Kepler-Release/Venus/Venus_RT/Config/PM/VenusDE/VenusDEDeviceModel.xml

<?xml version="1.0" encoding="utf-8" ?>
<DeviceModelDefine type="VenusDE" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
	<!--阀体-->
	<IoValves>
		<IoValve id="ValvePVN21" display="PVN21 Valve" schematicId="PVN21" unit="" isNc="true"
	        isDefaultOpen="false" diOpen="" doOpen="DO_PVN21" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePVN22" display="PVN22 Valve" schematicId="PVN22" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PVN22" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV11" display="PV11 Valve" schematicId="PV11" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV11" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV12" display="PV12 Valve" schematicId="PV12" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV12" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV21" display="PV21 Valve" schematicId="PV21" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV21" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV22" display="PV22 Valve" schematicId="PV22" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV22" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV31" display="PV31 Valve" schematicId="PV31" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV31" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV32" display="PV32 Valve" schematicId="PV32" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV32" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV41" display="PV41 Valve" schematicId="PV41" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV41" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV42" display="PV42 Valve" schematicId="PV42" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV42" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV51" display="PV51 Valve" schematicId="PV51" unit="" isNc="true"
		isDefaultOpen="false" diOpen="" doOpen="DO_PV51" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV52" display="PV52 Valve" schematicId="PV52" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV52" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV61" display="PV61 Valve" schematicId="PV61" unit="" isNc="true"
		isDefaultOpen="false" diOpen="" doOpen="DO_PV61" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV62" display="PV62 Valve" schematicId="PV62" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV62" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV71" display="PV71 Valve" schematicId="PV71" unit="" isNc="true"
		isDefaultOpen="false" diOpen="" doOpen="DO_PV71" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV72" display="PV72 Valve" schematicId="PV72" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV72" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV81" display="PV81 Valve" schematicId="PV81" unit="" isNc="true"
		isDefaultOpen="false" diOpen="" doOpen="DO_PV81" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV82" display="PV82 Valve" schematicId="PV82" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV82" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV91" display="PV91 Valve" schematicId="PV91" unit="" isNc="true"
		isDefaultOpen="false" diOpen="" doOpen="DO_PV91" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV92" display="PV92 Valve" schematicId="PV92" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV92" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePVA1" display="PVA1 Valve" schematicId="PVA1" unit="" isNc="true"
		isDefaultOpen="false" diOpen="" doOpen="DO_PVA1" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePVA2" display="PVA2 Valve" schematicId="PVA2" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PVA2" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePVB1" display="PVB1 Valve" schematicId="PVB1" unit="" isNc="true"
		isDefaultOpen="false" diOpen="" doOpen="DO_PVB1" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePVB2" display="PVB2 Valve" schematicId="PVB2" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PVB2" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePVC1" display="PVC1 Valve" schematicId="PVC1" unit="" isNc="true"
		isDefaultOpen="false" diOpen="" doOpen="DO_PVC1" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePVC2" display="PVC2 Valve" schematicId="PVC2" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PVC2" diCloseSensor="" diOpenSensor="" />

		<IoValve id="ValveN2" display="N2 valve" schematicId=""
				unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />

		<IoValve id="ValveGasFinal" display="Gas Final valve" schematicId=""
				unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gas_Final_Valve"
				diCloseSensor="" diOpenSensor="" />
		<!--<IoValve id="ValveSoftPump" display="Soft Pump valve" schematicId=""
				unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
				diCloseSensor="" diOpenSensor="" />-->

		<IoValve id="ValveFastPump" display="FastPump valve" schematicId=""
			unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveTurboPumpPumping" display="Turbo Pump Pumping valve" schematicId=""
			  unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Pumping_Valve"
			  diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveTurboPumpPurge" display="Turbo Pump Purge valve" schematicId=""
				unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Purge_Valve"
				diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveGuage" display="Guage valve" schematicId=""
				unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Guage_Valve"
				diCloseSensor="" diOpenSensor="" />

