DeviceModelVenusDE_MF.xml 6.6 KB

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  1. <?xml version="1.0" encoding="utf-8" ?>
  2. <DeviceModelDefine type="DETM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
  3. <IoValves>
  4. <IoValve id="TMFastPumpValve" display="TM Fast Pump Valve" schematicId="FastPumpTM" unit="" isNc="true"
  5. isDefaultOpen="false" diOpen="" doOpen="DO_TM_Fast_Pump" diCloseSensor="" diOpenSensor="" />
  6. <IoValve id="TMSoftPumpValve" display="TM Soft Pump Valve" schematicId="SoftPumpTM" unit="" isNc="true"
  7. isDefaultOpen="false" diOpen="" doOpen="DO_TM_Soft_Pump" diCloseSensor="" diOpenSensor="" />
  8. <IoValve id="VCEASoftPumpValve" display="VCEA Soft Pump Valve" schematicId="SoftPumpVCEA" unit="" isNc="true"
  9. isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Soft_Pump" diCloseSensor="" diOpenSensor="" />
  10. <IoValve id="VCEAFastPumpValve" display="VCEA Fast Pump Valve" schematicId="FastPumpVCEA" unit="" isNc="true"
  11. isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Fast_Pump" diCloseSensor="" diOpenSensor="" />
  12. <IoValve id="VCEBSoftPumpValve" display="VCEB Soft Pump Valve" schematicId="SoftPumpVCEB" unit="" isNc="true"
  13. isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Soft_Pump" diCloseSensor="" diOpenSensor="" />
  14. <IoValve id="VCEBFastPumpValve" display="VCEB Fast Pump Valve" schematicId="FastPumpVCEB" unit="" isNc="true"
  15. isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Fast_Pump" diCloseSensor="" diOpenSensor="" />
  16. <IoValve id="TMFastVentValve" display="TM Fast Vent Valve" schematicId="FastVentTM" unit="" isNc="true"
  17. isDefaultOpen="false" diOpen="" doOpen="DO_TM_Fast_Vent" diCloseSensor="" diOpenSensor="" />
  18. <IoValve id="TMSoftVentValve" display="TM Soft Vent Valve" schematicId="SoftVentTM" unit="" isNc="true"
  19. isDefaultOpen="false" diOpen="" doOpen="DO_TM_Soft_Vent" diCloseSensor="" diOpenSensor="" />
  20. <IoValve id="VCEASoftVentValve" display="VCEA Soft Vent Valve" schematicId="SoftVentVCEA" unit="" isNc="true"
  21. isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Soft_Vent" diCloseSensor="" diOpenSensor="" />
  22. <IoValve id="VCEAFastVentValve" display="VCEA Fast Vent Valve" schematicId="FastVentVCEA" unit="" isNc="true"
  23. isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Fast_Vent" diCloseSensor="" diOpenSensor="" />
  24. <IoValve id="VCEBSoftVentValve" display="VCEB Soft Vent Valve" schematicId="SoftVentVCEB" unit="" isNc="true"
  25. isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Soft_Vent" diCloseSensor="" diOpenSensor="" />
  26. <IoValve id="VCEBFastVentValve" display="VCEB Fast Vent Valve" schematicId="FastVentVCEB" unit="" isNc="true"
  27. isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Fast_Vent" diCloseSensor="" diOpenSensor="" />
  28. </IoValves>
  29. <IoSensors>
  30. <IoSensor id="PMASlitDoorOpenEnable" display="PMA Slit Door Open Enable" schematicId="" unit="" di="DI_PMA_SLIT_DOOR_OPEN_ENABLE" isLowAsNormal="" textOutTrigValue="false"
  31. infoText="" warningText="" alarmText="" />
  32. <IoSensor id="PMBSlitDoorOpenEnable" display="PMB Slit Door Open Enable" schematicId="" unit="" di="DI_PMB_SLIT_DOOR_OPEN_ENABLE" isLowAsNormal="" textOutTrigValue="false"
  33. infoText="" warningText="" alarmText="" />
  34. <IoSensor id="PMCSlitDoorOpenEnable" display="PMC Slit Door Open Enable" schematicId="" unit="" di="DI_PMC_SLIT_DOOR_OPEN_ENABLE" isLowAsNormal="" textOutTrigValue="false"
