SimulatorSystem.cs 116 KB

1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950515253545556575859606162636465666768697071727374757677787980818283848586878889909192939495969798991001011021031041051061071081091101111121131141151161171181191201211221231241251261271281291301311321331341351361371381391401411421431441451461471481491501511521531541551561571581591601611621631641651661671681691701711721731741751761771781791801811821831841851861871881891901911921931941951961971981992002012022032042052062072082092102112122132142152162172182192202212222232242252262272282292302312322332342352362372382392402412422432442452462472482492502512522532542552562572582592602612622632642652662672682692702712722732742752762772782792802812822832842852862872882892902912922932942952962972982993003013023033043053063073083093103113123133143153163173183193203213223233243253263273283293303313323333343353363373383393403413423433443453463473483493503513523533543553563573583593603613623633643653663673683693703713723733743753763773783793803813823833843853863873883893903913923933943953963973983994004014024034044054064074084094104114124134144154164174184194204214224234244254264274284294304314324334344354364374384394404414424434444454464474484494504514524534544554564574584594604614624634644654664674684694704714724734744754764774784794804814824834844854864874884894904914924934944954964974984995005015025035045055065075085095105115125135145155165175185195205215225235245255265275285295305315325335345355365375385395405415425435445455465475485495505515525535545555565575585595605615625635645655665675685695705715725735745755765775785795805815825835845855865875885895905915925935945955965975985996006016026036046056066076086096106116126136146156166176186196206216226236246256266276286296306316326336346356366376386396406416426436446456466476486496506516526536546556566576586596606616626636646656666676686696706716726736746756766776786796806816826836846856866876886896906916926936946956966976986997007017027037047057067077087097107117127137147157167177187197207217227237247257267277287297307317327337347357367377387397407417427437447457467477487497507517527537547557567577587597607617627637647657667677687697707717727737747757767777787797807817827837847857867877887897907917927937947957967977987998008018028038048058068078088098108118128138148158168178188198208218228238248258268278288298308318328338348358368378388398408418428438448458468478488498508518528538548558568578588598608618628638648658668678688698708718728738748758768778788798808818828838848858868878888898908918928938948958968978988999009019029039049059069079089099109119129139149159169179189199209219229239249259269279289299309319329339349359369379389399409419429439449459469479489499509519529539549559569579589599609619629639649659669679689699709719729739749759769779789799809819829839849859869879889899909919929939949959969979989991000100110021003100410051006100710081009101010111012101310141015101610171018101910201021102210231024102510261027102810291030103110321033103410351036103710381039104010411042104310441045104610471048104910501051105210531054105510561057105810591060106110621063106410651066106710681069107010711072107310741075107610771078107910801081108210831084108510861087108810891090109110921093109410951096109710981099110011011102110311041105110611071108110911101111111211131114111511161117111811191120112111221123112411251126112711281129113011311132113311341135113611371138113911401141114211431144114511461147114811491150115111521153115411551156115711581159116011611162116311641165116611671168116911701171117211731174117511761177117811791180118111821183118411851186118711881189119011911192119311941195119611971198119912001201120212031204120512061207120812091210121112121213121412151216121712181219122012211222122312241225122612271228122912301231123212331234123512361237123812391240124112421243124412451246124712481249125012511252125312541255125612571258125912601261126212631264126512661267126812691270127112721273127412751276127712781279128012811282128312841285128612871288128912901291129212931294129512961297129812991300130113021303130413051306130713081309131013111312131313141315131613171318131913201321132213231324132513261327132813291330133113321333133413351336133713381339134013411342134313441345134613471348134913501351135213531354135513561357135813591360136113621363136413651366136713681369137013711372137313741375137613771378137913801381138213831384138513861387138813891390139113921393139413951396139713981399140014011402140314041405140614071408140914101411141214131414141514161417141814191420142114221423142414251426142714281429143014311432143314341435143614371438143914401441144214431444144514461447144814491450145114521453145414551456145714581459146014611462146314641465146614671468146914701471147214731474147514761477147814791480148114821483148414851486148714881489149014911492149314941495149614971498149915001501150215031504150515061507150815091510151115121513151415151516151715181519152015211522152315241525152615271528152915301531153215331534153515361537153815391540154115421543154415451546154715481549155015511552155315541555155615571558155915601561156215631564156515661567156815691570157115721573157415751576157715781579158015811582158315841585158615871588158915901591159215931594159515961597159815991600160116021603160416051606160716081609161016111612161316141615161616171618161916201621162216231624162516261627162816291630163116321633163416351636163716381639164016411642164316441645164616471648164916501651165216531654165516561657165816591660166116621663166416651666166716681669167016711672167316741675167616771678167916801681168216831684168516861687168816891690169116921693169416951696169716981699170017011702170317041705170617071708170917101711171217131714171517161717171817191720172117221723172417251726172717281729173017311732173317341735173617371738173917401741174217431744174517461747174817491750175117521753175417551756175717581759176017611762176317641765176617671768176917701771177217731774177517761777177817791780178117821783178417851786178717881789179017911792179317941795179617971798179918001801180218031804180518061807180818091810181118121813181418151816181718181819182018211822182318241825182618271828182918301831183218331834183518361837183818391840184118421843184418451846184718481849185018511852185318541855185618571858185918601861186218631864186518661867186818691870187118721873187418751876187718781879188018811882188318841885188618871888188918901891189218931894189518961897189818991900190119021903190419051906190719081909191019111912191319141915191619171918191919201921192219231924192519261927192819291930193119321933193419351936193719381939194019411942194319441945194619471948194919501951195219531954195519561957195819591960196119621963196419651966196719681969197019711972197319741975197619771978197919801981198219831984198519861987198819891990199119921993199419951996199719981999200020012002200320042005200620072008200920102011201220132014201520162017201820192020202120222023202420252026202720282029203020312032203320342035203620372038203920402041204220432044204520462047204820492050205120522053205420552056205720582059206020612062206320642065206620672068206920702071207220732074207520762077207820792080208120822083208420852086208720882089209020912092209320942095209620972098209921002101210221032104210521062107210821092110211121122113211421152116211721182119212021212122212321242125212621272128212921302131213221332134213521362137213821392140214121422143214421452146214721482149215021512152215321542155215621572158215921602161216221632164216521662167216821692170217121722173217421752176217721782179218021812182218321842185218621872188218921902191219221932194219521962197219821992200220122022203220422052206220722082209221022112212221322142215221622172218221922202221222222232224222522262227222822292230223122322233223422352236223722382239224022412242224322442245224622472248224922502251225222532254225522562257225822592260226122622263226422652266226722682269227022712272227322742275227622772278227922802281228222832284228522862287228822892290229122922293229422952296229722982299230023012302230323042305230623072308230923102311231223132314231523162317231823192320232123222323232423252326232723282329233023312332233323342335233623372338233923402341234223432344234523462347234823492350235123522353235423552356235723582359236023612362236323642365236623672368236923702371237223732374237523762377237823792380238123822383238423852386238723882389239023912392239323942395239623972398239924002401240224032404240524062407
  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. namespace Venus_Simulator.Instances
  15. {
  16. public class SimulatorSystem : Singleton<SimulatorSystem>
  17. {
  18. private PeriodicJob _thread;
  19. private Random _rd = new Random();
  20. private RD_TRIG _trigATM = new RD_TRIG();
  21. private RD_TRIG _trigVAC = new RD_TRIG();
  22. private R_TRIG _trigLLExtend = new R_TRIG();
  23. private R_TRIG _trigLLRetract = new R_TRIG();
  24. private static int count = 0;
  25. private readonly float ATM_THRESHOLD = 750000;
  26. private readonly float ATM_PRESSURE = 760000;
  27. private readonly float ATM_LoadLock_PRESSURE = 760000;
  28. private readonly uint VAC_SW_PRESSURE = 9500;
  29. private readonly uint PROCESS_GAUGE = 10000;
  30. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  31. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  32. public SimulatorSystem()
  33. {
  34. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  35. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  36. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  37. // TODO
  38. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  39. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  40. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  41. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  42. }
  43. ~SimulatorSystem()
  44. {
  45. _thread?.Stop();
  46. }
  47. public void Initialize()
  48. {
  49. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  50. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  51. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  52. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  53. SetTMDefaultValue();
  54. SetSETMDefaultValue();
  55. Singleton<DataManager>.Instance.Initialize(false);
  56. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  57. }
  58. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  59. {
  60. switch (jetChamber)
  61. {
  62. case JetChamber.Venus:
