Kepler-Release/Venus/Venus_RT/Config/DeviceModelVenus_MF.xml

<?xml version="1.0" encoding="utf-16"?>
<DeviceModelDefine type="Venus" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
  <IoValves>
	<IoValve id="ValveN2" display="N2 Valve" schematicId="N2" unit="" isNc="true"
	        isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveSoftPump" display="Soft Pump Valve" schematicId="SoftPump" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_TM" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveFastPump" display="Fast Pump Valve" schematicId="FastPump" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_TM" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePurge" display="Purge Valve" schematicId="Purge" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_TM" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveVent" display="Vent Valve" schematicId="Vent" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_TM" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveSoftPumpLLA" display="LLA Soft Pump Valve" schematicId="SoftPumpLLA" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_LLA" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveFastPumpLLA" display="LLA Fast Pump Valve" schematicId="FastPumpLLA" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_LLA" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePurgeLLA" display="LLA Purge Valve" schematicId="PurgeLLA" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_LLA" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveVentLLA" display="LLA Vent Valve" schematicId="VentLLA" unit="" isNc="true"
            isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_LLA" diCloseSensor="" diOpenSensor="" />

	<IoValve id="ValveSoftPumpLLB" display="LLB Soft Pump Valve" schematicId="SoftPumpLLB" unit="" isNc="true"
		isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_LLB" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveFastPumpLLB" display="LLB Fast Pump Valve" schematicId="FastPumpLLB" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_LLB" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePurgeLLB" display="LLB Purge Valve" schematicId="PurgeLLB" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_LLB" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveVentLLB" display="LLB Vent Valve" schematicId="VentLLB" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_LLB" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveWaterRelay" display="Water Relay Valve" schematicId="WaterRelay" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Water_Valve_Relay" diCloseSensor="" diOpenSensor="" />
    
  </IoValves>

    <IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
    <IoMfc id="TM_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
            aiFlow="AI_TM_MFC1_Flow" aoFlow="AO_TM_MFC1_Flow_Setpoint" diOffline="" aoRange=""
            diPressureAlarm="DI_N2_Pressure_Switch"/>
    </IoMfcs>

    <IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
	    <IoGasStick id="GasStickMFC1" display="" mfc ="TM_MFC1" downvalve="ValveN2" />
    </IoGasSticks>

  <IoSensors>
      <IoSensor id="TMPowerOn" display="TM Power On"  schematicId="" unit="" di="DI_TM_Power_On" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="TM Power Off" />
	  <IoSensor id="TMInSafty" display="TM In Safty"  schematicId="" unit="" di="DI_TM_In_Safety" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="TM Safty Alarm" />
	  <IoSensor id="WaferLeakSensor" display="Water Leak Sensor"  schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="TM Wafer Leak" />
	  <IoSensor id="EFEMSideDoorClosed" display="EFEM Side Door Closed"  schematicId="" unit="" di="DI_EFEM_Side_Door_Closed" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="EFEM Side Door Not Closed" />
	  <IoSensor id="TMPCWFlowSwitch" display="TM PCW Flow Switch"  schematicId="" unit="" di="DI_TM_CHB_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="TM PCW Flow Switch abnormal" alarmText="" />
	  <IoSensor id="LLAPCWFlowSwitch" display="LLA PCW Flow Switch"  schematicId="" unit="" di="DI_LLA_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="LLA PCW Flow Switch abnormal" alarmText="" />
	  <IoSensor id="LLBPCWFlowSwitch" display="LLB PCW Flow Switch"  schematicId="" unit="" di="DI_LLB_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="LLB PCW Flow Switch abnormal" alarmText="" />
	  <IoSensor id="TMLidClosed" display="TM Lid Closed"  schematicId="" unit="" di="DI_TM_CHB_Door_Closed" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="TM Lid Not Closed" />
	  <IoSensor id="CDAPressureSwitch" display="CDA pressure Switch"  schematicId="" unit="" di="DI_CDA_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="TM CDA pressure abnormal" />
	  <IoSensor id="VaccumPressureSwitch" display="Vaccum Pressure Switch"  schematicId="" unit="" di="DI_Vaccum_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
			 infoText="" warningText="" alarmText="Vaccum Pressure Switch abnormal" />
	  <IoSensor id="N2PressureSwitch" display="N2 Pressure Switch"  schematicId="" unit="" di="DI_N2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="N2 Pressure Switch abnormal" />
	  
