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Kepler-Release
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Venus
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Config
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Interlock.Venus.xml

Interlock.Venus.xml 46 KB
History Raw

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  1. <?xml version="1.0" encoding="utf-16"?>
    2. 

  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3.   
    4. 

  4.   <Action do="PMA.DO_PVN21" value="true" tip="PVN21" tip.zh-CN=""  tip.en-US="DO-0" >
    5. 

  5. 	<Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
    6. 

  6.     <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"           tip.zh-CN="" tip.en-US="DI-2" />
    7. 

  7. 	<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
    8. 

  8. 	<Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
    9. 

  9. 	<Limit di="PMA.DI_PN2_Pressure_SW"     value="true" tip="DI GB Interlock"        tip.zh-CN="" tip.en-US="DI-34" />
    10. 

  10.   </Action>
    11. 

  11. 

  12.   <Action do="PMA.DO_PVN22"  value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
    13. 

  13. 	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    14. 

  14. 	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"             tip.zh-CN="" tip.en-US="DI-2" />
    15. 

  15. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    16. 

  16. 	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    17. 

  17. 	  <Limit di="PMA.DI_PN2_Pressure_SW"     value="true" tip="DI PN2 Pressure SW"       tip.zh-CN="" tip.en-US="DI-34" />
    18. 

  18.   </Action>
    19. 

  19.   
    20. 

  20.   <Action do="PMA.DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
    21. 

  21. 	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    22. 

  22. 	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"             tip.zh-CN="" tip.en-US="DI-2" />
    23. 

  23. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    24. 

  24. 	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    25. 

  25. 	  <Limit di="PMA.DI_MFC1_Pressure_SW"    value="true" tip="DI MFC1 Pressure SW"      tip.zh-CN="" tip.en-US="DI-35" />
    26. 

  26.   </Action>
    27. 

  27. 

  28.   <Action do="PMA.DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
    29. 

  29. 	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    30. 

  30. 	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"             tip.zh-CN="" tip.en-US="DI-2" />
    31. 

  31. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    32. 

  32. 	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    33. 

  33. 	  <Limit di="PMA.DI_MFC1_Pressure_SW"    value="true" tip="DI MFC1 Pressure SW"      tip.zh-CN="" tip.en-US="DI-35" />
    34. 

  34.   </Action>
    35. 

  35. 

  36.   <Action do="PMA.DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
    37. 

  37. 	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
    38. 

  38. 	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"           tip.zh-CN="" tip.en-US="DI-2" />
    39. 

  39. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
    40. 

  40. 	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
    41. 

  41. 	  <Limit di="PMA.DI_MFC2_Pressure_SW"    value="true" tip="DI MFC2 Pressure SW"    tip.zh-CN="" tip.en-US="DI-36" />
    42. 

  42.   </Action>
    43. 

  43. 

  44.   <Action do="PMA.DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
    45. 

  45. 	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
    46. 

  46. 	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"           tip.zh-CN="" tip.en-US="DI-2" />
    47. 

  47. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
    48. 

  48. 	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
    49. 

  49. 	  <Limit di="PMA.DI_MFC2_Pressure_SW"    value="true" tip="DI MFC2 Pressure SW"    tip.zh-CN="" tip.en-US="DI-36" />
    50. 

  50.   </Action>
    51. 

  51.   
    52. 

  52.   <Action do="PMA.DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
    53. 

  53. 	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    54. 

  54. 	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    55. 

  55. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    56. 

  56. 	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    57. 

  57. 	  <Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
    58. 

  58.   </Action>
    59. 

  59. 

  60.   <Action do="PMA.DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
    61. 

  61. 	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    62. 

  62. 	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    63. 

  63. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    64. 

  64. 	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    65. 

  65. 	  <Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
    66. 

  66.   </Action>
    67. 

  67. 

  68.   <Action do="PMA.DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
    69. 

  69. 	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    70. 

  70. 	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    71. 

  71. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    72. 

  72. 	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    73. 

  73. 	  <Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
    74. 

  74.   </Action>
    75. 

  75.   
    76. 

  76.   <Action do="PMA.DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
    77. 

  77. 	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    78. 

  78. 	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    79. 

  79. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    80. 

  80. 	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    81. 

  81. 	  <Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
    82. 

  82.   </Action>
    83. 

  83. 

  84. 

  85. 	<Action do="PMA.DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
    86. 

  86. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    87. 

  87. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    88. 

  88. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    89. 

  89. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    90. 

  90. 		<Limit di="PMA.DI_MFC1_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-35" />
    91. 