  63. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  64. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  65. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  66. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  67. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  68. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  69. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  70. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  71. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  72. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  73. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  74. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  75. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  76. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  78. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  83. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  85. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  86. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  88. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  89. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  90. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  91. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  92. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  93. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  94. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  96. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  99. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  100. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  101. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  102. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  104. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  106. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  107. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  108. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  109. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  110. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  111. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  112. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  113. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  114. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  115. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  116. //// pressure
  117. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  118. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  119. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  120. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  121. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  122. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000.02F);
  123. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  124. //// Temperature
  125. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  126. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  127. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  128. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  129. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  130. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  131. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  132. //if (mod == ModuleName.PMA)
  133. //{
  134. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  135. //}
  136. //else if (mod == ModuleName.PMB)
  137. //{
  138. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  139. //}
  140. // Datetime
  141. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  142. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  143. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  144. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  145. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  146. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  147. break;
  148. case JetChamber.VenusSE:
  149. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  150. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  151. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  152. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  153. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  154. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  155. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  156. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  157. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  158. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  159. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  160. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  161. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  162. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  164. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  165. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  167. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  168. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  169. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  170. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  171. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  172. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  173. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  174. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  175. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  177. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  179. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  180. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  184. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  185. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  186. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  188. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  189. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  190. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  195. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  196. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  197. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  198. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  199. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  200. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  201. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  202. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  203. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  204. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  205. //// pressure
  206. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  207. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  208. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  209. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  210. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  211. //// Temperature
  212. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  213. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  214. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  215. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  216. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  217. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  218. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  219. // Datetime
  220. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  221. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  222. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  223. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  224. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  225. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  226. break;
  227. case JetChamber.VenusDE:
  228. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  229. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  230. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  231. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  232. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  233. IO.DI[$"{mod}.DI_Lift_Pin_Up_Pos"].Value = false;
  234. IO.DI[$"{mod}.DI_Lift_Pin_Down_Pos"].Value = true;
  235. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  236. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  237. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  238. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  239. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  240. IO.DI[$"{mod}.DI_Slit_Door_Open_Position"].Value = true;
  241. IO.DI[$"{mod}.DI_Slit_Door_Close_Position"].Value = false;
  242. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  243. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  244. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  245. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  246. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  247. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  248. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  249. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  250. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  251. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  252. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  253. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  254. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  255. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  256. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  257. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  258. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  259. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  260. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  261. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  262. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  264. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  265. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  266. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  267. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  268. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  269. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  270. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  271. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  272. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  273. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  274. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  275. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  276. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  277. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  279. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  281. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  282. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  283. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  284. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  285. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  286. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  287. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  288. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  289. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  290. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  291. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  292. //// pressure
  293. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  294. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  295. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  296. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  297. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  298. //// Temperature