		<IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="PV1" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="PV2" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="PV3" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="PV4" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="PV5" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc6" display="MFC6 Valve" schematicId="PV6" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC6_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc7" display="MFC7 Valve" schematicId="PV7" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC7_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc8" display="MFC8 Valve" schematicId="PV8" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC8_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc9" display="MFC9 Valve" schematicId="PV9" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC9_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc10" display="MFC10 Valve" schematicId="PV10" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC10_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc11" display="MFC11 Valve" schematicId="PV11" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC11_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc12" display="MFC12 Valve" schematicId="PV12" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC12_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePVHe1" display="PVHe1 valve" schematicId=""
				  unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PVHe1"
				  diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePVHe2" display="PVHe2 valve" schematicId=""
				  unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PVHe2"
				  diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePVHe3" display="PVHe3 valve" schematicId=""
				  unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PVHe3"
				  diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveHeISO" display="He ISO valve" schematicId=""
				  unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_He_ISO"
				  diCloseSensor="" diOpenSensor="" />
	</IoValves>
	<IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
		<IoMfc id="MfcGas1" display="Gas1" schematicId="MFC1" unit="sccm"
			   aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
			   diPressureAlarm="DI_MFC1_Pressure_Switch"/>
		<IoMfc id="MfcGas2" display="Gas2" schematicId="MFC2" unit="sccm"
			   aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
			   diPressureAlarm="DI_MFC2_Pressure_Switch"/>
		<IoMfc id="MfcGas3" display="Gas3" schematicId="MFC3" unit="sccm"
			   aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
			   diPressureAlarm="DI_MFC3_Pressure_Switch"/>
		<IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
			  aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
			  diPressureAlarm="DI_MFC4_Pressure_Switch"/>
		<IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
			   aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
			   diPressureAlarm="DI_MFC5_Pressure_Switch"/>
		<IoMfc id="MfcGas6" display="Gas6" schematicId="MFC6" unit="sccm"
			aiFlow="AI_MFC6_Flow" aoFlow="AO_MFC6_Flow_Setpoint" diOffline="" aoRange=""
			diPressureAlarm="DI_MFC6_Pressure_Switch"/>
		<IoMfc id="MfcGas7" display="Gas7" schematicId="MFC7" unit="sccm"
			aiFlow="AI_MFC7_Flow" aoFlow="AO_MFC7_Flow_Setpoint" diOffline="" aoRange=""
			diPressureAlarm="DI_MFC7_Pressure_Switch"/>
		<IoMfc id="MfcGas8" display="Gas8" schematicId="MFC8" unit="sccm"
			aiFlow="AI_MFC8_Flow" aoFlow="AO_MFC8_Flow_Setpoint" diOffline="" aoRange=""
			diPressureAlarm="DI_MFC8_Pressure_Switch"/>
		<IoMfc id="MfcGas9" display="Gas9" schematicId="MFC9" unit="sccm"
			aiFlow="AI_MFC9_Flow" aoFlow="AO_MFC9_Flow_Setpoint" diOffline="" aoRange=""
			diPressureAlarm="DI_MFC9_Pressure_Switch"/>
		<IoMfc id="MfcGas10" display="Gas10" schematicId="MFC10" unit="sccm"
			aiFlow="AI_MFC10_Flow" aoFlow="AO_MFC10_Flow_Setpoint" diOffline="" aoRange=""
			diPressureAlarm="DI_MFC10_Pressure_Switch"/>
		<IoMfc id="MfcGas11" display="Gas11" schematicId="MFC11" unit="sccm"
			aiFlow="AI_MFC11_Flow" aoFlow="AO_MFC11_Flow_Setpoint" diOffline="" aoRange=""
			diPressureAlarm="DI_MFC11_Pressure_Switch"/>
		<IoMfc id="MfcGas12" display="Gas12" schematicId="MFC12" unit="sccm"
			aiFlow="AI_MFC12_Flow" aoFlow="AO_MFC12_Flow_Setpoint" diOffline="" aoRange=""
			diPressureAlarm="DI_MFC12_Pressure_Switch"/>
		<IoMfc id="MfcN2" display="N2" schematicId="N2" unit="sccm"
			aiFlow="" aoFlow="" diOffline="" aoRange=""
			diPressureAlarm="DI_PN2_Pressure_Switch"/>
		<!--<IoMfc id="MfcHe" display="He" schematicId="He" unit="sccm"
			aiFlow="AI_He_Flow" aoFlow="AO_ESC_He_Pressure_Setpoint1" diOffline="" aoRange=""
			diPressureAlarm="DI_ESC_He_Pressure_100t_Gauge_Alarm"/>-->
	</IoMfcs>
	<IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
		<IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" />
		<IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" />
		<IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" />
		<IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" />
		<IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
		<IoGasStick id="GasStick6" display="" mfc ="MfcGas6" downvalve="ValveMfc6" />
		<IoGasStick id="GasStick7" display="" mfc ="MfcGas7" downvalve="ValveMfc7" />
		<IoGasStick id="GasStick8" display="" mfc ="MfcGas8" downvalve="ValveMfc8" />
		<IoGasStick id="GasStick9" display="" mfc ="MfcGas9" downvalve="ValveMfc9" />
		<IoGasStick id="GasStick10" display="" mfc ="MfcGas10" downvalve="ValveMfc10" />
		<IoGasStick id="GasStick11" display="" mfc ="MfcGas11" downvalve="ValveMfc11" />
		<IoGasStick id="GasStick12" display="" mfc ="MfcGas12" downvalve="ValveMfc12" />
		<IoGasStick id="GasStickN2" display="" mfc ="MfcN2" downvalve="ValveTurboPumpPurge" />
	</IoGasSticks>

