567. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
  568. return false;
  569. }
  570. if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
  571. {
  572. reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
  573. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  574. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  575. return false;
  576. }
  577. if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
  578. {
  579. reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
  580. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  581. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  582. return false;
  583. }
  584. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
  585. WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
  586. cj.LotWafers.Add(waferInfo);
  587. waferInfo.SequenceName = slotSequence[i];
  588. waferInfo.LotId = lotId;
  589. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---
  590. seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
  591. cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
  592. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
  593. }
  594. if (seqSlotWafers.Count == 0)
  595. {
  596. reason = $"job has not assign wafer";
  597. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  598. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  599. return false;
  600. }
  601. List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
  602. string[] seqs = seqSlot.Keys.ToArray();
  603. for (int i = 0; i < seqs.Length; i++)
  604. {
  605. ProcessJobInfo pj = new ProcessJobInfo();
  606. pj.Name = jobId + "_" + (i + 1);
  607. pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
  608. if (pj.Sequence == null)
  609. {
  610. reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
  611. return false;
  612. }
  613. pj.ControlJobName = cj.Name;
  614. pj.LotName = lotId;
  615. pj.SlotWafers = seqSlotWafers[seqs[i]];
  616. pj.SetState(EnumProcessJobState.Queued);
  617. if (!CheckSequencePmReady(pj.Sequence, out reason))
  618. {
  619. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
  620. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  621. return false;
  622. }
  623. if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
  624. {
  625. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
  626. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  627. return false;
  628. }
  629. pjs.Add(pj);
  630. }
  631. _dbCallback.LotUpdate(cj);
  632. foreach (var pj in pjs)
  633. {
  634. cj.ProcessJobNameList.Add(pj.Name);
  635. _lstProcessJobs.Add(pj);
  636. }
  637. _lstControlJobs.Add(cj);
  638. //AssociatedPMWithLP(cj);
  639. _loadportControlJobDic[cj.Module] = cj;
  640. _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
  641. return true;
  642. }
  643. public bool CheckAllJobDone()
  644. {
  645. foreach (var cj in _lstControlJobs)
  646. {
  647. if (cj.State != EnumControlJobState.Completed)
  648. return false;
  649. }
  650. InUseRecipes.Clear();
  651. return true;
  652. }
  653. public bool CheckJobJustDone(out string sJobName)
  654. {
  655. foreach (var cj in _lstControlJobs)
  656. {
  657. if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
  658. {
  659. //LP;WaferSize;Lot;Number;Start;End;
  660. sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
  661. cj.BeenPosted = true;
  662. return true;
  663. }
  664. }
  665. sJobName = "NULL";
  666. return false;
  667. }
  668. public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
  669. {
  670. foreach (var pj in _lstProcessJobs)
  671. {
  672. if (pj.ControlJobName == cj.Name)
  673. return pj;
  674. }
  675. return null;
  676. }
  677. public bool AbortJob(string jobName, out string reason)
  678. {
  679. reason = "";
  680. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  681. if (cj == null)
  682. {
  683. reason = $"abort job rejected, not found job with id {jobName}";
  684. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  685. return false;
  686. }
  687. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  688. foreach (var pj in _lstProcessJobs)
  689. {
  690. if (pj.ControlJobName == cj.Name)
  691. {
  692. pj.SetState(EnumProcessJobState.Aborting);
  693. pjAbortList.Add(pj);
  694. int unprocessed = 0;
  695. int aborted = 0;
  696. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  697. foreach (var waferInfo in wafers)
  698. {
  699. waferInfo.ProcessJob = null;
  700. waferInfo.NextSequenceStep = 0;
  701. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  702. unprocessed++;
  703. }
  704. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  705. }
  706. }
  707. _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
  708. _dbCallback.LotFinished(cj);
  709. foreach (var pj in pjAbortList)
  710. {
  711. _lstProcessJobs.Remove(pj);
  712. }
  713. _lstControlJobs.Remove(cj);
  714. if (_loadportControlJobDic.ContainsKey(cj.Module))
  715. {
  716. _loadportControlJobDic[cj.Module] = null;
  717. }
  718. return true;
  719. }
  720. public bool StopJob(string jobName, out string reason)
  721. {
  722. reason = "";
  723. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  724. if (cj == null)
  725. {
  726. reason = $"stop job rejected, not found job with id {jobName}";
  727. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  728. return false;
  729. }
  730. foreach (var pj in _lstProcessJobs)
  731. {
  732. if (pj.ControlJobName == cj.Name)
  733. {
