| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950 | using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.Device;using Aitex.Core.RT.IOCore;using Aitex.Core.RT.Log;using Aitex.Core.RT.OperationCenter;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;using MECF.Framework.Common.CommonData.DeviceData;using System;using System.Collections.Generic;using System.Diagnostics;using System.Linq;using System.Text;using System.Threading.Tasks;using System.Xml;using Venus_Core;using Venus_Unity;namespace Venus_RT.Devices.IODevices{    public class IoHighTemperatureHeater : BaseDevice, IDevice    {        private readonly DIAccessor _diPowerOnFeedback;        private readonly DOAccessor _doPowerOn;        private readonly AIAccessor _aiTemperatureFeedback;        private readonly AOAccessor _aoTemperatureSetPoint;        private readonly DIAccessor _diGoPosition1Feedback;        private readonly DOAccessor _doGoPosition1On;        private readonly DIAccessor _diGoPosition2Feedback;        private readonly DOAccessor _doGoPosition2On;        private readonly DIAccessor _diGoPosition3Feedback;        private readonly DOAccessor _doGoPosition3On;        private readonly DIAccessor _diGoPosition4Feedback;        private readonly DOAccessor _doGoPosition4On;        private readonly DIAccessor _diGoPosition5Feedback;        private readonly DOAccessor _doGoPosition5On;        private readonly DIAccessor _diGoOriginFeedback;        private readonly DOAccessor _doGoOriginOn;        private readonly AOAccessor _aoLiftServoPosition1;        private readonly AOAccessor _aoLiftServoPosition2;        private readonly AOAccessor _aoLiftServoPosition3;        private readonly AOAccessor _aoLiftServoPosition4;        private readonly AOAccessor _aoLiftServoPosition5;        private readonly AOAccessor _aoOriginSearchHighSpeed;        private readonly AOAccessor _aoOriginSearchLowSpeed;        private readonly AOAccessor _aoAbsMoveSpeed;        private readonly AOAccessor _aoMaximusMoveSpeed;        private readonly AOAccessor _aoSoftDownLimit;        private readonly AOAccessor _aoSoftUpLimit;        private readonly AOAccessor _aoRatio;        private readonly DIAccessor _diDriverAlarm;        private readonly DIAccessor _diPosiModuleAlarm;        private readonly DIAccessor _diORGFailAlarm;        private readonly DOAccessor _doResetLift;        private readonly DOAccessor _doResetHeater;        private readonly AIAccessor _aiHeaterPurgeN2Flow;        private readonly DIAccessor _diMhtrErrorHeatStop;        private readonly DOAccessor _doMhtrErrorReset;        private readonly DIAccessor _diWaferTransferPosiSW;        private readonly AIAccessor _aiHeaterInnerAlarmWord1;        private readonly AIAccessor _aiHeaterInnerAlarmWord2;        private readonly AIAccessor _aiHeaterOuterAlarmWord1;        private readonly AIAccessor _aiHeaterOuterAlarmWord2;        private readonly DeviceTimer _originTimer = new DeviceTimer();        private readonly DeviceTimer _position1Timer = new DeviceTimer();        private readonly DeviceTimer _position2Timer = new DeviceTimer();        private readonly DeviceTimer _position3Timer = new DeviceTimer();        private readonly DeviceTimer _position4Timer = new DeviceTimer();        private readonly DeviceTimer _position5Timer = new DeviceTimer();        private int _goPositionTime = 30 * 1000;        private float HighTemperatureHeaterTemperatureSetPoint;        private string HighTemperatureHeaterPositipnSetPoint;        private float HighTemperatureHeaterRatioSetPoint;        private float _maxTemperatureSetPoint;        private float _minTemperatureSetPoint;        private float _maxRatioSetPoint;        private float _minRatioSetPoint;        private int _clearAlarmCounter;        private Stopwatch _heaterControlStopWatch = new Stopwatch();        //private R_TRIG innerWord1_TRIG = new R_TRIG();        //private R_TRIG innerWord2_TRIG = new R_TRIG();        //private R_TRIG outerWord1_TRIG = new R_TRIG();        //private R_TRIG outerWord2_TRIG = new R_TRIG();        private int _innerWord1;        private int _innerWord2;        private int _outerWord1;        private int _outerWord2;        private bool _isAutoRatio;        private List<RatioValue> _ratioValues = new List<RatioValue>();        private Stopwatch _ratioStopwatch=new Stopwatch();        private int RangeIndex=-1;        private AITHighTemperatureHeaterData DeviceData        {            get            {                return new AITHighTemperatureHeaterData                {                    Module = Module,                    DeviceName = Name,                    DisplayName = Display,                    HighTemperatureHeaterPositionFeedBack = CurrentPosition.ToString(),                    HighTemperatureHeaterIsonFeedBack = HighTemperatureHeaterIsOn,                    HighTemperatureHeaterTemperatureFeedBack = HighTemperatureHighHeaterTemperature,                    HighTemperatureHeaterRatioFeedBack = HighTemperatureHeaterRatio,                    HighTemperatureHeaterPositionSetPoint = HighTemperatureHeaterPositipnSetPoint,                    HighTemperatureHeaterTemperatureSetPoint = HighTemperatureHeaterTemperatureSetPoint,                    HighTemperatureHeaterRatioSetPoint = HighTemperatureHeaterRatioSetPoint,                    HighTemperatureHeaterN2Flow = HighTemperatureHeaterN2Flow,                    LiftIsAlarm = IsDriverAlarm || IsPosiModuleAlarm || IsORGFailAlarm,                    HeaterIsAlarm = _diMhtrErrorHeatStop.Value,                    IsAutoRatio = _isAutoRatio                };            }        }        public bool IsDriverAlarm => _diDriverAlarm.Value;        public bool IsPosiModuleAlarm => _diPosiModuleAlarm.Value;        public bool IsORGFailAlarm => _diORGFailAlarm.Value;        public HighTemperatureHeaterPosition CurrentPosition        {            get            {                if (_diDriverAlarm.Value || _diPosiModuleAlarm.Value || _diORGFailAlarm.Value)                {                    return HighTemperatureHeaterPosition.UnKnow;                }                if (_diGoOriginFeedback.Value == true && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)                {                    return HighTemperatureHeaterPosition.Origin;                }                if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == true && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)                {                    return HighTemperatureHeaterPosition.Position1;                }                else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == true && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)                {                    return HighTemperatureHeaterPosition.Position2;                }                else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == true && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)                {                    return HighTemperatureHeaterPosition.Position3;                }                else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == true && _diGoPosition5Feedback.Value == false)                {                    return HighTemperatureHeaterPosition.Position4;                }                else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == true)                {                    return HighTemperatureHeaterPosition.Position5;                }                else                {                    return HighTemperatureHeaterPosition.UnKnow;                }            }        }        public bool HighTemperatureHeaterIsOn        {            get            {                if (_diPowerOnFeedback.Value == true && _doPowerOn.Value == true)                {                    return true;                }                else                {                    return false;                }            }            set            {                SC.SetItemValue($"{Module}.HighTemperatureHeater.IsOn", value);            }        }        public float HighTemperatureHighHeaterTemperature        {            get            {                if (_aiTemperatureFeedback == null) return -1;                return _GetRealFloat(_aiTemperatureFeedback);            }            set            {                if (value <= _maxTemperatureSetPoint && value >= _minTemperatureSetPoint)                {                    LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $" Set Temperature to {value}");                    HighTemperatureHeaterTemperatureSetPoint = value;                    SC.SetItemValue($"{Module}.HighTemperatureHeater.Temperature", value);                }                else                {                    LOG.Write(eEvent.ERR_HighTemperatureHeater_SetTemperature_OverRange, Module, value.ToString(), _minTemperatureSetPoint.ToString(), _maxTemperatureSetPoint.ToString());                }            }        }        public float HighTemperatureHeaterRatio        {            get            {                if (_aoRatio == null) return -1;                return _GetRealFloat(_aoRatio);            }            set            {                if (value <= _maxRatioSetPoint && value >= _minRatioSetPoint)                {                    LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $" Set Ratio to {value}");                    HighTemperatureHeaterRatioSetPoint = value;                    SC.SetItemValue($"{Module}.HighTemperatureHeater.Ratio", value);                }                else                {                    