  35. infoText="" warningText="" alarmText="" />
  36. <IoSensor id="TMATMSensor" display="TM ATM Sensor" schematicId="" unit="" di="DI_TM_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
  37. infoText="" warningText="" alarmText="" />
  38. <IoSensor id="VCEAATMSensor" display="VCEA ATM Sensor" schematicId="" unit="" di="DI_VCEA_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
  39. infoText="" warningText="" alarmText="" />
  40. <IoSensor id="VCEBATMSensor" display="VCEB ATM Sensor" schematicId="" unit="" di="DI_VCEB_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
  41. infoText="" warningText="" alarmText="" />
  42. </IoSensors>
  43. <IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
  44. <IoCylinder id="VCEASlitDoor" display="VCEA Slit Door" schematicId="" unit="" doMotorRelay=""
  45. doON="DO_VCEA_SlitDoor_Open" doOFF="DO_VCEA_SlitDoor_Close" diON="DI_VCEA_SlitDoor_Open_POS" diOFF="DI_VCEA_SlitDoor_Close_POS" />
  46. <IoCylinder id="VCEBSlitDoor" display="VCEB Slit Door" schematicId="" unit="" doMotorRelay=""
  47. doON="DO_VCEB_SlitDoor_Open" doOFF="DO_VCEB_SlitDoor_Close" diON="DI_VCEB_SlitDoor_Open_POS" diOFF="DI_VCEB_SlitDoor_Close_POS" />
  48. <IoCylinder id="PMASlitDoor" display="PMA Slit Door" schematicId="" unit="" doMotorRelay=""
  49. doON="DO_PMA_SlitDoor_Open" doOFF="DO_PMA_SlitDoor_Close" diON="DI_PMA_SlitDoor_Open_POS" diOFF="DI_PMA_SlitDoor_Close_POS" />
  50. <IoCylinder id="PMBSlitDoor" display="PMB Slit Door" schematicId="" unit="" doMotorRelay=""
  51. doON="DO_PMB_SlitDoor_Open" doOFF="DO_PMB_SlitDoor_Close" diON="DI_PMB_SlitDoor_Open_POS" diOFF="DI_PMB_SlitDoor_Close_POS" />
  52. <IoCylinder id="PMCSlitDoor" display="PMC Slit Door" schematicId="" unit="" doMotorRelay=""
  53. doON="DO_PMC_SlitDoor_Open" doOFF="DO_PMC_SlitDoor_Close" diON="DI_PMC_SlitDoor_Open_POS" diOFF="DI_PMC_SlitDoor_Close_POS" />
  54. </IoCylinders>
  55. <IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
  56. <IoPressureMeter id="TMPressure" display="TM Pressure" schematicId="" unit="mTorr"
  57. aiValue="AI_TM_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
  58. <IoPressureMeter id="TMPipelinePressure" display="TM Pipeline Pressure" schematicId="" unit="mTorr"
  59. aiValue="AI_Foreline_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
  60. <IoPressureMeter id="VCEAPressure" display="VCEA Pressure" schematicId="" unit="mTorr"
  61. aiValue="AI_Left_VCE_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
  62. <IoPressureMeter id="VCEBPressure" display="VCEB Pressure" schematicId="" unit="mTorr"
  63. aiValue="AI_Right_VCE_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
  64. </IoPressureMeters>
  65. <IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
  66. <IoMfc id="TM_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
  67. aiFlow="AI_MFC_Flow" aoFlow="AO_MFC_Flow_Setpoint" diOffline="" aoRange=""
  68. diPressureAlarm="DI_SYSTEM_N2_Pressure_SW"/>
  69. </IoMfcs>
  70. <IoHongHuControls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoHongHuControl">
  71. <IoHongHuControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="sccm" doMFCFlow="DO_Flow_Mode" doPressureMode="DO_Pressure_Mode" doVent="DO_TM_Soft_Vent" doPump="DO_TM_Soft_Pumping" aoMFCFlow="AO_MFC_Flow_Setpoint" aoPressure="AO_TM_Pressure_SetPoint"/>
  72. </IoHongHuControls>
  73. </DeviceModelDefine>