  734. pj.SetState(EnumProcessJobState.Stopping);
  735. }
  736. }
  737. _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
  738. _dbCallback.LotFinished(cj);
  739. if (_loadportControlJobDic.ContainsKey(cj.Module))
  740. {
  741. _loadportControlJobDic[cj.Module] = null;
  742. }
  743. return true;
  744. }
  745. public bool ResumeJob(string jobName, out string reason)
  746. {
  747. reason = "";
  748. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  749. if (cj == null)
  750. {
  751. reason = $"resume job rejected, not found job with id {jobName}";
  752. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
  753. return false;
  754. }
  755. if (cj.State == EnumControlJobState.Paused)
  756. {
  757. cj.SetState(EnumControlJobState.Executing);
  758. }
  759. _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
  760. _cycleState = RState.Running;
  761. return true;
  762. }
  763. public bool PauseJob(string jobName, out string reason)
  764. {
  765. reason = "";
  766. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  767. if (cj == null)
  768. {
  769. reason = $"pause job rejected, not found job with id {jobName}";
  770. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
  771. return false;
  772. }
  773. if (cj.State == EnumControlJobState.Executing)
  774. {
  775. cj.SetState(EnumControlJobState.Paused);
  776. }
  777. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  778. if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
  779. _cycleState = RState.Paused;
  780. return true;
  781. }
  782. public bool StartJob(string jobName, out string reason)
  783. {
  784. reason = "";
  785. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  786. if (cj == null)
  787. {
  788. reason = $"start job rejected, not found job with id {jobName}";
  789. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  790. return false;
  791. }
  792. if (cj.State == EnumControlJobState.WaitingForStart)
  793. {
  794. cj.SetState(EnumControlJobState.Queued);
  795. //PreJobClean(cj);
  796. cj.StartTime = DateTime.Now;
  797. _dbCallback.LotCreated(cj);
  798. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  799. //if (!_blockingWatcher.IsRunning)
  800. // _blockingWatcher.Restart();
  801. //ResetTraceFlag();
  802. }
  803. if (!_cycleWatch.IsRunning)
  804. {
  805. _cycleWatch.Restart();
  806. }
  807. if (!_lpCycleWafer.Keys.Contains(ModuleHelper.Converter(cj.Module)))
  808. {
  809. _lpCycleCount.Add(ModuleHelper.Converter(cj.Module), 0);
  810. _lpCycleWafer.Add(ModuleHelper.Converter(cj.Module), 0);
  811. }
  812. _cycleState = RState.Running;
  813. return true;
  814. }
  815. public RState Monitor()
  816. {
  817. prelude();
  818. RunWaferTask();
  819. RunModuleTasks();
  820. RoutingWafers();
  821. epilogue();
  822. return _cycleState;
  823. }
  824. public void Abort()
  825. {
  826. }
  827. public void Clear()
  828. {
  829. foreach (var module in _dictModuleTask)
  830. {
  831. module.Value.Status = ModuleStatus.Idle;
  832. module.Value.Scheduler.ResetTask();
  833. module.Value.ResetTask();
  834. }
  835. List<string> keys = _loadportControlJobDic.Keys.ToList();
  836. foreach (var key in keys)
  837. {
  838. _loadportControlJobDic[key] = null;
  839. }
  840. _lstWaferTasks.Clear();
  841. _tmSchdActions.Clear();
  842. _curTmAction.Clear();
  843. _lstControlJobs.Clear();
  844. _lstProcessJobs.Clear();
  845. InUseRecipes.Clear();
  846. _cycleState = RState.End;
  847. }
  848. #endregion
  849. #region manual return wafer
  850. // manual return one wafer while system is auto running
  851. public bool ManualReturnWafer(object[] objs)
  852. {
  853. ModuleName SourceModule = (ModuleName)objs[0];
  854. int SourceSlot = (int)objs[1];
  855. if (!_dictModuleTask.Keys.Contains(SourceModule))
  856. {
  857. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
  858. return false;
  859. }
  860. if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
  861. {
  862. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
  863. return false;
  864. }
  865. if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
  866. {
  867. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
  868. return false;
  869. }
  870. var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
  871. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
  872. _qeReturnWafers.Enqueue(wafer);
  873. return true;
  874. }
  875. public RState CheckManualReturnWafer()
  876. {
  877. var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
  878. var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
  879. if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
  880. {
  881. LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
  882. return RState.Failed;
  883. }
  884. foreach (var mod in _dictModuleTask)
  885. {
  886. if (ModuleHelper.IsLoadPort(mod.Key))
  887. continue;
  888. if (!ModuleHelper.IsAligner(mod.Key) && !mod.Value.Scheduler.IsIdle)
  889. {
  890. LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
  891. return RState.Failed;
  892. }
  893. int nSlotNumber = (ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1);
  894. for (int slot = 0; slot < nSlotNumber; slot++)
  895. {
  896. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  897. if (wafer.IsEmpty)
  898. continue;
  899. var destLP = (ModuleName)wafer.OriginStation;
  900. if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
  901. {
  902. LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
