PumpDownRoutine.cs 11 KB

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  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. using Aitex.Core.RT.Log;
  8. namespace Venus_RT.Modules.PMs
  9. {
  10. class PumpDownRoutine : PMRoutineBase, IRoutine
  11. {
  12. private enum PumpStep
  13. {
  14. kDelay_2s,
  15. kCloseISOValve,
  16. kSoftPump,
  17. kFastPump,
  18. kHe2ExDelay,
  19. kPVHe2,
  20. kISOValve,
  21. kTurboN2Purge,
  22. kVATValve,
  23. kOpenTurboPumpPurgeGasFinal,
  24. kOpenTurboPump,
  25. kGasFinal,
  26. kFinalStep,
  27. kCloseValve,
  28. vFastPump,
  29. kEnd,
  30. }
  31. //private int _ventTime;
  32. private int _pump_delay = 5000;
  33. private int _roughPumpPressure = 75000;
  34. private int _vHe2FlowPressure = 200;
  35. private int _forelinePressure = 200;
  36. private int _basePressure = 10;
  37. private JetChamber jetChamber = JetChamber.None;
  38. //private bool needsoft = true;
  39. public PumpDownRoutine(JetPMBase chamber) : base(chamber)
  40. {
  41. jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
  42. Name = "PumpDown";
  43. //if (jetChamber == JetChamber.VenusDE)
  44. //{
  45. // needsoft = false;
  46. //}
  47. }
  48. public RState Start(params object[] objs)
  49. {
  50. if (CheckLid() &&
  51. CheckSlitDoor())
  52. {
  53. Reset();
  54. _chamber.CloseValves();
  55. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.PumpCrossingPressure");
  56. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  57. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  58. if(jetChamber != JetChamber.VenusSE && jetChamber != JetChamber.VenusDE)
  59. _chamber.OpenValve(ValveType.PVN22, true);
  60. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  61. _chamber.TurnPendulumValve(false);
  62. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  63. //前端压力值高于某个数值
  64. _forelinePressure = SC.GetValue<int>($"{Module}.Pump.ForelinePressure");
  65. if (!_chamber.IsPumpRunning || _chamber.ForelinePressure > _forelinePressure)
  66. {
  67. LOG.Write(eEvent.ERR_PM,Module, $"Cannot start pumpdown, drypump running:{_chamber.IsPumpRunning}, ForelinePressure:{_chamber.ForelinePressure}=>Target:{_forelinePressure}");
  68. return RState.Failed;
  69. }
  70. return Runner.Start(Module, Name);
  71. }
  72. return RState.Failed;
  73. }
  74. public RState Monitor()
  75. {
  76. switch (jetChamber)
  77. {
  78. //case JetChamber.Venus:
  79. case JetChamber.VenusSE:
  80. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  81. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  82. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), CheckToCrossPressure)
  83. .Run(PumpStep.vFastPump, VenusFastPump, () => { return _chamber.ChamberPressure <= _vHe2FlowPressure; })
  84. .Delay(PumpStep.kHe2ExDelay, 3000)
  85. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  86. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  87. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  88. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  89. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  90. .Run(PumpStep.kCloseValve, CloseValve, NullFun)
  91. .End(PumpStep.kEnd, NullFun, _delay_1s);
  92. break;
  93. case JetChamber.Kepler2300:
  94. case JetChamber.Kepler2200A:
  95. case JetChamber.Kepler2200B:
  96. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  97. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  98. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), CheckToCrossPressure)
  99. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  100. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  101. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  102. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  103. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  104. .End(PumpStep.kEnd, NullFun, _delay_1s);
  105. break;
  106. case JetChamber.VenusDE:
  107. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  108. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  109. .Run(PumpStep.kFastPump, OpenDEFastPump, VenusFastPumpOver )
  110. .Delay(PumpStep.kHe2ExDelay, 3000)
  111. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  112. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  113. .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  114. .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  115. .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  116. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  117. .Run(PumpStep.kCloseValve,CloseValve,NullFun)