  299. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  300. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  301. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  302. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  303. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  304. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  305. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  306. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  307. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  308. // Datetime
  309. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  310. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  311. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  312. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  313. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  314. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  315. break;
  316. case JetChamber.Kepler2300:
  317. // chamber
  318. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  319. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  320. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  321. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  322. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  323. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  324. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  325. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  326. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  327. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  328. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  329. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  330. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  331. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  332. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  333. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  334. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  335. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  336. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  337. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  338. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  339. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  340. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  341. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  342. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  343. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  344. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  345. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  346. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  347. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  348. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  349. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  350. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  351. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  352. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  353. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  354. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  355. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  356. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  357. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  358. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  359. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  360. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  361. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  362. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  363. //// pressure
  364. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  365. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  366. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  367. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  368. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  369. //// Temperature
  370. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  371. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  372. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  373. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  374. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  375. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  376. // Datetime
  377. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  378. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  379. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  380. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  381. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  382. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  383. break;
  384. case JetChamber.Kepler2200A:
  385. case JetChamber.Kepler2200B:
  386. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  387. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  388. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  389. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  390. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  391. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  392. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  393. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  394. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  395. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  396. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  397. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  398. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  399. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  400. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  401. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  402. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  403. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  404. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  405. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  406. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  407. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  408. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  409. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  410. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  411. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  412. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  413. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  414. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  415. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  416. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  417. //// pressure
  418. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  419. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  420. SetAiValue($"{mod}.AI_Process_Pressure_2t", 100);
  421. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  422. //// Temperature
  423. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  424. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  425. // Datetime
  426. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  427. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  428. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  429. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  430. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  431. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  432. break;
  433. }
  434. }
  435. private void SetTMDefaultValue()
  436. {
  437. ModuleName mod = ModuleName.TM;
  438. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  439. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  440. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  441. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  442. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  443. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  444. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  445. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  446. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  447. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  448. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  449. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  450. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  451. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  452. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  453. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  454. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  455. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  456. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  457. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  458. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  459. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  460. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  461. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  462. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  463. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  464. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  465. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  466. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  467. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  468. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  469. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  470. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  471. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  472. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  473. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  474. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  475. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  476. // Datetime
  477. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  478. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  479. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  480. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  481. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  482. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  483. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  484. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  485. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  486. {
  487. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  488. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  489. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  490. }
  491. else
  492. {
  493. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  494. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  495. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  496. }
  497. }
  498. private void SetSETMDefaultValue()
  499. {
  500. ModuleName mod = ModuleName.SETM;
  501. IO.DI[$"{mod}.DI_TM_DI1"].Value = true;
  502. IO.DI[$"{mod}.DI_TM_DI2"].Value = true;
  503. IO.DI[$"{mod}.DI_TM_DI3"].Value = true;
  504. IO.DI[$"{mod}.DI_TM_DI5"].Value = true;
  505. IO.DI[$"{mod}.DI_TM_DI7"].Value = true;
  506. IO.DI[$"{mod}.DI_VCE_A"].Value = true;
  507. IO.DI[$"{mod}.DI_TM_A"].Value = true;
  508. IO.DI[$"{mod}.DI_VCE_SS"].Value = false;
  509. IO.DI[$"{mod}.DI_PMB_SS"].Value = false;
  510. IO.DI[$"{mod}.DI_PMA_SS"].Value = false;
  511. IO.DI[$"{mod}.DI_PMC_SS"].Value = false;
  512. IO.DI[$"{mod}.DI_SYS_C1"].Value = true;
  513. IO.DI[$"{mod}.DI_SYS_C2"].Value = false;
  514. IO.DI[$"{mod}.DI_SYS_C3"].Value = false;