	<IoBacksideHes assembly="Venus_RT" classType="Venus_RT.Devices.IoBacksideHe">
		<IoBacksideHe id="BacksideHelium" display="" mfc="" downvalve="ValvePVHe1" upvalve="ValveHeISO" up2valve="ValvePVHe3" aoControlMode="" aoPressureSP="AO_ESC_He_Pressure_Setpoint1" />
	</IoBacksideHes>

	<IoSensors>
		<IoSensor id="SensorATMSwitch" display="ATM Switch"  schematicId="" unit="" di="DI_ATM_Switch" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
		<IoSensor id="SensorPMLidClosed" display="PM Lid Closed"  schematicId="" unit="" di="DI_Lid_Closed" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="" alarmText="" />
		<IoSensor id="SensorVacSwitch" display="VAC Switch"  schematicId="" unit="" di="DI_PM_VAC_Switch" isLowAsNormal="" textOutTrigValue="true"
				  infoText="" warningText="" alarmText="" />
		<!--<IoSensor id="SensorWaterFlowOk" display="Water Flow OK"  schematicId="" unit="" di="DI_PCW_Flow_SW" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="sensor water flow abnormal" alarmText="" />-->
		<IoSensor id="SensorWaterLeakOk" display="Water Leak Ok"  schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="Sensor water leak" alarmText="" />
		<IoSensor id="SensorCDAPressureOk" display="CDA pressure OK"  schematicId="" unit="" di="DI_CDA_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="Sensor CDA pressure abnormal" alarmText="" />
		<IoSensor id="N2PressureOk" display="N2 Pressure OK"  schematicId="" unit="" di="DI_PN2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
			   infoText="" warningText="N2 Pressure Alarm" alarmText="" />
		<IoSensor id="GeneratorInterlock" display="RFG hardware interlock"  schematicId="" unit="" di="DI_RF_HV_Interlock_OK" isLowAsNormal="" textOutTrigValue="false" infoText="Generator interlock" warningText="" alarmText="" />
		<IoSensor id="SensorSourceRFFan" display="Bias RF Water Flow Switch"  schematicId="" unit="" di="DI_BIAS_RF_Water_Flow_Switch" isLowAsNormal="" textOutTrigValue="true" infoText="Bias RF Water Flow" warningText="" alarmText="Bias RF Water Flow Error" />
		<IoSensor id="SensorSlitDoorClosed" display="Slit Door Closed"  schematicId="" unit="" di="DI_TM_Slit_Door_Closed" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="TurboPumpInterlock" display="Turbo Pump Interlock"  schematicId="" unit="" di="DI_Turbo_Pump_Interlock" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="GasBoxDoorSW" display="Gas Box Door SW"  schematicId="" unit="" di="DI_Gas_Box_Door_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="GasBoxPressureSW" display="Gas Box Pressure SW"  schematicId="" unit="" di="DI_Gas_Box_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Gas Box Pressure Alarm" />
		<IoSensor id="CoolantInletTCBrokenAlarm" display="Coolant Inlet TC Broken Alarm"  schematicId="" unit="" di="DI_Coolant_Inlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Inlet TC Broken Alarm" />
		<IoSensor id="CoolantOutletTCBrokenAlarm" display="Coolant Outlet TC Broken Alarm"  schematicId="" unit="" di="DI_Coolant_Outlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Outlet TC Broken Alarm" />
		<IoSensor id="CHBWallOTSWAlarm" display="CHB Wall OT SW Alarm"  schematicId="" unit="" di="DI_CHB_Wall_OT_Switch_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="CHB Wall OT SW Alarm" />

