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- using System;
- using System.Collections.Generic;
- using System.Threading;
- using System.Diagnostics;
- using System.Linq;
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.DataCenter;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_Core;
- using Venus_RT.Devices;
- using Venus_RT.Modules;
- using Venus_RT.Modules.PMs;
- using MECF.Framework.Common.Routine;
- namespace Venus_RT.Modules.PMs
- {
- public class RecipeRunningInfo
- {
- public Guid InnerId { get; set; }
- public RecipeHead Head { get; set; }
- public List<RecipeStep> RecipeStepList { get; set; }
- public string RecipeName { get; set; }
- public DateTime BeginTime { get; set; }
- public DateTime EndTime { get; set; }
- public int StepNumber { get; set; }
- public string StepName { get; set; }
- public double StepTime { get; set; }
- public double StepElapseTime { get; set; }
- public double TotalTime { get; set; }
- public double TotalElapseTime { get; set; }
- }
- public class PMEntity : Entity, IModuleEntity
- {
- public enum MSG
- {
- Home,
- Transfer,
- PrepareTransfer,
- PostTransfer,
- Reset,
- Abort,
- Error,
- LaunchPump,
- LaunchTurboPump,
- Pump,
- Vent,
- PumpLoadLock,
- VentLoadLock,
- PurgeLoadLock,
- LoadLockLeakCheck,
- CyclePurge,
- GasLinePurge,
- Heat,
- TransferHandoff,
- StartTransfer,
- LeakCheck,
- GasLeakCheck,
- MoveLiftPin,
- MoveGuidePin,
- LLPlace,
- LLPick,
- Process,
- RunRecipe,
- PostProcess,
- RecipeSkipStep,
- RecipeUpdate,
- RecipeResume,
- RecipePause,
- RecipeAbort,
- PreProcess,
- AutoMode,
- ManualMode,
- LockLid,
- Online,
- Offline,
- GasFlow,
- StopGasFlow,
- RfPower,
- MaxMsg
- }
- private readonly JetPM _chamber;
- public ModuleName Module { get; }
- public Action<bool, bool> TransferPrepared;
- private readonly PMHomeRoutine _home;
- private readonly StartDryPumpRoutine _startDryPumpRoutine;
- private readonly StartTurboPumpRoutine _startTurboPumpRoutine;
- private readonly VentRoutine _ventRoutine;
- private readonly PumpDownRoutine _pumpRoutine;
- private readonly LoadLockVentRoutine _ventLoadLockRoutine;
- private readonly LoadLockPumpRoutine _pumpLoadLockRoutine;
- private readonly LoadLockPurgeRoutine _purgeLoadLockRoutine;
- private readonly LoadLockLeakCheckRoutine _loadLockLeakCheckRoutine;
- private readonly PMPurgeRoutine _purgeRoutine;
- private readonly PMGaslinePurgeRoutine _gaslinePurgeRoutine;
- private readonly PMLeakCheckRoutine _leakCheckRoutine;
- private readonly GasBoxLeakCheckRoutine _gasBoxLeakCheckRoutine;
- private readonly LLPlaceRoutine _llPlaceRoutine;
- private readonly LLPickRoutine _llPickRoutine;
- public bool IsIdle
- {
- get { return fsm.State == (int)PMState.Idle; }
- }
- public bool IsError
- {
- get { return fsm.State == (int)PMState.Error; }
- }
- public bool IsInit
- {
- get { return fsm.State == (int)PMState.Init; }
- }
- public bool IsBusy
- {
- get { return !IsInit && !IsError && !IsIdle; }
- }
- public bool IsProcessing
- {
- get { return fsm.State == (int)PMState.PreProcess || fsm.State == (int)PMState.Processing || fsm.State == (int)PMState.PostProcess; }
- }
- public bool Check(int msg, out string reason, object[] objs)
- {
- reason = "";
- return true;
- }
- //
- private bool CheckToPostMessage(int msg, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- EV.PostWarningLog(Module.ToString(), $"{Module} is in { (PMState)fsm.State} state,can not do {(MSG)msg}");
