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|
- [
- {
- "Id": 1,
- "Level": "Info",
- "LogEnum": "EV_LOGOFF_INFO",
- "GlobalDescription_zh": "用户'{0}'注销登录",
- "GlobalDescription_en": "",
- "Module": "System",
- "Note": "用户注销登录"
- },
- {
- "Id": 2,
- "Level": "Info",
- "LogEnum": "EV_LOGOUT_INFO",
- "GlobalDescription_zh": "强制用户{0}登出,原因:{1}",
- "GlobalDescription_en": "Force user {0} logout system,reason:{1}。",
- "Module": "System",
- "Note": ""
- },
- {
- "Id": 3,
- "Level": "Error",
- "LogEnum": "ERR_LOGOFF_ERROR",
- "GlobalDescription_zh": "注销用户{0}发生异常",
- "GlobalDescription_en": "",
- "Module": "System",
- "Note": ""
- },
- {
- "Id": 4,
- "Level": "Error",
- "LogEnum": "ERR_UPDATE_PW_ERROR",
- "GlobalDescription_zh": "修改账号{0}的密码失败",
- "GlobalDescription_en": "",
- "Module": "System",
- "Note": ""
- },
- {
- "Id": 5,
- "Level": "Error",
- "LogEnum": "ERR_DELETE_USER_ERROR",
- "GlobalDescription_zh": "删除账号{0}发生异常",
- "GlobalDescription_en": "",
- "Module": "System",
- "Note": ""
- },
- {
- "Id": 6,
- "Level": "Error",
- "LogEnum": "ERR_UPDATE_USER_ERROR",
- "GlobalDescription_zh": "更新账号{0}资料发生异常",
- "GlobalDescription_en": "",
- "Module": "System",
- "Note": ""
- },
- {
- "Id": 9,
- "Level": "Error",
- "LogEnum": "ERR_WCF_OPEN_ERROR",
- "GlobalDescription_zh": "WCF服务{0}未能打开,原因:{1}",
- "GlobalDescription_en": "WCF Service{0}can not open,reason:{1} ",
- "Module": "System",
- "Note": "wcf未能打开"
- },
- {
- "Id": 10,
- "Level": "Info",
- "LogEnum": "EV_ROUTINE_NOTIFY",
- "GlobalDescription_zh": "[{0}] routine, {1}",
- "GlobalDescription_en": "[{0}] routine, {1}",
- "Module": "System",
- "Note": "Routine Notify"
- },
- {
- "Id": 11,
- "Level": "Warning",
- "LogEnum": "WARN_DEFAULT_WARN",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Default Warning"
- },
- {
- "Id": 12,
- "Level": "Error",
- "LogEnum": "ERR_ROUTINE_FAILED",
- "GlobalDescription_zh": "[{0}] routine failed, {1}",
- "GlobalDescription_en": "[{0}] routine failed, {1}",
- "Module": "System",
- "Note": "Routine Failed"
- },
- {
- "Id": 13,
- "Level": "Error",
- "LogEnum": "ERR_SIGNAL_TOWER_UNDEFINE",
- "GlobalDescription_zh": "Undefined light: {0}",
- "GlobalDescription_en": "Undefined light: {0}",
- "Module": "System",
- "Note": "Undefined light: {0}"
- },
- {
- "Id": 14,
- "Level": "Error",
- "LogEnum": "ERR_SIGNAL_TOWER_INVALID_CFG",
- "GlobalDescription_zh": "signal tower config file has invalid set, {0}",
- "GlobalDescription_en": "signal tower config file has invalid set, {0}",
- "Module": "System",
- "Note": "Invalid config"
- },
- {
- "Id": 15,
- "Level": "Error",
- "LogEnum": "ERR_PLC_HEARTBEAT_FAIL",
- "GlobalDescription_zh": "{0}心跳停止,判PLC运行失败,请检查PLC运行情况。",
- "GlobalDescription_en": "{0}HeatBeat Stop,PLC status error, please check it",
- "Module": "System",
- "Note": "Invalid config"
- },
- {
- "Id": 16,
- "Level": "Info",
- "LogEnum": "EV_DEVICE_INFO",
- "GlobalDescription_zh": "Device Info: {0}",
- "GlobalDescription_en": "Device Info: {0}",
- "Module": "System",
- "Note": "Device Info"
- },
- {
- "Id": 17,
- "Level": "Error",
- "LogEnum": "ERR_DEVICE_INFO",
- "GlobalDescription_zh": "Device Error: {0}",
- "GlobalDescription_en": "Device Error: {0}",
- "Module": "System",
- "Note": "Device Error"
- },
- {
- "Id": 18,
- "Level": "Error",
- "LogEnum": "ERR_EXCEPTION",
- "GlobalDescription_zh": "异常:{0}",
- "GlobalDescription_en": "Exception:{0}。",
- "Module": "System",
- "Note": ""
- },
- {
- "Id": 19,
- "Level": "Warning",
- "LogEnum": "WARN_DEVICE_INFO",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Device Warning"
- },
- {
- "Id": 20,
- "Level": "Info",
- "LogEnum": "EV_WAFER_MANAGER_NOTIFY",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Wafermanager Notify"
- },
- {
- "Id": 21,
- "Level": "Warning",
- "LogEnum": "WARN_WAFER_MANAGER_WARN",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Wafermanager Warning"
- },
- {
- "Id": 22,
- "Level": "Error",
- "LogEnum": "ERR_WAFER_MANAGER_FAILED",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Wafermanager Failed"
- },
- {
- "Id": 23,
- "Level": "Info",
- "LogEnum": "EV_FSM_NOTIFY",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "FSM Notify"
