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- using System;
- using System.Collections;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_Core;
- using Venus_RT.Modules.PMs;
- using Aitex.Core.RT.Log;
- namespace Venus_RT.Modules
- {
- class RouteManager : Entity, IEntity
- {
- public enum MSG
- {
- MoveWafer,
- ReturnWafer,
- HomeUnit,
- PauseAuto,
- ResumeAuto,
- Stop,
- StartCycle,
- StopCycle,
- HOME,
- RESET,
- ABORT,
- ERROR,
- SetAutoMode,
- SetManualMode,
- ResetIdleCleanTime,
- ResetIdlePurgeTime,
- CreateJob,
- PauseJob,
- ResumeJob,
- StartJob,
- StopJob,
- AbortJob,
- JobDone,
- CassetteLeave, //For unload light control off afer job done
- Map,
- ReturnAllWafer,
- TMCycle,
- }
- public PMEntity PMA { get; private set; }
- public PMEntity PMB { get; private set; }
- public PMEntity PMC { get; private set; }
- public PMEntity PMD { get; private set; }
- public TMEntity TM { get; private set; }
- public LLEntity LLA { get; private set; }
- public LLEntity LLB { get; private set; }
- public EfemEntity EFEM { get; private set; }
- public string Name { get; set; }
- public bool IsAutoMode
- {
- get
- {
- return fsm.State == (int)RtState.AutoRunning || fsm.State == (int)RtState.AutoIdle;
- }
- }
- public bool IsInit
- {
- get { return fsm.State == (int)RtState.Init; }
- }
- public bool IsIdle
- {
- get { return fsm.State == (int)RtState.Idle || fsm.State == (int)RtState.AutoIdle; }
- }
- public bool IsAlarm
- {
- get { return fsm.State == (int)RtState.Error; }
- }
- public bool IsEntityError
- {
- get
- {
- return (EFEM?.IsError ?? false)
- || (PMA?.IsError ?? false)
- || (PMB?.IsError ?? false);
- }
- }
- public bool IsRunning
- {
- get
- {
- return !IsInit && !IsAlarm && !IsIdle;
- }
- }
- private TMCycle _TMCycle;
- private AutoCycle _AutoCycle;
- private bool _isWaitUnload;
- public RouteManager()
- {
- Name = "System";
- if (ModuleHelper.IsInstalled(ModuleName.PMA))
- PMA = new PMEntity(ModuleName.PMA);
- if (ModuleHelper.IsInstalled(ModuleName.PMB))
- PMB = new PMEntity(ModuleName.PMB);
- if (ModuleHelper.IsInstalled(ModuleName.PMC))
- PMC = new PMEntity(ModuleName.PMC);
- if (ModuleHelper.IsInstalled(ModuleName.PMD))
- PMD = new PMEntity(ModuleName.PMD);
- if (ModuleHelper.IsInstalled(ModuleName.TM))
- TM = new TMEntity();
- if (ModuleHelper.IsInstalled(ModuleName.LLA))
- LLA = new LLEntity(ModuleName.LLA);
- if (ModuleHelper.IsInstalled(ModuleName.LLB))
- LLB = new LLEntity(ModuleName.LLB);
- if (ModuleHelper.IsInstalled(ModuleName.EFEM))
- EFEM = new EfemEntity();
- fsm = new StateMachine<RouteManager>(Name, (int)RtState.Init, 200);
- SubscribeOperation();
- }
- public bool Check(int msg, out string reason, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- reason = String.Format("{0} is in {1} state,can not do {2}", Name, 0, (MSG)msg);
- return false;
- }
- if (msg == (int)MSG.StartCycle)
- {
- //if (!IsAutoMode)
- {
- reason = String.Format("can not do {0}, isn't auto mode.", msg.ToString());
- return false;
- }
- }
- reason = "";
- return true;
- }
- void SubscribeDataVariable()
- {
- DATA.Subscribe("Rt.Status", () => ((RtState)fsm.State).ToString());
- DATA.Subscribe(ModuleName.System.ToString(), "AlarmEvent", EV.GetAlarmEvent);
- DATA.Subscribe("System.IsAutoMode", () => IsAutoMode);
- DATA.Subscribe("System.IsIdle", () => IsIdle || IsInit);
- DATA.Subscribe("System.IsAlarm", () => IsAlarm || IsEntityError);
- DATA.Subscribe("System.IsBusy", () => IsRunning);
- DATA.Subscribe("System.IsWaitUnload", () => /*_isWaitUnload && */IsAutoMode);
- //DATA.Subscribe("System.IsConnectedWithHost", () => Singleton<FaManager>.Instance.IsConnected);
- DATA.Subscribe("EquipmentMode", () => IsAutoMode ? 0 : 1, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe("EquipmentStatus", () =>
- {
- //"0 = Uninit
- //1 = Idle
- //2 = Running
- //3 = Error
- //4 = Pause
- //"
- if (IsInit) return 0;
- if (IsIdle) return 1;
- if (IsAlarm) return 3;
- return 2;
- }, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- }
- void SubscribeOperation()
- {
- OP.Subscribe("CreateWafer", InvokeCreateWafer);
- OP.Subscribe("DeleteWafer", InvokeDeleteWafer);
- OP.Subscribe("System.Home", (cmd, args) => CheckToPostMessage((int)MSG.HOME, args));
- OP.Subscribe("TMCycle.Start", (cmd, args) => CheckToPostMessage((int)MSG.TMCycle, args));