  91. 	</Action>
    92. 

  92. 

  93. 	<Action do="PMA.DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
    94. 

  94. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    95. 

  95. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    96. 

  96. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    97. 

  97. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    98. 

  98. 		<Limit di="PMA.DI_MFC2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-36" />
    99. 

  99. 	</Action>
    100. 

  100. 

  101. 	<Action do="PMA.DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
    102. 

  102. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    103. 

  103. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    104. 

  104. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    105. 

  105. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    106. 

  106. 		<Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
    107. 

  107. 	</Action>
    108. 

  108. 

  109. 	<Action do="PMA.DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
    110. 

  110. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    111. 

  111. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    112. 

  112. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    113. 

  113. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    114. 

  114. 		<Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
    115. 

  115. 	</Action>
    116. 

  116. 

  117. 	<Action do="PMA.DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
    118. 

  118. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    119. 

  119. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    120. 

  120. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    121. 

  121. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    122. 

  122. 		<Limit di="PMA.DI_MFC5_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-39" />
    123. 

  123. 	</Action>
    124. 

  124. 

  125. 	<Action do="PMA.DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
    126. 

  126. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    127. 

  127. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    128. 

  128. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    129. 

  129. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    130. 

  130. 		<Limit di="PMA.DI_MFC6_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-40" />
    131. 

  131. 	</Action>
    132. 

  132. 

  133. 	<Action do="PMA.DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
    134. 

  134. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    135. 

  135. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    136. 

  136. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    137. 

  137. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    138. 

  138. 		<Limit di="PMA.DI_MFC7_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-41" />
    139. 

  139. 	</Action>
    140. 

  140. 

  141. 	<Action do="PMA.DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
    142. 

  142. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    143. 

  143. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    144. 

  144. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    145. 

  145. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    146. 

  146. 		<Limit di="PMA.DI_MFC8_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-42" />
    147. 

  147. 	</Action>
    148. 

  148. 

  149. 	<Action do="PMA.DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
    150. 

  150. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    151. 

  151. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    152. 

  152. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    153. 

  153. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    154. 

  154. 		<Limit di="PMA.DI_He_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-43" />
    155. 

  155. 	</Action>
    156. 

  156. 

  157. 	<Action do="PMA.DO_PVHe2" value="true" tip="PVHe2" tip.zh-CN="" tip.en-US="DO-20" >
    158. 

  158. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    159. 

  159. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    160. 

  160. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    161. 

  161. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    162. 

  162. 		<Limit di="PMA.DI_He_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-43" />
    163. 

  163. 	</Action>
    164. 

  164. 

  165. 	<Action do="PMA.DO_Gas_Final_Valve" value="true" tip="Gas Final Valve" tip.zh-CN="" tip.en-US="DO-21" >
    166. 

  166. 		<Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI PM Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
    167. 

  167. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
    168. 

  168. 		<Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
    169. 

  169. 	</Action>
    170. 

  170. 

  171. 	<Action do="PMA.DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" >
    172. 

  172. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    173. 

  173. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI  Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    174. 

  174. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    175. 

  175. 	</Action>
    176. 

  176. 

  177. 	<Action do="PMA.DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" >
    178. 

  178. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    179. 

  179. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    180. 

  180. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    181. 

  181. 	</Action>
    182. 

  182. 

  183. 	<Action do="PMA.DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
    184. 

  184. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    185. 

  185. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    186. 

  186. 		<Limit di="PMA.DI_Loadlock_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-45" />
    187. 

  187. 		<Limit di="PMA.DI_Loadlock_Arm_Retract_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-47" />
    188. 

  188. 	</Action>
    189. 

  189. 

  190. 	<Action do="PMA.DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-25" >
    191. 

  191. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    192. 

  192. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    193. 

  193. 		<Limit di="PMA.DI_Loadlock_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-45" />
    194. 

  194. 		<Limit di="PMA.DI_Loadlock_Arm_Retract_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-47" />
    195. 

  195. 	</Action>
    196. 

  196. 

  197. 	
    198. 

  198. 	<Action do="PMA.DO_N2_Valve" value="true" tip="N2 Vent valve" tip.zh-CN="" tip.en-US="DO-10" >
    199. 

  199. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    200. 

  200. 		<Limit di="PMA.DI_PN2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-34" />
    201. 

  201. 	</Action>
    202. 

  202. 

  203. 	<Action do="PMA.DO_Loadlock_Pumping_Valve" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-42" >
    204. 

  204. 		<Limit do="PMA.DO_Loadlock_Vent_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-42" />
    205. 

