VenusDispatcher.cs 116 KB

1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950515253545556575859606162636465666768697071727374757677787980818283848586878889909192939495969798991001011021031041051061071081091101111121131141151161171181191201211221231241251261271281291301311321331341351361371381391401411421431441451461471481491501511521531541551561571581591601611621631641651661671681691701711721731741751761771781791801811821831841851861871881891901911921931941951961971981992002012022032042052062072082092102112122132142152162172182192202212222232242252262272282292302312322332342352362372382392402412422432442452462472482492502512522532542552562572582592602612622632642652662672682692702712722732742752762772782792802812822832842852862872882892902912922932942952962972982993003013023033043053063073083093103113123133143153163173183193203213223233243253263273283293303313323333343353363373383393403413423433443453463473483493503513523533543553563573583593603613623633643653663673683693703713723733743753763773783793803813823833843853863873883893903913923933943953963973983994004014024034044054064074084094104114124134144154164174184194204214224234244254264274284294304314324334344354364374384394404414424434444454464474484494504514524534544554564574584594604614624634644654664674684694704714724734744754764774784794804814824834844854864874884894904914924934944954964974984995005015025035045055065075085095105115125135145155165175185195205215225235245255265275285295305315325335345355365375385395405415425435445455465475485495505515525535545555565575585595605615625635645655665675685695705715725735745755765775785795805815825835845855865875885895905915925935945955965975985996006016026036046056066076086096106116126136146156166176186196206216226236246256266276286296306316326336346356366376386396406416426436446456466476486496506516526536546556566576586596606616626636646656666676686696706716726736746756766776786796806816826836846856866876886896906916926936946956966976986997007017027037047057067077087097107117127137147157167177187197207217227237247257267277287297307317327337347357367377387397407417427437447457467477487497507517527537547557567577587597607617627637647657667677687697707717727737747757767777787797807817827837847857867877887897907917927937947957967977987998008018028038048058068078088098108118128138148158168178188198208218228238248258268278288298308318328338348358368378388398408418428438448458468478488498508518528538548558568578588598608618628638648658668678688698708718728738748758768778788798808818828838848858868878888898908918928938948958968978988999009019029039049059069079089099109119129139149159169179189199209219229239249259269279289299309319329339349359369379389399409419429439449459469479489499509519529539549559569579589599609619629639649659669679689699709719729739749759769779789799809819829839849859869879889899909919929939949959969979989991000100110021003100410051006100710081009101010111012101310141015101610171018101910201021102210231024102510261027102810291030103110321033103410351036103710381039104010411042104310441045104610471048104910501051105210531054105510561057105810591060106110621063106410651066106710681069107010711072107310741075107610771078107910801081108210831084108510861087108810891090109110921093109410951096109710981099110011011102110311041105110611071108110911101111111211131114111511161117111811191120112111221123112411251126112711281129113011311132113311341135113611371138113911401141114211431144114511461147114811491150115111521153115411551156115711581159116011611162116311641165116611671168116911701171117211731174117511761177117811791180118111821183118411851186118711881189119011911192119311941195119611971198119912001201120212031204120512061207120812091210121112121213121412151216121712181219122012211222122312241225122612271228122912301231123212331234123512361237123812391240124112421243124412451246124712481249125012511252125312541255125612571258125912601261126212631264126512661267126812691270127112721273127412751276127712781279128012811282128312841285128612871288128912901291129212931294129512961297129812991300130113021303130413051306130713081309131013111312131313141315131613171318131913201321132213231324132513261327132813291330133113321333133413351336133713381339134013411342134313441345134613471348134913501351135213531354135513561357135813591360136113621363136413651366136713681369137013711372137313741375137613771378137913801381138213831384138513861387138813891390139113921393139413951396139713981399140014011402140314041405140614071408140914101411141214131414141514161417141814191420142114221423142414251426142714281429143014311432143314341435143614371438143914401441144214431444144514461447144814491450145114521453145414551456145714581459146014611462146314641465146614671468146914701471147214731474147514761477147814791480148114821483148414851486148714881489149014911492149314941495149614971498149915001501150215031504150515061507150815091510151115121513151415151516151715181519152015211522152315241525152615271528152915301531153215331534153515361537153815391540154115421543154415451546154715481549155015511552155315541555155615571558155915601561156215631564156515661567156815691570157115721573157415751576157715781579158015811582158315841585158615871588158915901591159215931594159515961597159815991600160116021603160416051606160716081609161016111612161316141615161616171618161916201621162216231624162516261627162816291630163116321633163416351636163716381639164016411642164316441645164616471648164916501651165216531654165516561657165816591660166116621663166416651666166716681669167016711672167316741675167616771678167916801681168216831684168516861687168816891690169116921693169416951696169716981699170017011702170317041705170617071708170917101711171217131714171517161717171817191720172117221723172417251726172717281729173017311732173317341735173617371738173917401741174217431744174517461747174817491750175117521753175417551756175717581759176017611762176317641765176617671768176917701771177217731774177517761777177817791780178117821783178417851786178717881789179017911792179317941795179617971798179918001801180218031804180518061807180818091810181118121813181418151816181718181819182018211822182318241825182618271828182918301831183218331834183518361837183818391840184118421843184418451846184718481849185018511852185318541855185618571858185918601861186218631864186518661867186818691870187118721873187418751876187718781879188018811882188318841885188618871888188918901891189218931894189518961897189818991900190119021903190419051906190719081909191019111912191319141915191619171918191919201921192219231924192519261927192819291930193119321933193419351936193719381939194019411942194319441945194619471948194919501951195219531954195519561957195819591960196119621963196419651966196719681969197019711972197319741975197619771978197919801981198219831984198519861987198819891990199119921993199419951996199719981999200020012002200320042005200620072008200920102011201220132014201520162017201820192020202120222023202420252026202720282029203020312032203320342035203620372038203920402041204220432044204520462047204820492050205120522053205420552056205720582059206020612062206320642065206620672068206920702071207220732074207520762077207820792080208120822083208420852086208720882089209020912092209320942095209620972098209921002101210221032104210521062107210821092110211121122113211421152116211721182119212021212122212321242125212621272128212921302131213221332134213521362137213821392140214121422143214421452146214721482149215021512152215321542155215621572158215921602161216221632164216521662167216821692170217121722173217421752176217721782179218021812182218321842185218621872188218921902191219221932194219521962197219821992200220122022203220422052206220722082209221022112212221322142215221622172218221922202221222222232224222522262227222822292230223122322233223422352236223722382239224022412242224322442245224622472248224922502251225222532254225522562257225822592260226122622263226422652266226722682269227022712272227322742275227622772278227922802281228222832284228522862287228822892290229122922293229422952296229722982299230023012302230323042305230623072308230923102311231223132314231523162317231823192320232123222323232423252326232723282329233023312332233323342335233623372338233923402341234223432344234523462347234823492350235123522353235423552356235723582359236023612362236323642365236623672368236923702371237223732374237523762377237823792380238123822383238423852386238723882389239023912392239323942395239623972398239924002401240224032404240524062407240824092410241124122413241424152416241724182419242024212422242324242425242624272428242924302431243224332434243524362437243824392440244124422443244424452446244724482449245024512452245324542455245624572458245924602461246224632464246524662467246824692470247124722473247424752476247724782479248024812482248324842485248624872488248924902491249224932494249524962497249824992500250125022503250425052506250725082509251025112512251325142515251625172518251925202521252225232524252525262527252825292530253125322533253425352536253725382539254025412542254325442545254625472548254925502551255225532554255525562557255825592560256125622563256425652566256725682569257025712572257325742575257625772578257925802581258225832584258525862587258825892590259125922593259425952596259725982599260026012602260326042605260626072608260926102611261226132614261526162617261826192620262126222623262426252626262726282629263026312632263326342635263626372638263926402641264226432644264526462647264826492650265126522653265426552656265726582659266026612662266326642665266626672668266926702671267226732674267526762677267826792680268126822683268426852686268726882689269026912692269326942695269626972698269927002701270227032704270527062707270827092710271127122713271427152716271727182719272027212722272327242725272627272728272927302731273227332734273527362737273827392740274127422743274427452746274727482749275027512752275327542755275627572758275927602761276227632764276527662767276827692770
  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Diagnostics;
  5. using Aitex.Core.Common;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Sorter.Common;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Util;
  11. using Aitex.Core.RT.DataCenter;
  12. using Aitex.Core.RT.RecipeCenter;
  13. using Aitex.Core.RT.Fsm;
  14. using MECF.Framework.Common.Jobs;
  15. using MECF.Framework.Common.Routine;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.Common.SubstrateTrackings;
  18. using MECF.Framework.Common.Schedulers;
  19. using MECF.Framework.Common.DBCore;
  20. using Venus_Core;
  21. using Venus_RT.Modules.Schedulers;
  22. using Venus_RT.Scheduler;
  23. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  24. using Venus_RT.Modules.TM.VenusEntity;
  25. using System.Threading.Tasks;
  26. using Venus_RT.Modules.VCE;
  27. namespace Venus_RT.Modules
  28. {
  29. class VCETask : ModuleTask
  30. {
  31. public VCETask(ModuleName mod) : base(mod)
  32. {
  33. }
  34. }
  35. public class VenusPMTask : ModuleTask
  36. {
  37. enum CleanType
  38. {
  39. IdleClean,
  40. PreJobClean,
  41. PostJobClean,
  42. WTWClean,
  43. }
  44. public override int TimeToReady
  45. {
  46. get
  47. {
  48. if (!Scheduler.IsOnline)
  49. return int.MaxValue / 2;
  50. switch (Status)
  51. {
  52. case ModuleStatus.Idle:
  53. case ModuleStatus.Processing:
  54. case ModuleStatus.IdleClean:
  55. case ModuleStatus.PreJobClean:
  56. {
  57. return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  58. }
  59. case ModuleStatus.PostJobClean:
  60. case ModuleStatus.WTWClean:
  61. {