- OP.Subscribe("TMCycle.Abort", (cmd, args) => CheckToPostMessage((int)MSG.StopCycle, args));
- DATA.Subscribe("SYSTEM.FsmState", () => (((RtState)fsm.State).ToString()));
- DATA.Subscribe("TMCycle.CycleIndex", () => (_TMCycle.CycleIndex));
- }
- public bool CheckToPostMessage(int msg, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- LOG.Write(eEvent.WARN_FSM_WARN, ModuleName.TM, $"TM is in {(RtState)fsm.State} state,can not do {(MSG)msg}");
- return false;
- }
- Running = true;
- fsm.PostMsg(msg, args);
- return true;
- }
- private bool InvokeCreateWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- WaferStatus state = WaferStatus.Normal;
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot));
- }
- else if (WaferManager.Instance.CreateWafer(chamber, slot, state) != null)
- {
- //EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());
- LOG.Write(eEvent.EV_WAFER_CREATE, ModuleName.System, chamber.ToString(), (slot + 1).ToString(), state.ToString());
- }
- }
- else
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- return true;
- }
- private bool InvokeDeleteWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- WaferManager.Instance.DeleteWafer(chamber, slot);
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDelete, chamber.ToString(), slot + 1);
- }
- else
- {
- EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, delete not valid", chamber.ToString(), slot + 1));
- }
- }
- else
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- return true;
- }
- public PMEntity GetPM(ModuleName mod)
- {
- if (ModuleHelper.IsInstalled(mod))
- {
- switch (mod)
- {
- case ModuleName.PMA:
- return PMA;
- case ModuleName.PMB:
- return PMB;
- case ModuleName.PMC:
- return PMC;
- case ModuleName.PMD:
- return PMD;
- }
- }
- return null;
- }
- public LLEntity GetLL(ModuleName mod)
- {
- if (ModuleHelper.IsInstalled(mod))
- {
- switch (mod)
- {
- case ModuleName.LLA:
- return LLA;
- case ModuleName.LLB:
- return LLB;
- }
- }
- return null;
- }
- public TMEntity GetTM()
- {
- return TM;
- }
-
- protected override bool Init()
- {
- PMA?.Initialize();
- PMB?.Initialize();
- TM?.Initialize();
- LLA?.Initialize();
- LLB?.Initialize();
- EFEM?.Initialize();
- _TMCycle = new TMCycle();
- _AutoCycle = new AutoCycle();
- BuildTransitionTable();
- return true;
- }
-
- private void BuildTransitionTable()
- {
- fsm = new StateMachine<RouteManager>(ModuleName.System.ToString(), (int)RtState.Init, 50);
- //Init sequence
- Transition(RtState.Init, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Idle, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Error, MSG.HOME, FsmStartHome, RtState.Initializing);
- //// EnterExitTransition<RtState, FSM_MSG>(RtState.Initializing, fStartInit, FSM_MSG.NONE, null);
- ///
- Transition(RtState.Idle, FSM_MSG.TIMER, FsmMonitor, RtState.Idle);
- Transition(RtState.Init, FSM_MSG.TIMER, FsmMonitor, RtState.Init);
- Transition(RtState.Initializing, FSM_MSG.TIMER, FsmMonitorHome, RtState.Idle);
- Transition(RtState.Initializing, MSG.ERROR, FsmError, RtState.Error);
- Transition(RtState.Initializing, MSG.ABORT, FsmAbort, RtState.Init);
- // TM Cycle
- Transition(RtState.Idle, MSG.TMCycle, FsmStartTMCycle, RtState.TMCycle);
- Transition(RtState.TMCycle, FSM_MSG.TIMER, FsmMonitorTMCycle, RtState.Idle);
- Transition(RtState.TMCycle, MSG.StopCycle, FsmStopTMCycle, RtState.Idle);
- //Auto/manual
- Transition(RtState.Idle, MSG.SetAutoMode, FsmStartAutoTransfer, RtState.AutoIdle);
- Transition(RtState.AutoRunning, FSM_MSG.TIMER, FsmAutoTransfer, RtState.Idle);
- Transition(RtState.AutoRunning, MSG.ABORT, FsmAbortAutoTransfer, RtState.Idle);
- //Transition(RtState.AutoRunning, MSG.SetManualMode, FsmStartSetManualMode, RtState.Idle);
- Transition(RtState.AutoRunning, MSG.JobDone, FsmJobDone, RtState.AutoIdle);
- //Transition(RtState.AutoRunning, MSG.CassetteLeave, fCassetteLeave, RtState.AutoRunning); //For unload light control off afer job done
- Transition(RtState.AutoRunning, MSG.CreateJob, FsmCreateJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.StartJob, FsmStartJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.PauseJob, FsmPauseJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.ResumeJob, FsmResumeJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.StopJob, FsmStopJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.AbortJob, FsmAbortJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.Map, FsmMap, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.ResetIdleCleanTime, FsmResetIdleCleanTime, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.ResetIdlePurgeTime, FsmResetIdlePurgeTime, RtState.AutoRunning);