  903. return RState.Failed;
  904. }
  905. if (!ModuleHelper.IsLoadPort(destLP))
  906. {
  907. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
  908. return RState.Failed;
  909. }
  910. }
  911. }
  912. Clear();
  913. return RState.Running;
  914. }
  915. public RState ReturnAllWafers()
  916. {
  917. int systemWaferCount = 0;
  918. foreach (var mod in _dictModuleTask)
  919. {
  920. if (ModuleHelper.IsLoadPort(mod.Key))
  921. continue;
  922. int nSlotNumber = ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1;
  923. for (int slot = 0; slot < nSlotNumber; slot++)
  924. {
  925. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  926. if (!wafer.IsEmpty)
  927. systemWaferCount++;
  928. }
  929. }
  930. if (systemWaferCount == 0)
  931. return RState.End;
  932. ReturnInternalWafers();
  933. return RState.Running;
  934. }
  935. #endregion
  936. #region internal implementation
  937. private void InitModules()
  938. {
  939. foreach (var module in ModuleHelper.InstalledModules)
  940. {
  941. if (ModuleHelper.IsInstalled(module))
  942. {
  943. if (ModuleHelper.IsPm(module))
  944. {
  945. _dictModuleTask[module] = new VenusPMTask(module);
  946. }
  947. else if (ModuleHelper.IsTMRobot(module))
  948. {
  949. _dictModuleTask[module] = new VenusTMRobotTask(module);
  950. }
  951. else if (ModuleHelper.IsAligner(module))
  952. {
  953. _dictModuleTask[module] = new PreAlignTask(module);
  954. }
  955. else if (ModuleHelper.IsLoadPort(module))
  956. {
  957. _dictModuleTask[module] = new LoadPortTask(module);
  958. }
  959. }
  960. }
  961. }
  962. private void prelude()
  963. {
  964. bool available = true;
  965. foreach (var mod in _dictModuleTask)
  966. {
  967. available = mod.Value.Scheduler.IsAvailable; // force scheduler update
  968. }
  969. }
  970. private void epilogue()
  971. {
  972. UpdateProcessJobStatus();
  973. UpdateControlJobStatus();
  974. CreateNewWaferTask();
  975. _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
  976. }
  977. private void RunWaferTask()
  978. {
  979. foreach (var task in _lstWaferTasks)
  980. {
  981. task.Run();
  982. }
  983. }
  984. private void RunModuleTasks()
  985. {
  986. foreach (var task in _dictModuleTask)
  987. {
  988. task.Value.Run();
  989. }
  990. }
  991. private void RoutingWafers()
  992. {
  993. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  994. {
  995. RunSchdTMActions();
  996. return;
  997. }
  998. if (_tmRobotStatus != RState.End)
  999. return;
  1000. if (_tmRobotSingleArmOption != 0)
  1001. {
  1002. RoutingWaferWithSingleArm();
  1003. return;
  1004. }
  1005. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1006. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1007. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1008. var robotWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList();
  1009. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1010. if(robotWafers.Count == 0)
  1011. {
  1012. if(readyReturnWafers.Count > 0)
  1013. {
  1014. if(readyReturnWafers.Count == 1)
  1015. {
  1016. // return one wafer
  1017. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1018. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, Hand.Blade1) });
  1019. }
  1020. else
  1021. {
  1022. // return two wafer
  1023. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[0].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1024. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[1].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
  1025. var doublePlaceActions = new List<MoveItem>
  1026. {
  1027. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers[0].destMod, readyReturnWafers[0].destSlot, Hand.Blade1),
  1028. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade2, readyReturnWafers[1].destMod, readyReturnWafers[1].destSlot, Hand.Blade2)
  1029. };
  1030. _tmSchdActions.Enqueue(doublePlaceActions);
  1031. }
  1032. }
  1033. else if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1034. {
  1035. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1036. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1037. if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1038. {
  1039. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1040. if(pmTask.ReadyMoveIn(alignerWafer))
  1041. {
  1042. // move aligner wafer to PM
  1043. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, alignerWafer.destMod, alignerWafer.destSlot, Hand.Blade1) });
  1044. }
  1045. }
  1046. }
  1047. else
  1048. {
  1049. if(emptyAndReadyIn20sPMs.Count >= 2 && waitInWafers.Count >= 2 && waitInWafers[0].currentMod == waitInWafers[1].currentMod)
  1050. {
  1051. var doublePickActions = new List<MoveItem>()
  1052. {
  1053. new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1),
  1054. new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2)
  1055. };
  1056. _tmSchdActions.Enqueue(doublePickActions);
  1057. if(aligner.Count > 0)
  1058. {
  1059. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1060. }
  1061. }
  1062. else if(emptyAndReadyIn20sPMs.Count >= 1 && waitInWafers.Count >= 1)
  1063. {
  1064. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1065. if (aligner.Count > 0)
  1066. {
  1067. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1068. }
  1069. }
  1070. }
  1071. }
  1072. else if(robotWafers.Count == 1)
  1073. {
  1074. var freeHand = robotWafers.First().currentSlot == 0 ? Hand.Blade2 : Hand.Blade1;
  1075. if (readyReturnWafers.Count >= 1)
