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Kepler2300Interlock.xml

Kepler2300Interlock.xml 18 KB
History Raw

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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3.   <Action do="DO_PVN21" value="true" tip="PVN21" tip.zh-CN=""  tip.en-US="DO-0" >
    4. 

  4. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    5. 

  5. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    6. 

  6. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    7. 

  7. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    8. 

  8. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    9. 

  9.   </Action>
    10. 

  10. 

  11.   <Action do="DO_PVN22"  value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
    12. 

  12. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    13. 

  13. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    14. 

  14. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    15. 

  15.   </Action>
    16. 

  16.   
    17. 

  17.   <Action do="DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
    18. 

  18. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    19. 

  19. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    20. 

  20. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    21. 

  21. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    22. 

  22. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    23. 

  23.   </Action>
    24. 

  24. 

  25.   <Action do="DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
    26. 

  26. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    27. 

  27. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    28. 

  28. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    29. 

  29. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    30. 

  30. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    31. 

  31.   </Action>
    32. 

  32. 

  33.   <Action do="DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
    34. 

  34. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    35. 

  35. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    36. 

  36. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    37. 

  37. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    38. 

  38. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    39. 

  39.   </Action>
    40. 

  40. 

  41.   <Action do="DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
    42. 

  42.   <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    43. 

  43.   <Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    44. 

  44. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    45. 

  45. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    46. 

  46. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    47. 

  47.   </Action>
    48. 

  48.   
    49. 

  49.   <Action do="DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
    50. 

  50. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    51. 

  51. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    52. 

  52. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    53. 

  53. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    54. 

  54. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    55. 

  55.   </Action>
    56. 

  56. 

  57.   <Action do="DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
    58. 

  58. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    59. 

  59. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    60. 

  60. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    61. 

  61. 

  62. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    63. 

  63. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    64. 

  64.   </Action>
    65. 

  65. 

  66.   <Action do="DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
    67. 

  67. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    68. 

  68. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    69. 

  69. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    70. 

  70. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    71. 

  71. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    72. 

  72.   </Action>
    73. 

  73.   
    74. 

  74.   <Action do="DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
    75. 

  75. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    76. 

  76. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    77. 

  77. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    78. 

  78. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    79. 

  79. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    80. 

  80.   </Action>
    81. 

  81. 

  82.   <Action do="DO_N2_Valve" value="true" tip="N2" tip.zh-CN="" tip.en-US="DO-10" >
    83. 

  83. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    84. 

  84. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    85. 

  85. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    86. 

  86. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    87. 

  87. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    88. 

  88.   <Limit do="DO_Soft_Pumping_Valve"	value="false" tip="DO Soft Pumping Valve"	tip.zh-CN="" tip.en-US="DO-22" />
    89. 

  89.   <Limit do="DO_Fast_Pumping_Valve"	value="false" tip="DO Fast Pumping Valve"	tip.zh-CN="" tip.en-US="DO-23" />
    90. 

  90.   </Action>
    91. 

  91. 

  92.   <Action do="DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
    93. 

  93. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    94. 

  94. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    95. 

  95. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    96. 

  96. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    97. 

  97. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    98. 

  98.   </Action>
    99. 

  99. 

  100.   <Action do="DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
    101. 

  101. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    102. 

  102. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    103. 

  103. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    104. 

  104. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    105. 

  105. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    106. 

  106.   </Action>
    107. 

  107. 

  108.   <Action do="DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
    109. 

  109. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    110. 

  110. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    111. 

  111. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    112. 

  112. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    113. 

  113. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    114. 

  114.   </Action>
    115. 

  115. 

  116.   <Action do="DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
    117. 

  117. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    118. 

  118. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    119. 

  119. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    120. 

  120. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    121. 

  121. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    122. 

  122.   </Action>
    123. 

  123. 

  124.   <Action do="DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
    125. 

  125. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    126. 

  126. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    127. 

  127. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    128. 

  128. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    129. 

  129. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    130. 

  130.   </Action>
    131. 

  131. 

  132.   <Action do="DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
    133. 

  133. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    134. 

  134. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    135. 

  135. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    136. 

  136. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    137. 

  137. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    138. 

  138.   </Action>
    139. 

  139. 

  140.   <Action do="DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
    141. 

  141. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    142. 

  142. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    143. 

  143. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    144. 

  144. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    145. 

  145. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    146. 

  146.   </Action>
    147. 

  147. 

  148.   <Action do="DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
    149. 

  149. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    150. 

  150. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    151. 

  151. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    152. 

  152. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    153. 

  153. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    154. 

  154.   </Action>
    155. 

  155. 

  156.   <Action do="DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
    157. 

  157. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    158. 

  158. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    159. 

  159. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    160. 

  160.   </Action>
    161. 

  161. 

  162.   <Action do="DO_PVHe2" value="true" tip="PVHe2" tip.zh-CN="" tip.en-US="DO-20" >
    163. 

  163. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    164. 

  164. 	<Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    165. 

  165. 	<Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    166. 

  166.   </Action>
    167. 

  167. 

  168.   <Action do="DO_Gas_Final_Valve" value="true" tip="Gas Final Valve" tip.zh-CN=""	tip.en-US="DO-21" >
    169. 

  169. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    170. 

  170. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    171. 

  171. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    172. 

  172.   </Action>
    173. 

  173. 

  174.   <Action do="DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" >
    175. 

  175. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    176. 

  176. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    177. 

  177. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    178. 

  178. 	<Limit do="DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
    179. 

  179.   </Action>
    180. 

  180. 

  181.   <Action do="DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" >
    182. 

  182. 	<Limit di="DI_Lid_Closed"		value="true" tip="DI PM Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    183. 

  183. 	<Limit di="DI_Slit_Door_Close_POS"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-11" />
    184. 