- return false;
- }
- fsm.PostMsg(msg, args);
- return true;
- }
- public int Invoke(string function, params object[] args)
- {
- switch (function)
- {
- case "Home":
- CheckToPostMessage((int)MSG.Home);
- return (int)MSG.Home;
- }
- return (int)FSM_MSG.NONE;
- }
- public bool CheckAcked(int msg)
- {
- return fsm.CheckExecuted(msg);
- }
- public PMEntity(ModuleName module)
- {
- Module = module;
- _chamber = DEVICE.GetDevice<JetPM>(Module.ToString());
- _home = new PMHomeRoutine(_chamber);
- _startDryPumpRoutine = new StartDryPumpRoutine(_chamber);
- _startTurboPumpRoutine = new StartTurboPumpRoutine(_chamber);
- _ventRoutine = new VentRoutine(_chamber);
- _pumpRoutine = new PumpDownRoutine(_chamber);
- _ventLoadLockRoutine = new LoadLockVentRoutine(_chamber);
- _pumpLoadLockRoutine = new LoadLockPumpRoutine(_chamber);
- _purgeLoadLockRoutine = new LoadLockPurgeRoutine(_chamber);
- _loadLockLeakCheckRoutine = new LoadLockLeakCheckRoutine(_chamber);
- _purgeRoutine = new PMPurgeRoutine(_chamber);
- _gaslinePurgeRoutine = new PMGaslinePurgeRoutine(_chamber);
- _leakCheckRoutine = new PMLeakCheckRoutine(_chamber);
- _gasBoxLeakCheckRoutine = new GasBoxLeakCheckRoutine(_chamber);
- _llPlaceRoutine = new LLPlaceRoutine(_chamber);
- _llPickRoutine = new LLPickRoutine(_chamber, _ventLoadLockRoutine);
- fsm = new StateMachine<PMEntity>(Module.ToString(), (int)PMState.Init, 50);
- //Idle
- EnterExitTransition((int)PMState.Idle, FnIdle, (int)FSM_MSG.NONE, null);
- EnterExitTransition<PMState, FSM_MSG>(PMState.Error, fEnterError, FSM_MSG.NONE, null);
- //Home
- //EnterExitTransition((int)PMState.Homing, FnEnterHome, (int)FSM_MSG.NONE, FnExitHome);
- AnyStateTransition(MSG.Error, FnError, PMState.Error);
- Transition(PMState.Init, FSM_MSG.TIMER, FnTimeout, PMState.Init);
- Transition(PMState.Init, MSG.Home, FnStartHome, PMState.Homing);
- Transition(PMState.Error, MSG.Home, FnStartHome, PMState.Homing);
- Transition(PMState.Idle, MSG.Home, FnStartHome, PMState.Homing);
- Transition(PMState.Homing, FSM_MSG.TIMER, FnMonitorHome, PMState.Idle);
- Transition(PMState.Idle, FSM_MSG.TIMER, FnIdleTimeout, PMState.Idle);
- Transition(PMState.Error, FSM_MSG.TIMER, FnErrorTimeout, PMState.Error);
- //Launch DryPump sequence
- Transition(PMState.Idle, MSG.LaunchPump, FnLaunchPump, PMState.LaunchingPump);
- Transition(PMState.LaunchingPump, FSM_MSG.TIMER, FnLaunchPumpTimeout, PMState.Idle);
- Transition(PMState.LaunchingPump, MSG.Abort, FnAbortStartPumping, PMState.Idle);
- //Launch TurboPump sequence
- Transition(PMState.Idle, MSG.LaunchTurboPump, FnLaunchTurboPump, PMState.LaunchingTurboPump);
- Transition(PMState.LaunchingTurboPump, FSM_MSG.TIMER, FnLaunchTurboPumpTimeout, PMState.Idle);
- Transition(PMState.LaunchingTurboPump, MSG.Abort, FnAbortStartTurboPumping, PMState.Idle);
- //vent sequence
- Transition(PMState.Idle, MSG.Vent, FnStartVent, PMState.Venting);
- Transition(PMState.Pumping, MSG.Vent, FnVentToPumping, PMState.Venting);
- Transition(PMState.Venting, FSM_MSG.TIMER, FnVentTimeout, PMState.Idle);
- Transition(PMState.Venting, MSG.Abort, FnAbortVent, PMState.Idle);
- //Pump sequence
- Transition(PMState.Idle, MSG.Pump, FnStartPumpDown, PMState.Pumping);
- Transition(PMState.Venting, MSG.Pump, FnVentToPumping, PMState.Pumping);
- Transition(PMState.Pumping, FSM_MSG.TIMER, FnPumpDownTimeout, PMState.Idle);
- Transition(PMState.Pumping, MSG.Abort, FnAbortPumping, PMState.Idle);