LOG.Write(eEvent.ERR_HighTemperatureHeater_SetRatio_OverRange, Module, value.ToString(), _minRatioSetPoint.ToString(), _maxRatioSetPoint.ToString());                }            }        }        public float HighTemperatureHeaterN2Flow        {            get            {                if (_aiHeaterPurgeN2Flow == null) return -1;                return _GetRealFloat(_aiHeaterPurgeN2Flow);            }        }        public IoHighTemperatureHeater(string module, XmlElement node, string ioModule = "")        {            base.Module = module;            base.Name = node.GetAttribute("id");            base.Display = node.GetAttribute("display");            base.DeviceID = node.GetAttribute("schematicId");            _diPowerOnFeedback = ParseDiNode("diPowerOnFeedback", node, ioModule);            _doPowerOn = ParseDoNode("doPowerOn", node, ioModule);            _aiTemperatureFeedback = ParseAiNode("aiTemperatureFeedback", node, ioModule);            _aoTemperatureSetPoint = ParseAoNode("aoTemperatureSetPoint", node, ioModule);            _diGoPosition1Feedback = ParseDiNode("diGoPosition1Feedback", node, ioModule);            _doGoPosition1On = ParseDoNode("doGoPosition1On", node, ioModule);            _diGoPosition2Feedback = ParseDiNode("diGoPosition2Feedback", node, ioModule);            _doGoPosition2On = ParseDoNode("doGoPosition2On", node, ioModule);            _diGoPosition3Feedback = ParseDiNode("diGoPosition3Feedback", node, ioModule);            _doGoPosition3On = ParseDoNode("doGoPosition3On", node, ioModule);            _diGoPosition4Feedback = ParseDiNode("diGoPosition4Feedback", node, ioModule);            _doGoPosition4On = ParseDoNode("doGoPosition4On", node, ioModule);            _diGoPosition5Feedback = ParseDiNode("diGoPosition5Feedback", node, ioModule);            _doGoPosition5On = ParseDoNode("doGoPosition5On", node, ioModule);            _diGoOriginFeedback = ParseDiNode("diGoOriginFeedback", node, ioModule);            _doGoOriginOn = ParseDoNode("doGoOriginOn", node, ioModule);            _aoLiftServoPosition1 = ParseAoNode("aoLiftServoPosition1", node, ioModule);            _aoLiftServoPosition2 = ParseAoNode("aoLiftServoPosition2", node, ioModule);            _aoLiftServoPosition3 = ParseAoNode("aoLiftServoPosition3", node, ioModule);            _aoLiftServoPosition4 = ParseAoNode("aoLiftServoPosition4", node, ioModule);            _aoLiftServoPosition5 = ParseAoNode("aoLiftServoPosition5", node, ioModule);            _aoOriginSearchHighSpeed = ParseAoNode("aoOriginSearchHighSpeed", node, ioModule);            _aoOriginSearchLowSpeed = ParseAoNode("aoOriginSearchLowSpeed", node, ioModule);            _aoAbsMoveSpeed = ParseAoNode("aoAbsMoveSpeed", node, ioModule);            _aoMaximusMoveSpeed = ParseAoNode("aoMaximusMoveSpeed", node, ioModule);            _aoSoftDownLimit = ParseAoNode("aoSoftDownLimit", node, ioModule);            _aoSoftUpLimit = ParseAoNode("aoSoftUpLimit", node, ioModule);            _aoRatio = ParseAoNode("aoRatio", node, ioModule);            _aiHeaterInnerAlarmWord1 = ParseAiNode("aiHeaterInnerAlarmWord1", node, ioModule);            _aiHeaterInnerAlarmWord2 = ParseAiNode("aiHeaterInnerAlarmWord2", node, ioModule);            _aiHeaterOuterAlarmWord1 = ParseAiNode("aiHeaterOuterAlarmWord1", node, ioModule);            _aiHeaterOuterAlarmWord2 = ParseAiNode("aiHeaterOuterAlarmWord2", node, ioModule);            _maxTemperatureSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Temperature").Max);            _minTemperatureSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Temperature").Min);            _maxRatioSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Ratio").Max);            _minRatioSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Ratio").Min);            _diDriverAlarm = ParseDiNode("diDriverAlarm", node, ioModule);            _diPosiModuleAlarm = ParseDiNode("diPosiModuleAlarm", node, ioModule);            _diORGFailAlarm = ParseDiNode("diORGFailAlarm", node, ioModule);            _doResetLift = ParseDoNode("doResetLift", node, ioModule);            _doResetHeater = ParseDoNode("doResetHeater", node, ioModule);            _aiHeaterPurgeN2Flow = ParseAiNode("aiHeaterPurgeN2Flow", node, ioModule);            _diMhtrErrorHeatStop = ParseDiNode("diMhtrErrorHeatStop", node, ioModule);            _doMhtrErrorReset = ParseDoNode("doMhtrErrorReset", node, ioModule);            _diWaferTransferPosiSW = ParseDiNode("diWaferTransferPosiSW", node, ioModule);            UpdateAutoRatio();            _ratioStopwatch.Start();        }        public bool GotoPosition(HighTemperatureHeaterPosition highTemperatureHeaterPosition)        {            if (!LiftHardwareIsOK())            {                LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Alarm,can not go to {highTemperatureHeaterPosition}");                return