  184. 	<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    185. 

  185. 	<Limit do="DO_N2_Valve"				value="false" tip="DO N2 Valve"				tip.zh-CN="" tip.en-US="DO-10" />
    186. 

  186.   </Action>
    187. 

  187. 

  188.   <Action do="DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
    189. 

  189. 	<Limit di="DI_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    190. 

  190. 	<Limit di="DI_CDA_Pressure_Switch"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    191. 

  191.     <Limit di="DI_Arm_Not_Extend_to_PM"			value="true" tip="DI Arm Not Extend to PM"	tip.zh-CN="" tip.en-US="DI-76" />
    192. 

  192.     <Limit di="DI_TM_Clear_Lid_Colse"				value="true" tip="DI EFEM Door Colse"				tip.zh-CN="" tip.en-US="DI-77" />
    193. 

  193.   </Action>
    194. 

  194. 

  195.   <Action do="DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-25" >
    196. 

  196.     <Limit di="DI_Lid_Closed"			value="true" tip="DI PM Lid Closed"				tip.zh-CN="" tip.en-US="DI-0" />
    197. 

  197.     <Limit di="DI_CDA_Pressure_Switch"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    198. 

  198.     <Limit di="DI_Arm_Not_Extend_to_PM"			value="true" tip="DI Arm Not Extend to PM"	tip.zh-CN="" tip.en-US="DI-76" />
    199. 

  199.     <Limit di="DI_TM_Clear_Lid_Colse"				value="true" tip="DI EFEM Door Colse"				tip.zh-CN="" tip.en-US="DI-77" />
    200. 

  200.   </Action>
    201. 

  201. 

  202. 	
    203. 

  203.   <Action do="DO_Lift_Pin_Up" value="true" tip="Lift Pin Up" tip.zh-CN="" tip.en-US="DO-26" >
    204. 

  204. 	<Limit di="DI_CDA_Pressure_Switch"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    205. 

  205.   </Action>
    206. 

  206. 

  207.   <Action do="DO_Lift_Pin_Down" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-27" >
    208. 

  208. 	<Limit di="DI_CDA_Pressure_Switch"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    209. 

  209.   </Action>
    210. 

  210. 

  211.   <Action do="DO_Turbo_Pump_Pumping_Valve" value="true" tip="Turbo Pump Pumping Valve" tip.zh-CN="" tip.en-US="DO-29" >
    212. 

  212. 	<Limit di="DI_CDA_Pressure_Switch"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    213. 

  213.   </Action>
    214. 

  214. 

  215.   <Action do="DO_Turbo_Pump_Purge_Valve" value="true" tip="Turbo Pump Purge Valve" tip.zh-CN="" tip.en-US="DO-30" >
    216. 

  216. 	<Limit di="DI_CDA_Pressure_Switch"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    217. 

  217. 

  218.   </Action>
    219. 

  219. 

  220.   <Action do="DO_Guage_Valve" value="true" tip="Guage Valve" tip.zh-CN="" tip.en-US="DO-31" >
    221. 

  221. 	<Limit di="DI_VAC_Switch"				value="true" tip="DI PM Vacuum SW"				tip.zh-CN="" tip.en-US="DI-2" />
    222. 

  222.   <Limit di="DI_CDA_Pressure_Switch"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    223. 

  223.   </Action>
    224. 

  224. 

  225.   <Action do="DO_S_Valve_Heater_On" value="true" tip="S-Valve Heater On" tip.zh-CN="" tip.en-US="DO-33" >
    226. 

  226.     <Limit di="DI_S_Valve_OT_Switch_Alarm" value="false" tip="S_Valve OT Switch Alarm" tip.zh-CN="" tip.en-US="DI-66" />
    227. 

  227.   </Action>
    228. 

  228. 

  229.   <Action do="DO_Foreline_Heater_On" value="true" tip="Foreline Heater On" tip.zh-CN="" tip.en-US="DO-34" >
    230. 

  230.     <Limit di="DI_Foreline_OT_Switch_Alarm" value="false" tip="Foreline OT Switch Alarm" tip.zh-CN="" tip.en-US="DI-67" />
    231. 

  231.   </Action>
    232. 

  232. 

  233.   <Action do="DO_CHB_Wall_Heater_On" value="true" tip="Chamber Wall Heater On" tip.zh-CN="" tip.en-US="DO-35" >
    234. 

  234.     <Limit di="DI_CHB_Wall_OT_Switch_Alarm" value="false" tip="DI Chamber Wall OT Alarm" tip.zh-CN="" tip.en-US="DI-32" />
    235. 

  235.   </Action>
    236. 

  236.   
    237. 

  237.   <Action do="DO_Lid_Up" value="true" tip="Lid UP" tip.zh-CN="" tip.en-US="DO-50" >
    238. 

  238.     <Limit di="DI_S_Valve_OT_Switch_Alarm" value="false" tip="S_Valve OT Switch Alarm" tip.zh-CN="" tip.en-US="DI-66" />
    239. 

  239. 	<Limit do="DO_Lid_Servo_CTRL_Mode"     value="true" tip="Lid Servo CTRL Mode"      tip.zh-CN="" tip.en-US="DO-80" />
    240. 

  240.   </Action>
    241. 

  241.   
    242. 

  242.   <Action do="DO_Lid_Down" value="true" tip="Lid Down" tip.zh-CN="" tip.en-US="DO-51" >
    243. 

  243.     <Limit di="DI_Foreline_OT_Switch_Alarm" value="false" tip="Foreline OT Switch Alarm" tip.zh-CN="" tip.en-US="DI-67" />
    244. 

  244.   </Action>
    245. 

  245.   
    246. 

  246. 

  247. 

  248. </Interlock>
    249.