Kepler-Release/Venus/Venus_RT/Config/System.sccfg

<?xml version="1.0" encoding="utf-8"?>
<root system="Venus">
	<configs name="System" nameView="System">
		<config default="True" name="IsSimulatorMode" nameView="Simulator Mode" description="仿真模式" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
		<config default="true" name="IsOpenIOEdit" nameView="Simulator Mode" description="RT IO修改开关" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
		<config default="True" name="IsOpenDebugLog" nameView="" description="Debug Log" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
		<config default="false" name="IsATMMode" nameView="ATM Mode" description="大气压传送测试模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="false" name="IsCycleMode" nameView="Cycle Mode" description="循环跑片模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="3" name="CycleCount" nameView="Cycle Count" description="循环次数" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
		<config default="5" name="ATMCyclePMDelayTime" nameView="ATM Cycle PM Delay Time" description="ATM循环测试取片延时时间" max="9999" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
		<config default="25" name="MaxTemperatureToleranceTransferWafer" nameView="Max Temperature Tolerance Transfer Wafer" description="传片最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
		<config default="1" name="MaxTemperatureToleranceToTarget" nameView="Max Temperature Tolerance To Target" description="工艺最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
		<!--<config default="30" name="DefaultCoolingTime" nameView="Default Cooling Time" description="晶圆默认冷却时间" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />-->
		<config default="true" name="DisplayPopDialogWhenJobComplete" nameView="Pop Dialog When Job Complete" description="是否弹出Job结束对话框" max="" min="" paramter="" tag="" unit="" type="Bool" />
		<config default="100" name="PMLLMaxPressureDifference" nameView="Max PM/LL Pressure difference for open slit valve" description="" max="500" min="20" paramter="" tag="" unit="mtorr" type="Double" />
		<config default="100" name="TMLLMaxPressureDifference" nameView="Max TM/LL Pressure difference for open slit valve" description="" max="500" min="20" paramter="" tag="" unit="mtorr" type="Double" />
		<config default="LLA,PMA" name="InstalledModules" description="安装的模块" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
		<config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="系统可允许进入的wafer数" max="8" min="1" paramter="" tag="" unit="" visible="true" type="Integer" />
		<config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="" max="200" min="0" paramter="" tag="" unit="mtorr" type="Double" />

		<!--FA-->
		<configs name="FA" nameView="FA" visible="false">
			<config default="Passive" name="ConnectionMode" nameView="Connection Mode" description="Passive  Active" max="0" min="0" paramter="" tag="" unit="" type="String" />
			<config default="127.0.0.1" name="LocalIpAddress" nameView="Local Ip Address" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
			<config default="5000" name="LocalPortNumber" nameView="Local Port Number" description="LocalPortNumber" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="127.0.0.1" name="RemoteIpAddress" nameView="Remote Ip Address" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
			<config default="5001" name="RemotePortNumber" nameView="Remote Port Number" description=" " max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="45" name="T3Timeout" nameView="T3 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="10" name="T5Timeout" nameView="T5 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="5" name="T6Timeout" nameView="T6 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="10" name="T7Timeout" nameView="T7 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="5" name="T8Timeout" nameView="T8 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="false" name="EnableSpooling" nameView="Enable Spooling" description="EnableSpooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="30" name="LinkTestInterval" nameView="Link Test Interval" description="LinkTestInterval" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="0" name="DeviceId" nameView="Device Id" description="DeviceId" max="0" min="0" paramter="" tag="" unit="" type="String" />

			<config default="true" name="DefaultToOnline" nameView="Change to online when FA connected" description="Change to online when FA connected" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="true" name="DefaultToRemote" nameView="Change to remote when FA connected" description="Change to remote when FA connected" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
		</configs>

		<configs name="SetUp" nameView="Set Up" visible="false">
			<config default="true" name="EPDInstalled" nameView="Is EPD installed" description="EPD是否安装" max="" min="" paramter="" tag="" unit="" type="Bool" />
		</configs>