- },
- {
- "Id": 24,
- "Level": "Warning",
- "LogEnum": "WARN_FSM_WARN",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "FSM Warning"
- },
- {
- "Id": 25,
- "Level": "Error",
- "LogEnum": "ERR_FSM_FAILED",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "FSM Failed"
- },
- {
- "Id": 26,
- "Level": "Info",
- "LogEnum": "EV_ROUTER",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Router Notify"
- },
- {
- "Id": 27,
- "Level": "Warning",
- "LogEnum": "WARN_ROUTER",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Router Warning"
- },
- {
- "Id": 28,
- "Level": "Error",
- "LogEnum": "ERR_ROUTER",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Router Failed"
- },
- {
- "Id": 29,
- "Level": "Info",
- "LogEnum": "EV_WAFER_MOVED",
- "GlobalDescription_zh": "Wafer {0} moved from {1} {2} to {3} {4}",
- "GlobalDescription_en": "Wafer {0} moved from {1} {2} to {3} {4}",
- "Module": "System",
- "Note": "Wafer Moved"
- },
- {
- "Id": 30,
- "Level": "Info",
- "LogEnum": "EV_WAFER_CREATE",
- "GlobalDescription_zh": "Wafer created at {0} slot {1}, status is {2}.",
- "GlobalDescription_en": "Wafer created at {0} slot {1}, status is {2}.",
- "Module": "System",
- "Note": "Wafer Created"
- },
- {
- "Id": 31,
- "Level": "Info",
- "LogEnum": "EV_WAFER_DELETE",
- "GlobalDescription_zh": "Wafer deleted from {0} slot {1}.",
- "GlobalDescription_en": "Wafer deleted from {0} slot {1}.",
- "Module": "System",
- "Note": "Wafer Deleted"
- },
- {
- "Id": 32,
- "Level": "Info",
- "LogEnum": "EV_SEQUENCE",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Sequence Info"
- },
- {
- "Id": 33,
- "Level": "Warning",
- "LogEnum": "WARN_SEQUENCE",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Sequence Warning"
- },
- {
- "Id": 34,
- "Level": "Error",
- "LogEnum": "ERR_SEQUENCE",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Sequence Failed"
- },
- {
- "Id": 35,
- "Level": "Error",
- "LogEnum": "ERR_INTERLOCK_FAIL",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Interlock Failed"
- },
- {
- "Id": 36,
- "Level": "Info",
- "LogEnum": "EV_SYSTEM_CONFIG",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Configuration Info"
- },
- {
- "Id": 37,
- "Level": "Warning",
- "LogEnum": "WARN_SYSTEM_CONFIG",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "Configuration Warning"
- },
- {
- "Id": 38,
- "Level": "Info",
- "LogEnum": "EV_SCHEDULER",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": ""
- },
- {
- "Id": 39,
- "Level": "Warning",
- "LogEnum": "WARN_SCHEDULER",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": ""
- },
- {
- "Id": 40,
- "Level": "Warning",
- "LogEnum": "EXCEP_FSM",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "FSM Exception"
- },
- {
- "Id": 41,
- "Level": "Warning",
- "LogEnum": "EV_WAFER_DUPLICATED",
- "GlobalDescription_zh": "Create duplicated wafer {0} at source: {1} {2} destination: {3} {4}, please carefully verify the real wafer position and delete the invalid position wafer",
- "GlobalDescription_en": "Create duplicated wafer {0} at source: {1} {2} destination: {3} {4}, please carefully verify the real wafer position and delete the invalid position wafer",
- "Module": "System",
- "Note": "Wafer Moved"
- },
- {
- "Id": 42,
- "Level": "Info",
- "LogEnum": "INFO_DEVICE_ENTITY",
- "GlobalDescription_zh": "Device Entity Log: {0}",
- "GlobalDescription_en": "Device Entity Log: {0}",
- "Module": "System",
- "Note": "Device Entity Info"
- },
- {
- "Id": 43,
- "Level": "Warning",
- "LogEnum": "WARN_DEVICE_ENTITY",
- "GlobalDescription_zh": "Device Entity Log: {0}",
- "GlobalDescription_en": "Device Entity Log: {0}",
- "Module": "System",
- "Note": "Device Entity Warning"
- },
- {
- "Id": 44,
- "Level": "Error",
- "LogEnum": "ERR_DEVICE_ENTITY",
- "GlobalDescription_zh": "Device Entity Log: {0}",
- "GlobalDescription_en": "Device Entity Log: {0}",
- "Module": "System",
- "Note": "Device Entity ERR"
- },
- {
- "Id": 45,
- "Level": "Info",
- "LogEnum": "INFO_WINRESOURCE",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "System Notify"
- },
- {
- "Id": 46,
- "Level": "Warning",
