| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644 | 
							- using System;
 
- using System.Collections.Generic;
 
- using System.Diagnostics;
 
- using System.Linq;
 
- using System.Text;
 
- using System.Threading.Tasks;
 
- using Aitex.Core.Common;
 
- using Aitex.Core.RT.DataCenter;
 
- using Aitex.Core.RT.Device;
 
- using Aitex.Core.RT.Event;
 
- using Aitex.Core.RT.Fsm;
 
- using Aitex.Core.RT.Log;
 
- using Aitex.Core.RT.SCCore;
 
- using Aitex.Core.Util;
 
- using Aitex.Sorter.Common;
 
- using Venus_RT.Modules;
 
- using Venus_RT.Modules.PMs;
 
- using MECF.Framework.Common.Equipment;
 
- using MECF.Framework.Common.Schedulers;
 
- using MECF.Framework.Common.SubstrateTrackings;
 
- using Venus_RT.Devices;
 
- namespace Venus_RT.Scheduler
 
- {
 
-     public class SchedulerPM : SchedulerModule
 
-     {
 
-         public override bool IsAvailable
 
-         {
 
-             get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() && !_waitCompletejobClean; }
 
-         }
 
-         public override bool IsOnline
 
-         {
 
-             get { return _entity != null && _entity.IsOnline; }
 
-         }
 
-         public override bool IsError
 
-         {
 
-             get { return _entity.IsError; }
 
-         }
 
-         public bool IsIdle
 
-         {
 
-             get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() ; }
 
-         }
 
-         public TaskType Task => _task;
 
-         private PMEntity _entity = null;
 
-         private ModuleName _taskRobot;
 
-         private EnumTransferType _taskTransferType;
 
-         private Hand _taskBlade;
 
-         private int _taskSlot;
 
-         private int _entityTaskToken = (int)FSM_MSG.NONE;
 
-         private DeviceTimer _timerProcess = new DeviceTimer();
 
-         private JetPM _pm;
 
-         private float _paramTemp;
 
-         public float Temperature
 
-         {
 
-             get
 
-             {
 
-                 //if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
 
-                 //{
 
-                 //    return _pm.CoolantOutletTempFB;
 
-                 //}
 
-                 //return _pm.SubstrateTempFB;
 
-                 return _pm.CoolantOutletTempFB;
 
-             }
 
-         }
 
-         public RD_TRIG IdlePurgeTrig { get; set; }
 
-         public Stopwatch IdlePurgeTimer { get; set; }
 
-         public int IdlePurgeTime { get; set; }
 
-         public int IdlePurgeNextRunTime { get; set; }
 
-         public RD_TRIG IdleCleanTrig { get; set; }
 
-         public Stopwatch IdleCleanTimer { get; set; }
 
-         public int IdleCleanTime { get; set; }
 
-         public int IdleCleanNextRunTime { get; set; }
 
-         private bool _waitPreJobClean;
 
-         private bool _waitCompletejobClean;
 
-         private R_TRIG _trigIdleCleanFailed = new R_TRIG();
 
-         private R_TRIG _trigIdlePurgeFailed = new R_TRIG();
 
-         public RD_TRIG PreJobCleanTrig { get; set; }
 
-         public Stopwatch PreJobCleanTimer { get; set; }
 
-         public int PreJobCleanTime { get; set; }
 
-         public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
 
-         {
 
-             switch (chamber)
 
-             {
 
-                 case ModuleName.PMA:
 
-                     _entity = Singleton<RouteManager>.Instance.PMA;
 
-                     break;
 
-                 case ModuleName.PMB:
 
-                     _entity = Singleton<RouteManager>.Instance.PMB;
 
-                     break;
 
-             }
 
-             _pm = DEVICE.GetDevice<JetPM>(Module.ToString());
 
-             IdlePurgeTrig = new RD_TRIG();
 
-             IdlePurgeTimer = new Stopwatch();
 
-             IdleCleanTrig = new RD_TRIG();
 
-             IdleCleanTimer = new Stopwatch();
 
-             PreJobCleanTrig = new RD_TRIG();
 
-             PreJobCleanTimer = new Stopwatch();
 