		<IoSensor id="TurboPumpWaterFlowSwitch" display="Turbo Pump Water Flow Switch"  schematicId="" unit="" di="DI_Turbo_Pump_Water_Flow_Switch" isLowAsNormal="" textOutTrigValue="true"
				  infoText="" warningText="" alarmText="" />
	</IoSensors>
	<IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
		<IoPressureMeter id="ProcessGauge" display="Process Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_Process_Pressure_1t" diGaugeFail="DI_Process_Pressure_1t_Gauge_Alarm" scPrecision="" scOffset=""/>
		<IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_Chamber_Pressure_10t"
						    diGaugeFail="DI_Chamber_Pressure_10t_Gauge_Alarm"
						    scPrecision="ChamberPressureGaugePrecision"
						    scOffset=""/>
		<IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_Foreline_Pressure_10t" diGaugeFail="DI_Foreline_Pressure_10t_Gauge_Alarm" scPrecision="" scOffset=""/>
		<!--<IoPressureMeter id="ESCHeGauge" display="ESC He Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_He_Pressure_100t" diGaugeFail="DI_ESC_He_Pressure_100t_Gauge_Alarm" scPrecision="" scOffset=""/>-->
		<IoPressureMeter id="ProcessPressureHigh" display="ProcessPressureHigh" schematicId="" unit="mTorr"
						    aiValue="AI_Chamber_Pressure_10t" diGaugeFail="DI_Chamber_Pressure_10t_Gauge_Alarm" scPrecision="" scOffset=""/>
		<IoPressureMeter id="ProcessPressureLow" display="ProcessPressureLow" schematicId="" unit="mTorr"
						    aiValue="AI_Process_Pressure_1t" diGaugeFail="DI_Process_Pressure_1t_Gauge_Alarm" scPrecision="" scOffset=""/>
	</IoPressureMeters>
	<IoPressureControls assembly="Venus_RT" classType="Venus_RT.Devices.IoPressureControl">
		<IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
						   diLogicProcessGasFlowing=""
						   scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
						   scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
						   scIsIndependentControl="IsIndependentControl"
						   scIsBoostPumpInstalled="EnableBoosterPump"
						   scTvInstalled="EnableThrottleValve"
						   boost="" tv="ThrottleValve" drypump="MainPump"
						   pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" loadlockMeter="" escHeGauge="" processPressureHigh="ProcessPressureHigh" processPressureLow="ProcessPressureLow"/>
	</IoPressureControls>
	<IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
		<IoHeartbeat  id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
	</IoHeartbeats>
	<IoPlcDateTimes>
		<IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
					  aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
	</IoPlcDateTimes>
	<IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
		<IoCylinder id="LiftPin" display="lifter Pin" schematicId="" unit="" doMotorRelay=""
					doON="DO_Lift_Pin_Up" doOFF="DO_Lift_Pin_Down" diON="DI_Lift_Pin_Up_POS" diOFF="DI_Lift_Pin_Down_POS" />
	</IoCylinders>

	<IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
		<IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_Lid_Closed" />
	</IoLids>
  <IoHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IoHeater">
    <IoHeater id="ValveHeater" display="Valve Heater" schematicId="" unit="℃"
           doPowerOn="DO_Valve_Heater_On"
           diDeviation="DI_Valve_TC_Deviation_out_of_range"
           diPowerOnFeedback="DI_Valve_Heater_On_FB"
           diControlTcBroken="DI_Valve_Control_TC_Broken_Alarm"
           diMonitorTcBroken=""
           aoSetPoint="AO_Valve_Temperature_Setpoint"
           aoSetPointLimit="AO_Valve_Temp_Limit_Setpoint"
           aiFeedback="AI_Valve_Control_TC_Temp"
           aiMonitor=""
           scSetPointLimit="ValveHeaterSetPointLimit" />

    <IoHeater id="ForelineHeater" display="Foreline Heater" schematicId="" unit="℃"
         doPowerOn="DO_Foreline_Heater_On"
         diDeviation="DI_Foreline_TC_Deviation_out_of_range"
         diPowerOnFeedback="DI_Foreline_Heater_On_FB"
         diControlTcBroken="DI_Foreline_Control_TC_Broken_Alarm"
         diMonitorTcBroken="DI_Foreline_Monitor_TC_Broken_Alarm"
         aoSetPoint="AO_Foreline_Temperature_Setpoint"
         aoSetPointLimit="AO_Foreline_Temp_Limit_Setpoint"
         aiFeedback="AI_Fline_Control_TC_Temp"
         aiMonitor="AI_Fline_Monitor_TC_Temp"
         scSetPointLimit="ForeLineHeaterSetPointLimit" />

    <!--<IoHeater id="WallHeater" display="Wall Heater" schematicId="" unit="℃"
              doPowerOn="DO_CHB_Wall_Heater_On"

              diDeviation="DI_CHB_Wall_TC_Deviation_out_of_range"
              diPowerOnFeedback="DI_CHB_Wall_Heater_On_FB"
              diControlTcBroken="DI_CHB_Wall_Control_TC_Broken_Alarm"
              diMonitorTcBroken="DI_CHB_Wall_Monitor_TC_Broken_Alarm"

              aoSetPoint="AO_CHB_Wall_Temperature_Setpoint"
              aoSetPointLimit="AO_CHB_Wall_Temp_Limit_Setpoint"

              aiFeedback="AI_CHB_Wall_Control_TC_Temp"
              aiMonitor="AI_CHB_Wall_Monitor_TC_Temp"

              scSetPointLimit="WallHeaterSetPointLimit" />-->
  </IoHeaters>
</DeviceModelDefine>