  1076. {
  1077. // return one wafer
  1078. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1079. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand) });
  1080. }
  1081. else
  1082. {
  1083. if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1084. {
  1085. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1086. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1087. if(!robotWafers.First().IsAligned)
  1088. {
  1089. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1090. }
  1091. if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1092. {
  1093. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1094. if (pmTask.ReadyMoveIn(alignerWafer))
  1095. {
  1096. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, alignerWafer.destMod, alignerWafer.destSlot, freeHand) });
  1097. }
  1098. }
  1099. }
  1100. else
  1101. {
  1102. if (ModuleHelper.IsPm(robotWafers.First().destMod))
  1103. {
  1104. if (!robotWafers.First().IsAligned)
  1105. {
  1106. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1107. }
  1108. else if (emptyAndReadyIn20sPMs.Contains(robotWafers.First().destMod))
  1109. {
  1110. var pmTask = _dictModuleTask[robotWafers.First().destMod] as VenusPMTask;
  1111. if (pmTask.ReadyMoveIn(robotWafers.First()))
  1112. {
  1113. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1114. }
  1115. }
  1116. }
  1117. else if (ModuleHelper.IsLoadPort(robotWafers.First().destMod) && _dictModuleTask[robotWafers.First().destMod].Scheduler.IsAvailable)
  1118. {
  1119. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1120. }
  1121. }
  1122. }
  1123. }
  1124. else // had better not go here
  1125. {
  1126. foreach(var wafer in robotWafers)
  1127. {
  1128. if (ModuleHelper.IsPm(wafer.destMod))
  1129. {
  1130. if (!wafer.IsAligned)
  1131. {
  1132. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1133. {
  1134. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1135. }
  1136. }
  1137. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1138. {
  1139. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1140. if (pmTask.ReadyMoveIn(wafer))
  1141. {
  1142. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1143. }
  1144. }
  1145. }
  1146. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1147. {
  1148. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1149. }
  1150. }
  1151. }
  1152. }
  1153. private void RoutingWaferWithSingleArm()
  1154. {
  1155. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1156. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1157. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1158. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1159. var validHand = _tmRobotSingleArmOption == 1 ? Hand.Blade1 : Hand.Blade2;
  1160. var robotWafers = _lstWaferTasks.Where(wt => wt.currentMod == ModuleName.TMRobot && wt.currentSlot == (int)validHand).ToList();
  1161. if (robotWafers.Count == 0)
  1162. {
  1163. if (readyReturnWafers.Count > 0)
  1164. {
  1165. // return one wafer
  1166. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1167. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, validHand) });
  1168. }
  1169. else
  1170. {
  1171. if(_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1172. {
  1173. var alignerWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsAligner(wt.currentMod));
  1174. if(emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1175. {
  1176. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1177. // move aligner wafer to PM
  1178. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1179. if (pmTask.ReadyMoveIn(alignerWafer))
  1180. {
  1181. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, alignerWafer.destMod, alignerWafer.destSlot, validHand) });
  1182. }
  1183. }
  1184. }
  1185. else
  1186. {
  1187. foreach(var wafer in waitInWafers)
  1188. {
  1189. if(emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1190. {
  1191. // move one wafer from LP to aligner
  1192. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
  1193. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, aligner.First().Key, 0, validHand) });
  1194. }
  1195. }
  1196. }
  1197. }
  1198. }
  1199. else
  1200. {
  1201. var wafer = robotWafers[0];
  1202. if (ModuleHelper.IsPm(wafer.destMod))
  1203. {
  1204. if (!wafer.IsAligned)
  1205. {
  1206. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1207. {
  1208. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1209. }
  1210. }
  1211. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1212. {
  1213. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1214. if (pmTask.ReadyMoveIn(wafer))
  1215. {
  1216. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1217. }
  1218. }
  1219. }
  1220. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1221. {
  1222. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1223. }
  1224. }
  1225. }
  1226. private void RunSchdTMActions()
  1227. {
  1228. if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
  1229. {
  1230. if (_tmSchdActions.Count > 0)
  1231. {
  1232. if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
  1233. {
  1234. var nextActions = _tmSchdActions.First();
  1235. if (nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
  1236. return;
  1237. if (ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle) /// wait PMTask status update to idle
  1238. return;
  1239. _curTmAction = _tmSchdActions.Dequeue();
  1240. foreach (var action in _curTmAction)
