Kepler-Release/Venus/Venus_RT/Modules/PMs/RFPowerSwitchRoutine.cs

using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Venus_RT.Devices;
using MECF.Framework.Common.Routine;
using Venus_Core;
using Aitex.Core.Common.DeviceData;
using System;

namespace Venus_RT.Modules.PMs
{
    class RFPowerSwitchRoutine : PMRoutineBase, IRoutine
    {
        enum RFPowerStep
        {
            kSetPower,
            kEnd,
        }
        private bool _bOn = true;
        private bool _enableBias;
        private double _rfPower;
        private double _rfPowerBias;
        private BiasRfMatchMode _matchMode;
        private double _matchC1;
        private double _matchC2;
        private int _rfPowerOnTime;
        public RFPowerSwitchRoutine(JetPM chamber, bool bOn) : base(chamber)
        {
            Name = "RF Power Switch";
            _bOn = bOn;
        }

        public RState Start(params object[] objs)
        {
            if (!_chamber.IsFastPumpOpened)
            {
                Stop("Pump 阀没有打开");
                return RState.Failed;
            }

            _enableBias = SC.GetValue<bool>($"{_chamber.Module}.BiasRf.EnableBiasRF");
            if (_bOn)
            {
                if (objs == null || objs.Length < 3)
                {
                    Stop("RF routine argument error");
                    return RState.Failed;
                }

                _rfPower = Convert.ToDouble(objs[0]);
                _rfPowerBias = Convert.ToDouble(objs[1]);
                _rfPowerOnTime = (int)Convert.ToDouble(objs[2]) * 1000;
                _matchMode = Convert.ToInt32(objs[3]) == 1 ? BiasRfMatchMode.Preset : BiasRfMatchMode.Hold;
                _matchC1 = Convert.ToDouble(objs[4]);
                _matchC2 = Convert.ToDouble(objs[5]);
            }
            else
            {
                _rfPower = 0.0;
                _rfPowerBias = 0.0;
                _matchMode = BiasRfMatchMode.Preset;
                _matchC1 = 0.0;
                _matchC2 = 0.0;
                _rfPowerOnTime = 2000;
            }

            return Runner.Start(Module, Name);
        }
        public RState Monitor()
        {
            Runner.Run((int)RFPowerStep.kSetPower,  SetRFPower,         _rfPowerOnTime)
                .End((int)RFPowerStep.kEnd,         RFPowerFinished,    _delay_1s);

            return Runner.Status;
        }

        private bool SetRFPower()
        {
            if(_bOn)
            {
                if (_enableBias)
                    Notify($"放电开始, 源射频设定值 {_rfPower}, 偏压射频设定值 {_rfPowerBias}");
                else
                    Notify($"放电开始, 源射频设定值 {_rfPower}");

                if (Math.Abs(_rfPower) > 0.01 && Math.Abs(_rfPowerBias) > 0.01)
                {
                    _chamber.GeneratorSetpower((float)_rfPower);
                    _chamber.GeneratorBiasSetpower((float)_rfPowerBias);
                    if (_matchMode == BiasRfMatchMode.Preset)
                    {
                        _chamber.GeneratorBiasSetMatchMode(true);
                        Notify($"Bias RF Match C1设定值 {_matchC1}, Bias RF Match C2设定值 {_matchC2}");
                        _chamber.SetBiasMatchPosition((float)_matchC1, (float)_matchC2);
                    }
                    else if (_matchMode == BiasRfMatchMode.Hold)
                    {
                        _chamber.GeneratorBiasSetMatchMode(false);
                    }
                    return _chamber.GeneratorPowerOn(true) && _chamber.GeneratorBiasPowerOn(true);
                }
                else if (Math.Abs(_rfPower) < 0.01 && Math.Abs(_rfPowerBias) > 0.01)
                {
                    if (_matchMode == BiasRfMatchMode.Preset)
                    {
                        _chamber.GeneratorBiasSetMatchMode(true);
                        Notify($"Bias RF Match C1设定值 {_matchC1}, Bias RF Match C2设定值 {_matchC2}");
                        _chamber.SetBiasMatchPosition((float)_matchC1, (float)_matchC2);
                    }
                    else if (_matchMode == BiasRfMatchMode.Hold)
                    {
                        _chamber.GeneratorBiasSetMatchMode(false);
                    }
                    _chamber.GeneratorBiasSetpower((float)_rfPowerBias);
                    return _chamber.GeneratorBiasPowerOn(true);
                }
                else if (Math.Abs(_rfPower) > 0.01 && Math.Abs(_rfPowerBias) < 0.01)
                {
                    _chamber.GeneratorSetpower((float)_rfPower);
                    return _chamber.GeneratorPowerOn(true);
                }
                else
                {
                    Notify("放电结束");
                    return false;
                }
            }
            else
            {
                Notify("放电停止");
                if (!_enableBias)
                    return _chamber.GeneratorPowerOn(false);
                return _chamber.GeneratorPowerOn(false) && _chamber.GeneratorBiasPowerOn(false);
            }
        }

        private bool RFPowerFinished()
        {
            if(_bOn)
            {
                Notify("放电结束");

                _chamber.StopAllGases();
                _chamber.OpenValve(ValveType.GasFinal, false);
                _chamber.GeneratorPowerOn(false);
                _chamber.GeneratorBiasPowerOn(false);
            }

            return true;
        }


        public void Abort()
        {
            _chamber.GeneratorSetpower(0);
            _chamber.GeneratorBiasSetpower(0);
            _chamber.GeneratorPowerOn(false);
            _chamber.GeneratorBiasPowerOn(false);
        }
    }
}