- Transition(RtState.AutoIdle, FSM_MSG.TIMER, FsmMonitorAutoIdle, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.SetManualMode, FsmStartSetManualMode, RtState.Idle);
- Transition(RtState.AutoIdle, MSG.CreateJob, FsmCreateJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.StartJob, FsmStartJob, RtState.AutoRunning);
- Transition(RtState.AutoIdle, MSG.PauseJob, FsmPauseJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.ResumeJob, FsmResumeJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.StopJob, FsmStopJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.AbortJob, FsmAbortJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.Map, FsmMap, RtState.AutoIdle);
- }
- private bool FsmMonitor(object[] objs)
- {
- _debugRoutine();
- return true;
- }
- private bool FsmStartHome(object[] objs)
- {
- PMA?.Invoke("Home");
- PMB?.Invoke("Home");
- PMC?.Invoke("Home");
- PMD?.Invoke("Home");
- TM?.Invoke("Home");
- LLA?.Invoke("Home");
- LLB?.Invoke("Home");
- return true;
- }
- private bool FsmMonitorHome(object[] objs)
- {
- bool CheckHomed(string name, bool bValid, bool bDone)
- {
- if (bValid && !bDone)
- {
- if (fsm.ElapsedTime > 20 * 1000)
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"{name} home timeout");
- PostMsg(MSG.ERROR);
- return true;
- }
- else
- return false;
- }
- return true;
- }
- return CheckHomed("PMA", PMA != null, PMA != null&&PMA.IsIdle) &&
- CheckHomed("PMB", PMB != null, PMB != null&&PMA.IsIdle) &&
- CheckHomed("PMC", PMC != null, PMC != null&&PMC.IsIdle) &&
- CheckHomed("PMD", PMD != null, PMD != null&&PMD.IsIdle) &&
- CheckHomed("LLA", LLA != null, LLA != null&&LLA.IsIdle) &&
- CheckHomed("LLB", LLB != null, LLB != null&&LLB.IsIdle) &&
- CheckHomed("TM", TM != null, TM != null&&TM.IsIdle);
- }
- private bool FsmError(object[] objs)
- {
- return true;
- }
- private bool FsmAbort(object[] objs)
- {
- return true;
- }
- private bool FsmStartTMCycle(object[] objs)
- {
- return _TMCycle.Start(objs) == RState.Running;
- }
- private bool FsmMonitorTMCycle(object[] objs)
- {
- RState ret = _TMCycle.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.ERROR);
- return false;
- }
- return ret == RState.End;
- }
- private bool FsmStopTMCycle(object[] objs)
- {
- _TMCycle.Abort();
- return true;
- }
- private bool FsmStartAutoTransfer(object[] objs)
- {
- return _AutoCycle.Start(objs) == RState.Running;
- }
- private bool FsmAutoTransfer(object[] objs)
- {
- RState ret = _AutoCycle.Monitor();
- if (_AutoCycle.CheckJobJustDone(out string jobInfo))
- {
- EV.PostPopDialogMessage(EventLevel.InformationNoDelay, "Job complete", jobInfo);
- }
- if (_AutoCycle.CheckAllJobDone())
- {
- if (!CheckToPostMessage((int)MSG.JobDone))
- return false;
- }
- _isWaitUnload = (bool)DATA.Poll("LP1.NotifyJobDone") || (bool)DATA.Poll("LP2.NotifyJobDone");
- return ret == RState.End;
- }
- private bool FsmAbortAutoTransfer(object[] objs)
- {
- return true;
- }
- private bool FsmJobDone(object[] objs)
- {
- return true;
- }
- private bool FsmCreateJob(object[] objs)
- {
- return true;
- }
- private bool FsmStartJob(object[] objs)
- {
- return true;
- }
- private bool FsmPauseJob(object[] objs)
- {
- return true;
- }
- private bool FsmResumeJob(object[] objs)
- {
- return true;
- }
- private bool FsmStopJob(object[] objs)
- {
- return true;
- }
- private bool FsmAbortJob(object[] objs)
- {
- return true;
- }
- private bool FsmMap(object[] objs)
- {
- return true;
- }
- private bool FsmResetIdleCleanTime(object[] objs)
- {
- return true;
- }
- private bool FsmResetIdlePurgeTime(object[] objs)
- {
- return true;
- }
- private bool FsmMonitorAutoIdle(object[] objs)
- {
- return true;
- }
- private bool FsmStartSetManualMode(object[] objs)
- {
- return true;
- }
- private void _debugRoutine()
- {
- int flag = 0;
- // Test Home routine
- if (flag == 1)
- {
- PostMsg(MSG.HOME);
- }
- else if (flag == 2)
- {
- PostMsg(MSG.TMCycle);
- }
- }
- }
- }
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