-             EventWaferArrived += WaferArrived;
 
-         }
 
-         public void InitClean()
 
-         {
 
-             DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
 
-             DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
 
-         }
 
-         public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
 
-         {
 
-             return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
 
-                    && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
 
-         }
 
-         public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
 
-         {
 
-             return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
 
-                    && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
 
-         }
 
-         public bool IsTemperatureReady(float temp)
 
-         {
 
-             return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
 
-         }
 
-         public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
 
-         {
 
-             return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
 
-                    _taskTransferType == type;
 
-         }
 
-         public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
 
-         {
 
-             _task = TaskType.PrepareTransfer;
 
-             _taskRobot = robot;
 
-             _taskSlot = slot;
 
-             _taskTransferType = type;
 
-             _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
 
-             LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
 
-             return _entityTaskToken != (int)FSM_MSG.NONE;
 
-         }
 
-         public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
 
-         {
 
-             _task = TaskType.PrepareTransfer;
 
-             _taskRobot = robot;
 
-             _taskSlot = slot;
 
-             _taskBlade = blade;
 
-             _taskTransferType = type;
 
-             _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
 
-             LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
 
-             return _entityTaskToken != (int)FSM_MSG.NONE;
 
-         }
 
-         public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
 
-         {
 
-             _task = TaskType.PrepareTransfer;
 
-             _taskRobot = robot;
 
-             _taskSlot = slot;
 
-             _taskBlade = blade;
 
-             _taskTransferType = type;
 
-             _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
 
-             LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
 
-             return _entityTaskToken != (int)FSM_MSG.NONE;
 
-         }
 
-         public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
 
-         {
 
-             StopWaitTransfer(robot);
 
-             _task = TaskType.PostTransfer;
 
-             _taskRobot = robot;
 
-             _taskSlot = slot;
 
-             _taskTransferType = type;
 
-             _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
 
-             LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
 
-             return _entityTaskToken != (int)FSM_MSG.NONE;
 
-         }
 
-         public override bool PostTransfer(ModuleName robot)
 
-         {
 
-             StopWaitTransfer(robot);
 
-             _task = TaskType.PostTransfer;
 
-             _taskRobot = robot;
 
-             _taskSlot = _inTransferSlot;
 
-             _taskTransferType = _inTransferType;
 
-             _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
 
-             LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
 
-             return _entityTaskToken != (int)FSM_MSG.NONE;
 
-         }
 
-         public override bool Process(string recipeName, bool isCleanRecipe, bool withWafer, WaferInfo wafer)
 
-         {
 
-             _task = TaskType.Process;
 
-             LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
 
-             if (SC.GetValue<bool>("System.IsATMMode"))
 
-             {
 
-                 int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
 
-                 _timerProcess.Start(time * 1000);
 
-                 EV.PostInfoLog("Scheduler", $"System run in ATM mode, process skipped, delay {time} seconds");
 
-                 WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
 
-                 return true;
 
-             }
 
-             else
 
-             {
 
-                 _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, withWafer);
 
-                 return _entityTaskToken != (int)FSM_MSG.NONE;
 
-             }
 
-         }
 
-         public override bool Preheating(float temperature)
 
-         {
 
-             _task = TaskType.Heating;
 
-             _paramTemp = temperature;
 
-             _entityTaskToken = _entity.InvokePreHeat(temperature);
 
-             LogTaskStart(_task, $"preheat to {temperature}");
 
-             return _entityTaskToken != (int)FSM_MSG.NONE;
 
-         }
 
-         public bool CheckTaskDone()
 
-         {
 
-             bool ret = false;
 
-             switch (_task)
 
-             {
 
-                 case TaskType.None:
 
-                     ret = true;
 
-                     break;
 
-                 case TaskType.PrepareTransfer:
 
-                     ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
 
-                     break;
 
-                 case TaskType.PostTransfer:
 
-                     ret = _entity.CheckAcked(_entityTaskToken);
 
-                     break;
 
-                 case TaskType.Heating:
 
-                     ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
 
-                     break;
 
-                 case TaskType.Process:
 
-                 case TaskType.IdlePurgeProcess:
 
-                 case TaskType.IdleCleanProcess:
 
-                 case TaskType.PreJobProcess:
 
-                 case TaskType.CompleteJobProcess:
 
-                     if (SC.GetValue<bool>("System.IsATMMode"))
 
-                     {
 
-                         ret = _timerProcess.IsTimeout() && _entity.IsIdle;
 
-                         if (ret)
 
-                             WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
 
-                     }
 
-                     else
 
-                     {
 
-                         ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
 
-                     }
 
-                     break;
 
-             }
 
-             if (ret && _task != TaskType.None)
 
-             {
 
-                 LogTaskDone(_task, "");
 
-                 _task = TaskType.None;
 
-             }
 
-             return ret;
 
-         }
 
-         public bool Monitor()
 
-         {
 
-             return true;
 
-         }
 
-         public void SetPMAuto()
 
-         {
 
-             _entity.SetAuto();
 
-         }
 
-         public bool IdlePurgeProcess(string recipeName)
 
-         {
 
-             _task = TaskType.IdlePurgeProcess;
 
-             _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
 
-             LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
 
-             return _entityTaskToken != (int)FSM_MSG.NONE;
 
-         }
 
-         public bool IdleCleanProcess(string recipeName)
 
-         {
 
-             _task = TaskType.IdleCleanProcess;
 
-             _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
 
-             LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
 
-             return _entityTaskToken != (int)FSM_MSG.NONE;
 
-         }
 
-         public void PreJobClean()
 
-         {
 
-             var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
 
-             var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
 
-             _waitPreJobClean = enableJobClean && enablePreJobClean;
 
-         }
 
-         public bool PreJobProcess(string recipeName)
 
-         {
 
-             _task = TaskType.PreJobProcess;
 
-             _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
 
-             LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
 
-             return _entityTaskToken != (int)FSM_MSG.NONE;
 
-         }
 
-         public void CompleteJobClean()
 
-         {
 
-             var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
 
-             var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
 
-             _waitCompletejobClean = enableJobClean && enableCompleteJobClean;
 
-         }
 
-         public bool CompleteJobProcess(string recipeName)
 
-         {
 
-             _task = TaskType.CompleteJobProcess;
 
-             _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
 
-             LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
 
-             return _entityTaskToken != (int)FSM_MSG.NONE;
 
-         }
 
-         private void WaferArrived(object sender, EventArgs e)
 
-         {
 
-             WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
 
-             var recipeName = Module == ModuleName.PMA
 
-                 ? wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PMARecipe"]
 
-                 : wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PMBRecipe"];
 
-             Process((string)recipeName, false, true, wafer);
 
-         }
 
-         #region clean task
 
-         internal void ResetIdlePurgeTime()
 
-         {
 
-             IdlePurgeTimer.Restart();
 
-         }
 
-         internal void ResetIdleCleanTime()
 
-         {
 
-             IdleCleanTimer.Restart();
 
-         }
 
-         public bool ResetClean(bool resetPurge, bool resetClean, bool jobClean)
 
-         {
 
-             if (resetPurge)
 
-             {
 
-                 IdlePurgeTrig.RST = true;
 
-                 IdlePurgeTimer.Stop();
 
-                 IdlePurgeTime = 0;
 
-             }
 
-             if (resetClean)
 
-             {
 
-                 IdleCleanTrig.RST = true;
 
-                 IdleCleanTimer.Stop();
 
-                 IdleCleanTime = 0;
 
-             }
 
-             if (jobClean)
 
-             {
 
-                 _waitPreJobClean = false;
 
-                 _waitCompletejobClean = false;
 
-                 PreJobCleanTrig.RST = true;
 
-                 PreJobCleanTimer.Stop();
 
-             }
 
-             return true;
 
-         }
 
-         public void MonitorCleanTasks()
 
-         {
 
-             var hasWafer = WaferManager.Instance.CheckHasWafer(Module, 0);
 
-             var enablePurge = false;//SC.GetValue<bool>($"{Module}.IdlePurge.IsEnabled");
 
-             var enableClean = SC.GetValue<bool>($"{Module}.IdleClean.IsEnabled");
 
-             #region Idle Purge
 
-             IdlePurgeTrig.CLK = (IsIdle || _task != TaskType.IdlePurgeProcess) && enablePurge && !hasWafer;
 
-             if (IdlePurgeTrig.R)
 
-             {
 
-                 LOG.Write( eEvent.INFO_PM, Module, $"{Module} idle purge start calc elapse time");
 
-                 IdlePurgeTimer.Restart();
 
-             }
 
-             if (IdlePurgeTrig.T)
 
-             {
 
-                 LOG.Write(eEvent.INFO_PM, Module, $"{Module} idle purge stopped calc elapse time");
 
-                 ResetClean(true, false, false);
 
-             }
 
-             if (IdlePurgeTimer.IsRunning)
 
-             {
 
-                 IdlePurgeTime = (int)IdlePurgeTimer.ElapsedMilliseconds / 1000;
 
-                 int idlePurgeTimeSetPoint = SC.GetValue<int>($"{Module}.IdlePurge.IdlePurgeTime");
 
-                 var nextRunTime = idlePurgeTimeSetPoint - IdlePurgeTime;
 
-                 if (nextRunTime < 0)
 
-                     nextRunTime = 0;
 
-                 if (enablePurge)
 
-                 {
 
-                     if (nextRunTime <= 0 && IsAvailable)
 
-                     {
 
-                         var recipe = SC.GetStringValue($"{Module}.IdlePurge.IdlePurgeRecipe");
 
-                         if (string.IsNullOrEmpty(recipe))
 
-                         {
 
-                             _trigIdlePurgeFailed.CLK = true;
 
-                             LOG.Write(eEvent.INFO_PM, Module, $"{Module} Idle purge can not run, recipe is empty");
 
-                             ResetClean(true, false, false);
 
-                         }
 
-                         else if (hasWafer)
 
-                         {
 
-                             _trigIdlePurgeFailed.CLK = true;
 
-                             LOG.Write(eEvent.INFO_PM, Module, $"{Module} Idle purge can not run, has wafer");
 
-                             ResetClean(true, false, false);
 
-                         }
 
-                         else
 
-                         {
 
-                             _trigIdlePurgeFailed.CLK = false;
 
-                             LOG.Write(eEvent.INFO_PM, Module, $"{Module} Start run idle purge recipe {recipe}");
 
-                             IdlePurgeProcess("ALD\\Process\\" + recipe);
 
-                         }
 
-                         if (_trigIdlePurgeFailed.Q)
 
-                         {
 
-                             LOG.Write(eEvent.WARN_PM, Module, "Can not run idle purge recipe");
 
-                         }
 
-                     }
 
-                 }
 
-                 else
 
-                 {
 
-                     nextRunTime = 0;
 
-                 }
 
-                 IdlePurgeNextRunTime = nextRunTime;
 
-             }
 
-             else
 
-             {
 
-                 IdlePurgeNextRunTime = 0;
 
-             }
 
-             #endregion
 
-             #region Idle Clean
 
-             IdleCleanTrig.CLK = (IsIdle || _task != TaskType.IdleCleanProcess) && enableClean && !hasWafer;
 
-             if (IdleCleanTrig.R)
 
-             {
 
-                 LOG.Write(eEvent.INFO_PM, Module, $"{Module} idle clean start calc elapse time");
 
-                 IdleCleanTimer.Restart();
 
-             }
 
-             if (IdleCleanTrig.T)
 
-             {
 
-                 LOG.Write(eEvent.INFO_PM, Module, $"{Module} idle clean stopped calc elapse time");
 
-                 ResetClean(false, true, false);
 
-             }
 
-             if (IdleCleanTimer.IsRunning)
 
-             {
 
-                 IdleCleanTime = (int)IdleCleanTimer.ElapsedMilliseconds / 1000;
 
-                 int idleCleanTimeSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
 
-                 var nextRunTime = idleCleanTimeSetPoint - IdleCleanTime;
 
-                 if (nextRunTime < 0)
 
-                     nextRunTime = 0;
 
-                 if (enableClean)
 
-                 {
 
-                     if (nextRunTime <= 0 && IsAvailable)
 
-                     {
 
-                         var recipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
 
-                         if (string.IsNullOrEmpty(recipe))
 
-                         {
 
-                             _trigIdleCleanFailed.CLK = true;
 
-                             LOG.Write(eEvent.INFO_PM, Module, $"{Module} Idle clean can not run, recipe is empty");
 
-                             ResetClean(false, true, false);
 
-                         }
 
-                         else if (hasWafer)
 
-                         {
 
-                             _trigIdleCleanFailed.CLK = true;
 
-                             LOG.Write(eEvent.INFO_PM, Module, $"{Module} Idle clean can not run, has wafer");
 
-                             ResetClean(false, true, false);
 
-                         }
 
-                         else
 
-                         {
 
-                             _trigIdleCleanFailed.CLK = false;
 
-                             LOG.Write(eEvent.INFO_PM, Module, $"{Module} Start run idle Clean recipe {recipe}");
 
-                             IdleCleanProcess($"{Module}\\" + recipe);
 
-                         }
 
-                         if (_trigIdleCleanFailed.Q)
 
-                         {
 
-                             EV.PostWarningLog(Module.ToString(), "Can not run idle clean recipe");
 
-                         }
 
-                     }
 
-                 }
 
-                 else
 
-                 {
 
-                     nextRunTime = 0;
 
-                 }
 
-                 IdleCleanNextRunTime = nextRunTime;
 
-             }
 
-             else
 
-             {
 
-                 IdleCleanNextRunTime = 0;
 
-             }
 
-             #endregion
 
-             #region PreJob Clean
 
-             var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
 
-             var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
 
-             var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
 
-             if (enableJobClean && enableCompleteJobClean && _waitCompletejobClean && IsIdle)
 
-             {
 
-                 var recipe = SC.GetStringValue($"{Module}.JobClean.CompleteJobCleanRecipe");
 
-                 if (string.IsNullOrEmpty(recipe))
 
-                 {
 
-                     EV.PostWarningLog(Module.ToString(), "complete job clean can not run, recipe is empty");
 
-                 }
 
-                 else if (hasWafer)
 
-                 {
 
-                     EV.PostWarningLog(Module.ToString(), "complete job clean can not run, has wafer");
 
-                 }
 
-                 else
 
-                 {
 
-                     EV.PostInfoLog(Module.ToString(), $"Start run complete job clean recipe {recipe}");
 
-                     CompleteJobProcess($"{Module}\\" + recipe);
 
-                 }
 
-                 _waitCompletejobClean = false;
 
-             }
 
-             PreJobCleanTrig.CLK = enableJobClean && enablePreJobClean && IsIdle;
 
-             if (PreJobCleanTrig.R)
 
-             {
 
-                 PreJobCleanTimer.Restart();
 
-             }
 
-             if(PreJobCleanTrig.T)
 
-             {
 
-                 ResetClean(false, false, true);
 
-             }
 
-             if (PreJobCleanTimer.IsRunning && _waitPreJobClean)
 
-             {
 
-                 PreJobCleanTime = (int)PreJobCleanTimer.ElapsedMilliseconds / 1000;
 
-                 int PreJobCleanIdleTimeSP = SC.GetValue<int>($"{Module}.JobClean.IdleCleanTime");
 
-                 if(PreJobCleanTime >= PreJobCleanIdleTimeSP)
 
-                 {
 
-                     var recipe = SC.GetStringValue($"{Module}.JobClean.PreJobCleanRecipe");
 
-                     if (string.IsNullOrEmpty(recipe))
 
-                     {
 
-                         EV.PostWarningLog(Module.ToString(), "pre job clean can not run, recipe is empty");
 
-                     }
 
-                     else if (hasWafer)
 
-                     {
 
-                         EV.PostWarningLog(Module.ToString(), "pre job clean can not run, has wafer");
 
-                     }
 
-                     else
 
-                     {
 
-                         EV.PostInfoLog(Module.ToString(), $"Start run pre job clean recipe {recipe}");
 
-                         PreJobProcess($"{Module}\\" + recipe);
 
-                     }
 
-                 }
 
-             }
 
-             #endregion
 
-         }
 
-         #endregion
 
-     }
 
- }
 
 
  |