- //Pump Loadlock sequence
- Transition(PMState.Idle, MSG.PumpLoadLock, FnStartPumpDownLoadLock, PMState.PumpingLoadLock);
- Transition(PMState.VentingLoadLock, MSG.PumpLoadLock, FnVentLoadLockToPumpingLoadLock, PMState.PumpingLoadLock);
- Transition(PMState.PumpingLoadLock, FSM_MSG.TIMER, FnPumpDownLoadLockTimeout, PMState.Idle);
- Transition(PMState.PumpingLoadLock, MSG.Abort, FnAbortPumpingLoadLock, PMState.Idle);
- //Vent Loadlock sequence
- Transition(PMState.Idle, MSG.VentLoadLock, FnStartVentLoadlock, PMState.VentingLoadLock);
- Transition(PMState.PumpingLoadLock, MSG.VentLoadLock, FnPumpingLoadLockToVentLoadLock, PMState.VentingLoadLock);
- Transition(PMState.VentingLoadLock, FSM_MSG.TIMER, FnVentLoadLockTimeout, PMState.Idle);
- Transition(PMState.VentingLoadLock, MSG.Abort, FnAbortVentLoadLock, PMState.Idle);
- // Purge LoadLock sequence
- Transition(PMState.Idle, MSG.PurgeLoadLock, FnStartPurgeLoadlock, PMState.PurgingLoadLock);
- Transition(PMState.PurgingLoadLock, FSM_MSG.TIMER, FnPurgeLoadLockTimeout, PMState.Idle);
- Transition(PMState.PurgingLoadLock, MSG.Abort, FnAbortPurgeLoadLock, PMState.Idle);
- //LoadLock Leak check sequence
- Transition(PMState.Idle, MSG.LoadLockLeakCheck, FnStartLoadLockLeakCheck, PMState.LoadLockLeakCheck);
- Transition(PMState.LoadLockLeakCheck, FSM_MSG.TIMER, FnLoadLockLeakCheckTimeout, PMState.Idle);
- Transition(PMState.LoadLockLeakCheck, MSG.Abort, FnAbortLoadLockLeakCheck, PMState.Idle);
- // PM Purge sequence
- Transition(PMState.Idle, MSG.CyclePurge, FnStartPurge, PMState.Purging);
- Transition(PMState.Purging, FSM_MSG.TIMER, FnPurgeTimeout, PMState.Idle);
- Transition(PMState.Purging, MSG.Abort, FnAbortPurge, PMState.Idle);
- // PM GasLine Purge sequence
- Transition(PMState.Idle, MSG.GasLinePurge, FnStartGasLinePurge, PMState.GasLinePurge);
- Transition(PMState.GasLinePurge, FSM_MSG.TIMER, FnGasLinePurgeTimeout, PMState.Idle);
- Transition(PMState.GasLinePurge, MSG.Abort, FnAbortGasLinePurge, PMState.Idle);
- //PM Leak check sequence
- Transition(PMState.Idle, MSG.LeakCheck, FnStartPMLeakCheck, PMState.LeakCheck);
- Transition(PMState.LeakCheck, FSM_MSG.TIMER, FnPMLeakCheckTimeout, PMState.Idle);
- Transition(PMState.LeakCheck, MSG.Abort, FnAbortPMLeakCheck, PMState.Idle);
- //PM Leak check sequence
- Transition(PMState.Idle, MSG.GasLeakCheck, FnStartGasBoxLeakCheck, PMState.GasBoxLeakCheck);
- Transition(PMState.GasBoxLeakCheck, FSM_MSG.TIMER, FnGasBoxLeakCheckTimeout, PMState.Idle);
- Transition(PMState.GasBoxLeakCheck, MSG.Abort, FnAbortGasBoxLeakCheck, PMState.Idle);
- // PlaceWafer from LoadLock Arm sequence
- Transition(PMState.Idle, MSG.LLPlace, FnStartLLPlace, PMState.LLPlacing);
- Transition(PMState.LLPlacing, FSM_MSG.TIMER, FnLLPlaceTimeout, PMState.Idle);
- Transition(PMState.LLPlacing, MSG.Abort, FnAbortLLPlace, PMState.Idle);
- // PickWafer to LoadLock Arm sequence
- Transition(PMState.Idle, MSG.LLPick, FnStartLLPick, PMState.LLPicking);
- Transition(PMState.LLPicking, FSM_MSG.TIMER, FnLLPickTimeout, PMState.Idle);
- Transition(PMState.LLPicking, MSG.Abort, FnAbortLLPick, PMState.Idle);
- Running = true;
- }
- private bool FnIdle(object[] objs)
- {
- Running = false;
- return true;
- }
- private bool fEnterError(object[] objs)
- {
- return true;
- }
- private bool FnError(object[] objs)
- {
- Running = false;
- if (((PMState)fsm.State == PMState.Processing) || ((PMState)fsm.State == PMState.PreProcess)