  515. IO.DI[$"{mod}.DI_SYS_C4"].Value = false;
  516. IO.DI[$"{mod}.DI_TSYS_C5"].Value = false;
  517. IO.DI[$"{mod}.DI_TM_N2_1"].Value = true;
  518. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  519. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  520. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
  521. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  522. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
  523. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  524. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
  525. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  526. IO.DI[$"{mod}.DI_TM_HE"].Value = true;
  527. IO.DI[$"{mod}.DI_TM_N2_2"].Value = true;
  528. IO.DI[$"{mod}.DI_TM_DI8"].Value = true;
  529. IO.DI[$"{mod}.DI_TM_LEAK"].Value = true;
  530. IO.DI[$"{mod}.DI_TM_CDA"].Value = true;
  531. IO.DI[$"{mod}.DI_VCE_V"].Value = false;
  532. IO.DI[$"{mod}.DI_TM_V"].Value = false;
  533. IO.DI[$"{mod}.DI_TM_LEAK"].Value = true;
  534. IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
  535. IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
  536. IO.DI[$"{mod}.DI_PMA_RB_RET"].Value = true;
  537. IO.DI[$"{mod}.DI_PMB_RB_RET"].Value = true;
  538. IO.DI[$"{mod}.DI_PMC_RB_RET"].Value = true;
  539. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  540. SetAiValue($"{mod}.AI_VCE_Vacuum_Gauge", 3000);
  541. SetAiValue($"{mod}.AI_Pipeline_Vacuum_Gauge", 3000);
  542. SetAiValue($"{mod}.AI_TM_Vacuum_Gauge", 3000);
  543. }
  544. private bool OnMonitor()
  545. {
  546. try
  547. {
  548. foreach (var item in jetChambers)
  549. {
  550. switch (item.Value)
  551. {
  552. case JetChamber.Venus:
  553. MonitorSlitDoor(item.Key);
  554. MonitorPin(item.Key);
  555. MonitorPressure(item.Key);
  556. MonitorExtendAndRetract(item.Key);
  557. MonitorGas(item.Key);
  558. this.SimulateHe(item.Key);
  559. //MonitorRF(item.Key);
  560. ChangeTime(item.Key);
  561. //MonitorIOPumpCtrl(item.Key);
  562. break;
  563. case JetChamber.Kepler2300:
  564. MonitorSlitDoor(item.Key);
  565. MonitorPin(item.Key);
  566. MonitorPressure_Kepler(item.Key);
  567. //MonitorTemperature(item.Key);
  568. MonitorGas(item.Key);
  569. this.SimulateHe(item.Key);
  570. //MonitorRF(item.Key);
  571. ChangeTime(item.Key);
  572. //MonitorIOPumpCtrl(item.Key);
  573. MonitorLid(item.Key);
  574. break;
  575. case JetChamber.Kepler2200A:
  576. case JetChamber.Kepler2200B:
  577. MonitorSlitDoor(item.Key);
  578. MonitorPressure_Kepler2200A(item.Key);
  579. //MonitorTemperature(item.Key);
  580. MonitorGas(item.Key);
  581. // MonitorRF(item.Key);
  582. ChangeTime(item.Key);
  583. //MonitorIOPumpCtrl(item.Key);
  584. MonitorLid(item.Key);
  585. MonitorIOHighTemperatureHeater(item.Key);
  586. break;
  587. case JetChamber.VenusSE:
  588. MonitorPin(item.Key);
  589. //MonitorVenuSESlitDoor(item.Key);
  590. MonitorSEPressure(item.Key);
  591. MonitorSEGas(item.Key);
  592. ChangeTime(item.Key);
  593. break;
  594. case JetChamber.VenusDE:
  595. MonitorPin(item.Key);
  596. //MonitorVenuDESlitDoor(item.Key);
  597. MonitorDEPressure(item.Key);
  598. ChangeTime(item.Key);
  599. break;
  600. }
  601. }
  602. ChangeTime(ModuleName.TM);
  603. MonitorMFSlitDoor();
  604. MonitorSEMFSlitDoor();
  605. MonitorMFPressure();
  606. MonitorSEMFPressure();
  607. }
  608. catch (Exception e)
  609. {
  610. LOG.WriteExeption(e);
  611. }
  612. return true;
  613. }
  614. private void ChangeTime(ModuleName mod)
  615. {
  616. // Heartbeat with PLC
  617. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  618. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  619. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  620. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  621. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  622. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  623. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  624. }
  625. //void MonitorVenuSESlitDoor(ModuleName mod)
  626. //{
  627. //}
  628. void MonitorSlitDoor(ModuleName mod)
  629. {
  630. // slit door open
  631. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  632. {
  633. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  634. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  635. }
  636. // slit door close
  637. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  638. {
  639. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  640. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  641. }
  642. }
  643. void MonitorMFSlitDoor()
  644. {
  645. ModuleName mod = ModuleName.TM;
  646. // LLA T door open
  647. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  648. {
  649. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  650. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  651. }
  652. // LLB T door open
  653. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  654. {
  655. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  656. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  657. }
  658. // LLA E door open
  659. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  660. {
  661. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  662. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  663. }
  664. // LLB E door open
  665. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  666. {
  667. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  668. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  669. }
  670. // LLA T door close
  671. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  672. {
  673. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  674. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  675. }
  676. // LLB T door close
  677. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  678. {
  679. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  680. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  681. }
  682. // LLA E door close
  683. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  684. {
  685. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  686. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  687. }
  688. // LLB E door close
  689. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  690. {
  691. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  692. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  693. }
  694. }
  695. void MonitorSEMFSlitDoor()
  696. {
  697. ModuleName mod = ModuleName.SETM;
  698. // VCE T door open
  699. if (IO.DO[$"{mod}.DO_VCE_TM_OP"].Value)
  700. {
  701. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = true;
  702. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = false;
  703. }
  704. // VCE T door Close
  705. if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
  706. {
  707. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  708. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  709. }
  710. //pma
  711. if (IO.DO[$"{mod}.DO_TM_PMA_OP"].Value)
  712. {
  713. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = true;
  714. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = false;
  715. }
  716. if (IO.DO[$"{mod}.DO_TM_PMA_CL"].Value)
  717. {
  718. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
  719. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  720. }
  721. //pmb
  722. if (IO.DO[$"{mod}.DO_TM_PMB_OP"].Value)
  723. {
  724. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = true;
  725. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = false;
  726. }
  727. if (IO.DO[$"{mod}.DO_TM_PMB_CL"].Value)
  728. {
  729. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
  730. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  731. }
  732. //pmc
  733. //if (IO.DO[$"{mod}.DO_TM_PMC_OP"].Value)
  734. //{
  735. // IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = true;
  736. // IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = false;
  737. //}
  738. //if (IO.DO[$"{mod}.DO_TM_PMC_CL"].Value)
  739. //{
  740. // IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
  741. // IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  742. //}
  743. }
  744. void MonitorPin(ModuleName mod)
  745. {
  746. // lift pin up
  747. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  748. {
  749. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  750. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  751. }
  752. }
  753. void MonitorLid(ModuleName mod)
  754. {
  755. // lift pin up
  756. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  757. {
  758. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  759. }
  760. }
  761. void MonitorExtendAndRetract(ModuleName mod)
  762. {
  763. // Extend
  764. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  765. if (_trigLLExtend.Q)
  766. {
  767. _trigLLRetract.RST = true;
  768. Thread.Sleep(500);
  769. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  770. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  771. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  772. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  773. }
  774. // Retract
  775. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  776. if (_trigLLRetract.Q)
  777. {
  778. count++;
  779. _trigLLExtend.RST = true;
  780. Thread.Sleep(500);
  781. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  782. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  783. if (count == 1)
  784. {
  785. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  786. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  787. }
  788. else if (count == 2)
  789. {
  790. count = 0;
  791. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  792. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  793. }
  794. }
  795. }
  796. void MonitorPressure(ModuleName mod)
  797. {
  798. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  799. // Loadlock pressure
  800. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  801. // Foreline
  802. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  803. {
  804. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  805. }
  806. else
  807. {
  808. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  809. }
  810. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  811. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  812. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  813. //float chamber_pressure = GetMockChamberPressure(mod);
  814. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  815. // soft pump & fast pump
  816. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  817. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  818. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  819. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  820. {
  821. //任意泵打开
  822. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  823. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  824. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  825. {//开双泵
  826. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  827. {
  828. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  829. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  830. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  831. }
