| .. |
|
PM
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 anno fa |
|
TM
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 anno fa |
|
ClusterGemModel.xml
|
60e9a04892
Simulator LP3 Update
|
2 anni fa |
|
DBModel.sql
|
fa67219b9f
1.Add automatically update database column codes
|
1 anno fa |
|
DeviceModel.xsd
|
d8e5f1dc2c
2022 last update
|
2 anni fa |
|
EquipmentVariables.xml
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 anno fa |
|
EventDefine.xml
|
3f9c41937a
update for event module enhancement
|
3 anni fa |
|
IoProviderConfig.xml
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 anno fa |
|
LogDefine.json
|
4338503e2a
1.添加霍庭格RF Device
|
1 anno fa |
|
RecipeFormat.xml
|
9760d40cf7
port simulator
|
3 anni fa |
|
SESequenceFormat.xml
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 anno fa |
|
SequenceFormat.xml
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
|
1 anno fa |
|
SignalTower.xml
|
3a078d515d
1.修复ui灯闪烁错误bug
|
2 anni fa |
|
System.sccfg
|
d744d950e1
配置文件添加Ethercat开关功能
|
1 anno fa |
|
System_Kepler2200.sccfg
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 anno fa |
|
VenusPreProcess.py
|
64c7ef574e
log
|
3 anni fa |
lixiang
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能