  205. 	</Action>
    206. 

  206. 

  207. 	<Action do="PMA.DO_Loadlock_Vent_Valve" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-43" >
    208. 

  208. 		<Limit do="PMA.DO_Loadlock_Pumping_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-10" />
    209. 

  209. 	</Action>
    210. 

  210. 

  211. 	<Action do="PMA.DO_Loadlock_Arm_Extend" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-44" >
    212. 

  212. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    213. 

  213. 		<Limit di="PMA.DI_Slit_Door_Open_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-10" />
    214. 

  214. 		<Limit di="PMA.DI_Loadlock_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-45" />
    215. 

  215. 	</Action>
    216. 

  216. 

  217. 	<!--<Action ao="PMA.AO_MFC1_Flow_Setpoint" value="true" tip="AO_MFC1_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-0" >
    218. 

  218. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    219. 

  219. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    220. 

  220. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    221. 

  221. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    222. 

  222. 		<Limit di="PMA.DI_MFC1_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-35" />
    223. 

  223. 	</Action>
    224. 

  224. 

  225. 	<Action ao="PMA.AO_MFC2_Flow_Setpoint" value="true" tip="AO_MFC2_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-1" >
    226. 

  226. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    227. 

  227. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    228. 

  228. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    229. 

  229. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    230. 

  230. 		<Limit di="PMA.DI_MFC2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-36" />
    231. 

  231. 	</Action>
    232. 

  232. 

  233. 	<Action ao="PMA.AO_MFC3_Flow_Setpoint" value="true" tip="AO_MFC3_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-2" >
    234. 

  234. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    235. 

  235. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    236. 

  236. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    237. 

  237. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    238. 

  238. 		<Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
    239. 

  239. 	</Action>
    240. 

  240. 

  241. 	<Action ao="PMA.AO_MFC4_Flow_Setpoint" value="true" tip="AO_MFC4_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-3" >
    242. 

  242. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    243. 

  243. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    244. 

  244. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    245. 

  245. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    246. 

  246. 		<Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
    247. 

  247. 	</Action>
    248. 

  248. 

  249. 	<Action ao="PMA.AO_MFC5_Flow_Setpoint" value="true" tip="AO_MFC5_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-4" >
    250. 

  250. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    251. 

  251. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    252. 

  252. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    253. 

  253. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    254. 

  254. 		<Limit di="PMA.DI_MFC5_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-39" />
    255. 

  255. 	</Action>
    256. 

  256. 

  257. 	<Action ao="PMA.AO_MFC6_Flow_Setpoint" value="true" tip="AO_MFC6_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-5" >
    258. 

  258. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    259. 

  259. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    260. 

  260. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    261. 

  261. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    262. 

  262. 		<Limit di="PMA.DI_MFC6_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-40" />
    263. 

  263. 	</Action>
    264. 

  264. 

  265. 	<Action ao="PMA.AO_MFC7_Flow_Setpoint" value="true" tip="AO_MFC7_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-6" >
    266. 

  266. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    267. 

  267. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    268. 

  268. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    269. 

  269. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    270. 

  270. 		<Limit di="PMA.DI_MFC7_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-41" />
    271. 

  271. 	</Action>
    272. 

  272. 

  273. 	<Action ao="PMA.AO_MFC8_Flow_Setpoint" value="true" tip="AO_MFC8_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-7" >
    274. 

  274. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    275. 

  275. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    276. 

  276. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    277. 

  277. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    278. 

  278. 		<Limit di="PMA.DI_MFC8_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-42" />
    279. 

  279. 	</Action>
    280. 

  280. 	
    281. 

  281. 		<Action ao="PMA.AO_He_Flow_Setpoint" value="true" tip="AO_He_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-8" >
    282. 

  282. 			<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    283. 

  283. 			<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    284. 

  284. 			<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    285. 

  285. 			<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    286. 

  286. 			<Limit di="PMA.DI_He_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-43" />
    287. 

  287. 		</Action>
    288. 

  288. 

  289. 		<Action ao="PMA.AO_Turbo_Pump_N2_Flow_Setpoint" value="true" tip="AO_Turbo_Pump_N2_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-9" >
    290. 

  290. 			<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    291. 

  291. 		    <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    292. 

  292. 			<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    293. 

  293. 			<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    294. 

  294. 			<Limit di="PMA.DI_PN2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-34" />
    295. 

  295. 		</Action>-->
    296. 

  296. 	
    297. 

  297. </Interlock>
    298.