false;            }            if (highTemperatureHeaterPosition != HighTemperatureHeaterPosition.Origin && !LiftSoftwareIsOK())            {                LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Alarm,can not go to {highTemperatureHeaterPosition}");                return false;            }            LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} start to {highTemperatureHeaterPosition.ToString()}");            HighTemperatureHeaterPositipnSetPoint = highTemperatureHeaterPosition.ToString();            switch (highTemperatureHeaterPosition)            {                case HighTemperatureHeaterPosition.Origin:                    _doGoPosition1On.Value = false;                    _doGoPosition2On.Value = false;                    _doGoPosition3On.Value = false;                    _doGoPosition4On.Value = false;                    _doGoPosition5On.Value = false;                    _doGoOriginOn.Value = true;                    _originTimer.Start(_goPositionTime);                    break;                case HighTemperatureHeaterPosition.Position1:                    _doGoPosition2On.Value = false;                    _doGoPosition3On.Value = false;                    _doGoPosition4On.Value = false;                    _doGoPosition5On.Value = false;                    _doGoOriginOn.Value = false;                    _doGoPosition1On.Value = true;                    _position1Timer.Start(_goPositionTime);                    break;                case HighTemperatureHeaterPosition.Position2:                    _doGoPosition1On.Value = false;                    _doGoPosition3On.Value = false;                    _doGoPosition4On.Value = false;                    _doGoPosition5On.Value = false;                    _doGoOriginOn.Value = false;                    _doGoPosition2On.Value = true;                    _position2Timer.Start(_goPositionTime);                    break;                case HighTemperatureHeaterPosition.Position3:                    _doGoPosition1On.Value = false;                    _doGoPosition2On.Value = false;                    _doGoPosition4On.Value = false;                    _doGoPosition5On.Value = false;                    _doGoOriginOn.Value = false;                    _doGoPosition3On.Value = true;                    _position3Timer.Start(_goPositionTime);                    break;                case HighTemperatureHeaterPosition.Position4:                    _doGoPosition1On.Value = false;                    _doGoPosition2On.Value = false;                    _doGoPosition3On.Value = false;                    _doGoPosition5On.Value = false;                    _doGoOriginOn.Value = false;                    _doGoPosition4On.Value = true;                    _position4Timer.Start(_goPositionTime);                    break;                case HighTemperatureHeaterPosition.Position5:                    _doGoPosition1On.Value = false;                    _doGoPosition2On.Value = false;                    _doGoPosition3On.Value = false;                    _doGoPosition4On.Value = false;                    _doGoOriginOn.Value = false;                    _doGoPosition5On.Value = true;                    _position5Timer.Start(_goPositionTime);                    break;            }            return true;        }        public bool Initialize()        {            OP.Subscribe($"{Module}.{Name}.GotoPosition", (cmd, args) =>            {                var currentPosition = (HighTemperatureHeaterPosition)Enum.Parse(typeof(HighTemperatureHeaterPosition), args[0].ToString());                GotoPosition(currentPosition);                return true;            });            OP.Subscribe($"{Module}.{Name}.SwitchHighTemperatureHeater", (cmd, args) =>            {                HighTemperatureHeaterIsOn = Convert.ToBoolean(args[0].ToString());                return true;            });            OP.Subscribe($"{Module}.{Name}.SetHighTemperatureHeaterTemperature", (cmd, args) =>            {                HighTemperatureHighHeaterTemperature = Convert.ToSingle(args[0]);                return true;            });            OP.Subscribe($"{Module}.{Name}.SetHighTemperatureHeaterRatio", (cmd, args) =>            {                HighTemperatureHeaterRatio = Convert.ToSingle(args[0]);                return true;            });            OP.Subscribe($"{Module}.{Name}.ResetHighTemperatureHeaterLift", (cmd, args) =>            {                ResetLift();                return true;            });            OP.Subscribe($"{Module}.{Name}.ResetHighTemperatureHeater", (cmd, args) =>            {                ResetHeater();                return true;            });            OP.Subscribe($"{Module}.{Name}.SetAutoRatio", (cmd, args) =>            {                UpdateAutoRatio();                return true;            });            DATA.Subscribe($"{Module}.