  832. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  833. {
  834. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  835. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  836. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  837. }
  838. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  839. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  840. }
  841. else if (fast_pump_vlv.Value)//开
  842. {
  843. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  844. {
  845. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  846. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  847. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  848. }
  849. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  850. {
  851. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  852. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  853. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  854. }
  855. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  856. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  857. }
  858. else if (soft_pump_vlv.Value)
  859. {
  860. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  861. {
  862. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  863. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  864. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  865. }
  866. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  867. {
  868. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  869. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  870. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  871. }
  872. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  873. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  874. }
  875. else if (turbo_pump_vlv.Value)
  876. {
  877. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  878. if ((getAiValue_ChamberPressure - 500) >= 0)
  879. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  880. else
  881. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  882. if ((getAiValue_ProcessPressure - 500) >= 0)
  883. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  884. else
  885. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  886. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  887. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  888. }
  889. }
  890. // fast vent & purge
  891. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  892. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  893. //if (vent_vlv.Value || purge_vlv.Value)
  894. //{
  895. // if (vent_vlv.Value && purge_vlv.Value)
  896. // {
  897. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  898. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  899. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  900. // {
  901. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  902. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  903. // }
  904. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  905. // {
  906. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  907. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  908. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  909. // }
  910. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  911. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  912. // }
  913. // else
  914. //
  915. if (vent_vlv.Value)
  916. {
  917. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  918. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  919. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  920. {
  921. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  922. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  923. }
  924. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  925. {
  926. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  927. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  928. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  929. }
  930. else
  931. {
  932. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  933. }
  934. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  935. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  936. }
  937. // Loadlock Pumping Valve
  938. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  939. if (Loadlock_pump_vlv.Value)
  940. {
  941. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  942. }
  943. // Loadlock vent
  944. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  945. if (Loadlock_vent_vlv.Value)
  946. {
  947. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  948. }
  949. // 压力值越界,复位
  950. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  951. if (chamber_pressure1 > ATM_PRESSURE)
  952. {
  953. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  954. }
  955. else if (chamber_pressure1 < 20)
  956. {
  957. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  958. }
  959. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  960. if (process_pressure1 > PROCESS_GAUGE)
  961. {
  962. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  963. }
  964. else if (process_pressure1 < 20)
  965. {
  966. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  967. }
  968. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  969. if (foreline_pressure > 10000)
  970. {
  971. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  972. }
  973. else if (foreline_pressure < 150)
  974. {
  975. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  976. }
  977. // 模拟压力计漂移
  978. //int p1 = (int)GetMockChamberPressure(mod);
  979. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  980. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  981. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  982. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  983. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  984. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  985. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  986. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  987. // 根据当前压力值设定信号
  988. //float chamber_pressure2 = GetMockChamberPressure(mod);
  989. // ATM switch
  990. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  991. // VAC switch
  992. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  993. // Throttle valve
  994. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  995. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  996. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  997. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  998. // 压力值
  999. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1000. //{
  1001. // short increase = (short)_rd.Next(20, 30);
  1002. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1003. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1004. // {
  1005. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1006. // }
  1007. //}
  1008. //else
  1009. //{
  1010. // short increase = (short)_rd.Next(20, 30);
  1011. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1012. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1013. // {
  1014. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1015. // }
  1016. //}
  1017. //// 位置值
  1018. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1019. //{
  1020. // short increase = (short)_rd.Next(20, 30);
  1021. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1022. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1023. // {
  1024. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1025. // }
  1026. //}
  1027. //else
  1028. //{
  1029. // short increase = (short)_rd.Next(20, 30);
  1030. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1031. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1032. // {
  1033. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1034. // }
  1035. //}
  1036. }
  1037. void MonitorSEPressure(ModuleName mod)
  1038. {
  1039. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1040. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1041. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1042. // Foreline
  1043. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1044. {
  1045. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1046. }
  1047. else
  1048. {
  1049. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1050. }
  1051. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1052. // soft pump & fast pump
  1053. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1054. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1055. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1056. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1057. {
  1058. //任意泵打开
  1059. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1060. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1061. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1062. {//开双泵
  1063. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1064. {
  1065. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1066. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1067. }
  1068. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1069. {
  1070. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1071. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1072. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1073. }
  1074. }
  1075. else if (fast_pump_vlv.Value)//开
  1076. {
  1077. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1078. {
  1079. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1080. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1081. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1082. }
  1083. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1084. {
  1085. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1086. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1087. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1088. }
  1089. }
  1090. else if (soft_pump_vlv.Value)
  1091. {
  1092. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1093. {
  1094. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1095. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1096. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1097. }
  1098. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1099. {
  1100. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1101. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1102. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1103. }
  1104. }
  1105. else if (turbo_pump_vlv.Value)
  1106. {
  1107. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1108. if ((getAiValue_ChamberPressure - 500) >= 0)
  1109. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1110. else
  1111. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1112. if ((getAiValue_ProcessPressure - 500) >= 0)
  1113. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1114. else
  1115. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1116. }
  1117. }
  1118. // fast vent & purge
  1119. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1120. if (vent_vlv.Value)
  1121. {
  1122. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1123. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1124. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1125. {