  62. if (_pendingCleanTask.Count == 0)
  63. {
  64. return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  65. }
  66. }
  67. break;
  68. }
  69. return int.MaxValue / 2;
  70. }
  71. }
  72. public bool HasPendingCleanTask => _pendingCleanTask.Count > 0;
  73. private WaferTask _wafer;
  74. private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
  75. private string _preJobCleanRecipe;
  76. private string _postJobCleanRecipe;
  77. private string _wtwCleanRecipe;
  78. private Queue<CleanType> _pendingCleanTask = new Queue<CleanType>();
  79. public VenusPMTask(ModuleName pm) : base(pm)
  80. {
  81. }
  82. public override RState Run()
  83. {
  84. if (Scheduler.IsIdle)
  85. {
  86. switch (Status)
  87. {
  88. case ModuleStatus.Idle:
  89. {
  90. if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
  91. {
  92. if (_pendingCleanTask.Count > 0)
  93. {
  94. var cleanTask = _pendingCleanTask.Dequeue();
  95. if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
  96. {
  97. Status = ModuleStatus.WaitPostJobClean;
  98. }
  99. else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  100. {
  101. Status = ModuleStatus.WaitPreJobClean;
  102. }
  103. }
  104. else if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
  105. {
  106. Status = ModuleStatus.StartIdleClean;
  107. }
  108. }
  109. }
  110. break;
  111. case ModuleStatus.WaitProcess:
  112. {
  113. Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
  114. Status = ModuleStatus.StartProcess;
  115. }
  116. break;
  117. case ModuleStatus.WaitPreJobClean:
  118. {
  119. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  120. {
  121. if (_pmScheduler.RunJobCleanTask(_preJobCleanRecipe))
  122. {
  123. Status = ModuleStatus.StartPreJobClean;
  124. }
  125. else
  126. {
  127. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe{_preJobCleanRecipe} failed");
  128. Status = ModuleStatus.Idle;
  129. _preJobCleanRecipe = string.Empty;
  130. }
  131. }
  132. }
  133. break;
  134. case ModuleStatus.WaitPostJobClean:
  135. {
  136. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  137. {
  138. if (_pmScheduler.RunJobCleanTask(_postJobCleanRecipe))
  139. {
  140. Status = ModuleStatus.StartPostJobClean;
  141. }
  142. else
  143. {
  144. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe{_postJobCleanRecipe} failed");
  145. Status = ModuleStatus.Idle;
  146. _postJobCleanRecipe = string.Empty;
  147. }
  148. }
  149. }
  150. break;
  151. case ModuleStatus.WaitWTWClean:
  152. {
  153. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  154. {
  155. if (_pmScheduler.RunJobCleanTask(_wtwCleanRecipe))
  156. {
  157. Status = ModuleStatus.StartWTWClean;
  158. }
  159. else
  160. {
  161. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW Wafer clean recipe{_wtwCleanRecipe} failed");
  162. Status = ModuleStatus.Idle;
  163. _wtwCleanRecipe = string.Empty;
  164. }
  165. }
  166. }
  167. break;
  168. case ModuleStatus.Processing:
  169. {
  170. var wafer = WaferManager.Instance.GetWafer(Module, 0);
  171. if (Scheduler.IsOnline)
  172. {
  173. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  174. {
  175. _wafer.Return();
  176. Status = ModuleStatus.Idle;
  177. }
  178. }
  179. else // handle offline exception situation
  180. {
  181. Status = ModuleStatus.Idle;
  182. }
  183. }
  184. break;
  185. case ModuleStatus.PreJobClean:
  186. {
  187. _preJobCleanRecipe = string.Empty;
  188. Status = ModuleStatus.Idle;
  189. }
  190. break;
  191. case ModuleStatus.PostJobClean:
  192. {
  193. _postJobCleanRecipe = string.Empty;
  194. if (_pendingCleanTask.Count > 0)
  195. {
  196. var cleanTask = _pendingCleanTask.Dequeue();
  197. if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  198. {
  199. Status = ModuleStatus.WaitPreJobClean;
  200. break;
  201. }
  202. }
  203. Status = ModuleStatus.Idle;
  204. }
  205. break;
  206. case ModuleStatus.WTWClean:
  207. {
  208. if (_pendingCleanTask.Count > 0)
  209. {
  210. var cleanTask = _pendingCleanTask.Dequeue();
  211. if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
  212. {
  213. Status = ModuleStatus.WaitPostJobClean;
  214. }
  215. else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  216. {
  217. Status = ModuleStatus.WaitPreJobClean;
  218. }
  219. }
  220. else
  221. {
  222. Status = ModuleStatus.Idle;
  223. }
  224. _wtwCleanRecipe = string.Empty;
  225. }
  226. break;
  227. case ModuleStatus.IdleClean:
  228. {
  229. Status = ModuleStatus.Idle;
  230. }
  231. break;
  232. case ModuleStatus.StartProcess:
  233. {
  234. if (RouteManager.IsATMMode)
  235. {
  236. Status = ModuleStatus.Processing;
  237. }
  238. }
  239. break;
  240. }
  241. }
  242. else
  243. {
  244. switch (Status)
  245. {
  246. case ModuleStatus.StartProcess:
  247. Status = ModuleStatus.Processing;
  248. break;
  249. case ModuleStatus.StartIdleClean:
  250. Status = ModuleStatus.IdleClean;
  251. break;
  252. case ModuleStatus.StartPreJobClean:
  253. Status = ModuleStatus.PreJobClean;
  254. break;
  255. case ModuleStatus.StartPostJobClean:
  256. Status = ModuleStatus.PostJobClean;
  257. break;
  258. case ModuleStatus.StartWTWClean:
  259. Status = ModuleStatus.WTWClean;
  260. break;
  261. }
  262. }
  263. return RState.Running;
  264. }
  265. public override void WaferArrived(WaferTask wafer, int slot)
  266. {
  267. _wafer = wafer;
  268. Status = ModuleStatus.WaitProcess;
  269. }
  270. public override void WaferLeaved(WaferTask wafer, int slot)
  271. {
  272. if (!string.IsNullOrWhiteSpace(_wafer.wtwCleanRecipe.Trim()) && (_pendingCleanTask.Count == 0 || _pendingCleanTask.First() != CleanType.PostJobClean))
  273. {
  274. Status = ModuleStatus.WaitWTWClean;
  275. _wtwCleanRecipe = _wafer.wtwCleanRecipe;
  276. }
  277. else if (_pendingCleanTask.Count > 0)
  278. {
  279. var cleanTask = _pendingCleanTask.Dequeue();
  280. if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
  281. {
  282. Status = ModuleStatus.WaitPostJobClean;
  283. }
  284. else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  285. {
  286. Status = ModuleStatus.WaitPreJobClean;
  287. }
  288. }
  289. _wafer = null;
  290. }
  291. public void InvokePreJobClean(string preJobClean)
  292. {
  293. _preJobCleanRecipe = preJobClean;
  294. _pendingCleanTask.Enqueue(CleanType.PreJobClean);
  295. //LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, Module, $"Invoke preClean {preJobClean}");
  296. }
  297. public bool IsPreJobCleanDone()
  298. {
  299. return !_pendingCleanTask.Contains(CleanType.PreJobClean) && string.IsNullOrWhiteSpace(_preJobCleanRecipe);
  300. }
  301. public void InvokePostJobClean(string postJobClean)
  302. {
  303. _postJobCleanRecipe = postJobClean;
  304. _pendingCleanTask.Enqueue(CleanType.PostJobClean);
  305. //LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, Module, $"Invoke postClean {postJobClean}");
  306. }
  307. public bool IsPostJobCleanDone()
  308. {
  309. return !_pendingCleanTask.Contains(CleanType.PostJobClean) && string.IsNullOrWhiteSpace(_postJobCleanRecipe);
  310. }
  311. }
  312. //class VenusPMTask : ModuleTask
  313. //{
  314. // public enum RecipeJobType
  315. // {
  316. // PreClean,
  317. // Process,
  318. // PostClean,
  319. // WtwClean,
  320. // }
  321. //
  322. // public override int TimeToReady
  323. // {
  324. // get
  325. // {
  326. // switch (Status)
  327. // {
  328. // case ModuleStatus.Idle:
  329. // case ModuleStatus.IdleClean:
  330. // case ModuleStatus.PreJobClean:
  331. // case ModuleStatus.PostJobClean:
  332. // case ModuleStatus.WTWClean:
  333. // case ModuleStatus.Processing:
  334. // {
  335. // return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  336. // }
  337. // }
  338. //
  339. // return int.MaxValue / 2;
  340. // }
  341. // }
  342. //
  343. // private WaferTask _wafer;
  344. // private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
  345. //
  346. // Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> _pendingWaferTasks = new Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> ();
  347. // KeyValuePair<Guid, Queue<KeyValuePair <RecipeJobType, string>>> _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>> (Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  348. //
  349. // public VenusPMTask(ModuleName mod) : base(mod)
  350. // { }
  351. // public override RState Run()
  352. // {
  353. // if(_runingWaferTask.Value.Count == 0)
  354. // {
  355. // if(_pendingWaferTasks.Count > 0)
  356. // {
  357. // _runingWaferTask = _pendingWaferTasks.Dequeue();
  358. // }
  359. // else
  360. // {
  361. // if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  362. // {
  363. // if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
  364. // {
  365. // if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
  366. // {
  367. // Status = ModuleStatus.StartIdleClean;
  368. // }
  369. // }
  370. // }
  371. // }
  372. // }
  373. // else
  374. // {
  375. // if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  376. // {
  377. //
  378. // switch(_runingWaferTask.Value.First().Key)
  379. // {
  380. // case RecipeJobType.PreClean:
  381. // {
  382. // if(WaferManager.Instance.CheckNoWafer(Module,0))
  383. // {
  384. // if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  385. // {
  386. // Status = ModuleStatus.StartPreJobClean;
  387. // }
  388. // else
  389. // {
  390. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe {_runingWaferTask.Value.First().Value} failed");
  391. // TryDequeueRuningTask(Status);
  392. // Status = ModuleStatus.Idle;
  393. // }
  394. // }
  395. // }
  396. // break;
  397. // case RecipeJobType.Process:
  398. // {
  399. // if (WaferManager.Instance.CheckHasWafer(Module, 0))
  400. // {
  401. // if(_wafer.waferId == _runingWaferTask.Key)
  402. // {
  403. // Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
  404. // Status = ModuleStatus.StartProcess;
  405. // }
  406. // else
  407. // {
  408. // LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer id dismatch while launch {_wafer.sourceMod}.{_wafer.sourceSlot + 1} process recipe");
  409. // }
  410. // }
  411. // }
  412. // break;
  413. // case RecipeJobType.PostClean:
  414. // {
  415. // if (WaferManager.Instance.CheckNoWafer(Module, 0))
  416. // {
  417. // if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  418. // {
  419. // Status = ModuleStatus.StartPostJobClean;
  420. // }
  421. // else
  422. // {
  423. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe {_runingWaferTask.Value.First().Value} failed");
  424. // TryDequeueRuningTask(Status);
  425. // Status = ModuleStatus.Idle;
  426. // }
  427. // }
  428. // }
  429. // break;
  430. // case RecipeJobType.WtwClean:
  431. // {
  432. // if (WaferManager.Instance.CheckNoWafer(Module, 0))
  433. // {
  434. // if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  435. // {
  436. // Status = ModuleStatus.StartWTWClean;
  437. // }
  438. // else
  439. // {
  440. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW clean recipe {_runingWaferTask.Value.First().Value} failed");
  441. // TryDequeueRuningTask(Status);
  442. // Status = ModuleStatus.Idle;
  443. // }
  444. // }
  445. // }
  446. // break;
  447. // }
  448. // }
  449. // }
  450. //
  451. // if(_runingWaferTask.Value.Count > 0 || Status != ModuleStatus.Idle)
  452. // {
  453. // if (Scheduler.IsIdle)
  454. // {
  455. // if (Scheduler.NoWafer(0) && Scheduler.LastPMWaferID != null)