- "LogEnum": "WARN_WINRESOURCE",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "System Failed"
- },
- {
- "Id": 47,
- "Level": "Error",
- "LogEnum": "ERR_WINRESOURCE",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "System",
- "Note": "System Failed"
- },
- {
- "Id": 48,
- "Level": "Error",
- "LogEnum": "ERR_PM_SCRUBBER_NOOK_STOPTRANSFER",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "System",
- "Note": "PM SCRUBBER Alarm,stop tranfer"
- },
- {
- "Id": 1000,
- "Level": "Info",
- "LogEnum": "INFO_DEVICE_IO_HEATER",
- "GlobalDescription_zh": "IO Heater Log: {0}",
- "GlobalDescription_en": "IO Heater Log: {0}",
- "Module": "PM",
- "Note": "IO Heater Info"
- },
- {
- "Id": 1001,
- "Level": "Warning",
- "LogEnum": "WARN_DEVICE_IO_HEATER",
- "GlobalDescription_zh": "IO Heater warning: {0}",
- "GlobalDescription_en": "IO Heater warning: {0}",
- "Module": "PM",
- "Note": "IO Heater Warning"
- },
- {
- "Id": 1002,
- "Level": "Error",
- "LogEnum": "ERR_DEVICE_IO_HEATER",
- "GlobalDescription_zh": "IO Heater alarm: {0}",
- "GlobalDescription_en": "IO Heater alarm: {0}",
- "Module": "PM",
- "Note": "IO Heater Alarm"
- },
- {
- "Id": 1003,
- "Level": "Error",
- "LogEnum": "ERR_DRY_PUMP",
- "GlobalDescription_zh": "Dry Pump alarm: {0}",
- "GlobalDescription_en": "Dry Pump alarm: {0}",
- "Module": "PM",
- "Note": "Dry Pump Alarm"
- },
- {
- "Id": 1004,
- "Level": "Error",
- "LogEnum": "ERR_PENDULUM_VALVE",
- "GlobalDescription_zh": "Pendulum Valve alarm: {0}",
- "GlobalDescription_en": "Pendulum Valve alarm: {0}",
- "Module": "PM",
- "Note": "Pendulum Valve Alarm"
- },
- {
- "Id": 1005,
- "Level": "Error",
- "LogEnum": "ERR_ESC_HV",
- "GlobalDescription_zh": "ESC HV alarm: {0}",
- "GlobalDescription_en": "ESC HV alarm: {0}",
- "Module": "PM",
- "Note": "ESC HV Alarm"
- },
- {
- "Id": 1006,
- "Level": "Error",
- "LogEnum": "ERR_TURBO_PUMP",
- "GlobalDescription_zh": "Turbo Pump alarm: {0}",
- "GlobalDescription_en": "Turbo Pump alarm: {0}",
- "Module": "PM",
- "Note": "Turbo Pump Alarm"
- },
- {
- "Id": 1007,
- "Level": "Error",
- "LogEnum": "ERR_RF",
- "GlobalDescription_zh": "RF error: {0}",
- "GlobalDescription_en": "RF error: {0}",
- "Module": "PM",
- "Note": "RF Alarm"
- },
- {
- "Id": 1008,
- "Level": "Info",
- "LogEnum": "INFO_DEVICE_CHILLER",
- "GlobalDescription_zh": "Chiller: {0}",
- "GlobalDescription_en": "Chiller: {0}",
- "Module": "PM",
- "Note": "Chiller Info"
- },
- {
- "Id": 1009,
- "Level": "Warning",
- "LogEnum": "WARN_DEVICE_CHILLER",
- "GlobalDescription_zh": "Chiller warning: {0}",
- "GlobalDescription_en": "Chiller warning: {0}",
- "Module": "PM",
- "Note": "Chiller Warning"
- },
- {
- "Id": 1010,
- "Level": "Error",
- "LogEnum": "ERR_DEVICE_CHILLER",
- "GlobalDescription_zh": "Chiller alarm: {0}",
- "GlobalDescription_en": "Chiller alarm: {0}",
- "Module": "PM",
- "Note": "Chiller Alarm"
- },
- {
- "Id": 1011,
- "Level": "Warning",
- "LogEnum": "WARN_RF",
- "GlobalDescription_zh": "RF warning: {0}",
- "GlobalDescription_en": "RF warning: {0}",
- "Module": "PM",
- "Note": "RF warning"
- },
- {
- "Id": 1012,
- "Level": "Error",
- "LogEnum": "ERR_ENDPOINT",
- "GlobalDescription_zh": "EndPoint alarm: {0}",
- "GlobalDescription_en": "EndPoint alarm: {0}",
- "Module": "PM",
- "Note": "EndPoint Alarm"
- },
- {
- "Id": 1013,
- "Level": "Info",
- "LogEnum": "INFO_ENDPOINT",
- "GlobalDescription_zh": "EndPoint log: {0}",
- "GlobalDescription_en": "EndPoint log: {0}",
- "Module": "PM",
- "Note": "EndPoint log"
- },
- {
- "Id": 1014,
- "Level": "Warning",
- "LogEnum": "WARN_ENDPOINT",
- "GlobalDescription_zh": "EndPoint warning: {0}",
- "GlobalDescription_en": "EndPoint warning: {0}",
- "Module": "PM",
- "Note": "EndPoint warning"
- },
- {
- "Id": 1015,
- "Level": "Error",
- "LogEnum": "ERR_BACKSIDE_HE",
- "GlobalDescription_zh": "BacksideHelium alarm: {0}",
- "GlobalDescription_en": "BacksideHelium alarm: {0}",
- "Module": "PM",
- "Note": "BacksideHelium Alarm"
- },
- {
- "Id": 1016,
- "Level": "Info",
- "LogEnum": "INFO_BACKSIDE_HE",
- "GlobalDescription_zh": "BacksideHelium log: {0}",
- "GlobalDescription_en": "BacksideHelium log: {0}",
- "Module": "PM",
- "Note": "BacksideHelium log"
- },
