| .. |
|
VenusEntity
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
1 år sedan |
|
MFHomeRoutine.cs
|
ed38ed5c95
1.check load function bugs fix
|
1 år sedan |
|
MFLeakCheckRoutine.cs
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 år sedan |
|
MFPMExtendRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 år sedan |
|
MFPMPickRoutine.cs
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 år sedan |
|
MFPMPlaceRoutine.cs
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 år sedan |
|
MFPMRetractRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 år sedan |
|
MFPMSwapRoutine.cs
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 år sedan |
|
MFPickRoutine.cs
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 år sedan |
|
MFPlaceRoutine.cs
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 år sedan |
|
MFPumpRoutine.cs
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 år sedan |
|
MFPurgeRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 år sedan |
|
MFSwapRoutine.cs
|
73f0d306a7
Enhance routing algorithm.
|
1 år sedan |
|
MFVentRoutine.cs
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 år sedan |
|
TMEntity.cs
|
af631c4aaa
1.添加RF Calibration功能
|
1 år sedan |
hecl
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock