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- using Aitex.Core.Common.DeviceData;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.Util;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.RT.Log;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Device.Bases;
- using MECF.Framework.Common.Equipment;
- using System;
- using System.Collections.Generic;
- using Venus_Core;
- using Venus_RT.Modules;
- using Venus_RT.Modules.PMs;
- using Venus_RT.Devices.IODevices;
- using Venus_RT.Devices.EPD;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.OperationCenter;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
- namespace Venus_RT.Devices
- {
- class JetTM : TM
- {
- private readonly IoLid _TMLid;
- private readonly IoLid _LLALid;
- private readonly IoLid _LLBLid;
- private readonly IoCylinder _LLASlitDoor;
- private readonly IoCylinder _LLBSlitDoor;
- private readonly IoValve _N2Valve;
- private readonly IoValve _SoftPumpValve;
- private readonly IoValve _FastPumpValve;
- private readonly IoValve _PurgeValve;
- private readonly IoValve _VentValve;
- private readonly IoValve _WaferRelayValve;
- private readonly IoSensor _TMPowerOn;
- private readonly IoSensor _TMInSafty;
- private readonly IoSensor _WaferLeakSensor;
- private readonly IoSensor _EFEMSideDoorClosed;
- private readonly IoSensor _TMPCWFlowSwitch;
- private readonly IoSensor _TMLidClosed;
- private readonly IoSensor _CDAPressureSwitch;
- private readonly IoSensor _VaccumPressureSwitch;
- private readonly IoSensor _N2PressureSwitch;
- private readonly IoTMPressureCtrl _presureCtrl;
- public bool TMLidClosed => _TMLid.OFFFeedback;
- public bool LLALidClosed => _LLALid.OFFFeedback;
- public bool LLBLidClosed => _LLBLid.OFFFeedback;
- public JetTM() : base("TM")
- {
- _TMLid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.TMLid}");
- _LLALid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.LLALid}");
- _LLBLid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.LLBLid}");
- _LLASlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLATSlitDoor}");
- _LLBSlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLBTSlitDoor}");
- _N2Valve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveN2}");
- _SoftPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveSoftPump}");
- _FastPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveFastPump}");
- _PurgeValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValvePurge}");
- _VentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveVent}");
- _WaferRelayValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveWaterRelay}");
- _TMPowerOn = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMPowerOn}");
- _TMInSafty = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMInSafty}");
- _WaferLeakSensor = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.WaferLeakSensor}");
- _EFEMSideDoorClosed = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.EFEMSideDoorClosed}");
- _TMPCWFlowSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMPCWFlowSwitch}");
- _TMLidClosed = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMLidClosed}");
- _CDAPressureSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.CDAPressureSwitch}");
- _VaccumPressureSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.VaccumPressureSwitch}");
- _N2PressureSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.N2PressureSwitch}");
- _presureCtrl = DEVICE.GetDevice<IoTMPressureCtrl>($"TM.{VenusDevice.TMPressureCtrl}");
- }
- public override void Monitor()
- {
- }
- }
- }
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