- || ((PMState)fsm.State == PMState.Homing) || ((PMState)fsm.State == PMState.LoadProcessRecipe))
- return false;
- if (IsProcessing)
- {
- WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Failed);
- }
- return true;
- }
- private bool FnTimeout(object[] objs)
- {
- _debugRoutine();
- return true;
- }
- private bool FnIdleTimeout(object[] objs)
- {
- _debugRoutine();
- return true;
- }
- private bool FnErrorTimeout(object[] objs)
- {
- _debugRoutine();
- return true;
- }
- private bool FnStartHome(object[] objs)
- {
- return _home.Start() == RState.Running;
- }
- private bool FnMonitorHome(object[] objs)
- {
- RState ret = _home.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnLaunchPump(object[] param)
- {
- return _startDryPumpRoutine.Start() == RState.Running;
- }
- private bool FnLaunchPumpTimeout(object[] param)
- {
- RState ret = _startDryPumpRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortStartPumping(object[] param)
- {
- _startDryPumpRoutine.Abort();
- return true;
- }
- private bool FnLaunchTurboPump(object[] param)
- {
- return _startTurboPumpRoutine.Start() == RState.Running;
- }
- private bool FnLaunchTurboPumpTimeout(object[] param)
- {
- RState ret = _startTurboPumpRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortStartTurboPumping(object[] param)
- {
- _startTurboPumpRoutine.Abort();
- return true;
- }
- private bool FnStartVent(object[] param)
- {
- return _ventRoutine.Start() == RState.Running;
- }
- private bool FnVentTimeout(object[] param)
- {
- RState ret = _ventRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnVentToPumping(object[] param)
- {
- _ventRoutine.Abort();
- return true; // FnStartPumpDown(param);
- }
- private bool FnAbortVent(object[] param)
- {
- _ventRoutine.Abort();
- return true;
- }
- private bool FnStartPumpDown(object[] param)
- {
- return _pumpRoutine.Start() == RState.Running;
- }
- private bool FnPumpDownTimeout(object[] param)
- {
- RState ret = _pumpRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPumping(object[] param)
- {
- _pumpRoutine.Abort();
- return true;
- }
- private bool FnStartVentLoadlock(object[] param)
- {
- return _ventLoadLockRoutine.Start() == RState.Running;
- }
- private bool FnVentLoadLockTimeout(object[] param)
- {
- RState ret = _ventLoadLockRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnVentLoadLockToPumpingLoadLock(object[] param)
- {
- _ventLoadLockRoutine.Abort();
- return FnStartPumpDownLoadLock(param);
- }
- private bool FnAbortVentLoadLock(object[] param)
- {
- _ventLoadLockRoutine.Abort();
- return true;
- }
- private bool FnStartPumpDownLoadLock(object[] param)
- {
- return _pumpLoadLockRoutine.Start() == RState.Running;
- }
- private bool FnPumpDownLoadLockTimeout(object[] param)
- {
- RState ret = _pumpLoadLockRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnPumpingToVent(object[] param)
- {
- _pumpRoutine.Abort();
- return FnStartVent(param);
- }
- private bool FnPumpingLoadLockToVentLoadLock(object[] param)
- {
- _pumpLoadLockRoutine.Abort();
- return FnStartVentLoadlock(param);
- }
- private bool FnAbortPumpingLoadLock(object[] param)
- {
- _pumpLoadLockRoutine.Abort();
- return true;
- }
- private bool FnStartPurgeLoadlock(object[] param)
- {
- return _purgeLoadLockRoutine.Start() == RState.Running;
- }
- private bool FnPurgeLoadLockTimeout(object[] param)
- {