  </IoSensors>
	
  <IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
	    <IoPressureMeter id="TMProcessGauge" display="TM Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_TM_CHB_Pressure" diGaugeFail="DI_TM_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
	    <IoPressureMeter id="TMForelineGauge" display="TM Foreline Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_TM_Foreline_Pressure" diGaugeFail="TMForelineGaugeAlarm" scPrecision="" scOffset=""/>
	    <IoPressureMeter id="LLAPressureGauge" display="LLA Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_LLA_CHB_Pressure" diGaugeFail="DI_LLA_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
		<IoPressureMeter id="LLBPressureGauge" display="LLB Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_LLB_CHB_Pressure" diGaugeFail="DI_LLB_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
		<IoPressureMeter id="LoadlockForelineGauge" display="Loadlock Foreline Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_LLA_LLB_Foreline_Pressure" diGaugeFail="DI_LLA_Foreline_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
    </IoPressureMeters>

	<IoTMPressureCtrls assembly="Venus_RT" classType="Venus_RT.Devices.IoTMPressureCtrl">
		<IoTMPressureCtrl id="TMPressureCtrl" display="MFPressureControl" schematicId="MFPressureControl" unit="mTorr"
						   aoMFPressure="AO_TM_CHB_Pressure"
						   MFPressureMeter ="TMProcessGauge" LLAPressureMeter="LLAPressureGauge" LLBPressureMeter="LLBPressureGauge" MFForelineMeter="TMForelineGauge" LLForelineMeter="LoadlockForelineGauge"/>
	</IoTMPressureCtrls>
	

  <IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
    <IoHeartbeat  id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
  </IoHeartbeats>


  <IoPlcDateTimes>
    <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
                  aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
  </IoPlcDateTimes>

  <IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">

    <IoCylinder id="LLAESlitDoor" display="LLA EFEM Side Door" schematicId="" unit="" doMotorRelay=""
                doON="DO_LLA_Slit_Door_E_Open" doOFF="DO_LLA_Slit_Door_E_Close" diON="DI_LLA_E_Slit_Door_open_Position" diOFF="DI_LLA_E_Slit_Door_close_Position" />
    <IoCylinder id="LLBESlitDoor" display="LLB EFEM Side Door" schematicId="" unit="" doMotorRelay=""
                doON="DO_LLB_Slit_Door_E_Open" doOFF="DO_LLB_Slit_Door_E_Close" diON="DI_LLB_E_Slit_Door_open_Position" diOFF="DI_LLB_E_Slit_Door_close_Position" />
	<IoCylinder id="LLATSlitDoor" display="LLA TM Side Door" schematicId="" unit="" doMotorRelay=""
				doON="DO_LLA_Slit_Door_T_Open" doOFF="DO_LLA_Slit_Door_T_Close" diON="DI_LLA_T_Slit_Door_open_Position" diOFF="DI_LLA_T_Slit_Door_close_Position" />
	<IoCylinder id="LLBTSlitDoor" display="LLB TM Side Door" schematicId="" unit="" doMotorRelay=""
				doON="DO_LLB_Slit_Door_T_Open" doOFF="DO_LLB_Slit_Door_T_Close" diON="DI_LLB_T_Slit_Door_open_Position" diOFF="DI_LLB_T_Slit_Door_close_Position" />
  </IoCylinders>

  <IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
    <IoLid id="TMLid" display="TM Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_TM_CHB_Door_Closed" />
	<IoLid id="LLALid" display="LoadLock A Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_LLA_Lid_Door_Closed" />
	<IoLid id="LLBLid" display="LoadLock B Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_LLB_Lid_Door_Closed" />
  </IoLids>
  
</DeviceModelDefine>