  1241. {
  1242. var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
  1243. waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
  1244. }
  1245. (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).SendMoveItems(_curTmAction.ToArray());
  1246. }
  1247. }
  1248. else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
  1249. {
  1250. _curTmAction.Clear();
  1251. }
  1252. }
  1253. }
  1254. private bool isReturnActionsDone(List<MoveItem> items)
  1255. {
  1256. foreach (var item in items)
  1257. {
  1258. if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
  1259. return false;
  1260. }
  1261. return true;
  1262. }
  1263. private bool IsMovingActionsDone(List<MoveItem> actions)
  1264. {
  1265. bool CheckWaferExistence(ModuleName mod, int slot)
  1266. {
  1267. return ModuleHelper.IsLoadPort(mod) ? WaferManager.Instance.CheckHasWafer(mod, slot) : _lstWaferTasks.Exists(wt => wt.currentMod == mod && wt.currentSlot == slot);
  1268. }
  1269. if (actions.Count == 1)
  1270. {
  1271. if (CheckWaferExistence(actions.First().SourceModule, actions.First().SourceSlot) ||
  1272. !CheckWaferExistence(actions.First().DestinationModule, actions.First().DestinationSlot))
  1273. return false;
  1274. }
  1275. else
  1276. {
  1277. // initialize all the wafer existance before move
  1278. var slotWafers = new Dictionary<KeyValuePair<ModuleName, int>, bool>();
  1279. foreach (var ac in actions)
  1280. {
  1281. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1282. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1283. if (!slotWafers.ContainsKey(scrSlot))
  1284. {
  1285. slotWafers[scrSlot] = true;
  1286. }
  1287. if (!slotWafers.ContainsKey(destSlot))
  1288. {
  1289. slotWafers[destSlot] = false;
  1290. }
  1291. }
  1292. // simulate moved result
  1293. foreach (var ac in actions)
  1294. {
  1295. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1296. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1297. if (!slotWafers[scrSlot])
  1298. {
  1299. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[scrSlot]} do not has a wafer");
  1300. }
  1301. else
  1302. {
  1303. slotWafers[scrSlot] = false;
  1304. }
  1305. if (slotWafers[destSlot])
  1306. {
  1307. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[destSlot]} has a wafer");
  1308. }
  1309. else
  1310. {
  1311. slotWafers[destSlot] = true;
  1312. }
  1313. }
  1314. foreach (var slot in slotWafers)
  1315. {
  1316. if (slot.Value != CheckWaferExistence(slot.Key.Key, slot.Key.Value))
  1317. return false;
  1318. }
  1319. }
  1320. return true;
  1321. }
  1322. private void WaferArrived(WaferTask wafer, MoveItem item)
  1323. {
  1324. _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);
  1325. //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
  1326. if (ModuleHelper.IsLoadPort(item.DestinationModule))
  1327. {
  1328. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
  1329. if (currentControlJob != null)
  1330. {
  1331. _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
  1332. }
  1333. }
  1334. //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
  1335. }
  1336. private void WaferLeaved(WaferTask wafer, MoveItem item)
  1337. {
  1338. _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
  1339. //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
  1340. if (ModuleHelper.IsLoadPort(item.SourceModule))
  1341. {
  1342. (_dictModuleTask[wafer.destMod] as VenusPMTask).SubscribeWaferTask(wafer);
  1343. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
  1344. if (currentControlJob != null)
  1345. {
  1346. _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
  1347. }
  1348. }
  1349. //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
  1350. }
  1351. private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  1352. {
  1353. bool allWaferReturn = true;
  1354. foreach (var slot in pj.SlotWafers)
  1355. {
  1356. var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
  1357. if (wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
  1358. {
  1359. allWaferReturn = false;
  1360. break;
  1361. }
  1362. }
  1363. return allWaferReturn;
  1364. }
  1365. private void ReturnInternalWafers()
  1366. {
  1367. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1368. {
  1369. RunSchdTMReturnActions();
  1370. return;
  1371. }
  1372. if (_tmRobotStatus != RState.End)
  1373. return;
  1374. for (int i = 0; i < 2; i++)
  1375. {
  1376. if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, i))
  1377. {
  1378. var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, i);
  1379. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
  1380. return;
  1381. }
  1382. }
  1383. foreach(var mod in _dictModuleTask)
  1384. {
  1385. if (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsLoadPort(mod.Key))
  1386. continue;
  1387. if(WaferManager.Instance.CheckHasWafer(mod.Key, 0))
  1388. {
  1389. var wafer = WaferManager.Instance.GetWafer(mod.Key, 0);
  1390. var freeHands = GetTMFreeHand();
  1391. if(freeHands.Count > 0)
  1392. {
  1393. var hand = freeHands[0];
  1394. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(mod.Key, 0, ModuleName.TMRobot, (int)hand, hand) });
  1395. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hand, (ModuleName)wafer.OriginStation, wafer.OriginSlot, hand) });
  1396. return;
  1397. }
  1398. }
  1399. }
  1400. }
  1401. private List<Hand> GetTMFreeHand()
  1402. {
  1403. var lstHands = new List<Hand>();