- {
- "Id": 1017,
- "Level": "Warning",
- "LogEnum": "WARN_BACKSIDE_HE",
- "GlobalDescription_zh": "BacksideHelium warning: {0}",
- "GlobalDescription_en": "BacksideHelium warning: {0}",
- "Module": "PM",
- "Note": "BacksideHelium warning"
- },
- {
- "Id": 1018,
- "Level": "Error",
- "LogEnum": "ERR_PROCESS",
- "GlobalDescription_zh": "Process alarm: {0}",
- "GlobalDescription_en": "Process alarm: {0}",
- "Module": "PM",
- "Note": "Process Alarm"
- },
- {
- "Id": 1019,
- "Level": "Info",
- "LogEnum": "INFO_PROCESS",
- "GlobalDescription_zh": "Process log: {0}",
- "GlobalDescription_en": "Process log: {0}",
- "Module": "PM",
- "Note": "Process log"
- },
- {
- "Id": 1020,
- "Level": "Warning",
- "LogEnum": "WARN_PROCESS",
- "GlobalDescription_zh": "Process warning: {0}",
- "GlobalDescription_en": "Process warning: {0}",
- "Module": "PM",
- "Note": "Process warning"
- },
- {
- "Id": 1021,
- "Level": "Error",
- "LogEnum": "ERR_IoGasValve",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "IoGasValve Error"
- },
- {
- "Id": 1022,
- "Level": "Warning",
- "LogEnum": "WARN_State",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "State warning"
- },
- {
- "Id": 1023,
- "Level": "Error",
- "LogEnum": "ERR_PM",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "PM Alarm"
- },
- {
- "Id": 1024,
- "Level": "Info",
- "LogEnum": "INFO_PM",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "PM INFO"
- },
- {
- "Id": 1025,
- "Level": "Warning",
- "LogEnum": "WARN_PM",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "PM warning"
- },
- {
- "Id": 1026,
- "Level": "Info",
- "LogEnum": "INFO_Sensor",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "Sensor log"
- },
- {
- "Id": 1027,
- "Level": "Warning",
- "LogEnum": "WARN_Sensor",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "Sensor warning"
- },
- {
- "Id": 1028,
- "Level": "Error",
- "LogEnum": "ERR_Sensor",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "Sensor Error"
- },
- {
- "Id": 1029,
- "Level": "Info",
- "LogEnum": "INFO_FA",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "FA",
- "Note": "FA INFO"
- },
- {
- "Id": 1030,
- "Level": "Info",
- "LogEnum": "INFO_IOCYLINDER",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "Cylinder INFO"
- },
- {
- "Id": 1031,
- "Level": "Info",
- "LogEnum": "INFO_IO_VALVE",
- "GlobalDescription_zh": "IO Valve: {0}",
- "GlobalDescription_en": "IO Valve: {0}",
- "Module": "PM",
- "Note": "IO Valve: Info"
- },
- {
- "Id": 1032,
- "Level": "Warning",
- "LogEnum": "WARN_IO_VALVE",
- "GlobalDescription_zh": "IO Valve: {0}",
- "GlobalDescription_en": "IO Valve: {0}",
- "Module": "PM",
- "Note": "IO Valve: Warning"
- },
- {
- "Id": 1033,
- "Level": "Error",
- "LogEnum": "ERR_IO_VALVE",
- "GlobalDescription_zh": "IO Valve: {0}",
- "GlobalDescription_en": "IO Valve: {0}",
- "Module": "PM",
- "Note": "IO Valve: Alarm"
- },
- {
- "Id": 1034,
- "Level": "Error",
- "LogEnum": "ERR_MATCH",
- "GlobalDescription_zh": "MATCH error: {0}",
- "GlobalDescription_en": "MATCH error: {0}",
- "Module": "PM",
- "Note": "MATCH Alarm"
- },
- {
- "Id": 1035,
- "Level": "Warning",
- "LogEnum": "WARN_MATCH",
- "GlobalDescription_zh": "MATCH warning: {0}",
- "GlobalDescription_en": "MATCH warning: {0}",
- "Module": "PM",
- "Note": "MATCH Alarm"
- },
- {
- "Id": 1036,
- "Level": "Info",
- "LogEnum": "INFO_MATCH",
- "GlobalDescription_zh": "MATCH Info: {0}",
- "GlobalDescription_en": "MATCH Info: {0}",
- "Module": "PM",
- "Note": "MATCH Info"
- },
- {
- "Id": 1037,
- "Level": "Info",
- "LogEnum": "INFO_RF",
- "GlobalDescription_zh": "RF info: {0}",
- "GlobalDescription_en": "RF info: {0}",
- "Module": "PM",
- "Note": "RF info"
- },
- {
- "Id": 1038,
- "Level": "Info",
- "LogEnum": "INFO_RFBox",
- "GlobalDescription_zh": "RFBox Info: {0}",
- "GlobalDescription_en": "RFBox Info: {0}",
- "Module": "PM",
- "Note": "RFBox Info"
- },
- {
- "Id": 1039,
- "Level": "Warning",
- "LogEnum": "WARN_RFBox",
- "GlobalDescription_zh": "RFBox Warning: {0}",
- "GlobalDescription_en": "RFBox Warning: {0}",
- "Module": "PM",
- "Note": "RFBox Warning"
- },
- {
- "Id": 1040,
- "Level": "Error",
- "LogEnum": "ERR_RFBox",
