Kepler-Release/Venus/Venus_RT/Config/Interlock.Venus.xml

<?xml version="1.0" encoding="utf-16"?>
<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  
	<!--PMA-->
  <Action do="PMA.DO_PVN21" value="true" tip="PVN21" tip.zh-CN=""  tip.en-US="DO-0" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_PVN22"  value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>
  
  <Action do="PMA.DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>
  
  <Action do="PMA.DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />

	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>
  
  <Action do="PMA.DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_N2_Valve" value="true" tip="N2" tip.zh-CN="" tip.en-US="DO-10" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	<Limit do="PMA.DO_Soft_Pumping_Valve"	value="false" tip="DO Soft Pumping Valve"	tip.zh-CN="" tip.en-US="DO-22" />
	<Limit do="PMA.DO_Fast_Pumping_Valve"	value="false" tip="DO Fast Pumping Valve"	tip.zh-CN="" tip.en-US="DO-23" />
  </Action>

  <Action do="PMA.DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_PVHe2" value="true" tip="PVHe2" tip.zh-CN="" tip.en-US="DO-20" >
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
	<Limit di="PMA.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
  </Action>

  <Action do="PMA.DO_Gas_Final_Valve" value="true" tip="Gas Final Valve" tip.zh-CN=""	tip.en-US="DO-21" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
  </Action>

  <Action do="PMA.DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit do="PMA.DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
  </Action>

  <Action do="PMA.DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" >
	<Limit di="PMA.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	<Limit do="PMA.DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
  </Action>

  <Action do="PMA.DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
	<Limit di="PMA.DI_Loadlock_Arm_Retract_POS"	value="true" tip="DI Loadlock Arm Retract POS"	tip.zh-CN="" tip.en-US="DI-47" />
  </Action>

  <Action do="PMA.DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-25" >
	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
	<Limit di="PMA.DI_Loadlock_Arm_Retract_POS"	value="true" tip="DI Loadlock Arm Retract POS"	tip.zh-CN="" tip.en-US="DI-47" />
  </Action>

	
  <Action do="PMA.DO_Lift_Pin_Up" value="true" tip="Lift Pin Up" tip.zh-CN="" tip.en-US="DO-26" >
	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
  </Action>

  <Action do="PMA.DO_Lift_Pin_Down" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-27" >
	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
  </Action>

  <Action do="PMA.DO_Turbo_Pump_Pumping_Valve" value="true" tip="Turbo Pump Pumping Valve" tip.zh-CN="" tip.en-US="DO-29" >
	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
  </Action>

  <Action do="PMA.DO_Turbo_Pump_Purge_Valve" value="true" tip="Turbo Pump Purge Valve" tip.zh-CN="" tip.en-US="DO-30" >
	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />

  </Action>

  <Action do="PMA.DO_Guage_Valve" value="true" tip="Guage Valve" tip.zh-CN="" tip.en-US="DO-31" >
	<Limit di="PMA.DI_PM_VAC_SW"				value="true" tip="DI PM Vacuum SW"				tip.zh-CN="" tip.en-US="DI-2" />
	<Limit di="PMA.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
  </Action>

  <Action do="PMA.DO_CHB_Wall_Heater_On" value="true" tip="Chamber Wall Heater On" tip.zh-CN="" tip.en-US="DO-35" >
	<Limit di="PMA.DI_CHB_Wall_OT_SW_Alarm" value="false" tip="DI Chamber Wall OT Alarm" tip.zh-CN="" tip.en-US="DI-32" />
  </Action>

  <Action do="PMA.DO_Loadlock_Pumping_Valve" value="true" tip="Loadlock Pumping Valve" tip.zh-CN="" tip.en-US="DO-42" >
	<Limit di="PMA.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
	<Limit do="PMA.DO_Loadlock_Vent_Valve"		value="false" tip="DO Loadlock Vent Valve"		tip.zh-CN="" tip.en-US="DO-43" />
  </Action>