  1404. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
  1405. lstHands.Add(Hand.Blade1);
  1406. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
  1407. lstHands.Add(Hand.Blade2);
  1408. return lstHands;
  1409. }
  1410. private void UpdateProcessJobStatus()
  1411. {
  1412. if (_tmRobotStatus == RState.Running)
  1413. return;
  1414. foreach (var pj in _lstProcessJobs)
  1415. {
  1416. if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
  1417. {
  1418. pj.SetState(EnumProcessJobState.ProcessingComplete);
  1419. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  1420. }
  1421. }
  1422. }
  1423. private void UpdateControlJobStatus()
  1424. {
  1425. if (_lstControlJobs.Count == 0 || _tmRobotStatus == RState.Running)
  1426. return;
  1427. var runningJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Executing);
  1428. var queueJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Queued).OrderBy(cj => cj.StartTime);
  1429. if (runningJobs.Count == 0)
  1430. {
  1431. if (queueJobs.Count() > 0)
  1432. {
  1433. // start the first waiting job
  1434. RunControlJob(queueJobs.First());
  1435. }
  1436. }
  1437. else
  1438. {
  1439. foreach (var runningjob in runningJobs)
  1440. {
  1441. // update the running job
  1442. RunControlJob(runningjob);
  1443. }
  1444. foreach (var queueJob in queueJobs)
  1445. {
  1446. if (!runningJobs.Exists(cj => IsControlJobIntersect(cj, queueJob)))
  1447. {
  1448. // parallelly start the not intersect job
  1449. RunControlJob(queueJob);
  1450. }
  1451. }
  1452. }
  1453. // update system cycle status
  1454. if (_lstControlJobs.All(cj => cj.State == EnumControlJobState.Completed))
  1455. _cycleState = RState.End;
  1456. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  1457. foreach (var cj in _lstControlJobs)
  1458. {
  1459. LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
  1460. if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
  1461. {
  1462. cjRemoveList.Add(cj);
  1463. }
  1464. }
  1465. foreach (var cj in cjRemoveList)
  1466. {
  1467. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1468. foreach (var pj in _lstProcessJobs)
  1469. {
  1470. if (pj.ControlJobName == cj.Name)
  1471. pjRemoveList.Add(pj);
  1472. }
  1473. foreach (var pj in pjRemoveList)
  1474. {
  1475. _lstProcessJobs.Remove(pj);
  1476. }
  1477. _lstControlJobs.Remove(cj);
  1478. }
  1479. }
  1480. private bool RunControlJob(ControlJobInfo cj)
  1481. {
  1482. switch (cj.JetState)
  1483. {
  1484. case EnumJetCtrlJobState.Quequed:
  1485. {
  1486. if (IsCtrlJobNeedPreClean(cj))
  1487. {
  1488. cj.JetState = EnumJetCtrlJobState.PreJobClean;
  1489. var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  1490. foreach (var pm in PMs)
  1491. {
  1492. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1493. if (pmTask != null && pmTask.Scheduler.IsOnline)
  1494. {
  1495. pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PreClean);
  1496. }
  1497. }
  1498. }
  1499. else
  1500. {
  1501. ActiveControlJob(cj);
  1502. }
  1503. cj.SetState(EnumControlJobState.Executing);
  1504. }
  1505. break;
  1506. case EnumJetCtrlJobState.PreJobClean:
  1507. {
  1508. if (IsPreJobCleanDone(cj))
  1509. {
  1510. ActiveControlJob(cj);
  1511. }
  1512. }
  1513. break;
  1514. case EnumJetCtrlJobState.Processing:
  1515. {
  1516. if (IsCtrlJobNeedPostClean(cj))
  1517. {
  1518. if (IsAllJobWaferProcessedOrProcessing(cj))
  1519. {
  1520. cj.JetState = EnumJetCtrlJobState.PostJobClean;
  1521. var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  1522. foreach (var pm in PMs)
  1523. {
  1524. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1525. if (pmTask != null && pmTask.Scheduler.IsOnline)
  1526. {
  1527. pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PostClean);
  1528. }
  1529. }
  1530. }
  1531. }
  1532. else
  1533. {
  1534. if (IsAllProcessJobComplete(cj))
  1535. {
  1536. cj.JetState = EnumJetCtrlJobState.Completed;
  1537. }
  1538. }
  1539. }
  1540. break;
  1541. case EnumJetCtrlJobState.PostJobClean:
  1542. {
  1543. if (IsPostJobCleanDone(cj))
  1544. {
  1545. cj.JetState = EnumJetCtrlJobState.Completed;
  1546. }
  1547. }
  1548. break;
  1549. }
  1550. // caculate processed wafer by control job
  1551. var lp = ModuleHelper.Converter(cj.Module);
  1552. int countProcessed = 0;
  1553. foreach (var pjName in cj.ProcessJobNameList)
  1554. {
  1555. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1556. if (pj == null)
  1557. {
  1558. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  1559. continue;
  1560. }
  1561. // caculate process wafer by process
  1562. if (_lpCycleCount[lp] < cj.CycleNumber)
  1563. {
  1564. foreach (var pjSlotWafer in pj.SlotWafers)
  1565. {
  1566. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1567. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  1568. countProcessed++;
  1569. }
  1570. }
  1571. }
  1572. int lpCycleWafer = 0;
  1573. if (cj.JetState == EnumJetCtrlJobState.Completed)
  1574. {
  1575. cj.EndTime = DateTime.Now;
  1576. _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
  1577. _dbCallback.LotFinished(cj);
  1578. if (_lpCycleCount[lp] >= cj.CycleNumber)
  1579. (Singleton<TransferModule>.Instance.GetScheduler(lp) as SchedulerLoadPort).NoteJobComplete();
  1580. _lpCycleCount[lp]++;
  1581. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count;
