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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using Venus_Core;
- namespace Venus_RT.Modules.PMs
- {
- class LoadLockPumpRoutine : PMRoutineBase, IRoutine
- {
- private enum PumpStep
- {
- kCloseValves,
- kPump,
- kClosePumpValves,
- }
- private int _basePressureLL = 100;
- private int _pumpTimeLimitLL = 120;
-
- public LoadLockPumpRoutine(JetPM chamber) : base(chamber)
- {
- Name = "Loadlock Pump";
- }
- public RState Start(params object[] objs)
- {
- if (CheckLidLoadLock() &&
- CheckSlitDoor() &&
- CheckDryPump())
- {
- Reset();
- _chamber.CloseValves();
- _basePressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPumpBasePressure");
- _pumpTimeLimitLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPumpTimeLimit");
- return Runner.Start(Module, Name);
- }
- return RState.Failed;
- }
- public RState Monitor()
- {
- Runner.Delay((int)PumpStep.kCloseValves, _delay_1s)
- .Run((int)PumpStep.kPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure <= _basePressureLL; }, _pumpTimeLimitLL * 1000)
- .End((int)PumpStep.kClosePumpValves, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, false), _delay_1s);
- return Runner.Status;
- }
- public void Abort()
- {
- CloseAllValves();
- }
- }
- }
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