- "GlobalDescription_zh": "RFBox Error: {0}",
- "GlobalDescription_en": "RFBox Error: {0}",
- "Module": "PM",
- "Note": "RFBox Error"
- },
- {
- "Id": 1041,
- "Level": "Info",
- "LogEnum": "INFO_HighTemperatureHeater",
- "GlobalDescription_zh": "HighTemperatureHeater Info: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Info: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Info"
- },
- {
- "Id": 1042,
- "Level": "Warning",
- "LogEnum": "WARN_HighTemperatureHeater",
- "GlobalDescription_zh": "HighTemperatureHeater Warning: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Warning: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Warning"
- },
- {
- "Id": 1043,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater",
- "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Error"
- },
- {
- "Id": 1044,
- "Level": "Warning",
- "LogEnum": "WARN_PM_TOLERANCE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "PM Tolerance Warning"
- },
- {
- "Id": 1045,
- "Level": "Error",
- "LogEnum": "ERR_PM_TOLERANCE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "PM Tolerance Error"
- },
- {
- "Id": 1046,
- "Level": "Error",
- "LogEnum": "ERR_PM_PLC_HEARTBEAT_FAIL",
- "GlobalDescription_zh": "{0}心跳停止,判PLC运行失败,请检查PLC运行情况。",
- "GlobalDescription_en": "{0}HeatBeat Stop,PLC status error, please check it",
- "Module": "PM",
- "Note": "Invalid config"
- },
- {
- "Id": 1050,
- "Level": "Error",
- "LogEnum": "ERR_PM_PROCESSNOWAFER",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "PM PROCESS NO WAFER"
- },
- {
- "Id": 1051,
- "Level": "Error",
- "LogEnum": "ERR_PM_CLEANWITHWAFER",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "PM CLEAN WITH WAFER"
- },
- {
- "Id": 1052,
- "Level": "Error",
- "LogEnum": "ERR_PM_SCRUBBER_NOOK_STOPPROCESS",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "PM SCRUBBER Alarm"
- },
- {
- "Id": 1053,
- "Level": "Error",
- "LogEnum": "ERR_PM_SCRUBBER_NOOK_CONTINUEPROCESS",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "PM SCRUBBER Alarm"
- },
- {
- "Id": 1054,
- "Level": "Warning",
- "LogEnum": "WARN_PM_SCRUBBER_NOOK",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "PM SCRUBBER Warning"
- },
- {
- "Id": 1100,
- "Level": "Info",
- "LogEnum": "INFO_RF_Connect",
- "GlobalDescription_zh": "{0} 连接成功,连接信息: {1}",
- "GlobalDescription_en": "{0} 连接成功,连接信息: {1}",
- "Module": "PM",
- "Note": "RF Connect Success"
- },
- {
- "Id": 1101,
- "Level": "Error",
- "LogEnum": "ERR_RF_Connect",
- "GlobalDescription_zh": "{0} 连接失败,连接信息: {1}",
- "GlobalDescription_en": "{0} 连接失败,连接信息: {1}",
- "Module": "PM",
- "Note": "RF Connect Failed"
- },
- {
- "Id": 1102,
- "Level": "Error",
- "LogEnum": "ERR_RF_WaterFlow",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "RF stop power"
- },
- {
- "Id": 1103,
- "Level": "Error",
- "LogEnum": "ERR_RF_RFGInterlock",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "RF stop power"
- },
- {
- "Id": 1104,
- "Level": "Error",
- "LogEnum": "ERR_RF_GASOFF",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "RF stop power"
- },
- {
- "Id": 1180,
- "Level": "Error",
- "LogEnum": "ERR_PV_INTERLOCK_FORELINRPRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "Pendulum Valve Error"
- },
- {
- "Id": 1182,
- "Level": "Error",
- "LogEnum": "ERR_PV_INTERLOCK_TURBOPUMPNOTATSPEED",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "Pendulum Valve Error"
- },
- {
- "Id": 1183,
- "Level": "Error",
- "LogEnum": "ERR_PV_PARITY",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "Pendulum Valve Error"
- },
- {
- "Id": 1220,
- "Level": "Error",
- "LogEnum": "ERR_MFC_MFC1FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC1 FLOW OVER RANGE"
- },
- {
- "Id": 1221,
- "Level": "Error",
- "LogEnum": "ERR_MFC_MFC2FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC2 FLOW OVER RANGE"
- },
- {
- "Id": 1222,
- "Level": "Error",
- "LogEnum": "ERR_MFC_MFC3FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC3 FLOW OVER RANGE"
- },
- {
- "Id": 1223,
- "Level": "Error",
- "LogEnum": "ERR_MFC_MFC4FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC4 FLOW OVER RANGE"
- },
- {
- "Id": 1224,
- "Level": "Error",