  456. // {
  457. // TryDequeueRuningTask(Status);
  458. // }
  459. //
  460. // switch (Status)
  461. // {
  462. // case ModuleStatus.Processing:
  463. // {
  464. // var wafer = WaferManager.Instance.GetWafer(Module, 0);
  465. // if (Scheduler.IsOnline)
  466. // {
  467. // if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  468. // {
  469. // _wafer.Return();
  470. // // Last Process PM ID
  471. // Scheduler.LastPMWaferID = wafer.InnerId;
  472. // //TryDequeueRuningTask(Status);
  473. // Status = ModuleStatus.Idle;
  474. // }
  475. // }
  476. // else // handle offline exception situation
  477. // {
  478. // TryDequeueRuningTask(Status);
  479. // Status = ModuleStatus.Idle;
  480. // }
  481. // }
  482. // break;
  483. // case ModuleStatus.PreJobClean:
  484. // case ModuleStatus.PostJobClean:
  485. // case ModuleStatus.WTWClean:
  486. // {
  487. // TryDequeueRuningTask(Status);
  488. // Status = ModuleStatus.Idle;
  489. // }
  490. // break;
  491. // case ModuleStatus.IdleClean:
  492. // {
  493. // Status = ModuleStatus.Idle;
  494. // }
  495. // break;
  496. // case ModuleStatus.StartProcess:
  497. // {
  498. // if (RouteManager.IsATMMode)
  499. // {
  500. // Status = ModuleStatus.Processing;
  501. // }
  502. // }
  503. // break;
  504. // }
  505. // }
  506. // else
  507. // {
  508. // switch (Status)
  509. // {
  510. // case ModuleStatus.StartProcess:
  511. // Status = ModuleStatus.Processing;
  512. // break;
  513. // case ModuleStatus.StartIdleClean:
  514. // Status = ModuleStatus.IdleClean;
  515. // break;
  516. // case ModuleStatus.StartPreJobClean:
  517. // Status = ModuleStatus.PreJobClean;
  518. // break;
  519. // case ModuleStatus.StartPostJobClean:
  520. // Status = ModuleStatus.PostJobClean;
  521. // break;
  522. // case ModuleStatus.StartWTWClean:
  523. // Status = ModuleStatus.WTWClean;
  524. // break;
  525. // }
  526. // }
  527. // }
  528. //
  529. // return RState.Running;
  530. // }
  531. //
  532. // void TryDequeueRuningTask( ModuleStatus status)
  533. // {
  534. // bool bMatch = false;
  535. // if (_runingWaferTask.Value.Count > 0)
  536. // {
  537. // switch(status)
  538. // {
  539. // case ModuleStatus.PreJobClean:
  540. // if(_runingWaferTask.Value.First().Key == RecipeJobType.PreClean)
  541. // {
  542. // _runingWaferTask.Value.Dequeue();
  543. // bMatch = true;
  544. // }
  545. // break;
  546. // case ModuleStatus.Processing:
  547. // if(_runingWaferTask.Value.First().Key == RecipeJobType.Process)
  548. // {
  549. // //_runingWaferTask.Value.Dequeue();
  550. // bMatch = true;
  551. // }
  552. // break;
  553. // case ModuleStatus.PostJobClean:
  554. // if(_runingWaferTask.Value.First().Key == RecipeJobType.PostClean)
  555. // {
  556. // _runingWaferTask.Value.Dequeue();
  557. // bMatch = true;
  558. // }
  559. // break;
  560. // case ModuleStatus.WTWClean:
  561. // if(_runingWaferTask.Value.First().Key == RecipeJobType.WtwClean)
  562. // {
  563. // _runingWaferTask.Value.Dequeue();
  564. // bMatch = true;
  565. // }
  566. // break;
  567. // case ModuleStatus.WaitPreJobClean:
  568. // case ModuleStatus.WaitProcess:
  569. // case ModuleStatus.WaitPostJobClean:
  570. // case ModuleStatus.WaitWTWClean:
  571. // case ModuleStatus.Idle:
  572. // _runingWaferTask.Value.Dequeue();
  573. // break;
  574. // }
  575. // }
  576. //
  577. // if(!bMatch)
  578. // {
  579. // string runingTask = _runingWaferTask.Value.Count > 0 ? _runingWaferTask.Value.First().ToString() : "Empty";
  580. // LOG.Write(eEvent.WARN_ROUTER, Module, $"TryDequeueRuningTask() failed, PM Status: {status}, runing task : {runingTask}");
  581. // }
  582. //
  583. // if(_runingWaferTask.Value.Count == 0 && _runingWaferTask.Key != Guid.Empty)
  584. // {
  585. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  586. // }
  587. // }
  588. //
  589. // public override void WaferArrived(WaferTask wafer, int slot)
  590. // {
  591. // _wafer = wafer;
  592. // }
  593. //
  594. // public override void WaferLeaved(WaferTask wafer, int slot)
  595. // {
  596. // _wafer = null;
  597. // }
  598. //
  599. // public void SubscribeWaferTask(WaferTask waferTask)
  600. // {
  601. // var waferRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  602. //
  603. // if (!string.IsNullOrWhiteSpace(waferTask.processRecipe))
  604. // {
  605. // waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.Process, waferTask.processRecipe));
  606. // }
  607. //
  608. // if (!string.IsNullOrWhiteSpace(waferTask.wtwCleanRecipe))
  609. // {
  610. // waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.WtwClean, waferTask.wtwCleanRecipe));
  611. // }
  612. //
  613. // if(_runingWaferTask.Key == waferTask.waferId || _pendingWaferTasks.ToList().Exists(kv => kv.Key == waferTask.waferId))
  614. // {
  615. // LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer {waferTask.sourceMod}.{waferTask.sourceSlot + 1} already subscribe job task.");
  616. // }
  617. // else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  618. // {
  619. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes);
  620. // }
  621. // else
  622. // {
  623. // _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes));
  624. // }
  625. // }
  626. //
  627. // public void SubscribeLotCleanTask(ControlJobInfo cj, RecipeJobType cleanType)
  628. // {
  629. // var lotCleanRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  630. //
  631. // if(cleanType == RecipeJobType.PreClean && !string.IsNullOrWhiteSpace(cj.PreJobClean))
  632. // {
  633. // lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PreJobClean));
  634. // }
  635. // else if(cleanType == RecipeJobType.PostClean && !string.IsNullOrWhiteSpace (cj.PostJobClean))
  636. // {
  637. // lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PostJobClean));
  638. // }
  639. // else
  640. // {
  641. // return;
  642. // }
  643. //
  644. // if ((_runingWaferTask.Key == cj.InnerId && _runingWaferTask.Value.ToList().Exists(pv => pv.Key == cleanType)) || _pendingWaferTasks.ToList().Exists(task => task.Key == cj.InnerId && task.Value.ToList().Exists(pv => pv.Key == cleanType)))
  645. // {
  646. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Control job {cj.Name} already subscribe {cleanType} task.");
  647. // }
  648. // else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  649. // {
  650. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes);
  651. // }
  652. // else
  653. // {
  654. // _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes));
  655. // }
  656. // }
  657. //
  658. // public bool ReadyMoveIn(WaferTask wafer)
  659. // {
  660. // return _runingWaferTask.Key == wafer.waferId && _runingWaferTask.Value.Count > 0 && _runingWaferTask.Value.First().Key == RecipeJobType.Process;
  661. // }
  662. //
  663. // public bool IsAllJobCompleted()
  664. // {
  665. // return Status == ModuleStatus.Idle && (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0) && _pendingWaferTasks.Count == 0;
  666. // }
  667. //
  668. // public bool IsRecipeJobDone(RecipeJobType job)
  669. // {
  670. // return (_runingWaferTask.Key == Guid.Empty || !_runingWaferTask.Value.ToList().Exists(kv => kv.Key == job)) && (_pendingWaferTasks.Count == 0 || !_pendingWaferTasks.ToList().Exists(kv => kv.Value.Count > 0 && kv.Value.ToList().Exists(kvv => kvv.Key == job)));
  671. // }
  672. //
  673. // public override void ResetTask()
  674. // {
  675. // base.ResetTask();
  676. //
  677. // _wafer = null;
  678. // _pendingWaferTasks.Clear();
  679. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  680. // }
  681. //}
  682. class PreAlignTask : ModuleTask
  683. {
  684. private WaferTask _wafer;
  685. public PreAlignTask(ModuleName aligner) : base(aligner)
  686. {
  687. }
  688. public override RState Run()
  689. {
  690. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  691. if (tmRobot == null || !tmRobot.IsAvailable)
  692. return RState.Running;
  693. switch (Status)
  694. {
  695. case ModuleStatus.WaitAlign:
  696. {
  697. tmRobot.Align(0);
  698. Status = ModuleStatus.Aligning;
  699. }
  700. break;
  701. case ModuleStatus.Aligning:
  702. {
  703. _wafer.IsAligned = true;
  704. Status = ModuleStatus.Idle;
  705. }
  706. break;
  707. }
  708. return RState.Running;
  709. }
  710. public override void WaferArrived(WaferTask wafer, int slot)
  711. {
  712. _wafer = wafer;
  713. Status = ModuleStatus.WaitAlign;
  714. }
  715. public override void WaferLeaved(WaferTask wafer, int slot)
  716. {
  717. _wafer = null;
  718. }
  719. }
  720. class VenusTMRobotTask : ModuleTask
  721. {
  722. public VenusTMRobotTask(ModuleName mod) : base(mod) { }
  723. public override RState Run()
  724. {
  725. return base.Run();
  726. }
  727. }
  728. class VenusDispatcher : ICycle
  729. {
  730. private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).RobotStatus; } }
  731. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  732. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  733. private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
  734. private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
  735. private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();
  736. private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();
  737. private List<MoveItem> _curTmAction = new List<MoveItem>();
  738. private Dictionary<ModuleName, List<Guid>> _preLotCleanMarks = new Dictionary<ModuleName, List<Guid>>();
  739. private Dictionary<ModuleName, List<Guid>> _postLotCleanMarks = new Dictionary<ModuleName, List<Guid>>();
  740. private bool _isCycleMode;
  741. private int _cycleSetPoint = 0;
  742. private int _cycledCount = 0;
  743. private int _cycledWafer = 0;
  744. private float _throughput = 0.0f;
  745. private bool _IsPumpBeforeSequence = false; //是否需要自动pump
  746. private bool _VceAutoUnLoad = false; //是否需要job完自动unload
  747. private int _tmRobotSingleArmOption = 0;
  748. private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 },{ ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  749. private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  750. private Dictionary<ModuleName, int> _lpCycleSP = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  751. private Dictionary<ModuleName, float> _lpThroughput = new Dictionary<ModuleName, float>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  752. private Stopwatch _cycleWatch = new Stopwatch();
  753. private SchedulerFACallback _faCallback;
  754. private SchedulerDBCallback _dbCallback;
  755. public SequenceLLInOutPath LLInOutPath => SequenceLLInOutPath.DInDOut;
  756. public bool HasJobRunning => _lstControlJobs.Count > 0;
  757. private RState _cycleState = RState.Init;
  758. public RState CycleState => _cycleState;
  759. private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();
  760. public List<string> InUseRecipes = new List<string>();
  761. public VenusDispatcher()
  762. {
  763. _faCallback = new SchedulerFACallback();
  764. _dbCallback = new SchedulerDBCallback();
  765. InitModules();
  766. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  767. DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());
  768. DATA.Subscribe("Scheduler.InUsingRecipe", () => InUseRecipes);
  769. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  770. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  771. foreach (var lp in new List<ModuleName> { ModuleName.LP1, ModuleName.LP2, ModuleName.LP3 })