  <Action do="PMA.DO_Loadlock_Vent_Valve" value="true" tip="Loadlock Vent Valve" tip.zh-CN="" tip.en-US="DO-43" >
	<Limit di="PMA.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
	<Limit do="PMA.DO_Loadlock_Pumping_Valve"	value="false" tip="DO Loadlock Pumping Valve"	tip.zh-CN="" tip.en-US="DO-42" />
  </Action>

  <Action do="PMA.DO_Loadlock_Arm_Extend" value="true" tip="Loadlock Arm Extend" tip.zh-CN="" tip.en-US="DO-44" >
	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Open_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-10" />
	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
  </Action>
	
  <Action do="PMA.DO_Loadlock_Arm_Retract" value="true" tip="Loadlock Arm Retract" tip.zh-CN="" tip.en-US="DO-45" >
	<Limit di="PMA.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
	<Limit di="PMA.DI_Slit_Door_Open_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-10" />
	<Limit di="PMA.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
  </Action>

	<!--PMB-->
	<!--<Action do="PMB.DO_PVN21" value="true" tip="PVN21" tip.zh-CN=""  tip.en-US="DO-0" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_PVN22"  value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />

		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_N2_Valve" value="true" tip="N2" tip.zh-CN="" tip.en-US="DO-10" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
		<Limit do="PMB.DO_Soft_Pumping_Valve"	value="false" tip="DO Soft Pumping Valve"	tip.zh-CN="" tip.en-US="DO-22" />
		<Limit do="PMB.DO_Fast_Pumping_Valve"	value="false" tip="DO Fast Pumping Valve"	tip.zh-CN="" tip.en-US="DO-23" />
	</Action>

	<Action do="PMB.DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_PVHe2" value="true" tip="PVHe2" tip.zh-CN="" tip.en-US="DO-20" >
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Gas_Box_Door_SW"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
		<Limit di="PMB.DI_Gas_Box_Pressure_SW"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
	</Action>

	<Action do="PMB.DO_Gas_Final_Valve" value="true" tip="Gas Final Valve" tip.zh-CN=""	tip.en-US="DO-21" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
	</Action>

	<Action do="PMB.DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit do="PMB.DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
	</Action>

	<Action do="PMB.DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" >
		<Limit di="PMB.DI_PM_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit do="PMB.DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
	</Action>

	<Action do="PMB.DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
		<Limit di="PMB.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
		<Limit di="PMB.DI_Loadlock_Arm_Retract_POS"	value="true" tip="DI Loadlock Arm Retract POS"	tip.zh-CN="" tip.en-US="DI-47" />
	</Action>

	<Action do="PMB.DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-25" >
		<Limit di="PMB.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
		<Limit di="PMB.DI_Loadlock_Arm_Retract_POS"	value="true" tip="DI Loadlock Arm Retract POS"	tip.zh-CN="" tip.en-US="DI-47" />
	</Action>


	<Action do="PMB.DO_Lift_Pin_Up" value="true" tip="Lift Pin Up" tip.zh-CN="" tip.en-US="DO-26" >
		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
	</Action>

	<Action do="PMB.DO_Lift_Pin_Down" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-27" >
		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
	</Action>

	<Action do="PMB.DO_Turbo_Pump_Pumping_Valve" value="true" tip="Turbo Pump Pumping Valve" tip.zh-CN="" tip.en-US="DO-29" >
		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
	</Action>

	<Action do="PMB.DO_Turbo_Pump_Purge_Valve" value="true" tip="Turbo Pump Purge Valve" tip.zh-CN="" tip.en-US="DO-30" >
		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />

	</Action>

	<Action do="PMB.DO_Guage_Valve" value="true" tip="Guage Valve" tip.zh-CN="" tip.en-US="DO-31" >
		<Limit di="PMB.DI_PM_VAC_SW"				value="true" tip="DI PM Vacuum SW"				tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMB.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
	</Action>

	<Action do="PMB.DO_CHB_Wall_Heater_On" value="true" tip="Chamber Wall Heater On" tip.zh-CN="" tip.en-US="DO-35" >
		<Limit di="PMB.DI_CHB_Wall_OT_SW_Alarm" value="false" tip="DI Chamber Wall OT Alarm" tip.zh-CN="" tip.en-US="DI-32" />
	</Action>