		<configs name="EndPoint" nameView="EndPoint" visible="false">
			<config default="ExposureTime=222;WaveLengthA=2;BinningA=3;WaveLengthB=4;BinningB=6;WaveLengthC=5;BinningC=8;WaveLengthD=7;BinningD=9;Fd=1;PrefilterTime=2;PostfilterTime=3;AlgorithmType=Valley;Criteria=4;DelayTime=5;ValidationTime=6;ValidationValue=7;TimeWindow=8;MinimalTime=9;PostponeTime=10;Control=True;Normalization=True;EnablePostponePercent=True;EnableCriterialPercent=True;EnableEventTrigger=True;IsFaultIfNoTrigger=True;" name="EndPointDefaultValue" nameView="EndPoint Default Value" description="EndPoint Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="false" />
		</configs>


		<configs name="FDC" nameView="FDC">
			<config default="Fdc" name="DataGroupName"  nameView="FDC Data group" description="FDC data group, defined in DataGroup.xml" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
			<config default="1000" name="DelayTime"  nameView="FDC Sample Delay Time" description="Step Delay time before collection FDC data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
			<config default="100" name="SampleInterval" nameView="FDC Sample Interval" description="interval time collection FDC sample data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		</configs>

		<configs name="WaferThickness" nameView="WaferThickness" visible="false">
			<config default="true" name="EnableThickness" nameView="Is active thickness functions" description="是否有厚片薄片功能" max="" min="" paramter="" tag="" unit="" type="Bool" />

			<config default="Thin" name="LP1WaferThicknessType" nameView="LP1 wafer thickness type" description="Thin；Thick" max="" min="" paramter="" tag="" unit="0" type="String" />
			<config default="Thick" name="LP2WaferThicknessType" nameView="LP2 wafer thickness type" description="Thin；Thick" max="" min="" paramter="" tag="" unit="0" type="String" />
		</configs>

		<configs name="Job" nameView="Job"  >
			<config default="10" name="BuzzerTimeWhenJobDone" nameView="Buzzer Time When Job Done"  description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
	</configs>


	<!--Router-->
	<configs name="Scheduler" nameView="Scheduler" >
		<config default="true" name="GroupWaferBySequence" nameView="Group Wafer By Sequence" description="GroupWaferBySequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
		<config default="true" name="IsRunInParallelMode" nameView="Is Run In Parallel Mode" description="并行模式1对1，串行模式按顺序" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
	</configs>

	<!--EFEM-->
	<configs name="EFEM" nameView="EFEM">
		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="EFEM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="127.0.0.1:13000" name="IPAddress" nameView="IP Address" description="EFEM IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
		<config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="在自动跑货的时候检查侧门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
		<config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="在自动跑货的时候检查EFEM正门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>


		<config default="1" name="EfemType" nameView="EFEM Type" description="EFEM类型，1=Future广川 2=Jet自制 3=Brooks" max="300" min="1" paramter="" tag="" unit="" type="Integer" />

		<config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="是否自动解锁" max="" min="" paramter="" tag="" unit="" type="Bool" />

		<config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="是否忽略冷却水报警" max="" min="" paramter="" tag="" unit="" type="Bool" />

		<config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="冷却前，lift pin停留多久再落下" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />

		<configs name="LoadPort" nameView="LoadPort" >
			<config default="30" name="MotionTimeout" nameView="Motion Timeout"  description="Motion Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
			<config default="30" name="HomeTimeout" nameView="Home Timeout"  description="LoadPort初始化超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
			<config default="25" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
			<config default="true" name="SlotFromBottom" nameView="Slot number from bottom" description="编号顺序从下往上，最下面的是1" max="" min="" paramter="" tag="" unit="" type="Bool" />

			<config default="false" name="EnableScanner" nameView="Enable Scanner Reader" description="是否打开扫码枪功能" max="0" min="0" paramter="" tag="" unit="" type="Bool" />

		</configs>
	</configs>

	<!--TM-->
	<configs name="TM" nameView="TM">
		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="TM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="TM Robot IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />


		<config default="1" name="TMRobotType" nameView="TM Robot Type" description="TM 类型，1=SIASUN新松 2==Brooks" max="10" min="1" paramter="" tag="" unit="" type="Integer" />

		<config default="1" name="LLAStationNumber" nameView="LLA Station Number" description="LLA Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="2" name="LLBStationNumber" nameView="LLB Station Number" description="LLB Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="3" name="PMAStationNumber" nameView="PMA Station Number" description="PMA Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="4" name="PMBStationNumber" nameView="PMB Station Number" description="PMB Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="5" name="PMCStationNumber" nameView="PMC Station Number" description="PMC Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="6" name="PMDStationNumber" nameView="PMD Station Number" description="PMD Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="7" name="PMEStationNumber" nameView="PME Station Number" description="PME Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="8" name="PMFStationNumber" nameView="PMF Station Number" description="PMF Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />

		<config default="1" name="CheckLoadStation" nameView="Check Load Station Number" description="Station Number for Check Load" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
		
		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="500000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />

		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />

		<config default="120" name="PickTimeout" nameView="Pick Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="120" name="PlaceTimeout" nameView="Place Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="ExtendTimeout" nameView="Extend Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="RetractTimeout" nameView="Retract Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="180" name="SwapTimeout" nameView="Swap Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		
		<configs name="TM_MFC1" nameView="MFC1" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
	</configs>

	<!--LLA-->
	<configs name="LLA" nameView="LLA">
		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="500000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />

		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
		<config default="4" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="" type="Integer" />
	</configs>

	<!--LLB-->
	<configs name="LLB" nameView="LLB">
		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="500000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />

		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
		<config default="4" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="" type="Integer" />
	</configs>

	<!--PMA-->
	<configs name="PMA" nameView="PMA" >
		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="Transfer Wafer Timeout" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
		<config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
		<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="" type="String" />
		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="751" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="" max="2000" min="500" paramter="" tag="" unit="°C" type="Double" />

		<configs name="MFCVerification" nameView="MFC Verification" >
			<config default="1" name="BasePressure" nameView="开始条件：腔体压力达到时开始流气" max="100" min="1" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
			<config default="180" name="PumpingTime" nameView="抽气时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
			<config default="10" name="GasFlowTime" nameView="结束条件：流气多长时间" max="600" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
			<config default="180" name="HoldTime" nameView="Hold 时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
			<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
			<config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
			
			<config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
			<config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
			<config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
			<config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
		</configs>

		<configs name="Chiller" nameView="Chiller" >
			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
			<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM44" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="DryPump" nameView="Dry Pump" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
		<configs name="Rf" nameView="Source RF" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
		</configs>
		<configs name="Match" nameView="Source Match" >
			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<!--<config default="10" name="MatchPositionC1" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
      <config default="10" name="MatchPositionC2" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
		</configs>

		<configs name="BiasRf" nameView="Bias RF" >
			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
		</configs>
		<configs name="BiasMatch" nameView="Bias Match" >
			<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
		</configs>
		<configs name="MfcGas1" nameView="MFC Gas1" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas2" nameView="MFC Gas2" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas3" nameView="MFC Gas3" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas4" nameView="MFC Gas4" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas5" nameView="MFC Gas5" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas6" nameView="MFC Gas6" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas7" nameView="MFC Gas7" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 7 or not" tag="" unit="" type="Bool" />
			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.7 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas8" nameView="MFC Gas8" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 8 or not" tag="" unit="" type="Bool" />
			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.8 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcN2" nameView="MFC N2" >
			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcHe" nameView="MFC He" >
			<config default="true" name="Enable" nameView="Enable" description="Enable He or not" tag="" unit="" type="Bool" />
			<config default="He" name="GasName" nameView="Gas Name" description="Name of He stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="Pump" nameView="Pump" >
			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
			<config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="10" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
			<config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="" max="100" min="0" paramter="" tag="" unit="mTorr" type="Double" />
			<config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="GasLine numbers for Leak Check" tag="" unit="" type="String" />
			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="75" name="RoughPumpDownPressure" description="PM Rough Pumping Pressure" max="200" min="0" paramter="" tag="" unit="Torr" type="Integer" />
			<config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
			<config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
			<config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />
			<config default="30" name="LoadLockPurgeCycleCount" description="LoadLock Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="120" name="LoadLockPurgePumpTime" description="LoadLock Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		    <config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
		</configs>
		<configs name="Purge" nameView="Purge" >
			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
			<config default="75" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="200" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="5" name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="HeaterChamber" nameView="Heater Substrate" >
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
		</configs>

		<configs name="WallHeater" nameView="Heater Wall" >
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
		</configs>

		<configs name="ForelineHeater" nameView="Heater Foreline" >
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
		</configs>

		<configs name="ValveHeater" nameView="Valve Heater" >
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
		</configs>
		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
			<config default="COM64" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
		</configs>
		<configs name="TurboPump" nameView="Turbo Pump">
			<config default="COM62" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
		<configs name="PendulumValve" nameView="Pendulum Valve">
			<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
		</configs>