  772. {
  773. _loadportControlJobDic[lp.ToString()] = null;
  774. DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp.ToString()], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  775. DATA.Subscribe($"{lp}.CycledCount", () => _lpCycleCount[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  776. DATA.Subscribe($"{lp}.CycledWafer", () => _lpCycleWafer[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  777. DATA.Subscribe($"{lp}.CycleSetPoint", () => _lpCycleSP[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  778. DATA.Subscribe($"{lp}.Throughput", () => _lpThroughput[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  779. }
  780. DATA.Subscribe("Scheduler.CurrentRecipeList", () => _lstProcessJobs);
  781. _IsPumpBeforeSequence = SC.GetValue<bool>("System.IsPumpBeforeJob");
  782. _VceAutoUnLoad = SC.GetValue<bool>("System.IsAutoUnload");
  783. }
  784. #region public interface
  785. /// <summary>
  786. /// 获取lp当前的ControlJob
  787. /// </summary>
  788. /// <param name="lp"></param>
  789. /// <returns></returns>
  790. public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
  791. {
  792. if (ModuleHelper.IsLoadPort(lp))
  793. {
  794. return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
  795. }
  796. else
  797. {
  798. return null;
  799. }
  800. }
  801. public RState Start(params object[] objs)
  802. {
  803. if (WaferManager.Instance.HasDuplicatedWafer)
  804. {
  805. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, "System has dummy wafers, please verify all the wafer position, and delete the invalid wafer");
  806. return RState.Failed;
  807. }
  808. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  809. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  810. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  811. _cycledWafer = 0;
  812. _cycledCount = 0;
  813. _throughput = 0;
  814. Clear();
  815. _cycleWatch.Stop();
  816. _lpCycleWafer[ModuleName.LP1] = 0;
  817. _lpCycleWafer[ModuleName.LP2] = 0;
  818. _lpCycleCount[ModuleName.LP1] = 0;
  819. _lpCycleCount[ModuleName.LP2] = 0;
  820. return RState.Running;
  821. }
  822. public bool CreateJob(Dictionary<string, object> param, out string reason)
  823. {
  824. reason = "";
  825. //_isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  826. //_cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  827. string[] slotSequence = (string[])param["SlotSequence"];
  828. string jobId = (string)param["JobId"];
  829. string module = (string)param["Module"];
  830. if (string.IsNullOrEmpty(jobId))
  831. {
  832. jobId = "CJ_Local_" + module;
  833. }
  834. //bool autoStart = (bool)param["AutoStart"];
  835. string lotId = jobId;
  836. if (param.ContainsKey("LotId"))
  837. lotId = (string)param["LotId"];
  838. if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  839. {
  840. reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
  841. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  842. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  843. return false;
  844. }
  845. if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
  846. {
  847. reason = $"{module} should be LoadPort";
  848. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  849. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  850. return false;
  851. }
  852. if (_lstControlJobs.Exists(x => x.Name == jobId))
  853. {
  854. reason = $"{jobId} already created";
  855. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  856. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  857. return false;
  858. }
  859. ControlJobInfo cj = new ControlJobInfo();
  860. cj.Name = jobId;
  861. cj.Module = module;
  862. cj.LotName = lotId;
  863. cj.LotInnerId = Guid.NewGuid();
  864. cj.LotWafers = new List<WaferInfo>();
  865. cj.SetState(EnumControlJobState.WaitingForStart);
  866. cj.JetState = EnumJetCtrlJobState.Quequed;
  867. cj.SequenceNameList = slotSequence;
  868. cj.CycleNumber = _cycleSetPoint; // only for temperary debug
  869. _lpCycleSP[ModuleHelper.Converter(module)] = _cycleSetPoint;
  870. Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
  871. Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
  872. Dictionary<string, string> indexSequence = new Dictionary<string, string>();
  873. bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
  874. for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
  875. {
  876. if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
  877. continue;
  878. string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
  879. indexSequence[groupName] = slotSequence[i];
  880. if (!seqSlot.ContainsKey(groupName))
  881. {
  882. seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
  883. }
  884. if (!seqSlotWafers.ContainsKey(groupName))
  885. {
  886. seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
  887. }
  888. seqSlot[groupName][i] = true;
  889. if (!WaferManager.Instance.CheckHasWafer(module, i))
  890. {
  891. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
  892. return false;
  893. }
  894. if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
  895. {
  896. reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
  897. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  898. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  899. return false;
  900. }
  901. if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
  902. {
  903. reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
  904. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  905. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  906. return false;
  907. }
  908. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
  909. WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
  910. cj.LotWafers.Add(waferInfo);
  911. waferInfo.SequenceName = slotSequence[i];
  912. waferInfo.LotId = lotId;
  913. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---
  914. seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
  915. cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
  916. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
  917. }
  918. if (seqSlotWafers.Count == 0)
  919. {
  920. reason = $"job has not assign wafer";
  921. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  922. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  923. return false;
  924. }
  925. List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
  926. string[] seqs = seqSlot.Keys.ToArray();
  927. for (int i = 0; i < seqs.Length; i++)
  928. {
  929. ProcessJobInfo pj = new ProcessJobInfo();
  930. pj.Name = jobId + "_" + (i + 1);
  931. pj.Sequence = SequenceInfoHelper.VenusGetInfo(indexSequence[seqs[i]]);
  932. if (pj.Sequence == null)
  933. {
  934. reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
  935. return false;
  936. }
  937. pj.ControlJobName = cj.Name;
  938. pj.LotName = lotId;
  939. pj.SlotWafers = seqSlotWafers[seqs[i]];
  940. pj.SetState(EnumProcessJobState.Queued);
  941. if (!CheckSequencePmReady(pj.Sequence, out reason))
  942. {
  943. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
  944. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  945. return false;
  946. }
  947. if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
  948. {
  949. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
  950. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  951. return false;
  952. }
  953. pjs.Add(pj);
  954. }
  955. _dbCallback.LotUpdate(cj);
  956. foreach (var pj in pjs)
  957. {
  958. cj.ProcessJobNameList.Add(pj.Name);
  959. _lstProcessJobs.Add(pj);
  960. }
  961. _lstControlJobs.Add(cj);
  962. //AssociatedPMWithLP(cj);
  963. _loadportControlJobDic[cj.Module] = cj;
  964. _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
  965. return true;
  966. }
  967. public bool CheckAllJobDone()
  968. {
  969. foreach (var cj in _lstControlJobs)
  970. {
  971. if (cj.State != EnumControlJobState.Completed)
  972. return false;
  973. }
  974. InUseRecipes.Clear();
  975. return true;
  976. }
  977. public bool CheckJobJustDone(out string sJobName)
  978. {
  979. foreach (var cj in _lstControlJobs)
  980. {
  981. if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
  982. {
  983. //LP;WaferSize;Lot;Number;Start;End;
  984. sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
  985. cj.BeenPosted = true;
  986. return true;
  987. }
  988. }
  989. sJobName = "NULL";
  990. return false;
  991. }
  992. public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
  993. {
  994. foreach (var pj in _lstProcessJobs)
  995. {
  996. if (pj.ControlJobName == cj.Name)
  997. return pj;
  998. }
  999. return null;
  1000. }
  1001. public bool AbortJob(string jobName, out string reason)
  1002. {
  1003. reason = "";
  1004. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1005. if (cj == null)
  1006. {
  1007. reason = $"abort job rejected, not found job with id {jobName}";
  1008. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  1009. return false;
  1010. }
  1011. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  1012. foreach (var pj in _lstProcessJobs)
  1013. {
  1014. if (pj.ControlJobName == cj.Name)
  1015. {
  1016. pj.SetState(EnumProcessJobState.Aborting);
  1017. pjAbortList.Add(pj);
  1018. int unprocessed = 0;
  1019. int aborted = 0;
  1020. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  1021. foreach (var waferInfo in wafers)
  1022. {
  1023. waferInfo.ProcessJob = null;
  1024. waferInfo.NextSequenceStep = 0;
  1025. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  1026. unprocessed++;
  1027. }
  1028. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  1029. }
  1030. }
  1031. _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
  1032. _dbCallback.LotFinished(cj);
  1033. foreach (var pj in pjAbortList)
  1034. {
  1035. _lstProcessJobs.Remove(pj);
  1036. }
  1037. _lstControlJobs.Remove(cj);
  1038. if (_loadportControlJobDic.ContainsKey(cj.Module))
  1039. {
  1040. _loadportControlJobDic[cj.Module] = null;
  1041. }
  1042. return true;
  1043. }
  1044. public bool StopJob(string jobName, out string reason)
  1045. {
  1046. reason = "";
  1047. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1048. if (cj == null)
  1049. {
  1050. reason = $"stop job rejected, not found job with id {jobName}";
  1051. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  1052. return false;
  1053. }
  1054. foreach (var pj in _lstProcessJobs)
  1055. {
  1056. if (pj.ControlJobName == cj.Name)
  1057. {
  1058. pj.SetState(EnumProcessJobState.Stopping);
  1059. }
  1060. }
  1061. _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
  1062. _dbCallback.LotFinished(cj);
  1063. if (_loadportControlJobDic.ContainsKey(cj.Module))
  1064. {
  1065. _loadportControlJobDic[cj.Module] = null;
  1066. }
  1067. return true;
  1068. }
  1069. public bool ResumeJob(string jobName, out string reason)
  1070. {
  1071. reason = "";
  1072. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1073. if (cj == null)
  1074. {
  1075. reason = $"resume job rejected, not found job with id {jobName}";
  1076. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
  1077. return false;
  1078. }
  1079. if (cj.State == EnumControlJobState.Paused)
  1080. {
  1081. cj.SetState(EnumControlJobState.Executing);
  1082. }
  1083. _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
  1084. _cycleState = RState.Running;
  1085. return true;
  1086. }
  1087. public bool PauseJob(string jobName, out string reason)