	<Action do="PMB.DO_Loadlock_Pumping_Valve" value="true" tip="Loadlock Pumping Valve" tip.zh-CN="" tip.en-US="DO-42" >
		<Limit di="PMB.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
		<Limit do="PMB.DO_Loadlock_Vent_Valve"		value="false" tip="DO Loadlock Vent Valve"		tip.zh-CN="" tip.en-US="DO-43" />
	</Action>

	<Action do="PMB.DO_Loadlock_Vent_Valve" value="true" tip="Loadlock Vent Valve" tip.zh-CN="" tip.en-US="DO-43" >
		<Limit di="PMB.DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMB.DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
		<Limit do="PMB.DO_Loadlock_Pumping_Valve"	value="false" tip="DO Loadlock Pumping Valve"	tip.zh-CN="" tip.en-US="DO-42" />
	</Action>

	<Action do="PMB.DO_Loadlock_Arm_Extend" value="true" tip="Loadlock Arm Extend" tip.zh-CN="" tip.en-US="DO-44" >
		<Limit di="PMB.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Open_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-10" />
		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
	</Action>

	<Action do="PMB.DO_Loadlock_Arm_Retract" value="true" tip="Loadlock Arm Retract" tip.zh-CN="" tip.en-US="DO-45" >
		<Limit di="PMB.DI_PM_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMB.DI_Slit_Door_Open_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-10" />
		<Limit di="PMB.DI_Loadlock_Lid_Closed"		value="true" tip="DI Loadlock Lid Closed"		tip.zh-CN="" tip.en-US="DI-45" />
	</Action>-->
	
   <!--TM-->
	<Action do="TM.DO_LLA_Slit_Door_E_Open"					value="true" tip="Loadlock A EFEM Side Door Open"	tip.zh-CN="" tip.en-US="DO-11" >
		<Limit di="TM.DI_LLA_T_Slit_Door_close_Position"	value="true" tip="LLA TM Side Door Closed"			tip.zh-CN="" tip.en-US="DI-25" />
		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
	</Action>
	
	<Action do="TM.DO_LLA_Slit_Door_E_Close"				value="true" tip="Loadlock A EFEM Side Door Close"	tip.zh-CN="" tip.en-US="DO-12" >
		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
	</Action>
	
	<Action do="TM.DO_LLB_Slit_Door_E_Open"					value="true" tip="Loadlock B EFEM Side Door Open"	tip.zh-CN="" tip.en-US="DO-21" >
		<Limit di="TM.DI_LLB_T_Slit_Door_close_Position"	value="true" tip="LLB TM Side Door Closed"			tip.zh-CN="" tip.en-US="DI-30" />
		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLB"			value="true" tip="EFEM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-12" />
	</Action>
	
	<Action do="TM.DO_LLB_Slit_Door_E_Close"				value="true" tip="Loadlock B EFEM Side Door Close"	tip.zh-CN="" tip.en-US="DO-12" >
		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLB"			value="true" tip="EFEM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-12" />
	</Action>

	<Action do="TM.DO_LLA_Slit_Door_T_Open"					value="true" tip="Loadlock A TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-13" >
		<Limit di="TM.DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
		<Limit di="TM.DI_LLA_E_Slit_Door_close_Position"	value="true" tip="LLA EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-23" />
		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
	</Action>
	
	<Action do="TM.DO_LLA_Slit_Door_T_Close"				value="true" tip="Loadlock A TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
		<Limit di="TM.DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
	</Action>
	
	<Action do="TM.DO_LLB_Slit_Door_T_Open"					value="true" tip="Loadlock B TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-23" >
		<Limit di="TM.DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
		<Limit di="TM.DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
	</Action>
	
	<Action do="TM.DO_LLB_Slit_Door_T_Close"				value="true" tip="Loadlock B TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-24" >
		<Limit di="TM.DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
	</Action>
	
</Interlock>