  1126. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1127. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1128. }
  1129. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1130. {
  1131. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1132. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1133. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1134. }
  1135. else
  1136. {
  1137. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1138. }
  1139. }
  1140. // Loadlock Pumping Valve
  1141. // 压力值越界,复位
  1142. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1143. if (chamber_pressure1 > ATM_PRESSURE)
  1144. {
  1145. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1146. }
  1147. else if (chamber_pressure1 < 20)
  1148. {
  1149. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1150. }
  1151. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1152. if (process_pressure1 > PROCESS_GAUGE)
  1153. {
  1154. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1155. }
  1156. else if (process_pressure1 < 20)
  1157. {
  1158. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1159. }
  1160. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1161. if (foreline_pressure > 10000)
  1162. {
  1163. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1164. }
  1165. else if (foreline_pressure < 150)
  1166. {
  1167. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1168. }
  1169. // ATM switch
  1170. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1171. // VAC switch
  1172. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1173. }
  1174. void MonitorDEPressure(ModuleName mod)
  1175. {
  1176. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1177. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1178. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1179. // Foreline
  1180. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1181. {
  1182. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1183. }
  1184. else
  1185. {
  1186. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1187. }
  1188. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1189. // soft pump & fast pump
  1190. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1191. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1192. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1193. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1194. {
  1195. //任意泵打开
  1196. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1197. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1198. if (fast_pump_vlv.Value)
  1199. {//开双泵
  1200. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1201. {
  1202. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1203. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1204. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1205. }
  1206. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1207. {
  1208. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1209. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1210. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1211. }
  1212. }
  1213. else if (turbo_pump_vlv.Value)
  1214. {
  1215. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1216. if ((getAiValue_ChamberPressure - 500) >= 0)
  1217. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1218. else
  1219. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1220. if ((getAiValue_ProcessPressure - 500) >= 0)
  1221. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1222. else
  1223. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1224. }
  1225. }
  1226. // fast vent & purge
  1227. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1228. if (vent_vlv.Value)
  1229. {
  1230. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1231. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1232. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1233. {
  1234. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1235. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1236. }
  1237. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1238. {
  1239. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1240. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1241. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1242. }
  1243. else
  1244. {
  1245. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1246. }
  1247. }
  1248. // Loadlock Pumping Valve
  1249. // 压力值越界,复位
  1250. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1251. if (chamber_pressure1 > ATM_PRESSURE)
  1252. {
  1253. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1254. }
  1255. else if (chamber_pressure1 < 20)
  1256. {
  1257. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1258. }
  1259. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1260. if (process_pressure1 > PROCESS_GAUGE)
  1261. {
  1262. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1263. }
  1264. else if (process_pressure1 < 20)
  1265. {
  1266. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1267. }
  1268. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1269. if (foreline_pressure > 10000)
  1270. {
  1271. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1272. }
  1273. else if (foreline_pressure < 150)
  1274. {
  1275. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1276. }
  1277. // ATM switch
  1278. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1279. // VAC switch
  1280. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1281. }
  1282. void MonitorPressure_Kepler(ModuleName mod)
  1283. {
  1284. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1285. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1286. {
  1287. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1288. }
  1289. else
  1290. {
  1291. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1292. }
  1293. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1294. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1295. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1296. //float chamber_pressure = GetMockChamberPressure(mod);
  1297. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1298. // soft pump & fast pump
  1299. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1300. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1301. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1302. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1303. {
  1304. //任意泵打开
  1305. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1306. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1307. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1308. {//开双泵
  1309. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1310. {
  1311. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1312. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1313. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1314. }
  1315. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1316. {
  1317. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1318. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1319. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1320. }
  1321. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1322. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1323. }
  1324. else if (fast_pump_vlv.Value)//开
  1325. {
  1326. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1327. {
  1328. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1329. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1330. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1331. }
  1332. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1333. {
  1334. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1335. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1336. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1337. }
  1338. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1339. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1340. }
  1341. else if (soft_pump_vlv.Value)
  1342. {
  1343. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1344. {
  1345. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1346. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1347. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1348. }
  1349. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1350. {
  1351. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1352. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1353. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1354. }
  1355. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1356. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1357. }
  1358. else if (turbo_pump_vlv.Value)
  1359. {
  1360. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1361. if ((getAiValue_ChamberPressure - 500) >= 0)
  1362. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1363. else
  1364. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1365. if ((getAiValue_ProcessPressure - 500) >= 0)
  1366. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1367. else
  1368. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1369. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1370. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1371. }
  1372. }
  1373. // fast vent & purge
  1374. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1375. if (vent_vlv.Value)
  1376. {
  1377. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1378. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1379. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1380. {
  1381. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1382. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1383. }
  1384. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1385. {
  1386. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1387. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1388. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1389. }
  1390. else
  1391. {
  1392. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1393. }
  1394. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1395. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1396. }
  1397. // Loadlock Pumping Valve
  1398. // 压力值越界,复位
  1399. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1400. if (chamber_pressure1 > ATM_PRESSURE)
  1401. {
  1402. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1403. }
  1404. else if (chamber_pressure1 < 20)
  1405. {
  1406. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1407. }
  1408. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1409. if (process_pressure1 > PROCESS_GAUGE)
  1410. {
  1411. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1412. }
  1413. else if (process_pressure1 < 20)
  1414. {
  1415. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1416. }
  1417. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1418. if (foreline_pressure > 10000)
  1419. {
  1420. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1421. }
  1422. else if (foreline_pressure < 150)
  1423. {
  1424. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1425. }
  1426. // ATM switch