  1088. {
  1089. reason = "";
  1090. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1091. if (cj == null)
  1092. {
  1093. reason = $"pause job rejected, not found job with id {jobName}";
  1094. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
  1095. return false;
  1096. }
  1097. if (cj.State == EnumControlJobState.Executing)
  1098. {
  1099. cj.SetState(EnumControlJobState.Paused);
  1100. }
  1101. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  1102. if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
  1103. _cycleState = RState.Paused;
  1104. return true;
  1105. }
  1106. public bool StartJob(string jobName, out string reason)
  1107. {
  1108. reason = "";
  1109. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1110. if (cj == null)
  1111. {
  1112. reason = $"start job rejected, not found job with id {jobName}";
  1113. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  1114. return false;
  1115. }
  1116. if (cj.State == EnumControlJobState.WaitingForStart)
  1117. {
  1118. cj.SetState(EnumControlJobState.Queued);
  1119. //PreJobClean(cj);
  1120. cj.StartTime = DateTime.Now;
  1121. _dbCallback.LotCreated(cj);
  1122. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  1123. //if (!_blockingWatcher.IsRunning)
  1124. // _blockingWatcher.Restart();
  1125. //ResetTraceFlag();
  1126. }
  1127. if (!_cycleWatch.IsRunning)
  1128. {
  1129. _cycleWatch.Restart();
  1130. }
  1131. if (!_lpCycleWafer.Keys.Contains(ModuleHelper.Converter(cj.Module)))
  1132. {
  1133. _lpCycleCount.Add(ModuleHelper.Converter(cj.Module), 0);
  1134. _lpCycleWafer.Add(ModuleHelper.Converter(cj.Module), 0);
  1135. }
  1136. _cycleState = RState.Running;
  1137. if (_IsPumpBeforeSequence)
  1138. {
  1139. Singleton<RouteManager>.Instance.GetVCE(VCE2LP.QueryLP2VCE(ModuleHelper.Converter(cj.Module))).PostMsg(VceMSG.Pump);
  1140. }
  1141. return true;
  1142. }
  1143. public RState Monitor()
  1144. {
  1145. prelude();
  1146. RunWaferTask();
  1147. RunModuleTasks();
  1148. RoutingWafers();
  1149. epilogue();
  1150. return _cycleState;
  1151. }
  1152. public void Abort()
  1153. {
  1154. }
  1155. public void Clear()
  1156. {
  1157. foreach (var module in _dictModuleTask)
  1158. {
  1159. module.Value.Status = ModuleStatus.Idle;
  1160. module.Value.Scheduler.ResetTask();
  1161. module.Value.ResetTask();
  1162. }
  1163. List<string> keys = _loadportControlJobDic.Keys.ToList();
  1164. foreach (var key in keys)
  1165. {
  1166. _loadportControlJobDic[key] = null;
  1167. }
  1168. foreach (var preLot in _preLotCleanMarks)
  1169. {
  1170. preLot.Value.Clear();
  1171. }
  1172. foreach (var postLot in _postLotCleanMarks)
  1173. {
  1174. postLot.Value.Clear();
  1175. }
  1176. _lstWaferTasks.Clear();
  1177. _tmSchdActions.Clear();
  1178. _curTmAction.Clear();
  1179. _lstControlJobs.Clear();
  1180. _lstProcessJobs.Clear();
  1181. InUseRecipes.Clear();
  1182. _lpCycleWafer[ModuleName.LP1] = 0;
  1183. _lpCycleWafer[ModuleName.LP2] = 0;
  1184. _lpCycleCount[ModuleName.LP1] = 0;
  1185. _lpCycleCount[ModuleName.LP2] = 0;
  1186. _lpThroughput[ModuleName.LP1] = 0;
  1187. _lpThroughput[ModuleName.LP2] = 0;
  1188. _cycleState = RState.End;
  1189. }
  1190. #endregion
  1191. #region manual return wafer
  1192. // manual return one wafer while system is auto running
  1193. public bool ManualReturnWafer(object[] objs)
  1194. {
  1195. ModuleName SourceModule = (ModuleName)objs[0];
  1196. int SourceSlot = (int)objs[1];
  1197. if (!_dictModuleTask.Keys.Contains(SourceModule))
  1198. {
  1199. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
  1200. return false;
  1201. }
  1202. if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
  1203. {
  1204. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
  1205. return false;
  1206. }
  1207. if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
  1208. {
  1209. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
  1210. return false;
  1211. }
  1212. var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
  1213. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
  1214. _qeReturnWafers.Enqueue(wafer);
  1215. return true;
  1216. }
  1217. public RState CheckManualReturnWafer()
  1218. {
  1219. var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
  1220. var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
  1221. if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
  1222. {
  1223. LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
  1224. return RState.Failed;
  1225. }
  1226. foreach (var mod in _dictModuleTask)
  1227. {
  1228. if (ModuleHelper.IsLoadPort(mod.Key))
  1229. continue;
  1230. if (!ModuleHelper.IsAligner(mod.Key) && !mod.Value.Scheduler.IsIdle)
  1231. {
  1232. LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
  1233. return RState.Failed;
  1234. }
  1235. int nSlotNumber = (ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1);
  1236. for (int slot = 0; slot < nSlotNumber; slot++)
  1237. {
  1238. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  1239. if (wafer.IsEmpty)
  1240. continue;
  1241. var destLP = (ModuleName)wafer.OriginStation;
  1242. if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
  1243. {
  1244. LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
  1245. return RState.Failed;
  1246. }
  1247. if (!ModuleHelper.IsLoadPort(destLP))
  1248. {
  1249. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
  1250. return RState.Failed;
  1251. }
  1252. }
  1253. }
  1254. Clear();
  1255. return RState.Running;
  1256. }
  1257. public RState ReturnAllWafers()
  1258. {
  1259. int systemWaferCount = 0;
  1260. foreach (var mod in _dictModuleTask)
  1261. {
  1262. if (ModuleHelper.IsLoadPort(mod.Key))
  1263. continue;
  1264. int nSlotNumber = ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1;
  1265. for (int slot = 0; slot < nSlotNumber; slot++)
  1266. {
  1267. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  1268. if (!wafer.IsEmpty)
  1269. systemWaferCount++;
  1270. }
  1271. }
  1272. if (systemWaferCount == 0)
  1273. return RState.End;
  1274. ReturnInternalWafers();
  1275. return RState.Running;
  1276. }
  1277. #endregion
  1278. #region internal implementation
  1279. private void InitModules()
  1280. {
  1281. foreach (var module in ModuleHelper.InstalledModules)
  1282. {
  1283. if (ModuleHelper.IsInstalled(module))
  1284. {
  1285. if (ModuleHelper.IsPm(module))
  1286. {
  1287. _dictModuleTask[module] = new VenusPMTask(module);
  1288. _preLotCleanMarks[module] = new List<Guid>();
  1289. _postLotCleanMarks[module] = new List<Guid>();
  1290. }
  1291. else if (ModuleHelper.IsTMRobot(module))
  1292. {
  1293. _dictModuleTask[module] = new VenusTMRobotTask(module);
  1294. }
  1295. else if (ModuleHelper.IsAligner(module))
  1296. {
  1297. _dictModuleTask[module] = new PreAlignTask(module);
  1298. }
  1299. else if (ModuleHelper.IsLoadPort(module))
  1300. {
  1301. _dictModuleTask[module] = new LoadPortTask(module);
  1302. }
  1303. }
  1304. }
  1305. }
  1306. private void prelude()
  1307. {
  1308. bool available = true;
  1309. foreach (var mod in _dictModuleTask)
  1310. {
  1311. available = mod.Value.Scheduler.IsAvailable; // force scheduler update
  1312. }
  1313. }
  1314. private void epilogue()
  1315. {
  1316. UpdateProcessJobStatus();
  1317. UpdateControlJobStatus();
  1318. RunLotCleanTasks();
  1319. CreateNewWaferTask();
  1320. _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
  1321. }
  1322. private void RunWaferTask()
  1323. {
  1324. foreach (var task in _lstWaferTasks)
  1325. {
  1326. task.Run();
  1327. }
  1328. }
  1329. private void RunModuleTasks()
  1330. {
  1331. foreach (var task in _dictModuleTask)
  1332. {
  1333. task.Value.Run();
  1334. }
  1335. }
  1336. private void RoutingWafers()
  1337. {
  1338. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1339. {
  1340. RunSchdTMActions();
  1341. return;
  1342. }
  1343. if (_tmRobotStatus != RState.End)
  1344. return;
  1345. if (_tmRobotSingleArmOption != 0)
  1346. {
  1347. RoutingWaferWithSingleArm();
  1348. return;
  1349. }
  1350. //wait for pick
  1351. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1352. //ready for back
  1353. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1354. // pm ready in 20s or pm is empty
  1355. var emptyAndReadyIn40sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 40).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1356. //robot has wafer
  1357. var robotWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList();
  1358. // aligner wafer
  1359. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1360. //robot is empty
  1361. if(robotWafers.Count == 0)
  1362. {
  1363. //has need return wafer
  1364. if(readyReturnWafers.Count > 0)
  1365. {
  1366. //==1 or ready destination is no the same
  1367. if(readyReturnWafers.Count == 1 || readyReturnWafers[0].destMod != readyReturnWafers[1].destMod)
  1368. {
  1369. // return one wafer
  1370. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1371. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, Hand.Blade1) });
  1372. }
  1373. else
  1374. {
  1375. // return two wafer
  1376. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[0].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1377. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[1].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
  1378. var doublePlaceActions = new List<MoveItem>
  1379. {
  1380. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers[0].destMod, readyReturnWafers[0].destSlot, Hand.Blade1),
  1381. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade2, readyReturnWafers[1].destMod, readyReturnWafers[1].destSlot, Hand.Blade2)
  1382. };
  1383. _tmSchdActions.Enqueue(doublePlaceActions);
  1384. }
  1385. }
  1386. // aligner has wafer need back
  1387. else if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1388. {
  1389. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1390. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1391. if (emptyAndReadyIn40sPMs.Contains(alignerWafer.destMod))
  1392. {
  1393. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1394. if(alignerWafer.destMod == pmTask.Module)
  1395. {
  1396. // move aligner wafer to PM
  1397. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, alignerWafer.destMod, alignerWafer.destSlot, Hand.Blade1) });
  1398. }
  1399. }
  1400. }
  1401. else
  1402. {
  1403. if (emptyAndReadyIn40sPMs.Count >= 2 && waitInWafers.Count >= 2)
  1404. {
  1405. var doublePickActions = new List<MoveItem>()
  1406. {
  1407. new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1),
  1408. new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2)
  1409. };
  1410. _tmSchdActions.Enqueue(doublePickActions);
  1411. if (aligner.Count > 0)
  1412. {
  1413. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1414. }
  1415. }
  1416. else if (emptyAndReadyIn40sPMs.Count >= 1 && waitInWafers.Count >= 1)
  1417. {
  1418. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1419. if (waitInWafers.Count == 2)
  1420. {
  1421. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
  1422. }
  1423. else if (aligner.Count > 0)
  1424. {
  1425. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1426. }
  1427. }
  1428. else if (waitInWafers.Count >= 1)
  1429. {
  1430. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1431. }
  1432. }
  1433. }
  1434. else if(robotWafers.Count == 1)