- RState ret = _purgeLoadLockRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPurgeLoadLock(object[] param)
- {
- _purgeLoadLockRoutine.Abort();
- return true;
- }
- private bool FnStartLoadLockLeakCheck(object[] param)
- {
- return _loadLockLeakCheckRoutine.Start() == RState.Running;
- }
- private bool FnLoadLockLeakCheckTimeout(object[] param)
- {
- RState ret = _loadLockLeakCheckRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortLoadLockLeakCheck(object[] param)
- {
- _loadLockLeakCheckRoutine.Abort();
- return true;
- }
- private bool FnStartPurge(object[] param)
- {
- return _purgeRoutine.Start() == RState.Running;
- }
- private bool FnPurgeTimeout(object[] param)
- {
- RState ret = _purgeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPurge(object[] param)
- {
- _purgeRoutine.Abort();
- return true;
- }
- private bool FnStartGasLinePurge(object[] param)
- {
- return _gaslinePurgeRoutine.Start() == RState.Running;
- }
- private bool FnGasLinePurgeTimeout(object[] param)
- {
- RState ret = _gaslinePurgeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortGasLinePurge(object[] param)
- {
- _gaslinePurgeRoutine.Abort();
- return true;
- }
- private bool FnStartPMLeakCheck(object[] param)
- {
- return _leakCheckRoutine.Start() == RState.Running;
- }
- private bool FnPMLeakCheckTimeout(object[] param)
- {
- RState ret = _leakCheckRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPMLeakCheck(object[] param)
- {
- _leakCheckRoutine.Abort();
- return true;
- }
- private bool FnStartGasBoxLeakCheck(object[] param)
- {
- return _gasBoxLeakCheckRoutine.Start() == RState.Running;
- }
- private bool FnGasBoxLeakCheckTimeout(object[] param)
- {
- RState ret = _gasBoxLeakCheckRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortGasBoxLeakCheck(object[] param)
- {
- _gasBoxLeakCheckRoutine.Abort();
- return true;
- }
- private bool FnStartLLPlace(object[] param)
- {
- return _llPlaceRoutine.Start() == RState.Running;
- }
- private bool FnLLPlaceTimeout(object[] param)
- {
- RState ret = _llPlaceRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortLLPlace(object[] param)
- {
- _llPlaceRoutine.Abort();
- return true;
- }
- private bool FnStartLLPick(object[] param)
- {
- return _llPickRoutine.Start() == RState.Running;
- }
- private bool FnLLPickTimeout(object[] param)
- {
- RState ret = _llPickRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortLLPick(object[] param)
- {
- _llPickRoutine.Abort();
- return true;
- }
- private void _debugRoutine()
- {
- int flag = 0;
- // Test Home routine
- if (flag == 1)
- {
- PostMsg(MSG.Home);
- }
- else if (flag == 2)
- {
- PostMsg(MSG.Vent);
- }
- else if (flag == 3)
- {
- PostMsg(MSG.Pump);
- }
- else if(flag == 4)
- {
- PostMsg(MSG.PumpLoadLock);
- }
- else if(flag == 5)
- {
- PostMsg(MSG.VentLoadLock);
- }
- else if(flag == 6)
- {
- PostMsg(MSG.PurgeLoadLock);
- }
- else if(flag == 7)
- {
- PostMsg(MSG.LaunchPump);
- }
- else if(flag == 8)
- {
- PostMsg(MSG.LaunchTurboPump);
- }
- else if(flag == 9)
- {
- PostMsg(MSG.LoadLockLeakCheck);
- }
- else if(flag == 10)
- {
- PostMsg(MSG.CyclePurge);
- }
- else if(flag == 11)
- {
- PostMsg(MSG.GasLinePurge);
- }
- else if(flag == 12)
- {
- PostMsg(MSG.LeakCheck);
- }
- else if(flag == 13)
- {
- PostMsg(MSG.GasLeakCheck);
- }
- else if(flag == 14)
- {
- PostMsg(MSG.LLPlace);
- }
- else if(flag == 15)
- {
- PostMsg(MSG.LLPick);
- }
- }
- }
- }
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