  1427. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1428. // VAC switch
  1429. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1430. }
  1431. void MonitorPressure_Kepler2200A(ModuleName mod)
  1432. {
  1433. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1434. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1435. {
  1436. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1437. }
  1438. else
  1439. {
  1440. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1441. }
  1442. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1443. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1444. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1445. //float chamber_pressure = GetMockChamberPressure(mod);
  1446. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1447. // soft pump & fast pump
  1448. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1449. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1450. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1451. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1452. {
  1453. //任意泵打开
  1454. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1455. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1456. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1457. {//开双泵
  1458. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1459. {
  1460. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1461. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1462. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1463. }
  1464. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1465. {
  1466. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1467. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1468. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1469. }
  1470. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1471. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1472. }
  1473. else if (fast_pump_vlv.Value)//开
  1474. {
  1475. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1476. {
  1477. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1478. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1479. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1480. }
  1481. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1482. {
  1483. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1484. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1485. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1486. }
  1487. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1488. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1489. }
  1490. else if (soft_pump_vlv.Value)
  1491. {
  1492. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1493. {
  1494. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1495. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1496. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1497. }
  1498. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1499. {
  1500. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1501. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1502. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1503. }
  1504. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1505. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1506. }
  1507. else if (turbo_pump_vlv.Value)
  1508. {
  1509. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1510. if ((getAiValue_ChamberPressure - 500) >= 0)
  1511. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1512. else
  1513. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1514. if ((getAiValue_ProcessPressure - 500) >= 0)
  1515. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1516. else
  1517. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1518. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1519. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1520. }
  1521. }
  1522. // fast vent & purge
  1523. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1524. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1525. if (vent_vlv.Value && gas_final_vlv.Value)
  1526. {
  1527. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1528. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1529. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1530. {
  1531. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1532. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1533. }
  1534. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1535. {
  1536. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1537. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1538. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1539. }
  1540. else
  1541. {
  1542. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1543. }
  1544. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1545. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1546. }
  1547. // Loadlock Pumping Valve
  1548. // 压力值越界,复位
  1549. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1550. if (chamber_pressure1 > ATM_PRESSURE)
  1551. {
  1552. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1553. }
  1554. else if (chamber_pressure1 < 20)
  1555. {
  1556. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1557. }
  1558. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1559. if (process_pressure1 > PROCESS_GAUGE)
  1560. {
  1561. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1562. }
  1563. else if (process_pressure1 < 20)
  1564. {
  1565. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1566. }
  1567. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1568. if (foreline_pressure > 10000)
  1569. {
  1570. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1571. }
  1572. else if (foreline_pressure < 150)
  1573. {
  1574. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1575. }
  1576. // ATM switch
  1577. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1578. // VAC switch
  1579. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1580. }
  1581. void MonitorSEMFPressure()
  1582. {
  1583. ModuleName mod = ModuleName.SETM;
  1584. string VCE_ChamberPressure = "AI_VCE_Vacuum_Gauge";
  1585. string TM_AI_ChamberPressure = "AI_TM_Vacuum_Gauge";
  1586. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_V_HS"];
  1587. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_V_LS"];
  1588. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_HS"];
  1589. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_LS"];
  1590. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_HS"];
  1591. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_LS"];
  1592. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_HS"];
  1593. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_LS"];
  1594. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1595. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1596. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1597. {
  1598. if (getAiValue_TM_ChamberPressure > 10000)
  1599. {
  1600. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1601. }
  1602. else if (getAiValue_TM_ChamberPressure <= 10000)
  1603. {
  1604. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1605. }
  1606. }
  1607. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1608. {
  1609. if (getAiValue_TM_ChamberPressure > 10000)
  1610. {
  1611. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1612. }
  1613. else if (getAiValue_TM_ChamberPressure <= 10000)
  1614. {
  1615. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1616. }
  1617. }
  1618. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1619. {
  1620. if (getAiValue_VCE_ChamberPressure > 10000)
  1621. {
  1622. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1623. }
  1624. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1625. {
  1626. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1627. }
  1628. }
  1629. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1630. {
  1631. if (getAiValue_VCE_ChamberPressure > 10000)
  1632. {
  1633. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1634. }
  1635. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1636. {
  1637. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1638. }
  1639. }
  1640. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1641. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1642. {
  1643. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1644. }
  1645. else if (getAiValue_VCE_ChamberPressure < 20)
  1646. {
  1647. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1648. }
  1649. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1650. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1651. {
  1652. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1653. }
  1654. else if (getAiValue_TM_ChamberPressure < 20)
  1655. {
  1656. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1657. }
  1658. IO.DI[$"{mod}.DI_VCE_V"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1659. // VAC switch
  1660. IO.DI[$"{mod}.DI_TM_V"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1661. }
  1662. void MonitorMFPressure()
  1663. {
  1664. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  1665. //{
  1666. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1667. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1668. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1669. ModuleName mod = ModuleName.TM;
  1670. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1671. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1672. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1673. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1674. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1675. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1676. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1677. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1678. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1679. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1680. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1681. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1682. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1683. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1684. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1685. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1686. {
  1687. if (getAiValue_LLA_ChamberPressure > 10000)
  1688. {
  1689. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1690. }
  1691. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1692. {
  1693. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1694. }
  1695. }
  1696. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1697. {
  1698. if (getAiValue_LLB_ChamberPressure > 10000)
  1699. {
  1700. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1701. }
  1702. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1703. {
  1704. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1705. }
  1706. }
  1707. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1708. {
  1709. if (getAiValue_TM_ChamberPressure > 10000)
  1710. {
  1711. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1712. }
  1713. else if (getAiValue_TM_ChamberPressure <= 10000)
  1714. {