  1435. {
  1436. var freeHand = robotWafers.First().currentSlot == 0 ? Hand.Blade2 : Hand.Blade1;
  1437. if (readyReturnWafers.Count >= 1)
  1438. {
  1439. // return one wafer
  1440. //_tmSchdActions.Enqueue(new List<MoveItem> {
  1441. // new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand),
  1442. // new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand)
  1443. //});
  1444. if (robotWafers[0].destMod == readyReturnWafers.First().currentMod && ModuleHelper.IsPm(robotWafers[0].destMod) && string.IsNullOrEmpty(readyReturnWafers.First().wtwCleanRecipe))
  1445. {
  1446. _tmSchdActions.Enqueue(new List<MoveItem> {
  1447. new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand),
  1448. new MoveItem(ModuleName.TMRobot, freeHand == 0 ? 1:0, readyReturnWafers.First().currentMod, 0, freeHand== Hand.Blade1 ? Hand.Blade2: Hand.Blade1)
  1449. });
  1450. }
  1451. else
  1452. {
  1453. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand)});
  1454. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand) });
  1455. }
  1456. }
  1457. else
  1458. {
  1459. if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1460. {
  1461. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1462. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1463. if(!robotWafers.First().IsAligned)
  1464. {
  1465. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1466. }
  1467. if (emptyAndReadyIn40sPMs.Contains(alignerWafer.destMod))
  1468. {
  1469. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1470. if (alignerWafer.destMod == pmTask.Module)
  1471. {
  1472. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, alignerWafer.destMod, alignerWafer.destSlot, freeHand) });
  1473. }
  1474. }
  1475. }
  1476. else
  1477. {
  1478. if (ModuleHelper.IsPm(robotWafers.First().destMod))
  1479. {
  1480. if (!robotWafers.First().IsAligned)
  1481. {
  1482. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1483. }
  1484. else if (emptyAndReadyIn40sPMs.Contains(robotWafers.First().destMod))
  1485. {
  1486. var pmTask = _dictModuleTask[robotWafers.First().destMod] as VenusPMTask;
  1487. if (robotWafers.First().destMod == pmTask.Module)
  1488. {
  1489. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1490. }
  1491. }
  1492. }
  1493. else if (ModuleHelper.IsLoadPort(robotWafers.First().destMod) && _dictModuleTask[robotWafers.First().destMod].Scheduler.IsAvailable)
  1494. {
  1495. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1496. }
  1497. }
  1498. }
  1499. }
  1500. else // had better not go here
  1501. {
  1502. foreach(var wafer in robotWafers)
  1503. {
  1504. if (ModuleHelper.IsPm(wafer.destMod))
  1505. {
  1506. if (!wafer.IsAligned)
  1507. {
  1508. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod))&& _tmSchdActions.Count == 0)
  1509. {
  1510. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1511. }
  1512. }
  1513. else if (emptyAndReadyIn40sPMs.Contains(wafer.destMod))
  1514. {
  1515. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1516. if (wafer.destMod == pmTask.Module && _tmSchdActions.Count == 0)
  1517. {
  1518. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1519. }
  1520. }
  1521. }
  1522. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1523. {
  1524. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1525. }
  1526. }
  1527. }
  1528. }
  1529. private void RoutingWaferWithSingleArm()
  1530. {
  1531. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1532. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1533. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1534. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1535. var validHand = _tmRobotSingleArmOption == 1 ? Hand.Blade1 : Hand.Blade2;
  1536. var robotWafers = _lstWaferTasks.Where(wt => wt.currentMod == ModuleName.TMRobot && wt.currentSlot == (int)validHand).ToList();
  1537. if (robotWafers.Count == 0)
  1538. {
  1539. if (readyReturnWafers.Count > 0)
  1540. {
  1541. // return one wafer
  1542. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1543. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, validHand) });
  1544. }
  1545. else
  1546. {
  1547. if(_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1548. {
  1549. var alignerWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsAligner(wt.currentMod));
  1550. if(emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1551. {
  1552. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1553. // move aligner wafer to PM
  1554. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1555. if (alignerWafer.destMod == pmTask.Module)
  1556. {
  1557. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, alignerWafer.destMod, alignerWafer.destSlot, validHand) });
  1558. }
  1559. }
  1560. }
  1561. else
  1562. {
  1563. foreach(var wafer in waitInWafers)
  1564. {
  1565. if (_tmSchdActions.Count > 0)
  1566. break;
  1567. if(emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1568. {
  1569. // move one wafer from LP to aligner
  1570. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
  1571. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, aligner.First().Key, 0, validHand) });
  1572. }
  1573. }
  1574. }
  1575. }
  1576. }
  1577. else
  1578. {
  1579. var wafer = robotWafers[0];
  1580. if (ModuleHelper.IsPm(wafer.destMod))
  1581. {
  1582. if (!wafer.IsAligned)
  1583. {
  1584. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1585. {
  1586. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1587. }
  1588. }
  1589. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1590. {
  1591. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1592. if (wafer.destMod == pmTask.Module)
  1593. {
  1594. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1595. }
  1596. }
  1597. }
  1598. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1599. {
  1600. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1601. }
  1602. }
  1603. }
  1604. private void RunSchdTMActions()
  1605. {
  1606. if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
  1607. {
  1608. if (_tmSchdActions.Count > 0)
  1609. {
  1610. if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
  1611. {
  1612. bool pmswap = false;
  1613. //if (_tmSchdActions.Count == 1
  1614. // && _tmSchdActions.First().Count == 2
  1615. // && _tmSchdActions.First()[0].TransferType == EnumMoveType.Pick
  1616. // && _tmSchdActions.First()[1].TransferType == EnumMoveType.Place
  1617. // && _tmSchdActions.First()[0].SourceModule == _tmSchdActions.First()[1].DestinationModule)
  1618. //{
  1619. // pmswap = true;
  1620. //}
  1621. var nextActions = _tmSchdActions.First();
  1622. if (!pmswap && nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
  1623. return;
  1624. if (!pmswap && ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle) /// wait PMTask status update to idle
  1625. return;
  1626. //if (_tmSchdActions.Count == 2 && _tmSchdActions[0].)
  1627. //{
  1628. //
  1629. //}
  1630. _curTmAction = _tmSchdActions.Dequeue();
  1631. foreach (var action in _curTmAction)
  1632. {
  1633. var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
  1634. waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
  1635. }
  1636. (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).SendMoveItems(_curTmAction.ToArray());
  1637. }
  1638. }
  1639. else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
  1640. {
  1641. _curTmAction.Clear();
  1642. }
  1643. }
  1644. }
  1645. private bool isReturnActionsDone(List<MoveItem> items)
  1646. {
  1647. foreach (var item in items)
  1648. {
  1649. if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
  1650. return false;
  1651. }
  1652. return true;
  1653. }
  1654. private bool IsMovingActionsDone(List<MoveItem> actions)
  1655. {
  1656. bool CheckWaferExistence(ModuleName mod, int slot)
  1657. {
  1658. return ModuleHelper.IsLoadPort(mod) ? WaferManager.Instance.CheckHasWafer(mod, slot) : _lstWaferTasks.Exists(wt => wt.currentMod == mod && wt.currentSlot == slot);
  1659. }
  1660. if (actions.Count == 1)
  1661. {
  1662. if (CheckWaferExistence(actions.First().SourceModule, actions.First().SourceSlot) ||
  1663. !CheckWaferExistence(actions.First().DestinationModule, actions.First().DestinationSlot))
  1664. return false;
  1665. }
  1666. else
  1667. {
  1668. // initialize all the wafer existance before move
  1669. var slotWafers = new Dictionary<KeyValuePair<ModuleName, int>, bool>();
  1670. foreach (var ac in actions)
  1671. {
  1672. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1673. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1674. if (!slotWafers.ContainsKey(scrSlot))
  1675. {
  1676. slotWafers[scrSlot] = true;
  1677. }
  1678. if (!slotWafers.ContainsKey(destSlot))
  1679. {
  1680. slotWafers[destSlot] = false;
  1681. }
  1682. }
  1683. // simulate moved result
  1684. foreach (var ac in actions)
  1685. {
  1686. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1687. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1688. if (!slotWafers[scrSlot])
  1689. {
  1690. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[scrSlot]} do not has a wafer");
  1691. }
  1692. else
  1693. {
  1694. slotWafers[scrSlot] = false;
  1695. }
  1696. if (slotWafers[destSlot])
  1697. {
  1698. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[destSlot]} has a wafer");
  1699. }
  1700. else
  1701. {
  1702. slotWafers[destSlot] = true;
  1703. }
  1704. }
  1705. foreach (var slot in slotWafers)
  1706. {
  1707. if (slot.Value != CheckWaferExistence(slot.Key.Key, slot.Key.Value))
  1708. return false;
  1709. }
  1710. }
  1711. return true;
  1712. }
  1713. private void WaferArrived(WaferTask wafer, MoveItem item)
  1714. {
  1715. _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);
  1716. //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
  1717. if (ModuleHelper.IsLoadPort(item.DestinationModule))
  1718. {
  1719. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
  1720. if (currentControlJob != null)
  1721. {
  1722. _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
  1723. }
  1724. }
  1725. //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
  1726. }
  1727. private void WaferLeaved(WaferTask wafer, MoveItem item)
  1728. {
  1729. _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
  1730. //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
  1731. if (ModuleHelper.IsLoadPort(item.SourceModule))
  1732. {
  1733. //(_dictModuleTask[wafer.destMod] as VenusPMTask).SubscribeWaferTask(wafer);
  1734. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
  1735. if (currentControlJob != null)
  1736. {
  1737. _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
  1738. }
  1739. }
  1740. //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
  1741. }
  1742. private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  1743. {
  1744. bool allWaferReturn = true;
  1745. foreach (var slot in pj.SlotWafers)
  1746. {
  1747. var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
  1748. if (wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
  1749. {
  1750. allWaferReturn = false;
  1751. break;
  1752. }
  1753. }
  1754. return allWaferReturn;
  1755. }
  1756. private void ReturnInternalWafers()
  1757. {
  1758. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1759. {
  1760. RunSchdTMReturnActions();
  1761. return;
  1762. }
  1763. if (_tmRobotStatus != RState.End)
  1764. return;
  1765. for (int i = 0; i < 2; i++)