- "LogEnum": "ERR_MFC_MFC5FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC5 FLOW OVER RANGE"
- },
- {
- "Id": 1225,
- "Level": "Error",
- "LogEnum": "ERR_MFC_MFC6FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC6 FLOW OVER RANGE"
- },
- {
- "Id": 1226,
- "Level": "Error",
- "LogEnum": "ERR_MFC_MFC7FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC7 FLOW OVER RANGE"
- },
- {
- "Id": 1227,
- "Level": "Error",
- "LogEnum": "ERR_MFC_MFC8FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC8 FLOW OVER RANGE"
- },
- {
- "Id": 1228,
- "Level": "Error",
- "LogEnum": "ERR_MFC_N2FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "N2 FLOW OVER RANGE"
- },
- {
- "Id": 1229,
- "Level": "Error",
- "LogEnum": "ERR_MFC1_PRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC1 PRESSURE"
- },
- {
- "Id": 1230,
- "Level": "Error",
- "LogEnum": "ERR_MFC2_PRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC2 PRESSURE"
- },
- {
- "Id": 1231,
- "Level": "Error",
- "LogEnum": "ERR_MFC3_PRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC3 PRESSURE"
- },
- {
- "Id": 1232,
- "Level": "Error",
- "LogEnum": "ERR_MFC4_PRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC4 PRESSURE"
- },
- {
- "Id": 1233,
- "Level": "Error",
- "LogEnum": "ERR_MFC5_PRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC5 PRESSURE"
- },
- {
- "Id": 1234,
- "Level": "Error",
- "LogEnum": "ERR_MFC6_PRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC6 PRESSURE"
- },
- {
- "Id": 1235,
- "Level": "Error",
- "LogEnum": "ERR_MFC7_PRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC7 PRESSURE"
- },
- {
- "Id": 1238,
- "Level": "Error",
- "LogEnum": "ERR_MFC8_PRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "MFC8 PRESSURE"
- },
- {
- "Id": 1239,
- "Level": "Error",
- "LogEnum": "ERR_N2_PRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "PM",
- "Note": "N2 PRESSURE"
- },
- {
- "Id": 1240,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_SetRatio_OverRange",
- "GlobalDescription_zh": "HighTemperatureHeater Set Ratio Failed, {0} Over Range [{1}-{2}]",
- "GlobalDescription_en": "HighTemperatureHeater Set Ratio Failed, {0} Over Range [{1}-{2}]",
- "Module": "PM",
- "Note": "HighTemperatureHeater Set Ratio Failed"
- },
- {
- "Id": 1241,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_SetTemperature_OverRange",
- "GlobalDescription_zh": "HighTemperatureHeater Set Temperature Failed, {0} Over Range [{1}-{2}]",
- "GlobalDescription_en": "HighTemperatureHeater Set Temperature Failed, {0} Over Range [{1}-{2}]",
- "Module": "PM",
- "Note": "HighTemperatureHeater Set Temperature Failed"
- },
- {
- "Id": 1242,
- "Level": "Warning",
- "LogEnum": "WARN_HighTemperatureHeater_N2",
- "GlobalDescription_zh": "Gas Box N2 Flow Trigger Warning,HighTemperatureHeater Cool Down to {0} ℃,Current Purge N2 Flow {1} sccm",
- "GlobalDescription_en": "Gas Box N2 Flow Trigger Warning,HighTemperatureHeater Cool Down to {0} ℃,Current Purge N2 Flow {1} sccm",
- "Module": "PM",
- "Note": "HighTemperatureHeater N2 Warning"
- },
- {
- "Id": 1246,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_GoPosition1TimeOut",
- "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Error"
- },
- {
- "Id": 1247,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_GoPosition2TimeOut",
- "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Error"
- },
- {
- "Id": 1248,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_GoPosition3TimeOut",
- "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Error"
- },
- {
- "Id": 1249,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_GoPosition4TimeOut",
- "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Error"
- },
- {
- "Id": 1250,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_GoPosition5TimeOut",
- "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Error"
- },
- {
- "Id": 1251,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_TransferPosition",
- "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Error"
- },
- {
- "Id": 1252,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_LiftDriverAlarm",
- "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Error"
