LoadLockPurgeRoutine.cs 3.2 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Venus_RT.Devices;
  4. using MECF.Framework.Common.Routine;
  5. using Venus_Core;
  6. namespace Venus_RT.Modules.PMs
  7. {
  8. class LoadLockPurgeRoutine : PMRoutineBase, IRoutine
  9. {
  10. private enum PurgeStep
  11. {
  12. kCloseValves,
  13. kPumpToBase,
  14. kPurgeDelay_1,
  15. kPurgeVent,
  16. kPurgeDelay_2,
  17. kPurgePumpToBase,
  18. kPurgePumpDelay,
  19. kPurgeEnd,
  20. kEnd,
  21. }
  22. private int _basePressureLL = 100;
  23. private int _purgeVentPressureLL = 10;
  24. private int _purgeCycleCounter = 30;
  25. private int _purgePumpTime = 120;
  26. public LoadLockPurgeRoutine(JetPM chamber) : base(chamber)
  27. {
  28. Name = "Loadlock Purge";
  29. }
  30. public RState Start(params object[] objs)
  31. {
  32. if (CheckLidLoadLock() &&
  33. CheckSlitDoor() &&
  34. CheckDryPump())
  35. {
  36. Reset();
  37. _chamber.CloseValves();
  38. _basePressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPumpBasePressure");
  39. _purgeVentPressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgeVentPressure");
  40. _purgeCycleCounter = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgeCycleCount");
  41. _purgePumpTime = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgePumpTime");
  42. return Runner.Start(Module, Name);
  43. }
  44. return RState.Failed;
  45. }
  46. public RState Monitor()
  47. {
  48. Runner.Delay((int)PurgeStep.kCloseValves, _delay_1s)
  49. .Run((int)PurgeStep.kPumpToBase, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure < _basePressureLL; })
  50. .LoopStart((int)PurgeStep.kPurgeDelay_1, "Purge", _purgeCycleCounter, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, false), _delay_1s)
  51. .LoopRun((int)PurgeStep.kPurgeVent, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, true), () => { return _chamber.LoadlockPressure >= _purgeVentPressureLL; })
  52. .LoopRun((int)PurgeStep.kPurgeDelay_2, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, false), _delay_1s)
  53. .LoopRun((int)PurgeStep.kPurgePumpToBase, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure < _basePressureLL; })
  54. .LoopRun((int)PurgeStep.kPurgePumpDelay, NullFun, _purgePumpTime * 1000)
  55. .LoopEnd((int)PurgeStep.kPurgeEnd, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, false), _delay_50ms)
  56. .End((int)PurgeStep.kEnd, NullFun, _delay_50ms);
  57. return Runner.Status;
  58. }
  59. public void Abort()
  60. {
  61. CloseAllValves();
  62. }
  63. }
  64. }