  1582. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  1583. LOG.Write(eEvent.EV_ROUTER, lp, $"Cycle Count: {_lpCycleCount[lp]}, Total Processed Wafer: {lpCycleWafer}, Throughput: {_lpThroughput[lp]}");
  1584. if (_lpCycleCount[lp] < cj.CycleNumber)
  1585. {
  1586. cj.SetState(EnumControlJobState.Executing);
  1587. cj.JetState = EnumJetCtrlJobState.Quequed;
  1588. cj.LotInnerId = Guid.NewGuid();
  1589. _dbCallback.LotCreated(cj);
  1590. foreach (var pj in _lstProcessJobs)
  1591. {
  1592. if (pj.ControlJobName == cj.Name)
  1593. {
  1594. pj.SetState(EnumProcessJobState.Queued);
  1595. pj.InnerId = Guid.NewGuid();
  1596. foreach (var pjSlotWafer in pj.SlotWafers)
  1597. {
  1598. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1599. wafer.ProcessJob = null;
  1600. wafer.NextSequenceStep = 0;
  1601. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1602. }
  1603. }
  1604. }
  1605. _lstWaferTasks.RemoveAll(wt => wt.currentMod == lp);
  1606. }
  1607. else
  1608. {
  1609. cj.SetState(EnumControlJobState.Completed);
  1610. }
  1611. }
  1612. else
  1613. {
  1614. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count + countProcessed;
  1615. }
  1616. if (lpCycleWafer != _lpCycleWafer[lp])
  1617. {
  1618. _lpCycleWafer[lp] = lpCycleWafer;
  1619. if (_lpCycleCount[lp] > 0)
  1620. {
  1621. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  1622. }
  1623. }
  1624. return cj.State == EnumControlJobState.Completed;
  1625. }
  1626. private bool IsControlJobIntersect(ControlJobInfo cj1, ControlJobInfo cj2)
  1627. {
  1628. var cj1Pms = GetWaitPreCleanPMsByCtrlJob(cj1);
  1629. var cj2Pms = GetWaitPreCleanPMsByCtrlJob(cj2);
  1630. return cj1Pms.Intersect(cj2Pms).Count() > 0;
  1631. }
  1632. private bool IsCtrlJobNeedPreClean(ControlJobInfo cj)
  1633. {
  1634. return !string.IsNullOrWhiteSpace(cj.PreJobClean);
  1635. }
  1636. private bool IsCtrlJobNeedPostClean(ControlJobInfo cj)
  1637. {
  1638. return !string.IsNullOrWhiteSpace(cj.PostJobClean.Trim());
  1639. }
  1640. private bool IsPreJobCleanDone(ControlJobInfo cj)
  1641. {
  1642. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  1643. foreach (var pm in pms)
  1644. {
  1645. var pmTask = _dictModuleTask[pm] as PMTask;
  1646. if (pmTask.Scheduler.IsOnline && !pmTask.IsPreJobCleanDone())
  1647. return false;
  1648. }
  1649. return true;
  1650. }
  1651. private bool IsPostJobCleanDone(ControlJobInfo cj)
  1652. {
  1653. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  1654. foreach (var pm in pms)
  1655. {
  1656. var pmTask = _dictModuleTask[pm] as PMTask;
  1657. if (pmTask.Scheduler.IsOnline && !pmTask.IsPostJobCleanDone())
  1658. return false;
  1659. }
  1660. return true;
  1661. }
  1662. private bool ActiveProcessJob(ProcessJobInfo pj)
  1663. {
  1664. foreach (var pjSlotWafer in pj.SlotWafers)
  1665. {
  1666. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1667. wafer.ProcessJob = pj;
  1668. wafer.NextSequenceStep = 0;
  1669. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  1670. }
  1671. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);
  1672. CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
  1673. JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
  1674. pj.SetState(EnumProcessJobState.Processing);
  1675. return true;
  1676. }
  1677. private bool ActiveControlJob(ControlJobInfo cj)
  1678. {
  1679. cj.JetState = EnumJetCtrlJobState.Processing;
  1680. foreach (var pjName in cj.ProcessJobNameList)
  1681. {
  1682. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1683. if (pj == null)
  1684. {
  1685. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  1686. continue;
  1687. }
  1688. if (pj.State == EnumProcessJobState.Queued)
  1689. {
  1690. ActiveProcessJob(pj);
  1691. }
  1692. }
  1693. return true;
  1694. }
  1695. private bool IsAllProcessJobComplete(ControlJobInfo cj)
  1696. {
  1697. foreach (var pj in _lstProcessJobs)
  1698. {
  1699. if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
  1700. {
  1701. return false;
  1702. }
  1703. }
  1704. return true;
  1705. }
  1706. private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
  1707. {
  1708. List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
  1709. int original = (int)ModuleHelper.Converter(cj.Module);
  1710. foreach (var mod in allModules)
  1711. {
  1712. if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
  1713. continue;
  1714. var wafers = WaferManager.Instance.GetWafers(mod);
  1715. foreach (var wafer in wafers)
  1716. {
  1717. if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
  1718. continue;
  1719. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
  1720. return false; ;
  1721. }
  1722. }
  1723. return true;
  1724. }
  1725. private ModuleName GetComingAvailablePM(ControlJobInfo cj)
  1726. {
  1727. var lstInProcessPMs = new List<ModuleName>();
  1728. foreach (var wafer in cj.LotWafers)
  1729. {
  1730. if (!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
  1731. {
  1732. foreach (var pm in wafer.ProcessJob.Sequence.PMs)
  1733. {
  1734. if (!lstInProcessPMs.Contains(pm) && _dictModuleTask[pm].Scheduler.IsOnline)
  1735. lstInProcessPMs.Add(pm);
  1736. }
  1737. }
  1738. }
  1739. Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
  1740. foreach (var mod in _dictModuleTask)
  1741. {
  1742. if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
  1743. {
  1744. pmAssociatedWaferCount[mod.Key] = 0;
  1745. }
  1746. }
  1747. var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
