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Kepler2300IoDefine.xml

Kepler2300IoDefine.xml 26 KB
History Raw

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  1. <?xml version='1.0'?>
    2. 

  2. <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
    3. 

  3. 

  4. 	<!--文件根据210-0064-000-E01-REF1 IO LIST, PM, K23.xlsx生成-->
    5. 

  5. 	<!--生成时间：01/07/2025 15:59:45-->
    6. 

  6. 	<Dig_In>
    7. 

  7. 		<DI_ITEM Index="1" Name="DI_Water_Leak_Sensor" Device=""  Note="0=Alarm,1=Normal" />
    8. 

  8. 		<DI_ITEM Index="2" Name="DI_Source_RF_Interlock" Device=""  Note="1=ITLK OK" />
    9. 

  9. 		<DI_ITEM Index="3" Name="DI_Bais_RF_Interlock" Device=""  Note="1=ITLK OK" />
    10. 

  10. 		<DI_ITEM Index="4" Name="DI_SRF_Match_Interlock" Device=""  Note="1=ITLK OK" />
    11. 

  11. 		<DI_ITEM Index="5" Name="DI_BRF_Match_Interlock" Device=""  Note="1=ITLK OK" />
    12. 

  12. 		<DI_ITEM Index="6" Name="DI_Slit_Door_Opened" Device="" />
    13. 

  13. 		<DI_ITEM Index="7" Name="DI_Slir_Door_Closed" Device="" />
    14. 

  14. 		<DI_ITEM Index="8" Name="DI_CDA_Pressure_SW" Device=""  Note="0=Alarm,1=Normal" />
    15. 

  15. 		<DI_ITEM Index="9" Name="DI_TM_Arm_Not_Extend" Device="" />
    16. 

  16. 		<DI_ITEM Index="10" Name="DI_TM_Lid_Closed" Device="" />
    17. 

  17. 		<DI_ITEM Index="11" Name="DI_CHB_Gauge_Status" Device=""  Note="0=Alarm,1=Normal" />
    18. 

  18. 		<DI_ITEM Index="12" Name="DI_CHB_Gauge_SP1" Device="VAC" />
    19. 

  19. 		<DI_ITEM Index="13" Name="DI_CHB_Gauge_SP2" Device="" />
    20. 

  20. 		<DI_ITEM Index="14" Name="DI_Proc_Gauge_Status" Device=""  Note="0=Alarm,1=Normal" />
    21. 

  21. 		<DI_ITEM Index="15" Name="DI_Proc_Gauge_SP1" Device="" />
    22. 

  22. 		<DI_ITEM Index="16" Name="DI_Proc_Gauge_SP2" Device="" />
    23. 

  23. 		<DI_ITEM Index="17" Name="DI_FAB_Scrubber_OK" Device=""  Note="0=Alarm,1=Normal" />
    24. 

  24. 		<DI_ITEM Index="18" Name="DI_RF_Fan_OK" Device=""  Note="0=Alarm,1=Normal" />
    25. 

  25. 		<DI_ITEM Index="19" Name="DI_ATM_SW" Device="ATM" />
    26. 

  26. 		<DI_ITEM Index="20" Name="DI_Lid_Closed_SW" Device="" />
    27. 

  27. 		<DI_ITEM Index="21" Name="DI_Slit_Door_OT_SW" Device=""  Note="0=Alarm,1=Normal" />
    28. 

  28. 		<DI_ITEM Index="22" Name="DI_CHB_Wall_OT_SW" Device=""  Note="0=Alarm,1=Normal" />
    29. 

  29. 		<DI_ITEM Index="23" Name="DI_GB_N2_Pres_SW" Device=""  Note="0=Alarm,1=Normal" />
    30. 

  30. 		<DI_ITEM Index="24" Name="DI_GB_MFC1_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    31. 

  31. 		<DI_ITEM Index="25" Name="DI_GB_MFC2_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    32. 

  32. 		<DI_ITEM Index="26" Name="DI_GB_MFC3_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    33. 

  33. 		<DI_ITEM Index="27" Name="DI_GB_MFC4_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    34. 

  34. 		<DI_ITEM Index="28" Name="DI_GB_MFC5_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    35. 

  35. 		<DI_ITEM Index="29" Name="DI_GB_MFC6_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    36. 

  36. 		<DI_ITEM Index="30" Name="DI_GB_MFC7_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    37. 

  37. 		<DI_ITEM Index="31" Name="DI_GB_MFC8_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    38. 

  38. 		<DI_ITEM Index="32" Name="DI_GB_MFC9_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    39. 

  39. 		<DI_ITEM Index="33" Name="DI_GB_MFC10_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    40. 

  40. 		<DI_ITEM Index="34" Name="DI_GB_MFC11_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    41. 

  41. 		<DI_ITEM Index="35" Name="DI_GB_MFC12_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    42. 

  42. 		<DI_ITEM Index="36" Name="DI_GB_MFC13_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    43. 

  43. 		<DI_ITEM Index="37" Name="DI_GB_MFC14_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    44. 

  44. 		<DI_ITEM Index="38" Name="DI_GB_MFC15_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    45. 

  45. 		<DI_ITEM Index="39" Name="DI_GB_MFC16_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    46. 

  46. 		<DI_ITEM Index="40" Name="DI_GB_GasLine_VAC_SW" Device=""  Note="0=Alarm,1=Normal" />
    47. 

  47. 		<DI_ITEM Index="41" Name="DI_GB_PumpLine_VAC_SW" Device=""  Note="0=Alarm,1=Normal" />
    48. 

  48. 		<DI_ITEM Index="42" Name="DI_GB_Door_Closed" Device=""  Note="0=Alarm,1=Normal" />
    49. 

  49. 		<DI_ITEM Index="43" Name="DI_GB_Negative_PRES_SW" Device=""  Note="0=Alarm,1=Normal" />
    50. 

  50. 		<DI_ITEM Index="44" Name="DI_Gas_Detector1_Alarm1" Device=""  Note="0=Alarm,1=Normal" />
    51. 

  51. 		<DI_ITEM Index="45" Name="DI_Gas_Detector1_Alarm2" Device=""  Note="0=Alarm,1=Normal" />
    52. 

  52. 		<DI_ITEM Index="46" Name="DI_Gas_Detector1_Fault" Device=""  Note="0=Alarm,1=Normal" />
    53. 