		<!--Clean-->
		<configs name="IdleClean" nameView="Idle Clean" visible="false">
			<config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		</configs>

		<configs name="JobClean" nameView="Job Clean" visible="false">
			<config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />

			<config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="864000" min="0" paramter="" tag="" unit="s" type="Integer" />

		</configs>


		<configs name="EPD" nameView="EPD Setting">
			<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
		</configs>

	</configs>

	<!--PMB-->
	<configs name="PMB" nameView="PMB" >
		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="Transfer Wafer Timeout" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
		<config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
		<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="" type="String" />
		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
		<config default="751" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="" max="2000" min="500" paramter="" tag="" unit="°C" type="Double" />

		<configs name="MFCVerification" nameView="MFC Verification" >
			<config default="1" name="BasePressure" nameView="开始条件：腔体压力达到时开始流气" max="100" min="1" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
			<config default="180" name="PumpingTime" nameView="抽气时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
			<config default="10" name="GasFlowTime" nameView="结束条件：流气多长时间" max="600" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
			<config default="180" name="HoldTime" nameView="Hold 时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
			<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
			<config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />

			<config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
			<config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
			<config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
			<config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
		</configs>

		<configs name="Chiller" nameView="Chiller" >
			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
			<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM44" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="DryPump" nameView="Dry Pump" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
		<configs name="Rf" nameView="Source RF" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
		</configs>
		<configs name="Match" nameView="Source Match" >
			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<!--<config default="10" name="MatchPositionC1" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
      <config default="10" name="MatchPositionC2" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
		</configs>

		<configs name="BiasRf" nameView="Bias RF" >
			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
		</configs>
		<configs name="BiasMatch" nameView="Bias Match" >
			<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
		</configs>
		<configs name="MfcGas1" nameView="MFC Gas1" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas2" nameView="MFC Gas2" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas3" nameView="MFC Gas3" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas4" nameView="MFC Gas4" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas5" nameView="MFC Gas5" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas6" nameView="MFC Gas6" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas7" nameView="MFC Gas7" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 7 or not" tag="" unit="" type="Bool" />
			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.7 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcGas8" nameView="MFC Gas8" >
			<config default="true" name="Enable" nameView="Enable" description="Enable gas 8 or not" tag="" unit="" type="Bool" />
			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.8 gas stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcN2" nameView="MFC N2" >
			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="MfcHe" nameView="MFC He" >
			<config default="true" name="Enable" nameView="Enable" description="Enable He or not" tag="" unit="" type="Bool" />
			<config default="He" name="GasName" nameView="Gas Name" description="Name of He stick" tag="" unit="" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="Pump" nameView="Pump" >
			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
			<config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="10" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
			<config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="" max="100" min="0" paramter="" tag="" unit="mTorr" type="Double" />
			<config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="GasLine numbers for Leak Check" tag="" unit="" type="String" />
			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="75" name="RoughPumpDownPressure" description="PM Rough Pumping Pressure" max="200" min="0" paramter="" tag="" unit="Torr" type="Integer" />
			<config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
			<config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
			<config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />
			<config default="30" name="LoadLockPurgeCycleCount" description="LoadLock Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
			<config default="120" name="LoadLockPurgePumpTime" description="LoadLock Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
		</configs>
		<configs name="Purge" nameView="Purge" >
			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
			<config default="75" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="200" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="5" name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="HeaterChamber" nameView="Heater Substrate" >
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
		</configs>

		<configs name="WallHeater" nameView="Heater Wall" >
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
		</configs>

		<configs name="ForelineHeater" nameView="Heater Foreline" >
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
		</configs>

		<configs name="ValveHeater" nameView="Valve Heater" >
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
		</configs>
		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
			<config default="COM64" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
		</configs>
		<configs name="TurboPump" nameView="Turbo Pump">
			<config default="COM62" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
		<configs name="PendulumValve" nameView="Pendulum Valve">
			<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
		</configs>

		<!--Clean-->
		<configs name="IdleClean" nameView="Idle Clean" visible="false">
			<config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		</configs>

		<configs name="JobClean" nameView="Job Clean" visible="false">
			<config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
			<config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />

			<config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="864000" min="0" paramter="" tag="" unit="s" type="Integer" />

		</configs>


		<configs name="EPD" nameView="EPD Setting">
			<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
			<config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
		</configs>

	</configs>
</root>