  1748. foreach (var wafer in unprocessedWafer)
  1749. {
  1750. if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
  1751. {
  1752. pmAssociatedWaferCount[wafer.destMod]++;
  1753. }
  1754. }
  1755. var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
  1756. if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
  1757. return oderedPMCount.First().Key;
  1758. return ModuleName.System;
  1759. }
  1760. private void CreateNewWaferTask()
  1761. {
  1762. var runningJobs = _lstControlJobs.FindAll(cj => cj.JetState == EnumJetCtrlJobState.PreJobClean || cj.JetState == EnumJetCtrlJobState.Processing);
  1763. var onDutyPms = new Dictionary<ModuleName, int>();
  1764. foreach (var job in runningJobs)
  1765. {
  1766. var pms = GetWaitPreCleanPMsByCtrlJob(job);
  1767. foreach (var pm in pms)
  1768. {
  1769. if (_dictModuleTask[pm].Scheduler.IsOnline && !onDutyPms.ContainsKey(pm))
  1770. {
  1771. onDutyPms[pm] = _lstWaferTasks.Where(wt => wt.destMod == pm).Count();
  1772. }
  1773. }
  1774. }
  1775. if (runningJobs.Count == 0 || onDutyPms.Count == 0)
  1776. return;
  1777. var oderedPMs = onDutyPms.OrderBy(kv => kv.Value).OrderBy(kv => _dictModuleTask[kv.Key].TimeToReady);
  1778. if (oderedPMs.First().Value < 1)
  1779. {
  1780. foreach (var runningJob in runningJobs)
  1781. {
  1782. foreach (var wafer in runningJob.LotWafers)
  1783. {
  1784. if (wafer.IsEmpty || wafer.ProcessJob == null)
  1785. continue;
  1786. if (wafer.ProcessJob.Sequence.PMs.Contains(oderedPMs.First().Key) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
  1787. {
  1788. CreateWaferTasks(wafer, oderedPMs.First().Key);
  1789. return;
  1790. }
  1791. }
  1792. }
  1793. }
  1794. }
  1795. private void CreateWaferTasks(WaferInfo wafer, ModuleName pm)
  1796. {
  1797. var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
  1798. var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
  1799. Recipe recipe = Recipe.Load(recipeContent);
  1800. int temperature = 0;
  1801. if (int.TryParse(recipe.Header.Temperature, out int temp))
  1802. {
  1803. temperature = temp;
  1804. }
  1805. var waferTask = new WaferTask((ModuleName)wafer.OriginStation,
  1806. wafer.OriginSlot,
  1807. pm,
  1808. 0,
  1809. temperature,
  1810. wafer.InnerId,
  1811. recipeName,
  1812. wafer.ProcessJob.Sequence.WTWCleanRecipe,
  1813. wafer.ProcessJob.Sequence.LLInOutPath,
  1814. wafer.ProcessJob.Sequence.LLDelayTime,
  1815. IsSequenceNeedAlign(wafer.ProcessJob.Sequence)); // post clean
  1816. waferTask.OnWaferArrived += WaferArrived;
  1817. waferTask.OnWaferLeaved += WaferLeaved;
  1818. _lstWaferTasks.Add(waferTask);
  1819. }
  1820. private bool IsSequenceNeedAlign(SequenceInfo sequence)
  1821. {
  1822. // check wether need align
  1823. foreach (var step in sequence.Steps)
  1824. {
  1825. foreach (var mod in step.StepModules)
  1826. {
  1827. if (ModuleHelper.IsAligner(mod))
  1828. return true;
  1829. }
  1830. }
  1831. return false;
  1832. }
  1833. private void RunSchdTMReturnActions()
  1834. {
  1835. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  1836. if (tmRobot == null || !tmRobot.IsAvailable)
  1837. return;
  1838. if (_tmSchdActions.Count > 0)
  1839. {
  1840. if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
  1841. {
  1842. var nextActions = _tmSchdActions.First();
  1843. var nextModule = nextActions.First().Module;
  1844. if (!_dictModuleTask[nextModule].IsIdle)
  1845. return;
  1846. _curTmAction = _tmSchdActions.Dequeue();
  1847. tmRobot.SendMoveItems(_curTmAction.ToArray());
  1848. }
  1849. }
  1850. else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
  1851. {
  1852. _curTmAction.Clear();
  1853. }
  1854. }
  1855. #endregion internal implementation
  1856. #region sequence/recipe validation
  1857. private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
  1858. {
  1859. reason = "";
  1860. foreach (var pm in seq.PMs)
  1861. {
  1862. if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
  1863. return true;
  1864. }
  1865. reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);
  1866. return false;
  1867. }
  1868. private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
  1869. {
  1870. for (int i = 0; i < seq.Steps.Count; i++)
  1871. {
  1872. SequenceStepInfo stepInfo = seq.Steps[i];
  1873. foreach (var module in stepInfo.StepModules)
  1874. {
  1875. if (ModuleHelper.IsPm(module))
  1876. {
  1877. string attr = $"{module}Recipe";
  1878. if (stepInfo.StepParameter.ContainsKey(attr)
  1879. && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
  1880. {
  1881. var recipeName = (string)stepInfo.StepParameter[attr];
  1882. if (!string.IsNullOrWhiteSpace(recipeName))
  1883. {
  1884. var recipeContent =
  1885. RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
  1886. if (string.IsNullOrWhiteSpace(recipeContent))
  1887. {
  1888. reason = $"Can not find recipe file{recipeName}";
  1889. return false;
  1890. }
  1891. }
  1892. }
  1893. }
  1894. }
  1895. }
  1896. reason = "";
  1897. return true;
  1898. }
  1899. private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
  1900. {
  1901. var pmlist = new List<ModuleName>();
  1902. foreach (var pj in _lstProcessJobs)
  1903. {
  1904. if (pj.ControlJobName == cj.Name)
  1905. {
  1906. foreach (var pm in pj.Sequence.PMs)
  1907. {
  1908. if (!pmlist.Contains(pm))
  1909. pmlist.Add(pm);
  1910. }
  1911. }
  1912. }
  1913. return pmlist;
  1914. }
  1915. #endregion
  1916. }
  1917. }