  53. 		<DI_ITEM Index="47" Name="DI_Gas_Detector2_Alarm1" Device=""  Note="0=Alarm,1=Normal" />
    54. 

  54. 		<DI_ITEM Index="48" Name="DI_Gas_Detector2_Alarm2" Device=""  Note="0=Alarm,1=Normal" />
    55. 

  55. 		<DI_ITEM Index="49" Name="DI_Gas_Detector2_Fault" Device=""  Note="0=Alarm,1=Normal" />
    56. 

  56. 		<DI_ITEM Index="50" Name="DI_Total_Water_Flow_SW" Device=""  Note="0=Alarm,1=Normal" />
    57. 

  57. 		<DI_ITEM Index="51" Name="DI_Top_Plate_Collant_Flow_SW" Device=""  Note="0=Alarm,1=Normal" />
    58. 

  58. 		<DI_ITEM Index="52" Name="DI_Esc_Coolant_Flow_SW" Device=""  Note="0=Alarm,1=Normal" />
    59. 

  59. 		<DI_ITEM Index="53" Name="DI_LEBox_Closed_SW" Device="" />
    60. 

  60. 		<DI_ITEM Index="54" Name="DI_LEBox_Cover_Closed_SW" Device="" />
    61. 

  61. 		<DI_ITEM Index="55" Name="DI_Lift_Pin_Up_Posi" Device="" />
    62. 

  62. 		<DI_ITEM Index="56" Name="DI_Lift_Pin_Down_Posi" Device="" />
    63. 

  63. 		<DI_ITEM Index="57" Name="DI_Bais_Match_Interlock" Device="" />
    64. 

  64. 		<DI_ITEM Index="58" Name="DI_Esc_He_Pressure_SW" Device="" />
    65. 

  65. 		<DI_ITEM Index="59" Name="DI_Source_RF_On_FB" Device="" />
    66. 

  66. 		<DI_ITEM Index="60" Name="DI_Source_RF_Error_FB" Device="" />
    67. 

  67. 		<DI_ITEM Index="61" Name="DI_Source_RF_Warning_FB" Device="" />
    68. 

  68. 		<DI_ITEM Index="62" Name="DI_Bais_RF_On_FB" Device="" />
    69. 

  69. 		<DI_ITEM Index="63" Name="DI_Bais_RF_Error_FB" Device="" />
    70. 

  70. 		<DI_ITEM Index="64" Name="DI_Bais_RF_Warning_FB" Device="" />
    71. 

  71. 		<DI_ITEM Index="65" Name="DI_Shutter_Servo_Alarm" Device="" />
    72. 

  72. 		<DI_ITEM Index="66" Name="DI_Shutter_Reach_Up_Limit" Device="" />
    73. 

  73. 		<DI_ITEM Index="67" Name="DI_Shutter_Reach_Down_Limit" Device="" />
    74. 

  74. 		<DI_ITEM Index="68" Name="DI_Lid_Servo_Alarm" Device="" />
    75. 

  75. 		<DI_ITEM Index="69" Name="DI_Lid_Servo_Enable_Button" Device="" />
    76. 

  76. 		<DI_ITEM Index="70" Name="DI_Lid_Servo_Up_Button" Device="" />
    77. 

  77. 		<DI_ITEM Index="71" Name="DI_Lid_Servo_Down_Button" Device="" />
    78. 

  78. 		<DI_ITEM Index="72" Name="DI_Lid_Servo_Reach_Up_Limit" Device="" />
    79. 

  79. 		<DI_ITEM Index="73" Name="DI_Lid_Rotate_To_MAINT_POSI" Device="" />
    80. 

  80. 		<DI_ITEM Index="74" Name="DI_Lid_Servo_Reach_MAINT_Down_Limit" Device="" />
    81. 

  81. 		<DI_ITEM Index="75" Name="DI_Lid_Rotate_To_PROC_POSI" Device="" />
    82. 

  82. 		<DI_ITEM Index="76" Name="DI_Lid_Servo_Reach_PROC_Down_Limit" Device="" />
    83. 

  83. 	</Dig_In>
    84. 

  84. 	<Dig_Out>
    85. 

  85. 		<DO_ITEM Index="1" Name="DO_PV1_Purge" Device=""  Note="1=VALVE ON" />
    86. 

  86. 		<DO_ITEM Index="2" Name="DO_PV2_Gas_Final" Device=""  Note="1=VALVE ON" />
    87. 

  87. 		<DO_ITEM Index="3" Name="DO_PV3_Soft_Pump" Device=""  Note="1=VALVE ON" />
    88. 

  88. 		<DO_ITEM Index="4" Name="DO_PV4_Fast_Pump" Device=""  Note="1=VALVE ON" />
    89. 

  89. 		<DO_ITEM Index="5" Name="DO_PV5_TMP_Purge" Device=""  Note="1=VALVE ON" />
    90. 

  90. 		<DO_ITEM Index="6" Name="DO_PV6_TMP_Pumping" Device=""  Note="1=VALVE ON" />
    91. 

  91. 		<DO_ITEM Index="7" Name="DO_PV7_LRange_Gauge" Device=""  Note="1=VALVE ON" />
    92. 

  92. 		<DO_ITEM Index="8" Name="DO_PV8_Penning_Gague" Device=""  Note="1=VALVE ON" />
    93. 

  93. 		<DO_ITEM Index="9" Name="DO_PV9_He_Supply" Device=""  Note="1=VALVE ON" />
    94. 

  94. 		<DO_ITEM Index="10" Name="DO_PV10_He_Vac" Device=""  Note="1=VALVE ON" />
    95. 

  95. 		<DO_ITEM Index="11" Name="DO_PV11_PCW_Inlet" Device=""  Note="1=VALVE ON" />
    96. 

  96. 		<DO_ITEM Index="12" Name="" />
    97. 

  97. 		<DO_ITEM Index="13" Name="DO_Slit_Door_HTR_RLY" Device=""  Note="1=RELAY ON" />
    98. 

  98. 		<DO_ITEM Index="14" Name="DO_Slit_Door_HTR_SSR" Device=""  Note="1=RELAY ON" />
    99. 

  99. 		<DO_ITEM Index="15" Name="DO_Pvalve_HTR_RLY" Device=""  Note="1=RELAY ON" />
    100. 

