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Bases
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa,添加工艺结束,等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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hai 1 ano |
Common
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a4b75ecb2e
1.每个Chamber做成可配,默认PMA Venus,PMB Kepler2300
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%!s(int64=2) %!d(string=hai) anos |
Unit
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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hai 1 ano |
ModuleName.cs
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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%!s(int64=2) %!d(string=hai) anos |