{Name}.DeviceData", () => DeviceData, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe($"{Module}.{Name}.Temperature", () => DeviceData.HighTemperatureHeaterTemperatureFeedBack);            DATA.Subscribe($"{Module}.{Name}.Position", () => (int)CurrentPosition - 1);            DATA.Subscribe($"{Module}.{Name}.IsOn", () => DeviceData.HighTemperatureHeaterIsonFeedBack);            DATA.Subscribe($"{Module}.{Name}.TemperatureSetPoint", () => DeviceData.HighTemperatureHeaterTemperatureSetPoint);            DATA.Subscribe($"{Module}.{Name}.Power_Output", () => GetAiValue($"{Module}.AI_CHB_M-HT_Reference_Power_Output"));            DATA.Subscribe($"{Module}.{Name}.MaxPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Max_Power"));            DATA.Subscribe($"{Module}.{Name}.MinPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Min_Power"));            DATA.Subscribe($"{Module}.{Name}.Speed", () => GetAiValue($"{Module}.AI_CHB_M-HT_Current_Speed"));            DATA.Subscribe($"{Module}.{Name}.Posi_Mm", () => GetAiValue($"{Module}.AI_Lift_Servo_Current_Posi_Mm"));            DATA.Subscribe($"{Module}.{Name}.TM_Temp", () => GetAiValue($"{Module}.AI_CHB_M-HT_Control_TM_Temp"));            DATA.Subscribe($"{Module}.{Name}.InnerCurrent", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Current_FB"));            DATA.Subscribe($"{Module}.{Name}.InnerVoltage", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Voltage_FB"));            DATA.Subscribe($"{Module}.{Name}.InnerPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Power_FB"));            DATA.Subscribe($"{Module}.{Name}.InnerResistance", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Resistance_FB"));            DATA.Subscribe($"{Module}.{Name}.OuterCurrent", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Current_FB"));            DATA.Subscribe($"{Module}.{Name}.OuterVoltage", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Voltage_FB"));            DATA.Subscribe($"{Module}.{Name}.OuterPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Power_FB"));            DATA.Subscribe($"{Module}.{Name}.OuterResistance", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Resistance_FB"));            DATA.Subscribe($"{Module}.{Name}.PurgeN2Flow", () => GetAiValue($"{Module}.AI_Heater_Purge_N2_Flow"));            DATA.Subscribe($"{Module}.{Name}.ShaftTCTemp", () => GetAiValue($"{Module}.AI_HTR_Shaft_TC_Temp"));            DATA.Subscribe($"{Module}.{Name}.SourceTCTemp", () => GetAiValue($"{Module}.AI_Source_TC_Temp"));            DATA.Subscribe($"{Module}.{Name}.HeaterDriverAlarm", () => _diMhtrErrorHeatStop.Value);            //DATA.Subscribe($"{Module}.{Name}.InnerAlarmWord1", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Alarm_Word1"));            //DATA.Subscribe($"{Module}.{Name}.InnerAlarmWord2", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Alarm_Word2"));            //DATA.Subscribe($"{Module}.{Name}.OuterAlarmWord1", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Alarm_Word1"));            //DATA.Subscribe($"{Module}.{Name}.OuterAlarmWord2", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Alarm_Word2"));            DATA.Subscribe($"{Module}.{Name}.Ratio", () => HighTemperatureHeaterRatio);            _SetRealFloat(_aoLiftServoPosition1, 20);            _SetRealFloat(_aoLiftServoPosition2, -30);            _SetRealFloat(_aoLiftServoPosition3, -40);            _SetRealFloat(_aoLiftServoPosition4, 20);            _SetRealFloat(_aoLiftServoPosition5, 50);            _SetRealFloat(_aoOriginSearchHighSpeed, 10);            _SetRealFloat(_aoOriginSearchLowSpeed, 5);            _SetRealFloat(_aoAbsMoveSpeed, 10);            _SetRealFloat(_aoMaximusMoveSpeed, 20);            _SetRealFloat(_aoSoftDownLimit, 100);            _SetRealFloat(_aoSoftUpLimit, 300);            _heaterControlStopWatch.Start();            return true;        }        public void Stop()        {        }        public void Terminate()        {        }        public void Monitor()        {            if (_originTimer.IsTimeout())            {                _originTimer.Stop();                if (_diGoOriginFeedback.Value == false)                {                    LOG.Write(eEvent.ERR_HighTemperatureHeater_GoOriginTimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到原点");                }            }            else if (_originTimer.IsIdle() == false)            {                if (_diGoOriginFeedback.Value == true)                {                    LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Origin");                    _doGoOriginOn.Value = false;                    _originTimer.Stop();                }            }            if (_position1Timer.IsTimeout())            {                _position1Timer.Stop();                if (_diGoPosition1Feedback.Value == false)                {                    LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition1TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position1");                }                if (_diWaferTransferPosiSW.Value == false)                {                    LOG.Write(eEvent.ERR_HighTemperatureHeater_TransferPosition, Module, $"{Name} {_goPositionTime / 1000} s 内未到传片位");                }            }            else if (_position1Timer.IsIdle() == false)            {                if (_diGoPosition1Feedback.Value == true && _diWaferTransferPosiSW.Value == true)                {                    LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position1");                    _doGoPosition1On.Value = false;                    _position1Timer.Stop();                }            }            if (_position2Timer.IsTimeout())            {                _position2Timer.Stop();                if (_diGoPosition2Feedback.Value == false)                {                    LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition2TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position2");                }            }            else if (_position2Timer.IsIdle() == false)            {                if (_diGoPosition2Feedback.Value == true)                {                    LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position2");                    _doGoPosition2On.Value = false;                    _position2Timer.Stop();                }            }            if (_position3Timer.IsTimeout())            {                _position3Timer.Stop();                if (_diGoPosition3Feedback.Value == false)                {                    LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition3TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position3");                }            }            else if (_position3Timer.IsIdle() == false)            {                if (_diGoPosition3Feedback.Value == true)                {                    LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position3");                    _doGoPosition3On.Value = false;                    _position3Timer.Stop();                }            }            if (_position4Timer.IsTimeout())            {                _position4Timer.Stop();                if (_diGoPosition4Feedback.Value == false)                {                    LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition4TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position4");                }            }            else if (_position4Timer.IsIdle() == false)            {                if (_diGoPosition4Feedback.Value == true)                {                    LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position4");                    _doGoPosition4On.Value = false;                    _position4Timer.Stop();                }            }            if (_position5Timer.IsTimeout())            {                _position5Timer.Stop();                if (_diGoPosition5Feedback.Value == false)                {                    LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition5TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position5");                }            }            else if (_position5Timer.IsIdle() == false)            {                if (_diGoPosition5Feedback.Value == true)                {                    LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position5");                    _doGoPosition5On.Value = false;                    _position5Timer.Stop();                }            }            var position1Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition1");            var position2Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition2") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");            var position3Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition3") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");            var position4Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition4") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");            var position5Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition5") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");            _SetRealFloat(_aoLiftServoPosition1, position1Value);            _SetRealFloat(_aoLiftServoPosition2, position2Value);            _SetRealFloat(_aoLiftServoPosition3, position3Value);            _SetRealFloat(_aoLiftServoPosition4, position4Value);            _SetRealFloat(_aoLiftServoPosition5, position5Value);            _isAutoRatio = SC.GetValue<bool>($"{Module}.HighTemperatureHeater.IsEnableAutoRatio");            _SetRealFloat(_aoOriginSearchHighSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.OriginSearchHighSpeed"));            _SetRealFloat(_aoOriginSearchLowSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.OriginSearchLowSpeed"));            _SetRealFloat(_aoAbsMoveSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.AbsMoveSpeed"));            _SetRealFloat(_aoMaximusMoveSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.MaximusMoveSpeed"));            _SetRealFloat(_aoSoftDownLimit, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.SoftDownLimit"));            _SetRealFloat(_aoSoftUpLimit, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.SoftUpLimit"));            _SetRealFloat(_aoTemperatureSetPoint, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.Temperature"));            _SetRealFloat(_aoRatio, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.Ratio"));            _doPowerOn.Value = SC.GetValue<bool>($"{Module}.HighTemperatureHeater.IsOn");            if (_heaterControlStopWatch.ElapsedMilliseconds > 10 * 1000)            {                _heaterControlStopWatch.Restart();                var innerWord1 = (int)_GetRealFloat(_aiHeaterInnerAlarmWord1);                if (innerWord1 > 0 && innerWord1 != _innerWord1)                {                    var innerWord1Value = ConvertToBitArray(innerWord1);                    AlarmWord1(innerWord1Value, "Inner Word1");                }                _innerWord1 = innerWord1;                var innerWord2 = (int)_GetRealFloat(_aiHeaterInnerAlarmWord2);                //innerWord2_TRIG.CLK = innerWord2 > 0;                if (innerWord2 > 0 && innerWord2 != _innerWord2)                {                    var innerWord2Value = ConvertToBitArray(innerWord2);                    AlarmWord2(innerWord2Value, "Inner Word2");                }                _innerWord2 = innerWord2;                var outerWord1 = (int)_GetRealFloat(_aiHeaterOuterAlarmWord1);                //outerWord1_TRIG.CLK = outerWord1 > 0;                if (outerWord1 > 0 && outerWord1 != _outerWord1)                {                    var outerWord1Value = ConvertToBitArray(outerWord1);                    AlarmWord1(outerWord1Value, "Outer Word1");                }                _outerWord1 = outerWord1;                var outerWord2 = (int)_GetRealFloat(_aiHeaterOuterAlarmWord2);                //outerWord2_TRIG.CLK = outerWord2> 0;                if (outerWord2 > 0 && outerWord2 != _outerWord2)                {                    var outerWord2Value = ConvertToBitArray(outerWord2);                    AlarmWord2(outerWord2Value, "Outer Word2");                }                _outerWord2 = outerWord2;            }            if (_ratioStopwatch.ElapsedMilliseconds > 2000)            {                foreach (var item in _ratioValues)                {                    int index= _ratioValues.IndexOf(item);                    if (_isAutoRatio == false)                    {                        RangeIndex = -1;                        break;                    }                    if (_isAutoRatio && HighTemperatureHighHeaterTemperature >= item.MinValue && HighTemperatureHighHeaterTemperature <= item.MaxValue && RangeIndex != index)                    {                        HighTemperatureHeaterRatio = item.Ratio;                        RangeIndex = index;                        break;                    }                }            }        }        public bool[] ConvertToBitArray(int number)        {            var bitArray = new bool[sizeof(int) * 8]; // 创建一个bool数组,大小为int类型的位数            for (int i = 0; i < bitArray.Length; i++)            {                bitArray[i] = (number & (1 << i)) != 0; // 将number的第i位与1做位与运算,如果结果不为0,则该位为true            }            return bitArray;        }        private void AlarmWord1(bool[] word1, string name)        {            if (word1[0] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Missing Mains");            }            if (word1[1] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Thyristor short circuit");            }            if (word1[3] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Network Dips");            }            if (word1[4] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Frequency Fault");            }            if (word1[5] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} T.L.F");            }            if (word1[6] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Chop Off");            }            if (word1[7] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} P.L.F");            }            if (word1[8] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} P.L.U");            }            if (word1[9] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Over Voltage");            }            if (word1[10] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Under Voltage");            }            if (word1[12] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Over Current");            }            if (word1[14] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Analn Over Current");            }            if (word1[15] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} External Input");            }        }        private void AlarmWord2(bool[] word2, string name)        {            if (word2[0] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Closed Loop break");            }            if (word2[1] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Transfer Active");            }            if (word2[2] == true)            {                LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Limit Active");            }        }        public bool LiftIsOK()        {            if (IsDriverAlarm)            {                LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Driver Alarm");                return false;            }            if (IsPosiModuleAlarm)            {                LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Position Module Alarm");                return false;            }            if (IsORGFailAlarm)            {                LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo ORG Fail Alarm");                return false;            }            return true;        }        private bool LiftHardwareIsOK()        {            if (IsDriverAlarm)            {                LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Driver Alarm");                return false;            }            if (IsPosiModuleAlarm)            {                LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Position Module Alarm");                return false;            }            return true;        }        private bool LiftSoftwareIsOK()        {            if (IsORGFailAlarm)            {                LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo ORG Fail Alarm");                return false;            }            return true;        }        public async void ResetLift()        {            if (_doResetHeater.Value == true)            {                _doResetHeater.Value = false;                await Task.Delay(200);            }            _doResetHeater.Value = true;            await Task.Delay(1000);            _doResetHeater.Value = true;            if (_doResetLift.Value == true)            {                _doResetLift.Value = false;                await Task.Delay(200);            }            _doResetLift.Value = true;            await Task.Delay(1000);            _doResetLift.Value = false;            _clearAlarmCounter = 0;            while (IsDriverAlarm || IsPosiModuleAlarm)            {                _clearAlarmCounter += 1;                if (_clearAlarmCounter > 5)                {                    LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Clear Alarm Failed");                    return;                }                else                {                    LOG.Write(eEvent.INFO_PM, Module, $"{Name} Clearing Alarm,Please wait");                }                await Task.Delay(1000);            }            GotoPosition(HighTemperatureHeaterPosition.Origin);        }        public async void ResetHeater()        {            if (_diMhtrErrorHeatStop.Value)            {                if (_doMhtrErrorReset.Value == true)                {                    _doMhtrErrorReset.Value = false;                    await Task.Delay(200);                }                _doMhtrErrorReset.Value = true;                LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} Reset Heater");            }        }        private void UpdateAutoRatio()        {            try            {                RangeIndex = -1;                var ratioValueString = SC.GetStringValue($"{Module}.HighTemperatureHeater.AutoRatioValue");                _ratioValues = SerializeHelper.Instance.JsonStringToObject<List<RatioValue>>(ratioValueString);            }            catch             {            }          }        //private string FloatToHex(float value)        //{        //    byte[] bytes = BitConverter.GetBytes(value);        //    StringBuilder stringBuffer = new StringBuilder();        //    for (int i = 0; i < bytes.Length; i++)        //    {        //        string hex = Convert.ToString(bytes[i], 2);        //        stringBuffer.Insert(0, hex);        //        for (int j = hex.Length; j < 8; j++)        //        {        //            stringBuffer.Insert(0, "0");        //        }        //    }        //    return stringBuffer.ToString();        //}        public void Reset()        {        }    }}
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