  1715. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1716. }
  1717. }
  1718. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1719. {
  1720. if (getAiValue_LLA_ChamberPressure > 10000)
  1721. {
  1722. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1723. }
  1724. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1725. {
  1726. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1727. }
  1728. }
  1729. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1730. {
  1731. if (getAiValue_LLB_ChamberPressure > 10000)
  1732. {
  1733. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1734. }
  1735. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1736. {
  1737. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1738. }
  1739. }
  1740. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1741. {
  1742. if (getAiValue_TM_ChamberPressure > 10000)
  1743. {
  1744. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1745. }
  1746. else if (getAiValue_TM_ChamberPressure <= 10000)
  1747. {
  1748. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1749. }
  1750. }
  1751. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1752. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1753. {
  1754. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1755. }
  1756. else if (getAiValue_LLA_ChamberPressure < 20)
  1757. {
  1758. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  1759. }
  1760. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1761. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  1762. {
  1763. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  1764. }
  1765. else if (getAiValue_LLB_ChamberPressure < 20)
  1766. {
  1767. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  1768. }
  1769. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1770. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1771. {
  1772. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1773. }
  1774. else if (getAiValue_TM_ChamberPressure < 20)
  1775. {
  1776. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1777. }
  1778. // ATM switch
  1779. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1780. // VAC switch
  1781. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1782. // ATM switch
  1783. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1784. // VAC switch
  1785. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1786. // ATM switch
  1787. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1788. // VAC switch
  1789. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1790. // }
  1791. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  1792. //{
  1793. // ModuleName mod = ModuleName.TM;
  1794. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1795. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1796. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1797. //}
  1798. }
  1799. void SetAiValue(string name, float value)
  1800. {
  1801. byte[] flow = BitConverter.GetBytes(value);
  1802. short high1 = BitConverter.ToInt16(flow, 0);
  1803. short low1 = BitConverter.ToInt16(flow, 2);
  1804. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1805. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1806. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1807. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1808. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1809. }
  1810. float GetAiValue(string name)
  1811. {
  1812. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1813. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1814. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1815. return flow;
  1816. }
  1817. float GetAoValue(string name)
  1818. {
  1819. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1820. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1821. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1822. return flow;
  1823. }
  1824. void MonitorTemperature(ModuleName mod)
  1825. {
  1826. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1827. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1828. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1829. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1830. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1831. // 底座
  1832. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1833. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1834. //{
  1835. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1836. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1837. //}
  1838. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1839. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1840. //{
  1841. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1842. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1843. //}
  1844. // Foreline
  1845. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1846. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1847. {
  1848. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1849. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1850. }
  1851. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1852. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1853. {
  1854. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1855. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1856. }
  1857. // Wall
  1858. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1859. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1860. {
  1861. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1862. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1863. }
  1864. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1865. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1866. {
  1867. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1868. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1869. }
  1870. }
  1871. void MonitorGas(ModuleName mod)
  1872. {
  1873. // gas
  1874. this.SimulateMFC(mod, 1);
  1875. this.SimulateMFC(mod, 2);
  1876. this.SimulateMFC(mod, 3);
  1877. this.SimulateMFC(mod, 4);
  1878. this.SimulateMFC(mod, 5);
  1879. this.SimulateMFC(mod, 6);
  1880. this.SimulateMFC(mod, 7);
  1881. this.SimulateMFC(mod, 8);
  1882. this.SimulateN2(mod);
  1883. }
  1884. void MonitorSEGas(ModuleName mod)
  1885. {
  1886. SimulateMFC(mod, 1);
  1887. SimulateMFC(mod, 2);
  1888. SimulateMFC(mod, 3);
  1889. SimulateMFC(mod, 4);
  1890. SimulateMFC(mod, 5);
  1891. SimulateMFC(mod, 6);
  1892. SimulateMFC(mod, 7);
  1893. SimulateMFC(mod, 8);
  1894. SimulateMFC(mod, 9);
  1895. SimulateMFC(mod, 10);
  1896. SimulateMFC(mod, 11);
  1897. SimulateMFC(mod, 12);
  1898. }
  1899. private void SimulateMFC(ModuleName mod, byte gasNum)
  1900. {
  1901. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1902. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1903. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  1904. }
  1905. private void SimulateN2(ModuleName mod)
  1906. {
  1907. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1908. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1909. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  1910. }
  1911. private void SimulateHe(ModuleName mod)
  1912. {
  1913. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1914. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1915. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1916. }
  1917. void MonitorRF(ModuleName mod)
  1918. {
  1919. // RF generator
  1920. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1921. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1922. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1923. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1924. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1925. }
  1926. void MonitorIOPumpCtrl(ModuleName mod)
  1927. {
  1928. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1929. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1930. }
  1931. void MonitorIOHighTemperatureHeater(ModuleName mod)
  1932. {
  1933. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  1934. {
  1935. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  1936. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1937. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1938. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1939. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1940. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1941. }
  1942. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  1943. {
  1944. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1945. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  1946. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1947. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1948. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1949. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1950. }
  1951. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  1952. {
  1953. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1954. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1955. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  1956. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1957. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1958. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1959. }
  1960. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  1961. {
  1962. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1963. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1964. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1965. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  1966. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1967. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1968. }
  1969. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  1970. {
  1971. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1972. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1973. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1974. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1975. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  1976. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1977. }
  1978. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  1979. {
  1980. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1981. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1982. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1983. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1984. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1985. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  1986. }
  1987. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  1988. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  1989. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  1990. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1991. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  1992. }
  1993. public void Terminate()
  1994. {
  1995. _thread.Stop();
  1996. }
  1997. public void SetCoolantOutletTemp(string module, int Temp)
  1998. {
  1999. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2000. //{
  2001. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2002. //}
  2003. }
  2004. }
  2005. }