  100. 		<DO_ITEM Index="16" Name="DO_Pvalve_HTR_SSR" Device=""  Note="1=RELAY ON" />
    101. 

  101. 		<DO_ITEM Index="17" Name="DO_Fore_Line_HTR_RLY" Device=""  Note="1=RELAY ON" />
    102. 

  102. 		<DO_ITEM Index="18" Name="DO_Fore_Line_HTR_SSR" Device=""  Note="1=RELAY ON" />
    103. 

  103. 		<DO_ITEM Index="19" Name="DO_Gas_Line_HTR_RLY" Device=""  Note="1=RELAY ON" />
    104. 

  104. 		<DO_ITEM Index="20" Name="DO_Gas_Line_HTR_SSR" Device=""  Note="1=RELAY ON" />
    105. 

  105. 		<DO_ITEM Index="21" Name="DO_CHB_Wall_HTR1_RLY" Device=""  Note="1=RELAY ON" />
    106. 

  106. 		<DO_ITEM Index="22" Name="DO_CHB_Wall_HTR1_SSR" Device=""  Note="1=RELAY ON" />
    107. 

  107. 		<DO_ITEM Index="23" Name="DO_CHB_Wall_HTR2_RLY" Device=""  Note="1=RELAY ON" />
    108. 

  108. 		<DO_ITEM Index="24" Name="DO_CHB_Wall_HTR2_SSR" Device=""  Note="1=RELAY ON" />
    109. 

  109. 		<DO_ITEM Index="25" Name="DO_CHB_Wall_HTR3_RLY" Device=""  Note="1=RELAY ON" />
    110. 

  110. 		<DO_ITEM Index="26" Name="DO_CHB_Wall_HTR3_SSR" Device=""  Note="1=RELAY ON" />
    111. 

  111. 		<DO_ITEM Index="27" Name="DO_CHB_Wall_HTR4_RLY" Device=""  Note="1=RELAY ON" />
    112. 

  112. 		<DO_ITEM Index="28" Name="DO_CHB_Wall_HTR4_SSR" Device=""  Note="1=RELAY ON" />
    113. 

  113. 		<DO_ITEM Index="29" Name="DO_N2_Outlet" Device="GPVN2"  Note="1=VALVE ON" />
    114. 

  114. 		<DO_ITEM Index="30" Name="DO_MFC1_Outlet" Device="GPV1"  Note="1=VALVE ON" />
    115. 

  115. 		<DO_ITEM Index="31" Name="DO_MFC2_Outlet" Device="GPV2"  Note="1=VALVE ON" />
    116. 

  116. 		<DO_ITEM Index="32" Name="DO_MFC3_Outlet" Device="GPV3"  Note="1=VALVE ON" />
    117. 

  117. 		<DO_ITEM Index="33" Name="DO_MFC4_Outlet" Device="GPV4"  Note="1=VALVE ON" />
    118. 

  118. 		<DO_ITEM Index="34" Name="DO_MFC5_Outlet" Device="GPV5"  Note="1=VALVE ON" />
    119. 

  119. 		<DO_ITEM Index="35" Name="DO_MFC6_Outlet" Device="GPV6"  Note="1=VALVE ON" />
    120. 

  120. 		<DO_ITEM Index="36" Name="DO_MFC7_Outlet" Device="GPV7"  Note="1=VALVE ON" />
    121. 

  121. 		<DO_ITEM Index="37" Name="DO_MFC8_Outlet" Device="GPV8"  Note="1=VALVE ON" />
    122. 

  122. 		<DO_ITEM Index="38" Name="DO_MFC9_Outlet" Device="GPV9"  Note="1=VALVE ON" />
    123. 

  123. 		<DO_ITEM Index="39" Name="DO_MFC10_Outlet" Device="GPV10"  Note="1=VALVE ON" />
    124. 

  124. 		<DO_ITEM Index="40" Name="DO_MFC11_Outlet" Device="GPV11"  Note="1=VALVE ON" />
    125. 

  125. 		<DO_ITEM Index="41" Name="DO_MFC12_Outlet" Device="GPV12"  Note="1=VALVE ON" />
    126. 

  126. 		<DO_ITEM Index="42" Name="DO_MFC13_Outlet" Device="GPV13"  Note="1=VALVE ON" />
    127. 

  127. 		<DO_ITEM Index="43" Name="DO_MFC14_Outlet" Device="GPV14"  Note="1=VALVE ON" />
    128. 

  128. 		<DO_ITEM Index="44" Name="DO_MFC15_Outlet" Device="GPV15"  Note="1=VALVE ON" />
    129. 

  129. 		<DO_ITEM Index="45" Name="DO_MFC16_Outlet" Device="GPV16"  Note="1=VALVE ON" />
    130. 

  130. 		<DO_ITEM Index="46" Name="DO_N2_Inlet" Device="GPVN21"  Note="1=VALVE ON" />
    131. 

  131. 		<DO_ITEM Index="47" Name="DO_MFC1_Inlet" Device="GPV11"  Note="1=VALVE ON" />
    132. 

  132. 		<DO_ITEM Index="48" Name="DO_MFC2_Inlet" Device="GPV21"  Note="1=VALVE ON" />
    133. 

  133. 		<DO_ITEM Index="49" Name="DO_MFC3_Inlet" Device="GPV31"  Note="1=VALVE ON" />
    134. 

  134. 		<DO_ITEM Index="50" Name="DO_MFC4_Inlet" Device="GPV41"  Note="1=VALVE ON" />
    135. 

  135. 		<DO_ITEM Index="51" Name="DO_MFC5_Inlet" Device="GPV51"  Note="1=VALVE ON" />
    136. 

  136. 		<DO_ITEM Index="52" Name="DO_MFC6_Inlet" Device="GPV61"  Note="1=VALVE ON" />
    137. 

  137. 		<DO_ITEM Index="53" Name="DO_MFC7_Inlet" Device="GPV71"  Note="1=VALVE ON" />
    138. 

  138. 		<DO_ITEM Index="54" Name="DO_MFC8_Inlet" Device="GPV81"  Note="1=VALVE ON" />
    139. 

  139. 		<DO_ITEM Index="55" Name="DO_MFC9_Inlet" Device="GPV91"  Note="1=VALVE ON" />
    140. 

