hecl e2836bfbda 1.Chamber DE process enhance il y a 1 an
..
AdLinkEthercat ee26035034 1.添加Ethercat 励兆 Match DeviceData il y a 1 an
EFEM 0bea20360b add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM il y a 1 an
EPD c3ef1d5a6e Wafer loadlock delay function. il y a 1 an
EPDs 4ffafb6001 EFEM界面优化 il y a 2 ans
IODevices e2836bfbda 1.Chamber DE process enhance il y a 1 an
PreAligner cc04adb731 change the location of the PA from VPA to Aligner1 il y a 1 an
SMIF 8436daeb68 Eliminate SE generation warning. il y a 1 an
TM e2836bfbda 1.Chamber DE process enhance il y a 1 an
VCE 3c1ae4babb add abort for VenusDE && fix bug in UI && add AbortJob,StopJob il y a 1 an
AIRSYSChiller.cs 6bbe2e529b 1.删除或注释 Venus ChamberType il y a 1 an
AdTecRF.cs 9163903164 Kepler2200优化 il y a 1 an
AdixenTurboPump.cs 9163903164 Kepler2200优化 il y a 1 an
CometRF.cs 9a410e084a fix exception: il y a 1 an
DataDefine.cs 12fa756895 1. SETM will be Init while While SETM Abort Homing il y a 1 an
DeviceManager.cs 9b93f58d68 Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM il y a 1 an
ESC5HighVoltage.cs c1ae6b6ea1 1.Fix Chamber DE recipe process bugs il y a 1 an
EdwardsPump.cs 75dbbd4da8 添加KeplerSignaltower功能 il y a 1 an
FinsPlc.cs 9163903164 Kepler2200优化 il y a 1 an
JetEPDBase.cs 4ffafb6001 EFEM界面优化 il y a 2 ans
JetEfem.cs 5fc13b3f0c New Efem design il y a 2 ans
JetKepler2200APM.cs 9163903164 Kepler2200优化 il y a 1 an
JetKepler2200BPM.cs 9163903164 Kepler2200优化 il y a 1 an
JetKepler2300PM.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug il y a 1 an
JetPMBase.cs 9163903164 Kepler2200优化 il y a 1 an
JetVenusDEPM.cs e2836bfbda 1.Chamber DE process enhance il y a 1 an
JetVenusSEPM.cs e2836bfbda 1.Chamber DE process enhance il y a 1 an
JetVenusSEPMBase.cs 56f7c900fe add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0 il y a 2 ans
KeplerSignalTower.cs 7a1faeac74 Redesign the EFEM module for thread safe issue. il y a 1 an
LzMatch_Ethercat.cs 6d6f659b77 1.Kepler2200 TM/PM控大压力10Pa,添加工艺结束,等待压力稳定(TM/PM压差满足要求)TM再Pick功能 il y a 1 an
PendulumValve.cs 9163903164 Kepler2200优化 il y a 1 an
PlasmaController.cs 75710d35d8 RF Match. il y a 2 ans
RevtechMatch.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug il y a 1 an
SMCChiller.cs 41c5b8a615 Remove the toleranceChecker in SMCChiler && SMCShareChiller il y a 1 an
SMCChillerDrive.cs a0f20d03ac add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown il y a 1 an
SMCShareChiller.cs a0f20d03ac add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown il y a 1 an
SkyPump.cs 4109b056f2 Fix exception caused by skypump recivemessage length && socket don't connect il y a 1 an
TruPlasmaRF.cs c1ae6b6ea1 1.Fix Chamber DE recipe process bugs il y a 1 an
TruPlasmaRF_Ethercat.cs 7ff42d4eca 1.添加 Process 切换step Match/BiasMatch设置值 offset功能,c1/c2小于offset不设置 il y a 1 an