zhouhr 136a0d3727 Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve. 1 년 전
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LoadPrepareRoutine.cs 984e634945 1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure 1 년 전
LoadRoutine.cs c80e520ac1 update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine 1 년 전
LoadWithSMIFRoutine.cs 984e634945 1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure 1 년 전
UnloadRoutine.cs 984e634945 1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure 1 년 전
UnloadWithSMIFRoutine.cs 984e634945 1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure 1 년 전
VceEntity.cs 136a0d3727 Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve. 1 년 전