  140. 		<DO_ITEM Index="56" Name="DO_MFC10_Inlet" Device="GPV101"  Note="1=VALVE ON" />
    141. 

  141. 		<DO_ITEM Index="57" Name="DO_MFC11_Inlet" Device="GPV111"  Note="1=VALVE ON" />
    142. 

  142. 		<DO_ITEM Index="58" Name="DO_MFC12_Inlet" Device="GPV121"  Note="1=VALVE ON" />
    143. 

  143. 		<DO_ITEM Index="59" Name="DO_MFC13_Inlet" Device="GPV131"  Note="1=VALVE ON" />
    144. 

  144. 		<DO_ITEM Index="60" Name="DO_MFC14_Inlet" Device="GPV141"  Note="1=VALVE ON" />
    145. 

  145. 		<DO_ITEM Index="61" Name="DO_MFC15_Inlet" Device="GPV151"  Note="1=VALVE ON" />
    146. 

  146. 		<DO_ITEM Index="62" Name="DO_MFC16_Inlet" Device="GPV161"  Note="1=VALVE ON" />
    147. 

  147. 		<DO_ITEM Index="63" Name="DO_N2_Bypass" Device="GPVN22"  Note="1=VALVE ON" />
    148. 

  148. 		<DO_ITEM Index="64" Name="DO_MFC1_Bypass" Device="GPV12"  Note="1=VALVE ON" />
    149. 

  149. 		<DO_ITEM Index="65" Name="DO_MFC2_Bypass" Device="GPV22"  Note="1=VALVE ON" />
    150. 

  150. 		<DO_ITEM Index="66" Name="DO_MFC3_Bypass" Device="GPV32"  Note="1=VALVE ON" />
    151. 

  151. 		<DO_ITEM Index="67" Name="DO_MFC4_Bypass" Device="GPV42"  Note="1=VALVE ON" />
    152. 

  152. 		<DO_ITEM Index="68" Name="DO_MFC5_Bypass" Device="GPV52"  Note="1=VALVE ON" />
    153. 

  153. 		<DO_ITEM Index="69" Name="DO_MFC6_Bypass" Device="GPV62"  Note="1=VALVE ON" />
    154. 

  154. 		<DO_ITEM Index="70" Name="DO_MFC7_Bypass" Device="GPV72"  Note="1=VALVE ON" />
    155. 

  155. 		<DO_ITEM Index="71" Name="DO_MFC8_Bypass" Device="GPV82"  Note="1=VALVE ON" />
    156. 

  156. 		<DO_ITEM Index="72" Name="DO_MFC9_Bypass" Device="GPV92"  Note="1=VALVE ON" />
    157. 

  157. 		<DO_ITEM Index="73" Name="DO_MFC10_Bypass" Device="GPV102"  Note="1=VALVE ON" />
    158. 

  158. 		<DO_ITEM Index="74" Name="DO_MFC11_Bypass" Device="GPV112"  Note="1=VALVE ON" />
    159. 

  159. 		<DO_ITEM Index="75" Name="DO_MFC12_Bypass" Device="GPV122"  Note="1=VALVE ON" />
    160. 

  160. 		<DO_ITEM Index="76" Name="DO_MFC13_Bypass" Device="GPV132"  Note="1=VALVE ON" />
    161. 

  161. 		<DO_ITEM Index="77" Name="DO_MFC14_Bypass" Device="GPV142"  Note="1=VALVE ON" />
    162. 

  162. 		<DO_ITEM Index="78" Name="DO_MFC15_Bypass" Device="GPV152"  Note="1=VALVE ON" />
    163. 

  163. 		<DO_ITEM Index="79" Name="DO_MFC16_Bypass" Device="GPV162"  Note="1=VALVE ON" />
    164. 

  164. 		<DO_ITEM Index="80" Name="DO_N2_Purge" Device="N2_Purge"  Note="1=VALVE ON" />
    165. 

  165. 		<DO_ITEM Index="81" Name="DO_UPC_Full_Open" Device="" />
    166. 

  166. 		<DO_ITEM Index="82" Name="DO_UPC_Full_Close" Device="" />
    167. 

  167. 		<DO_ITEM Index="83" Name="DO_UPC_PRES_Remote_Zero" Device="" />
    168. 

  168. 		<DO_ITEM Index="84" Name="DO_UPC_Flow_Remote_Zero" Device="" />
    169. 

  169. 		<DO_ITEM Index="85" Name="DO_ESC_HTR1_RLY" Device=""  Note="1=RELAY ON" />
    170. 

  170. 		<DO_ITEM Index="86" Name="DO_ESC_HTR1_SSR" Device=""  Note="1=RELAY ON" />
    171. 

  171. 		<DO_ITEM Index="87" Name="DO_ESC_HTR2_RLY" Device=""  Note="1=RELAY ON" />
    172. 

  172. 		<DO_ITEM Index="88" Name="DO_ESC_HTR2_SSR" Device=""  Note="1=RELAY ON" />
    173. 

  173. 		<DO_ITEM Index="89" Name="DO_ESC_HTR3_RLY" Device=""  Note="1=RELAY ON" />
    174. 

  174. 		<DO_ITEM Index="90" Name="DO_ESC_HTR3_SSR" Device=""  Note="1=RELAY ON" />
    175. 

  175. 		<DO_ITEM Index="91" Name="DO_ESC_HTR4_RLY" Device=""  Note="1=RELAY ON" />
    176. 

  176. 		<DO_ITEM Index="92" Name="DO_ESC_HTR4_SSR" Device=""  Note="1=RELAY ON" />
    177. 

  177. 		<DO_ITEM Index="93" Name="DO_SRF_Power_On" Device="" />
    178. 

  178. 		<DO_ITEM Index="94" Name="DO_SRF_Error_Reset" Device="" />
    179. 

  179. 		<DO_ITEM Index="95" Name="DO_BRF_Power_On" Device="" />
    180. 

  180. 		<DO_ITEM Index="96" Name="DO_BRF_Error_Reset" Device="" />
    181. 

  181. 		<DO_ITEM Index="97" Name="DO_Shutter_SVO_Go_To_PROC_POSI" Device="" />
    182. 

  182. 		<DO_ITEM Index="98" Name="DO_Shutter_SVO_Go_To_Origin" Device="" />
    183. 

  183. 		<DO_ITEM Index="99" Name="DO_Shutter_SVO_Reset" Device="" />
    184. 

  184. 		<DO_ITEM Index="100" Name="DO_Lid_SVO_Enable" Device="" />
    185. 

  185. 		<DO_ITEM Index="101" Name="DO_Lid_SVO_Reset" Device="" />
    186. 

  186. 		<DO_ITEM Index="102" Name="DO_HV_Power_On" Device="" />
    187. 

  187. 	</Dig_Out>
    188. 

  188. 	<Ana_Out>
    189. 

  189. 		<AO_ITEM Index="1" Name="AO_SRF_CTRL_Mode" Device=""  Note="0 = forward power operation,
    190. 

  190. 1 = Power delivery/load operation
    191. 

  191. 2 = auto operation" />
    192. 

  192. 		<AO_ITEM Index="2" Name="AO_SRF_Power_SP" Device="" />
    193. 

  193. 		<AO_ITEM Index="3" Name="AO_SRF_Forward_PWR_SP" Device="" />
    194. 

  194. 		<AO_ITEM Index="4" Name="AO_SRF_Reflected_PWR_SP" Device="" />
    195. 

  195. 		<AO_ITEM Index="5" Name="AO_SRF_Delivered_PWR_SP" Device="" />
    196. 

  196. 		<AO_ITEM Index="6" Name="AO_SRF_Pulse_FREQ_SP" Device="" />
    197. 

  197. 		<AO_ITEM Index="7" Name="AO_SRF_Pulse_Duty_Cycle_SP" Device="" />
    198. 

  198. 		<AO_ITEM Index="8" Name="AO_SRF_Forward_PWR_Limit" Device="" />
    199. 

  199. 		<AO_ITEM Index="9" Name="AO_SRF_Reflect_PWR_Limit" Device="" />
    200. 

  200. 		<AO_ITEM Index="10" Name="AO_SRF_Pulse_Mode" Device=""  Note="0 = Master/Internal
    201. 

  201. 1 = Slave/External
    202. 

  202. 2 = Triggered slave" />
    203. 

  203. 		<AO_ITEM Index="11" Name="AO_SMatch_C1_Sp" Device="" />
    204. 

  204. 		<AO_ITEM Index="12" Name="AO_SMatch_C2_Sp" Device="" />
    205. 

  205. 		<AO_ITEM Index="13" Name="AO_SMatch_C3_Sp" Device="" />
    206. 

  206. 		<AO_ITEM Index="14" Name="AO_SMatch_C4_Sp" Device="" />
    207. 

  207. 		<AO_ITEM Index="15" Name="AO_SMatch_C3_MAX_SP" Device="" />
    208. 

  208. 		<AO_ITEM Index="16" Name="AO_SMatch_C3_MIN_SP" Device="" />
    209. 

  209. 		<AO_ITEM Index="17" Name="AO_SMatch_Mode" Device="" />
    210. 

  210. 		<AO_ITEM Index="18" Name="AO_BRF_CTRL_Mode" Device=""  Note="0 = forward mode
    211. 

  211. 1 = Power delivery/load operation" />
    212. 

  212. 		<AO_ITEM Index="19" Name="AO_BRF_Power_SP" Device="" />
    213. 

  213. 		<AO_ITEM Index="20" Name="AO_BRF_Pulse_FREQ_SP" Device="" />
    214. 

  214. 		<AO_ITEM Index="21" Name="AO_BRF_Pulse_Duty_Cycle_SP" Device="" />
    215. 

  215. 		<AO_ITEM Index="22" Name="AO_BMatch_C1_Sp" Device="" />
    216. 

  216. 		<AO_ITEM Index="23" Name="AO_BMatch_C2_Sp" Device="" />
    217. 

  217. 		<AO_ITEM Index="24" Name="AO_BMatch_C3_Sp" Device="" />
    218. 

  218. 		<AO_ITEM Index="25" Name="AO_BMatch_C4_Sp" Device="" />
    219. 

  219. 		<AO_ITEM Index="26" Name="AO_BMatch_C3_MAX_SP" Device="" />
    220. 

  220. 		<AO_ITEM Index="27" Name="AO_BMatch_C3_MIN_SP" Device="" />
    221. 

  221. 		<AO_ITEM Index="28" Name="AO_BMatch_Mode" Device="" />
    222. 

  222. 		<AO_ITEM Index="29" Name="AO_MFC1_Flow_SP" Device="" />
    223. 

  223. 		<AO_ITEM Index="30" Name="AO_MFC1_Position_SP" Device="" />
    224. 

  224. 		<AO_ITEM Index="31" Name="AO_MFC1_CTRL_Mode" Device=""  Note="1: Feedback
    225. 

  225. 2: Position
    226. 

  226. 3: Fully close
    227. 

  227. 4: Freeze Position
    228. 

  228. other: Invalid" />
    229. 

  229. 		<AO_ITEM Index="32" Name="AO_MFC2_Flow_SP" Device="" />
    230. 

  230. 		<AO_ITEM Index="33" Name="AO_MFC2_Position_SP" Device="" />
    231. 

  231. 		<AO_ITEM Index="34" Name="AO_MFC2_CTRL_Mode" Device=""  Note="RT AO-55" />
    232. 

  232. 		<AO_ITEM Index="35" Name="AO_MFC3_Flow_SP" Device="" />
    233. 

  233. 		<AO_ITEM Index="36" Name="AO_MFC3_Position_SP" Device="" />
    234. 

  234. 		<AO_ITEM Index="37" Name="AO_MFC3_CTRL_Mode" Device=""  Note="RT AO-55" />
    235. 

  235. 		<AO_ITEM Index="38" Name="AO_MFC4_Flow_SP" Device="" />
    236. 

  236. 		<AO_ITEM Index="39" Name="AO_MFC4_Position_SP" Device="" />
    237. 

  237. 		<AO_ITEM Index="40" Name="AO_MFC4_CTRL_Mode" Device=""  Note="RT AO-55" />
    238. 

  238. 		<AO_ITEM Index="41" Name="AO_MFC5_Flow_SP" Device="" />
    239. 

  239. 		<AO_ITEM Index="42" Name="AO_MFC5_Position_SP" Device="" />
    240. 

  240. 		<AO_ITEM Index="43" Name="AO_MFC5_CTRL_Mode" Device=""  Note="RT AO-55" />
    241. 