- },
- {
- "Id": 1253,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_LiftPosiModuleAlarm",
- "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Error"
- },
- {
- "Id": 1254,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_LiftORGAlarm",
- "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Error"
- },
- {
- "Id": 1255,
- "Level": "Error",
- "LogEnum": "ERR_HighTemperatureHeater_GoOriginTimeOut",
- "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
- "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
- "Module": "PM",
- "Note": "HighTemperatureHeater Error"
- },
- {
- "Id": 1260,
- "Level": "Info",
- "LogEnum": "INFO_DEVICE_IO_MAGNET",
- "GlobalDescription_zh": "IO Magnet Log: {0}",
- "GlobalDescription_en": "IO Magnet Log: {0}",
- "Module": "PM",
- "Note": "IO Magnet Info"
- },
- {
- "Id": 2000,
- "Level": "Error",
- "LogEnum": "ERR_TM",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2001,
- "Level": "Info",
- "LogEnum": "INFO_TM",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "TM",
- "Note": "TM INFO"
- },
- {
- "Id": 2002,
- "Level": "Warning",
- "LogEnum": "WARN_TM",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "TM",
- "Note": "TM warning"
- },
- {
- "Id": 2003,
- "Level": "Error",
- "LogEnum": "ERR_TM_MFC1FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2004,
- "Level": "Error",
- "LogEnum": "ERR_TM_MFCPRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2005,
- "Level": "Error",
- "LogEnum": "ERR_TM_PLC_HEARTBEAT_FAIL",
- "GlobalDescription_zh": "{0}心跳停止,判PLC运行失败,请检查PLC运行情况。",
- "GlobalDescription_en": "{0}HeatBeat Stop,PLC status error, please check it",
- "Module": "TM",
- "Note": "TM HEARTBEAT ERROR"
- },
- {
- "Id": 2100,
- "Level": "Error",
- "LogEnum": "ERR_TM_ROBOT",
- "GlobalDescription_zh": "TM Robot receive an error:{0}",
- "GlobalDescription_en": "TM Robot receive an error:{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2101,
- "Level": "Info",
- "LogEnum": "INFO_TM_ROBOT",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "TM",
- "Note": "TM Info"
- },
- {
- "Id": 2102,
- "Level": "Error",
- "LogEnum": "ERR_TM_ROBOT_PICKSLOTOVERRANGE",
- "GlobalDescription_zh": "TM Robot receive an error:{0}",
- "GlobalDescription_en": "TM Robot receive an error:{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2103,
- "Level": "Error",
- "LogEnum": "ERR_TM_ROBOT_PLACESLOTOVERRange",
- "GlobalDescription_zh": "TM Robot receive an error:{0}",
- "GlobalDescription_en": "TM Robot receive an error:{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2104,
- "Level": "Error",
- "LogEnum": "ERR_TM_ROBOT_SETINTLOCKWAF_SEN",
- "GlobalDescription_zh": "TM Robot receive an error:{0}",
- "GlobalDescription_en": "TM Robot receive an error:{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2105,
- "Level": "Error",
- "LogEnum": "ERR_TM_ROBOT_SETINTLOCKRZ",
- "GlobalDescription_zh": "TM Robot receive an error:{0}",
- "GlobalDescription_en": "TM Robot receive an error:{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2106,
- "Level": "Error",
- "LogEnum": "ERR_TM_ROBOT_SETINTLOCK",
- "GlobalDescription_zh": "TM Robot receive an error:{0}",
- "GlobalDescription_en": "TM Robot receive an error:{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2107,
- "Level": "Error",
- "LogEnum": "ERR_TM_ROBOT_SETIOECHO",
- "GlobalDescription_zh": "TM Robot receive an error:{0}",
- "GlobalDescription_en": "TM Robot receive an error:{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2108,
- "Level": "Error",
- "LogEnum": "ERR_TM_ROBOT_SETIOSTATE",
- "GlobalDescription_zh": "TM Robot receive an error:{0}",
- "GlobalDescription_en": "TM Robot receive an error:{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2109,
- "Level": "Error",
- "LogEnum": "ERR_TM_ROBOT_LLAWCOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 2110,
- "Level": "Error",
- "LogEnum": "ERR_TM_ROBOT_PMAWCOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "TM",
- "Note": "TM Alarm"
- },
- {
- "Id": 4000,
- "Level": "Info",
- "LogEnum": "EV_EFEM_COMMON_INFO",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM Notify"
- },
- {
- "Id": 4001,