  1766. {
  1767. if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, i))
  1768. {
  1769. var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, i);
  1770. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
  1771. return;
  1772. }
  1773. }
  1774. foreach(var mod in _dictModuleTask)
  1775. {
  1776. if (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsLoadPort(mod.Key))
  1777. continue;
  1778. if(WaferManager.Instance.CheckHasWafer(mod.Key, 0))
  1779. {
  1780. var wafer = WaferManager.Instance.GetWafer(mod.Key, 0);
  1781. var freeHands = GetTMFreeHand();
  1782. if(freeHands.Count > 0)
  1783. {
  1784. var hand = freeHands[0];
  1785. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(mod.Key, 0, ModuleName.TMRobot, (int)hand, hand) });
  1786. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hand, (ModuleName)wafer.OriginStation, wafer.OriginSlot, hand) });
  1787. return;
  1788. }
  1789. }
  1790. }
  1791. }
  1792. private List<Hand> GetTMFreeHand()
  1793. {
  1794. var lstHands = new List<Hand>();
  1795. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
  1796. lstHands.Add(Hand.Blade1);
  1797. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
  1798. lstHands.Add(Hand.Blade2);
  1799. return lstHands;
  1800. }
  1801. private void UpdateProcessJobStatus()
  1802. {
  1803. if (_tmRobotStatus == RState.Running)
  1804. return;
  1805. foreach (var pj in _lstProcessJobs)
  1806. {
  1807. if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
  1808. {
  1809. pj.SetState(EnumProcessJobState.ProcessingComplete);
  1810. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  1811. }
  1812. }
  1813. }
  1814. private void UpdateControlJobStatus()
  1815. {
  1816. if (_lstControlJobs.Count == 0 || _tmRobotStatus == RState.Running)
  1817. return;
  1818. var runningJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Executing);
  1819. var queueJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Queued).OrderBy(cj => cj.StartTime);
  1820. if (runningJobs.Count == 0)
  1821. {
  1822. if (queueJobs.Count() > 0)
  1823. {
  1824. // start the first waiting job
  1825. RunControlJob(queueJobs.First());
  1826. }
  1827. }
  1828. else
  1829. {
  1830. foreach (var runningjob in runningJobs)
  1831. {
  1832. // update the running job
  1833. RunControlJob(runningjob);
  1834. }
  1835. foreach (var queueJob in queueJobs)
  1836. {
  1837. if (!runningJobs.Exists(cj => IsControlJobIntersect(cj, queueJob)))
  1838. {
  1839. // parallelly start the not intersect job
  1840. RunControlJob(queueJob);
  1841. }
  1842. }
  1843. }
  1844. // update system cycle status
  1845. if (_lstControlJobs.All(cj => cj.State == EnumControlJobState.Completed))
  1846. _cycleState = RState.End;
  1847. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  1848. foreach (var cj in _lstControlJobs)
  1849. {
  1850. LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
  1851. if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
  1852. {
  1853. cjRemoveList.Add(cj);
  1854. }
  1855. }
  1856. foreach (var cj in cjRemoveList)
  1857. {
  1858. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1859. foreach (var pj in _lstProcessJobs)
  1860. {
  1861. if (pj.ControlJobName == cj.Name)
  1862. pjRemoveList.Add(pj);
  1863. }
  1864. foreach (var pj in pjRemoveList)
  1865. {
  1866. _lstProcessJobs.Remove(pj);
  1867. }
  1868. _lstControlJobs.Remove(cj);
  1869. }
  1870. }
  1871. private void RunLotCleanTasks()
  1872. {
  1873. foreach (var pm in _dictModuleTask)
  1874. {
  1875. if (!ModuleHelper.IsPm(pm.Key))
  1876. continue;
  1877. var pmTask = pm.Value as VenusPMTask;
  1878. if (pmTask.HasWafer)
  1879. {
  1880. var pmWafer = _lstWaferTasks.Find(wt => wt.currentMod == pm.Key);
  1881. if (pmWafer != null && IsProcessJobEnding(pmWafer.lotId, pm.Key) && !_postLotCleanMarks[pm.Key].Contains(pmWafer.lotId))
  1882. {
  1883. var pj = _lstProcessJobs.Find(process => process.InnerId == pmWafer.lotId);
  1884. if (pj != null)
  1885. {
  1886. //2024-10-31 15:36:19 修改postjob来源
  1887. //var postClean = pj.Sequence.GetPostCleanRecipe(pm.Key);
  1888. var postClean = pj.Sequence.GetPostCleanRecipe(pm.Key);
  1889. if (!string.IsNullOrWhiteSpace(postClean))
  1890. {
  1891. pmTask.InvokePostJobClean(postClean);
  1892. _postLotCleanMarks[pm.Key].Add(pmWafer.lotId);
  1893. }
  1894. }
  1895. }
  1896. }
  1897. // pre clean
  1898. var waitInWafer = GetFirstWaitInWafer(pm.Key);
  1899. if (waitInWafer != null && !_preLotCleanMarks[pm.Key].Contains(waitInWafer.lotId))
  1900. {
  1901. var pj = _lstProcessJobs.Find(process => process.InnerId == waitInWafer.lotId);
  1902. if (pj != null)
  1903. {
  1904. //2024-10-31 15:36:37 修改prejob来源
  1905. //var preClean = pj.Sequence.GetPreCleanRecipe(pm.Key);
  1906. var preClean = pj.Sequence.GetPreCleanRecipe(pm.Key);
  1907. if (!string.IsNullOrWhiteSpace(preClean))
  1908. {
  1909. pmTask.InvokePreJobClean(preClean);
  1910. _preLotCleanMarks[pm.Key].Add(waitInWafer.lotId);
  1911. }
  1912. }
  1913. }
  1914. }
  1915. }
  1916. ControlJobInfo FindControlJobByName(string CJName)
  1917. {
  1918. return _lstControlJobs.Find(x=>x.Name == CJName);
  1919. }
  1920. bool IsProcessJobEnding(Guid pjId, ModuleName pm)
  1921. {
  1922. if (!_lstWaferTasks.Exists(wt => wt.lotId == pjId && wt.destMod == pm && !ModuleHelper.IsPm(wt.currentMod)))
  1923. {
  1924. var processJob = _lstProcessJobs.Find(pj => pj.InnerId == pjId);
  1925. if (processJob == null)
  1926. return false;
  1927. foreach (var slot in processJob.SlotWafers)
  1928. {
  1929. if (WaferManager.Instance.CheckHasWafer(slot.Item1, slot.Item2))
  1930. {
  1931. if (WaferManager.Instance.GetWafer(slot.Item1, slot.Item2).NextSequenceStep == 0)
  1932. return false;
  1933. }
  1934. }
  1935. return true;
  1936. }
  1937. return false;
  1938. }
  1939. WaferTask GetFirstWaitInWafer(ModuleName pm)
  1940. {
  1941. int distance(WaferTask wafer)
  1942. {
  1943. if (ModuleHelper.IsTMRobot(wafer.currentMod))
  1944. return 0;
  1945. else if (ModuleHelper.IsLoadLock(wafer.currentMod))
  1946. {
  1947. return (_dictModuleTask[wafer.currentMod] as LoadlockTask).Distance;
  1948. }
  1949. else if (ModuleHelper.IsEFEMRobot(wafer.currentMod))
  1950. {
  1951. if (wafer.IsAligned)
  1952. return 15;
  1953. else
  1954. return 19;
  1955. }
  1956. return 17;
  1957. }
  1958. var waitInWafers = _lstWaferTasks.Where(wt => (wt.destMod == pm) && !ModuleHelper.IsPm(wt.currentMod) && !ModuleHelper.IsLoadPort(wt.currentMod)).OrderBy(wt => distance(wt));
  1959. if (waitInWafers.Count() > 0)
  1960. return waitInWafers.First();
  1961. return null;
  1962. }
  1963. private bool RunControlJob(ControlJobInfo cj)
  1964. {
  1965. switch (cj.JetState)
  1966. {
  1967. //case EnumJetCtrlJobState.Quequed:
  1968. // {
  1969. // if (IsCtrlJobNeedPreClean(cj))
  1970. // {
  1971. // cj.JetState = EnumJetCtrlJobState.PreJobClean;
  1972. // var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  1973. // foreach (var pm in PMs)
  1974. // {
  1975. // var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1976. // if (pmTask != null && pmTask.Scheduler.IsOnline)
  1977. // {
  1978. // pmTask.InvokePreJobClean(cj.PreJobClean);
  1979. // //pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PreClean);
  1980. // }
  1981. // }
  1982. // }
  1983. // else
  1984. // {
  1985. // ActiveControlJob(cj);
  1986. // }
  1987. // cj.SetState(EnumControlJobState.Executing);
  1988. // }
  1989. // break;
  1990. //case EnumJetCtrlJobState.PreJobClean:
  1991. // {
  1992. // if (IsPreJobCleanDone(cj))
  1993. // {
  1994. // ActiveControlJob(cj);
  1995. // }
  1996. // }
  1997. // break;
  1998. //case EnumJetCtrlJobState.Processing:
  1999. // {
  2000. // if (IsCtrlJobNeedPostClean(cj))
  2001. // {
  2002. // if (IsAllJobWaferProcessedOrProcessing(cj))
  2003. // {
  2004. // cj.JetState = EnumJetCtrlJobState.PostJobClean;
  2005. // var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  2006. // foreach (var pm in PMs)
  2007. // {
  2008. // var pmTask = _dictModuleTask[pm] as VenusPMTask;
  2009. // if (pmTask != null && pmTask.Scheduler.IsOnline)
  2010. // {
  2011. // pmTask.InvokePostJobClean(cj.PostJobClean);
  2012. // //pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PostClean);
  2013. // }
  2014. // }
  2015. // }
  2016. // }
  2017. // else
  2018. // {
  2019. // if (IsAllProcessJobComplete(cj))
  2020. // {
  2021. // cj.JetState = EnumJetCtrlJobState.Completed;
  2022. // }
  2023. // }
  2024. // }
  2025. // break;
  2026. //case EnumJetCtrlJobState.PostJobClean:
  2027. // {
  2028. // if (IsPostJobCleanDone(cj))
  2029. // {
  2030. // cj.JetState = EnumJetCtrlJobState.Completed;
  2031. // }
  2032. // }
  2033. // break;
  2034. case EnumJetCtrlJobState.Quequed:
  2035. {
  2036. ActiveControlJob(cj);
  2037. }
  2038. break;
  2039. case EnumJetCtrlJobState.Processing:
  2040. {
  2041. if (IsAllProcessJobComplete(cj))
  2042. {
  2043. cj.JetState = EnumJetCtrlJobState.Completed;
  2044. }
  2045. }
  2046. break;
  2047. }
  2048. // caculate processed wafer by control job
  2049. var lp = ModuleHelper.Converter(cj.Module);
  2050. int countProcessed = 0;
  2051. foreach (var pjName in cj.ProcessJobNameList)
  2052. {
  2053. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  2054. if (pj == null)
  2055. {
  2056. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  2057. continue;
  2058. }
  2059. // caculate process wafer by process
  2060. if (_lpCycleCount[lp] < cj.CycleNumber)
  2061. {
  2062. foreach (var pjSlotWafer in pj.SlotWafers)
  2063. {
  2064. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  2065. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  2066. countProcessed++;
  2067. }
  2068. }
  2069. }
  2070. int lpCycleWafer = 0;
  2071. if (cj.JetState == EnumJetCtrlJobState.Completed)
  2072. {
  2073. cj.EndTime = DateTime.Now;
  2074. _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
  2075. _dbCallback.LotFinished(cj);
  2076. if (_lpCycleCount[lp] >= cj.CycleNumber - 1 || !_isCycleMode)
  2077. {
  2078. (Singleton<TransferModule>.Instance.GetScheduler(lp) as SchedulerLoadPort).NoteJobComplete();
  2079. if(_VceAutoUnLoad)
  2080. Singleton<RouteManager>.Instance.GetVCE(VCE2LP.QueryLP2VCE(ModuleHelper.Converter(cj.Module))).PostMsg(VceMSG.SafeUnload);
  2081. }
  2082. _lpCycleCount[lp]++;
  2083. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count;
  2084. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  2085. LOG.Write(eEvent.EV_ROUTER, lp, $"Cycle Count: {_lpCycleCount[lp]}, Total Processed Wafer: {lpCycleWafer}, Throughput: {_lpThroughput[lp]}");
  2086. if (_lpCycleCount[lp] < cj.CycleNumber)
  2087. {
  2088. cj.SetState(EnumControlJobState.Executing);
  2089. cj.JetState = EnumJetCtrlJobState.Quequed;
  2090. cj.LotInnerId = Guid.NewGuid();
  2091. _dbCallback.LotCreated(cj);
  2092. foreach (var pj in _lstProcessJobs)
  2093. {
  2094. if (pj.ControlJobName == cj.Name)
  2095. {
  2096. foreach (var marks in _preLotCleanMarks)
  2097. {
  2098. if (marks.Value.Contains(pj.InnerId))
  2099. marks.Value.Remove(pj.InnerId);
  2100. }
  2101. foreach (var marks in _postLotCleanMarks)
  2102. {
  2103. if (marks.Value.Contains(pj.InnerId))
  2104. marks.Value.Remove(pj.InnerId);
  2105. }
  2106. pj.SetState(EnumProcessJobState.Queued);
  2107. pj.InnerId = Guid.NewGuid();
  2108. foreach (var pjSlotWafer in pj.SlotWafers)
  2109. {