  241. 		<AO_ITEM Index="44" Name="AO_MFC6_Flow_SP" Device="" />
    242. 

  242. 		<AO_ITEM Index="45" Name="AO_MFC6_Position_SP" Device="" />
    243. 

  243. 		<AO_ITEM Index="46" Name="AO_MFC6_CTRL_Mode" Device=""  Note="RT AO-55" />
    244. 

  244. 		<AO_ITEM Index="47" Name="AO_MFC7_Flow_SP" Device="" />
    245. 

  245. 		<AO_ITEM Index="48" Name="AO_MFC7_Position_SP" Device="" />
    246. 

  246. 		<AO_ITEM Index="49" Name="AO_MFC7_CTRL_Mode" Device=""  Note="RT AO-55" />
    247. 

  247. 		<AO_ITEM Index="50" Name="AO_MFC8_Flow_SP" Device="" />
    248. 

  248. 		<AO_ITEM Index="51" Name="AO_MFC8_Position_SP" Device="" />
    249. 

  249. 		<AO_ITEM Index="52" Name="AO_MFC8_CTRL_Mode" Device=""  Note="RT AO-55" />
    250. 

  250. 		<AO_ITEM Index="53" Name="AO_MFC9_Flow_SP" Device="" />
    251. 

  251. 		<AO_ITEM Index="54" Name="AO_MFC9_Position_SP" Device="" />
    252. 

  252. 		<AO_ITEM Index="55" Name="AO_MFC9_CTRL_Mode" Device=""  Note="RT AO-55" />
    253. 

  253. 		<AO_ITEM Index="56" Name="AO_MFC10_Flow_SP" Device="" />
    254. 

  254. 		<AO_ITEM Index="57" Name="AO_MFC10_Position_SP" Device="" />
    255. 

  255. 		<AO_ITEM Index="58" Name="AO_MFC10_CTRL_Mode" Device=""  Note="RT AO-55" />
    256. 

  256. 		<AO_ITEM Index="59" Name="AO_MFC11_Flow_SP" Device="" />
    257. 

  257. 		<AO_ITEM Index="60" Name="AO_MFC11_Position_SP" Device="" />
    258. 

  258. 		<AO_ITEM Index="61" Name="AO_MFC11_CTRL_Mode" Device=""  Note="RT AO-55" />
    259. 

  259. 		<AO_ITEM Index="62" Name="AO_MFC12_Flow_SP" Device="" />
    260. 

  260. 		<AO_ITEM Index="63" Name="AO_MFC12_Position_SP" Device="" />
    261. 

  261. 		<AO_ITEM Index="64" Name="AO_MFC12_CTRL_Mode" Device=""  Note="RT AO-55" />
    262. 

  262. 		<AO_ITEM Index="65" Name="AO_MFC13_Flow_SP" Device="" />
    263. 

  263. 		<AO_ITEM Index="66" Name="AO_MFC13_Position_SP" Device="" />
    264. 

  264. 		<AO_ITEM Index="67" Name="AO_MFC13_CTRL_Mode" Device=""  Note="RT AO-55" />
    265. 

  265. 		<AO_ITEM Index="68" Name="AO_MFC14_Flow_SP" Device="" />
    266. 

  266. 		<AO_ITEM Index="69" Name="AO_MFC14_Position_SP" Device="" />
    267. 

  267. 		<AO_ITEM Index="70" Name="AO_MFC14_CTRL_Mode" Device=""  Note="RT AO-55" />
    268. 

  268. 		<AO_ITEM Index="71" Name="AO_MFC15_Flow_SP" Device="" />
    269. 

  269. 		<AO_ITEM Index="72" Name="AO_MFC15_Position_SP" Device="" />
    270. 

  270. 		<AO_ITEM Index="73" Name="AO_MFC15_CTRL_Mode" Device=""  Note="RT AO-55" />
    271. 

  271. 		<AO_ITEM Index="74" Name="AO_MFC16_Flow_SP" Device="" />
    272. 

  272. 		<AO_ITEM Index="75" Name="AO_MFC16_Position_SP" Device="" />
    273. 

  273. 		<AO_ITEM Index="76" Name="AO_MFC16_CTRL_Mode" Device=""  Note="RT AO-55" />
    274. 

  274. 		<AO_ITEM Index="77" Name="AO_Shutter_SVO_PROC_POSI_SP" Device="" />
    275. 

  275. 		<AO_ITEM Index="78" Name="AO_UPC_Pressure_SP" Device="" />
    276. 

  276. 		<AO_ITEM Index="79" Name="AO_HV_Power_Voltage_SP" Device="" />
    277. 

  277. 		<AO_ITEM Index="80" Name="AO_HV_Power_Current_SP" Device="" />
    278. 

  278. 	</Ana_Out>
    279. 

  279. 	<Ana_In>
    280. 

  280. 		<AI_ITEM Index="1" Name="AI_Chamber_Pressure" Device="" />
    281. 

  281. 		<AI_ITEM Index="2" Name="AI_Process_Pressure" Device="" />
    282. 

  282. 		<AI_ITEM Index="3" Name="AI_Fore_Line_Pressure" Device="" />
    283. 

  283. 		<AI_ITEM Index="4" Name="AI_Slit_Door_TC" Device="" />
    284. 

  284. 		<AI_ITEM Index="5" Name="AI_Slit_Door_TM" Device="" />
    285. 

  285. 		<AI_ITEM Index="6" Name="AI_Fore_Line_TC" Device="" />
    286. 

  286. 		<AI_ITEM Index="7" Name="AI_Fore_Line_TM" Device="" />
    287. 

  287. 		<AI_ITEM Index="8" Name="AI_Gas_Line_TC" Device="" />
    288. 

  288. 		<AI_ITEM Index="9" Name="AI_Gas_Line_TM" Device="" />
    289. 

  289. 		<AI_ITEM Index="10" Name="AI_Pvalve_TC" Device="" />
    290. 

  290. 		<AI_ITEM Index="11" Name="AI_Chanber_Wall_TC1" Device="" />
    291. 

  291. 		<AI_ITEM Index="12" Name="AI_Chanber_Wall_TM1" Device="" />
    292. 

  292. 		<AI_ITEM Index="13" Name="AI_Chanber_Wall_TC2" Device="" />
    293. 

  293. 		<AI_ITEM Index="14" Name="AI_Chanber_Wall_TM2" Device="" />
    294. 

