123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354 |
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_Core;
- using Venus_RT.Modules.PMs;
- using Aitex.Core.RT.Log;
- namespace Venus_RT.Modules
- {
- class RouteManager : Entity, IEntity
- {
- public enum MSG
- {
- MoveWafer,
- ReturnWafer,
- HomeUnit,
- PauseAuto,
- ResumeAuto,
- Stop,
- StartCycle,
- HOME,
- RESET,
- ABORT,
- ERROR,
- SetAutoMode,
- SetManualMode,
- ResetIdleCleanTime,
- ResetIdlePurgeTime,
- CreateJob,
- PauseJob,
- ResumeJob,
- StartJob,
- StopJob,
- AbortJob,
- JobDone,
- CassetteLeave, //For unload light control off afer job done
- Map,
- ReturnAllWafer,
- TMCycle,
- }
- public PMEntity PMA { get; private set; }
- public PMEntity PMB { get; private set; }
- public PMEntity PMC { get; private set; }
- public PMEntity PMD { get; private set; }
- public TMEntity TM { get; private set; }
- public LLEntity LLA { get; private set; }
- public LLEntity LLB { get; private set; }
- public EfemEntity EFEM { get; private set; }
- public string Name { get; set; }
- private TMCycle _TMCycle;
- public RouteManager()
- {
- Name = "System";
- if (ModuleHelper.IsInstalled(ModuleName.PMA))
- PMA = new PMEntity(ModuleName.PMA);
- if (ModuleHelper.IsInstalled(ModuleName.PMB))
- PMB = new PMEntity(ModuleName.PMB);
- if (ModuleHelper.IsInstalled(ModuleName.PMC))
- PMC = new PMEntity(ModuleName.PMC);
- if (ModuleHelper.IsInstalled(ModuleName.PMD))
- PMD = new PMEntity(ModuleName.PMD);
- if (ModuleHelper.IsInstalled(ModuleName.TM))
- TM = new TMEntity();
- if (ModuleHelper.IsInstalled(ModuleName.LLA))
- LLA = new LLEntity(ModuleName.LLA);
- if (ModuleHelper.IsInstalled(ModuleName.LLB))
- LLB = new LLEntity(ModuleName.LLB);
- fsm = new StateMachine<RouteManager>(Name, (int)RtState.Init, 200);
- SubscribeOperation();
- }
- public bool Check(int msg, out string reason, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- reason = String.Format("{0} is in {1} state,can not do {2}", Name, 0, (MSG)msg);
- return false;
- }
- if (msg == (int)MSG.StartCycle)
- {
- //if (!IsAutoMode)
- {
- reason = String.Format("can not do {0}, isn't auto mode.", msg.ToString());
- return false;
- }
- }
- reason = "";
- return true;
- }
- void SubscribeOperation()
- {
- OP.Subscribe("CreateWafer", InvokeCreateWafer);
- OP.Subscribe("DeleteWafer", InvokeDeleteWafer);
- }
- private bool InvokeCreateWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- WaferStatus state = WaferStatus.Normal;
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot));
- }
- else if (WaferManager.Instance.CreateWafer(chamber, slot, state) != null)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());
- }
- }
- else
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- return true;
- }
- private bool InvokeDeleteWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- WaferManager.Instance.DeleteWafer(chamber, slot);
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDelete, chamber.ToString(), slot + 1);
- }
- else
- {
- EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, delete not valid", chamber.ToString(), slot + 1));
- }
- }
- else
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- return true;
- }
- public PMEntity GetPM(ModuleName mod)
- {
- if (ModuleHelper.IsInstalled(mod))
- {
- switch (mod)
- {
- case ModuleName.PMA:
- return PMA;
- case ModuleName.PMB:
- return PMB;
- case ModuleName.PMC:
- return PMC;
- case ModuleName.PMD:
- return PMD;
- }
- }
- return null;
- }
- public LLEntity GetLL(ModuleName mod)
- {
- if (ModuleHelper.IsInstalled(mod))
- {
- switch (mod)
- {
- case ModuleName.LLA:
- return LLA;
- case ModuleName.LLB:
- return LLB;
- }
- }
- return null;
- }
-
- protected override bool Init()
- {
- PMA?.Initialize();
- PMB?.Initialize();
- TM?.Initialize();
- LLA?.Initialize();
- LLB?.Initialize();
- _TMCycle = new TMCycle();
- BuildTransitionTable();
- return true;
- }
- private void BuildTransitionTable()
- {
- fsm = new StateMachine<RouteManager>(ModuleName.System.ToString(), (int)RtState.Init, 50);
- //Init sequence
- Transition(RtState.Init, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Idle, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Error, MSG.HOME, FsmStartHome, RtState.Initializing);
- //// EnterExitTransition<RtState, FSM_MSG>(RtState.Initializing, fStartInit, FSM_MSG.NONE, null);
- ///
- Transition(RtState.Idle, FSM_MSG.TIMER, FsmMonitor, RtState.Idle);
- Transition(RtState.Init, FSM_MSG.TIMER, FsmMonitor, RtState.Init);
- Transition(RtState.Initializing, FSM_MSG.TIMER, FsmMonitorHome, RtState.Idle);
- Transition(RtState.Initializing, MSG.ERROR, FsmError, RtState.Error);
- Transition(RtState.Initializing, MSG.ABORT, FsmAbort, RtState.Init);
- // TM Cycle
- Transition(RtState.Idle, MSG.TMCycle, FsmStartTMCycle, RtState.TMCycle);
- Transition(RtState.TMCycle, FSM_MSG.TIMER, FsmMonitorTMCycle, RtState.Idle);
- Transition(RtState.TMCycle, MSG.ABORT, FsmAbort, RtState.Idle);
- }
- private bool FsmMonitor(object[] objs)
- {
- _debugRoutine();
- return true;
- }
- private bool FsmStartHome(object[] objs)
- {
- PMA?.Invoke("Home");
- PMB?.Invoke("Home");
- PMC?.Invoke("Home");
- PMD?.Invoke("Home");
- TM?.Invoke("Home");
- LLA?.Invoke("Home");
- LLB?.Invoke("Home");
- return true;
- }
- private bool FsmMonitorHome(object[] objs)
- {
- bool CheckHomed(string name, bool bValid, bool bDone)
- {
- if (bValid && !bDone)
- {
- if (fsm.ElapsedTime > 20 * 1000)
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"{name} home timeout");
- PostMsg(MSG.ERROR);
- return true;
- }
- else
- return false;
- }
- return true;
- }
- return CheckHomed("PMA", PMA != null, PMA != null&&PMA.IsIdle) &&
- CheckHomed("PMB", PMB != null, PMB != null&&PMA.IsIdle) &&
- CheckHomed("PMC", PMC != null, PMC != null&&PMC.IsIdle) &&
- CheckHomed("PMD", PMD != null, PMD != null&&PMD.IsIdle) &&
- CheckHomed("LLA", LLA != null, LLA != null&&LLA.IsIdle) &&
- CheckHomed("LLB", LLB != null, LLB != null&&LLB.IsIdle) &&
- CheckHomed("TM", TM != null, TM != null&&TM.IsIdle);
- }
- private bool FsmError(object[] objs)
- {
- return true;
- }
- private bool FsmAbort(object[] objs)
- {
- return true;
- }
- private bool FsmStartTMCycle(object[] objs)
- {
- return _TMCycle.Start() == RState.Running;
- }
- private bool FsmMonitorTMCycle(object[] objs)
- {
- RState ret = _TMCycle.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.ERROR);
- return false;
- }
- return ret == RState.End;
- }
- private void _debugRoutine()
- {
- int flag = 0;
- // Test Home routine
- if (flag == 1)
- {
- PostMsg(MSG.HOME);
- }
- else if (flag == 2)
- {
- PostMsg(MSG.TMCycle);
- }
- }
- }
- }
|