- "Level": "Warning",
- "LogEnum": "WARN_EFEM_COMMON_WARN",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM Warning"
- },
- {
- "Id": 4002,
- "Level": "Error",
- "LogEnum": "ERR_EFEM_COMMON_FAILED",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM Failed"
- },
- {
- "Id": 4003,
- "Level": "Error",
- "LogEnum": "ERR_EFEM_VAC_SOURCE_PRESSURE_LOW",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM SYSTEM Failed"
- },
- {
- "Id": 4004,
- "Level": "Error",
- "LogEnum": "ERR_EFEM_IONIZER_COMPRESSED_AIR",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM SYSTEM Failed"
- },
- {
- "Id": 4005,
- "Level": "Error",
- "LogEnum": "ERR_EFEM_COMPRESSED_AIR_PRESSURE_LOW",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM SYSTEM Failed"
- },
- {
- "Id": 4006,
- "Level": "Error",
- "LogEnum": "ERR_EFEM_FLOW_GUAGE_SENSOR",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM SYSTEM Failed"
- },
- {
- "Id": 4007,
- "Level": "Error",
- "LogEnum": "ERR_EFEM_LEAKAGE",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM SYSTEM Failed"
- },
- {
- "Id": 4008,
- "Level": "Error",
- "LogEnum": "ERR_EFEM_IONIZER",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM SYSTEM Failed"
- },
- {
- "Id": 4009,
- "Level": "Error",
- "LogEnum": "ERR_EFEM_FFU",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM SYSTEM Failed"
- },
- {
- "Id": 4010,
- "Level": "Error",
- "LogEnum": "ERR_EFEM_SWITCH_TO_MAINTAIN_MODE",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM SYSTEM Failed"
- },
- {
- "Id": 4100,
- "Level": "Info",
- "LogEnum": "EV_EFEM_ROBOT",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM Notify"
- },
- {
- "Id": 4101,
- "Level": "Warning",
- "LogEnum": "WARN_EFEM_ROBOT",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM Warning"
- },
- {
- "Id": 4102,
- "Level": "Error",
- "LogEnum": "ERR_EFEM_ROBOT",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "EFEM",
- "Note": "EFEM Failed"
- },
- {
- "Id": 4200,
- "Level": "Info",
- "LogEnum": "EV_VCE_COMMON_INFO",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "VCE",
- "Note": "VCE Notify"
- },
- {
- "Id": 4201,
- "Level": "Warning",
- "LogEnum": "WARN_VCE_COMMON_WARN",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "VCE",
- "Note": "VCE Warning"
- },
- {
- "Id": 4202,
- "Level": "Error",
- "LogEnum": "ERR_VCE_COMMON_Failed",
- "GlobalDescription_zh": "{0}。",
- "GlobalDescription_en": "{0}.",
- "Module": "VCE",
- "Note": "VCE Failed"
- },
- {
- "Id": 5003,
- "Level": "Error",
- "LogEnum": "ERR_FA",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "FA",
- "Note": "FA Alarm"
- },
- {
- "Id": 5004,
- "Level": "Warning",
- "LogEnum": "WARN_FA",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "FA",
- "Note": "FA warning"
- },
- {
- "Id": 6000,
- "Level": "Error",
- "LogEnum": "ERR_LL",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "LL",
- "Note": "LL Alarm"
- },
- {
- "Id": 6001,
- "Level": "Info",
- "LogEnum": "INFO_LL",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "LL",
- "Note": "LL INFO"
- },
- {
- "Id": 6002,
- "Level": "Warning",
- "LogEnum": "WARN_LL",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "LL",
- "Note": "LL warning"
- },
- {
- "Id": 6003,
- "Level": "Error",
- "LogEnum": "ERR_LLA_MFC1FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "LL",
- "Note": "LLA Alarm"
- },
- {
- "Id": 6004,
- "Level": "Error",
- "LogEnum": "ERR_LLB_MFC1FLOWOVERRANGE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "LL",
- "Note": "LLB Alarm"
- },
- {
- "Id": 6005,
- "Level": "Error",
- "LogEnum": "ERR_LLA_MFCPRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "LL",
- "Note": "LLA Alarm"
- },
- {
- "Id": 6006,
- "Level": "Error",
- "LogEnum": "ERR_LLB_MFCPRESSURE",
- "GlobalDescription_zh": "{0}",
- "GlobalDescription_en": "{0}",
- "Module": "LL",
- "Note": "LLB Alarm"
- },
- {
- "Id": 8888,
- "Level": "Info",
- "LogEnum": "INFO_TROUGHPUT_ENHANCE_TRACE",
- "GlobalDescription_zh": "Throughput enhancement: {0}",
- "GlobalDescription_en": "Throughput enhancement: {0}",
- "Module": "System",
- "Note": "Throughput enhancement: "
- }
- ]
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