  294. 		<AI_ITEM Index="15" Name="AI_Chanber_Wall_TC3" Device="" />
    295. 

  295. 		<AI_ITEM Index="16" Name="AI_Chanber_Wall_TM3" Device="" />
    296. 

  296. 		<AI_ITEM Index="17" Name="AI_Chanber_Wall_TC4" Device="" />
    297. 

  297. 		<AI_ITEM Index="18" Name="AI_Chanber_Wall_TM4" Device="" />
    298. 

  298. 		<AI_ITEM Index="19" Name="AI_MFC1_Pressure" Device="" />
    299. 

  299. 		<AI_ITEM Index="20" Name="AI_MFC2_Pressure" Device="" />
    300. 

  300. 		<AI_ITEM Index="21" Name="AI_MFC3_Pressure" Device="" />
    301. 

  301. 		<AI_ITEM Index="22" Name="AI_MFC4_Pressure" Device="" />
    302. 

  302. 		<AI_ITEM Index="23" Name="AI_MFC5_Pressure" Device="" />
    303. 

  303. 		<AI_ITEM Index="24" Name="AI_MFC6_Pressure" Device="" />
    304. 

  304. 		<AI_ITEM Index="25" Name="AI_MFC7_Pressure" Device="" />
    305. 

  305. 		<AI_ITEM Index="26" Name="AI_MFC8_Pressure" Device="" />
    306. 

  306. 		<AI_ITEM Index="27" Name="AI_MFC9_Pressure" Device="" />
    307. 

  307. 		<AI_ITEM Index="28" Name="AI_MFC10_Pressure" Device="" />
    308. 

  308. 		<AI_ITEM Index="29" Name="AI_MFC11_Pressure" Device="" />
    309. 

  309. 		<AI_ITEM Index="30" Name="AI_MFC12_Pressure" Device="" />
    310. 

  310. 		<AI_ITEM Index="31" Name="AI_MFC13_Pressure" Device="" />
    311. 

  311. 		<AI_ITEM Index="32" Name="AI_MFC14_Pressure" Device="" />
    312. 

  312. 		<AI_ITEM Index="33" Name="AI_MFC15_Pressure" Device="" />
    313. 

  313. 		<AI_ITEM Index="34" Name="AI_MFC16_Pressure" Device="" />
    314. 

  314. 		<AI_ITEM Index="35" Name="AI_N2_Pressure" Device="" />
    315. 

  315. 		<AI_ITEM Index="36" Name="AI_Total_Water_Flow" Device="" />
    316. 

  316. 		<AI_ITEM Index="37" Name="AI_Top_Plate_Coolant_Flow" Device="" />
    317. 

  317. 		<AI_ITEM Index="38" Name="AI_ESC_Coolant_Flow" Device="" />
    318. 

  318. 		<AI_ITEM Index="39" Name="AI_Total_Water_Inlet_TM" Device="" />
    319. 

  319. 		<AI_ITEM Index="40" Name="AI_Total_Water_Outlet_TM" Device="" />
    320. 

  320. 		<AI_ITEM Index="41" Name="AI_Top_Plate_Coolant_Inlet_TM" Device="" />
    321. 

  321. 		<AI_ITEM Index="42" Name="AI_Top_Plate_Coolant_Outlet_TM" Device="" />
    322. 

  322. 		<AI_ITEM Index="43" Name="AI_ESC_Coolant_Inlet_TM" Device="" />
    323. 

  323. 		<AI_ITEM Index="44" Name="AI_ESC_Coolant_Outlet_TM" Device="" />
    324. 

  324. 		<AI_ITEM Index="45" Name="AI_ESC_Heater1_TC" Device="" />
    325. 

  325. 		<AI_ITEM Index="46" Name="AI_ESC_Heater2_TC" Device="" />
    326. 

  326. 		<AI_ITEM Index="47" Name="AI_ESC_Heater3_TC" Device="" />
    327. 

  327. 		<AI_ITEM Index="48" Name="AI_ESC_Heater4_TC" Device="" />
    328. 

  328. 		<AI_ITEM Index="49" Name="AI_ESC_He_Pressure" Device="" />
    329. 

  329. 		<AI_ITEM Index="50" Name="AI_UPC_Actual_Pressure" Device="" />
    330. 

  330. 		<AI_ITEM Index="51" Name="AI_UPC_Actual_Flow" Device="" />
    331. 

  331. 		<AI_ITEM Index="52" Name="AI_SRF_GEN_Current_Forward_PWR" Device="" />
    332. 

  332. 		<AI_ITEM Index="53" Name="AI_SRF_GEN_Current_Reflected_PWR" Device="" />
    333. 

  333. 		<AI_ITEM Index="54" Name="AI_SRF_GEN_Current_Delivered_PWR" Device="" />
    334. 

  334. 		<AI_ITEM Index="55" Name="AI_SRF_GEN_Water_Temp" Device="" />
    335. 

  335. 		<AI_ITEM Index="56" Name="AI_SRF_GEN_Air_Temp" Device="" />
    336. 

  336. 		<AI_ITEM Index="57" Name="AI_SRF_Match_Voltage" Device="" />
    337. 

  337. 		<AI_ITEM Index="58" Name="AI_SRF_Match_Current" Device="" />
    338. 

  338. 		<AI_ITEM Index="59" Name="AI_SRF_Match_Power" Device="" />
    339. 

  339. 		<AI_ITEM Index="60" Name="AI_BRF_GEN_Current_Forward_PWR" Device="" />
    340. 

  340. 		<AI_ITEM Index="61" Name="AI_BRF_GEN_Current_Reflected_PWR" Device="" />
    341. 

  341. 		<AI_ITEM Index="62" Name="AI_BRF_GEN_Current_Delivered_PWR" Device="" />
    342. 

  342. 		<AI_ITEM Index="63" Name="AI_BRF_GEN_Water_Temp" Device="" />
    343. 

  343. 		<AI_ITEM Index="64" Name="AI_BRF_GEN_Air_Temp" Device="" />
    344. 

  344. 		<AI_ITEM Index="65" Name="AI_BRF_Match_Voltage" Device="" />
    345. 

  345. 		<AI_ITEM Index="66" Name="AI_BRF_Match_Current" Device="" />
    346. 

  346. 		<AI_ITEM Index="67" Name="AI_BRF_Match_Power" Device="" />
    347. 