  2110. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  2111. wafer.ProcessJob = null;
  2112. wafer.NextSequenceStep = 0;
  2113. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  2114. }
  2115. }
  2116. }
  2117. _lstWaferTasks.RemoveAll(wt => wt.currentMod == lp);
  2118. }
  2119. else
  2120. {
  2121. cj.SetState(EnumControlJobState.Completed);
  2122. }
  2123. }
  2124. else
  2125. {
  2126. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count + countProcessed;
  2127. }
  2128. if (lpCycleWafer != _lpCycleWafer[lp])
  2129. {
  2130. _lpCycleWafer[lp] = lpCycleWafer;
  2131. if (_lpCycleCount[lp] > 0)
  2132. {
  2133. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  2134. }
  2135. }
  2136. return cj.State == EnumControlJobState.Completed;
  2137. }
  2138. private bool IsControlJobIntersect(ControlJobInfo cj1, ControlJobInfo cj2)
  2139. {
  2140. var cj1Pms = GetWaitPreCleanPMsByCtrlJob(cj1);
  2141. var cj2Pms = GetWaitPreCleanPMsByCtrlJob(cj2);
  2142. return cj1Pms.Intersect(cj2Pms).Count() > 0;
  2143. }
  2144. private bool IsCtrlJobNeedPreClean(ControlJobInfo cj)
  2145. {
  2146. return !string.IsNullOrWhiteSpace(cj.PreJobClean);
  2147. }
  2148. private bool IsCtrlJobNeedPostClean(ControlJobInfo cj)
  2149. {
  2150. return !string.IsNullOrWhiteSpace(cj.PostJobClean?.Trim());
  2151. }
  2152. private bool IsPreJobCleanDone(ControlJobInfo cj)
  2153. {
  2154. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  2155. foreach (var pm in pms)
  2156. {
  2157. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  2158. if (pmTask.Scheduler.IsOnline && !pmTask.IsPreJobCleanDone())
  2159. return false;
  2160. }
  2161. return true;
  2162. }
  2163. private bool IsPostJobCleanDone(ControlJobInfo cj)
  2164. {
  2165. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  2166. foreach (var pm in pms)
  2167. {
  2168. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  2169. if (pmTask.Scheduler.IsOnline && !pmTask.IsPostJobCleanDone())
  2170. return false;
  2171. }
  2172. return true;
  2173. }
  2174. private bool ActiveProcessJob(ProcessJobInfo pj)
  2175. {
  2176. foreach (var pjSlotWafer in pj.SlotWafers)
  2177. {
  2178. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  2179. wafer.ProcessJob = pj;
  2180. wafer.NextSequenceStep = 0;
  2181. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  2182. }
  2183. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);
  2184. CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
  2185. JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
  2186. pj.SetState(EnumProcessJobState.Processing);
  2187. return true;
  2188. }
  2189. private bool ActiveControlJob(ControlJobInfo cj)
  2190. {
  2191. cj.JetState = EnumJetCtrlJobState.Processing;
  2192. foreach (var pjName in cj.ProcessJobNameList)
  2193. {
  2194. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  2195. if (pj == null)
  2196. {
  2197. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  2198. continue;
  2199. }
  2200. if (pj.State == EnumProcessJobState.Queued)
  2201. {
  2202. ActiveProcessJob(pj);
  2203. }
  2204. }
  2205. return true;
  2206. }
  2207. private bool IsAllProcessJobComplete(ControlJobInfo cj)
  2208. {
  2209. foreach (var pj in _lstProcessJobs)
  2210. {
  2211. if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
  2212. {
  2213. return false;
  2214. }
  2215. }
  2216. return true;
  2217. }
  2218. private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
  2219. {
  2220. List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
  2221. int original = (int)ModuleHelper.Converter(cj.Module);
  2222. foreach (var mod in allModules)
  2223. {
  2224. if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
  2225. continue;
  2226. var wafers = WaferManager.Instance.GetWafers(mod);
  2227. foreach (var wafer in wafers)
  2228. {
  2229. if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
  2230. continue;
  2231. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
  2232. return false; ;
  2233. }
  2234. }
  2235. return true;
  2236. }
  2237. private ModuleName GetComingAvailablePM(ControlJobInfo cj)
  2238. {
  2239. var lstInProcessPMs = new List<ModuleName>();
  2240. foreach (var wafer in cj.LotWafers)
  2241. {
  2242. if (!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
  2243. {
  2244. foreach (var pm in wafer.ProcessJob.Sequence.PMs)
  2245. {
  2246. if (!lstInProcessPMs.Contains(pm) && _dictModuleTask[pm].Scheduler.IsOnline)
  2247. lstInProcessPMs.Add(pm);
  2248. }
  2249. }
  2250. }
  2251. Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
  2252. foreach (var mod in _dictModuleTask)
  2253. {
  2254. if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
  2255. {
  2256. pmAssociatedWaferCount[mod.Key] = 0;
  2257. }
  2258. }
  2259. var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
  2260. foreach (var wafer in unprocessedWafer)
  2261. {
  2262. if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
  2263. {
  2264. pmAssociatedWaferCount[wafer.destMod]++;
  2265. }
  2266. }
  2267. var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
  2268. if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
  2269. return oderedPMCount.First().Key;
  2270. return ModuleName.System;
  2271. }
  2272. private void CreateNewWaferTask()
  2273. {
  2274. var runningJobs = _lstControlJobs.FindAll(cj => cj.JetState == EnumJetCtrlJobState.PreJobClean || cj.JetState == EnumJetCtrlJobState.Processing);
  2275. var onDutyPms = new Dictionary<ModuleName, int>();
  2276. foreach (var job in runningJobs)
  2277. {
  2278. var pms = GetWaitPreCleanPMsByCtrlJob(job);
  2279. foreach (var pm in pms)
  2280. {
  2281. if (_dictModuleTask[pm].Scheduler.IsOnline && !onDutyPms.ContainsKey(pm))
  2282. {
  2283. onDutyPms[pm] = _lstWaferTasks.Where(wt => wt.destMod == pm).Count();
  2284. }
  2285. }
  2286. }
  2287. if (runningJobs.Count == 0 || onDutyPms.Count == 0)
  2288. return;
  2289. var oderedPMs = onDutyPms.OrderBy(kv => kv.Value).OrderBy(kv => _dictModuleTask[kv.Key].TimeToReady);
  2290. if (oderedPMs.First().Value <= 1)
  2291. {
  2292. foreach (var runningJob in runningJobs)
  2293. {
  2294. foreach (var wafer in runningJob.LotWafers)
  2295. {
  2296. if (wafer.IsEmpty || wafer.ProcessJob == null)
  2297. continue;
  2298. if (_lstWaferTasks.Count >= oderedPMs.Count() * 2)
  2299. return;
  2300. if (wafer.ProcessJob.Sequence.PMs.Contains(oderedPMs.First().Key) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
  2301. {
  2302. if (oderedPMs.First().Key != oderedPMs.Last().Key)
  2303. {
  2304. if (oderedPMs.First().Value % 2 == 0 && Is1stPMFirst(oderedPMs.First().Key, oderedPMs.Last().Key))
  2305. CreateWaferTasks(wafer, oderedPMs.First().Key);
  2306. else
  2307. CreateWaferTasks(wafer, oderedPMs.Last().Key);
  2308. }
  2309. else
  2310. {
  2311. CreateWaferTasks(wafer, oderedPMs.First().Key);
  2312. }
  2313. }
  2314. if (_lstWaferTasks.Count >= oderedPMs.Count() * 2)
  2315. return;
  2316. }
  2317. }
  2318. }
  2319. }
  2320. private void CreateWaferTasks(WaferInfo wafer, ModuleName pm)
  2321. {
  2322. var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
  2323. var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
  2324. Recipe recipe = Recipe.Load(recipeContent);
  2325. int temperature = 0;
  2326. if (int.TryParse(recipe.Header.Temperature, out int temp))
  2327. {
  2328. temperature = temp;
  2329. }
  2330. var waferTask = new WaferTask((ModuleName)wafer.OriginStation,
  2331. wafer.OriginSlot,
  2332. pm,
  2333. 0,
  2334. temperature,
  2335. wafer.InnerId,
  2336. wafer.ProcessJob.InnerId,
  2337. recipeName,
  2338. wafer.ProcessJob.Sequence.GetWTWCleanRecipe(pm),
  2339. wafer.ProcessJob.Sequence.LLInOutPath,
  2340. wafer.ProcessJob.Sequence.LLDelayTime,
  2341. IsSequenceNeedAlign(wafer.ProcessJob.Sequence)); // post clean
  2342. waferTask.OnWaferArrived += WaferArrived;
  2343. waferTask.OnWaferLeaved += WaferLeaved;
  2344. _lstWaferTasks.Add(waferTask);
  2345. }
  2346. private bool IsSequenceNeedAlign(SequenceInfo sequence)
  2347. {
  2348. // check wether need align
  2349. foreach (var step in sequence.Steps)
  2350. {
  2351. foreach (var mod in step.StepModules)
  2352. {
  2353. if (ModuleHelper.IsAligner(mod))
  2354. return true;
  2355. }
  2356. }
  2357. return false;
  2358. }
  2359. private void RunSchdTMReturnActions()
  2360. {
  2361. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  2362. if (tmRobot == null || !tmRobot.IsAvailable)
  2363. return;
  2364. if (_tmSchdActions.Count > 0)
  2365. {
  2366. if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
  2367. {
  2368. var nextActions = _tmSchdActions.First();
  2369. var nextModule = nextActions.First().Module;
  2370. if (!_dictModuleTask[nextModule].IsIdle)
  2371. return;
  2372. _curTmAction = _tmSchdActions.Dequeue();
  2373. tmRobot.SendMoveItems(_curTmAction.ToArray());
  2374. }
  2375. }
  2376. else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
  2377. {
  2378. _curTmAction.Clear();
  2379. }
  2380. }
  2381. #endregion internal implementation
  2382. #region sequence/recipe validation
  2383. private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
  2384. {
  2385. reason = "";
  2386. foreach (var pm in seq.PMs)
  2387. {
  2388. if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
  2389. return true;
  2390. }
  2391. reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);
  2392. return false;
  2393. }
  2394. private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
  2395. {
  2396. for (int i = 0; i < seq.Steps.Count; i++)
  2397. {
  2398. SequenceStepInfo stepInfo = seq.Steps[i];
  2399. foreach (var module in stepInfo.StepModules)
  2400. {
  2401. if (ModuleHelper.IsPm(module))
  2402. {
  2403. string attr = $"{module}Recipe";
  2404. if (stepInfo.StepParameter.ContainsKey(attr)
  2405. && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
  2406. {
  2407. var recipeName = (string)stepInfo.StepParameter[attr];
  2408. if (!string.IsNullOrWhiteSpace(recipeName))
  2409. {
  2410. var recipeContent =
  2411. RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
  2412. if (string.IsNullOrWhiteSpace(recipeContent))
  2413. {
  2414. reason = $"Can not find recipe file{recipeName}";
  2415. return false;
  2416. }
  2417. }
  2418. }
  2419. }
  2420. }
  2421. }
  2422. reason = "";
  2423. return true;
  2424. }
  2425. private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
  2426. {
  2427. var pmlist = new List<ModuleName>();
  2428. foreach (var pj in _lstProcessJobs)
  2429. {
  2430. if (pj.ControlJobName == cj.Name)
  2431. {
  2432. foreach (var pm in pj.Sequence.PMs)
  2433. {
  2434. if (!pmlist.Contains(pm))
  2435. pmlist.Add(pm);
  2436. }
  2437. }
  2438. }
  2439. return pmlist;
  2440. }
  2441. private bool Is1stPMFirst(ModuleName firstpm, ModuleName secondpm)
  2442. {
  2443. if (firstpm == secondpm)
  2444. return true;
  2445. if(_dictModuleTask[firstpm].HasWafer && !_dictModuleTask[secondpm].HasWafer)
  2446. return false;
  2447. if (!_dictModuleTask[firstpm].HasWafer && _dictModuleTask[secondpm].HasWafer)
  2448. return true;
  2449. if (_dictModuleTask[firstpm].HasWafer && _dictModuleTask[secondpm].HasWafer)
  2450. {
  2451. if (_dictModuleTask[firstpm].TimeToReady <= _dictModuleTask[secondpm].TimeToReady)
  2452. return true;
  2453. else
  2454. return false;
  2455. }
  2456. return true;
  2457. }
  2458. #endregion
  2459. }
  2460. }