  118. .End(PumpStep.kEnd, NullFun, _delay_1s);
  119. break;
  120. }
  121. //if (jetChamber == JetChamber.VenusDE)
  122. //{
  123. // Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  124. // .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  125. // .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_5s)
  126. // .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  127. // .Run(PumpStep.kISOValve, OpenISOValve, _delay_5s)
  128. // .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  129. // .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  130. // .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  131. // .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  132. // .End(PumpStep.kEnd, NullFun, _delay_1s);
  133. //}
  134. //else
  135. //{
  136. // Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  137. // .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  138. // .RunIf(PumpStep.kSoftPump, needsoft, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  139. // .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  140. // .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  141. // .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  142. // .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  143. // .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  144. // .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  145. // .End(PumpStep.kEnd, NullFun, _delay_1s);
  146. //}
  147. return Runner.Status;
  148. }
  149. private bool CheckToCrossPressure()
  150. {
  151. if (_chamber.ChamberPressure < _roughPumpPressure)
  152. {
  153. _chamber.OpenValve(ValveType.SoftPump, false);
  154. return true;
  155. }
  156. else
  157. return false;
  158. }
  159. private bool CloseValve()
  160. {
  161. _chamber.OpenValve(ValveType.PVN22, false);
  162. return true;
  163. }
  164. private bool OpenTurboPumpPurgeGasFinalValve()
  165. {
  166. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  167. _chamber.OpenValve(ValveType.GasFinal, true);
  168. return true;
  169. }
  170. private bool OpenTurboValve()
  171. {
  172. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  173. return true;
  174. }
  175. private bool OpenGuageGasFinalValve()
  176. {
  177. _chamber.OpenValve(ValveType.GasFinal, true);
  178. _chamber.OpenValve(ValveType.Guage, true);
  179. return true;
  180. }
  181. private bool VenusFastPumpOver()
  182. {
  183. if (_chamber.ChamberPressure < _vHe2FlowPressure)
  184. {
  185. _chamber.OpenValve(ValveType.FastPump, false);
  186. return true;
  187. }
  188. else
  189. return false;
  190. }
  191. private bool VenusFastPump()
  192. {
  193. _chamber.OpenValve(ValveType.SoftPump, false);
  194. if (_chamber.ChamberPressure > _vHe2FlowPressure)
  195. {
  196. _chamber.OpenValve(ValveType.FastPump, true);
  197. }
  198. return true;
  199. }
  200. private bool OpenFastPump()
  201. {
  202. _chamber.OpenValve(ValveType.SoftPump, false);
  203. _chamber.OpenValve(ValveType.FastPump, true);
  204. return true;
  205. }
  206. private bool OpenDEFastPump()
  207. {
  208. _chamber.OpenValve(ValveType.PVHe2, false);
  209. //_chamber.OpenValve(ValveType.SoftPump, false);
  210. if (_chamber.ChamberPressure > _vHe2FlowPressure)
  211. {
  212. _chamber.OpenValve(ValveType.FastPump, true);
  213. }
  214. return true;
  215. }
  216. private bool OpenHe2Valve()
  217. {
  218. _chamber.OpenValve(ValveType.FastPump, false);
  219. _chamber.OpenValve(ValveType.PVHe2, true);
  220. return true;
  221. }
  222. private bool OpenISOValve()
  223. {
  224. _chamber.OpenValve(ValveType.FastPump, false);
  225. _chamber.OpenValve(ValveType.PVHe2, false);
  226. // ISO Valve
  227. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  228. return true;
  229. }
  230. private bool OpenVATValve()
  231. {
  232. return _chamber.TurnPendulumValve(true);
  233. }
  234. private bool FinalStep()
  235. {
  236. _chamber.OpenValve(ValveType.Guage, true);
  237. //2023/04/25修改
  238. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  239. //_chamber.OpenValve(ValveType.GasFinal, true);
  240. return true;
  241. }
  242. public void Abort()
  243. {
  244. CloseAllValves();
  245. }
  246. }
  247. }