  347. 		<AI_ITEM Index="68" Name="AI_MFC1_Status" Device="" />
    348. 

  348. 		<AI_ITEM Index="69" Name="AI_MFC1_Flow_PV" Device="" />
    349. 

  349. 		<AI_ITEM Index="70" Name="AI_MFC1_Position_PV" Device="" />
    350. 

  350. 		<AI_ITEM Index="71" Name="AI_MFC2_Status" Device="" />
    351. 

  351. 		<AI_ITEM Index="72" Name="AI_MFC2_Flow_PV" Device="" />
    352. 

  352. 		<AI_ITEM Index="73" Name="AI_MFC2_Position_PV" Device="" />
    353. 

  353. 		<AI_ITEM Index="74" Name="AI_MFC3_Status" Device="" />
    354. 

  354. 		<AI_ITEM Index="75" Name="AI_MFC3_Flow_PV" Device="" />
    355. 

  355. 		<AI_ITEM Index="76" Name="AI_MFC3_Position_PV" Device="" />
    356. 

  356. 		<AI_ITEM Index="77" Name="AI_MFC4_Status" Device="" />
    357. 

  357. 		<AI_ITEM Index="78" Name="AI_MFC4_Flow_PV" Device="" />
    358. 

  358. 		<AI_ITEM Index="79" Name="AI_MFC4_Position_PV" Device="" />
    359. 

  359. 		<AI_ITEM Index="80" Name="AI_MFC5_Status" Device="" />
    360. 

  360. 		<AI_ITEM Index="81" Name="AI_MFC5_Flow_PV" Device="" />
    361. 

  361. 		<AI_ITEM Index="82" Name="AI_MFC5_Position_PV" Device="" />
    362. 

  362. 		<AI_ITEM Index="83" Name="AI_MFC6_Status" Device="" />
    363. 

  363. 		<AI_ITEM Index="84" Name="AI_MFC6_Flow_PV" Device="" />
    364. 

  364. 		<AI_ITEM Index="85" Name="AI_MFC6_Position_PV" Device="" />
    365. 

  365. 		<AI_ITEM Index="86" Name="AI_MFC7_Status" Device="" />
    366. 

  366. 		<AI_ITEM Index="87" Name="AI_MFC7_Flow_PV" Device="" />
    367. 

  367. 		<AI_ITEM Index="88" Name="AI_MFC7_Position_PV" Device="" />
    368. 

  368. 		<AI_ITEM Index="89" Name="AI_MFC8_Status" Device="" />
    369. 

  369. 		<AI_ITEM Index="90" Name="AI_MFC8_Flow_PV" Device="" />
    370. 

  370. 		<AI_ITEM Index="91" Name="AI_MFC8_Position_PV" Device="" />
    371. 

  371. 		<AI_ITEM Index="92" Name="AI_MFC9_Status" Device="" />
    372. 

  372. 		<AI_ITEM Index="93" Name="AI_MFC9_Flow_PV" Device="" />
    373. 

  373. 		<AI_ITEM Index="94" Name="AI_MFC9_Position_PV" Device="" />
    374. 

  374. 		<AI_ITEM Index="95" Name="AI_MFC10_Status" Device="" />
    375. 

  375. 		<AI_ITEM Index="96" Name="AI_MFC10_Flow_PV" Device="" />
    376. 

  376. 		<AI_ITEM Index="97" Name="AI_MFC10_Position_PV" Device="" />
    377. 

  377. 		<AI_ITEM Index="98" Name="AI_MFC11_Status" Device="" />
    378. 

  378. 		<AI_ITEM Index="99" Name="AI_MFC11_Flow_PV" Device="" />
    379. 

  379. 		<AI_ITEM Index="100" Name="AI_MFC11_Position_PV" Device="" />
    380. 

  380. 		<AI_ITEM Index="101" Name="AI_MFC12_Status" Device="" />
    381. 

  381. 		<AI_ITEM Index="102" Name="AI_MFC12_Flow_PV" Device="" />
    382. 

  382. 		<AI_ITEM Index="103" Name="AI_MFC12_Position_PV" Device="" />
    383. 

  383. 		<AI_ITEM Index="104" Name="AI_MFC13_Status" Device="" />
    384. 

  384. 		<AI_ITEM Index="105" Name="AI_MFC13_Flow_PV" Device="" />
    385. 

  385. 		<AI_ITEM Index="106" Name="AI_MFC13_Position_PV" Device="" />
    386. 

  386. 		<AI_ITEM Index="107" Name="AI_MFC14_Status" Device="" />
    387. 

  387. 		<AI_ITEM Index="108" Name="AI_MFC14_Flow_PV" Device="" />
    388. 

  388. 		<AI_ITEM Index="109" Name="AI_MFC14_Position_PV" Device="" />
    389. 

  389. 		<AI_ITEM Index="110" Name="AI_MFC15_Status" Device="" />
    390. 

  390. 		<AI_ITEM Index="111" Name="AI_MFC15_Flow_PV" Device="" />
    391. 

  391. 		<AI_ITEM Index="112" Name="AI_MFC15_Position_PV" Device="" />
    392. 

  392. 		<AI_ITEM Index="113" Name="AI_MFC16_Status" Device="" />
    393. 

  393. 		<AI_ITEM Index="114" Name="AI_MFC16_Flow_PV" Device="" />
    394. 

  394. 		<AI_ITEM Index="115" Name="AI_MFC16_Position_PV" Device="" />
    395. 

  395. 		<AI_ITEM Index="116" Name="AI_Shutter_Servo_Current_POSI" Device="" />
    396. 

  396. 		<AI_ITEM Index="117" Name="AI_HV_Power_Status" Device="" />
    397. 

  397. 		<AI_ITEM Index="118" Name="AI_HV_Power_Voltage_PV" Device="" />
    398. 

  398. 		<AI_ITEM Index="119" Name="AI_HV_Power_Center_Voltage_PV" Device="" />
    399. 

  399. 		<AI_ITEM Index="120" Name="AI_HV_Power_Positive_Current_PV" Device="" />
    400. 

  400. 		<AI_ITEM Index="121" Name="AI_HV_Power_Negative_Current_PV" Device="" />
    401. 

  401. 	</Ana_In>
    402. 

  402. </IO_DEFINE>
    403. 

  403.