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- <?xml version="1.0" encoding="utf-16"?>
- <DeviceModelDefine type="Venus" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
- <IoValves>
- <IoValve id="ValvePVN21" display="PVN21 Valve" schematicId="PVN21" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_PVN21" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValvePVN22" display="PVN22 Valve" schematicId="PVN22" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_PVN22" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValvePV11" display="PV11 Valve" schematicId="PV11" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_PV11" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValvePV12" display="PV12 Valve" schematicId="PV12" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_PV12" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValvePV21" display="PV21 Valve" schematicId="PV21" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_PV21" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValvePV22" display="PV22 Valve" schematicId="PV22" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_PV22" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValvePV31" display="PV31 Valve" schematicId="PV31" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_PV31" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValvePV32" display="PV32 Valve" schematicId="PV32" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_PV32" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValvePV41" display="PV41 Valve" schematicId="PV41" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_PV41" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValvePV42" display="PV42 Valve" schematicId="PV42" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_PV42" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveN2" display="N2 valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValvePVHe1" display="PVHe1 valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PVHe1"
- diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValvePVHe2" display="PVHe2 valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PVHe2"
- diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveGasFinal" display="Gas Final valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gas_Final_Valve"
- diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveSoftPump" display="Soft Pump valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
- diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveFastPump" display="FastPump valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveTurboPumpPumping" display="Turbo Pump Pumping valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Pumping_Valve"
- diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveTurboPumpPurge" display="Turbo Pump Purge valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Purge_Valve"
- diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveGuage" display="Guage valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Guage_Valve"
- diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveLoadlockVent" display="Loadlock Vent valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Loadlock_Vent_Valve"
- diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveLoadlockPumping" display="Loadlock Pumping valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Loadlock_Pumping_Valve"
- diCloseSensor="" diOpenSensor="" />
-
- <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="PV1" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="PV2" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="PV3" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="PV4" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="PV5" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveMfc6" display="MFC6 Valve" schematicId="PV6" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC6_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveMfc7" display="MFC7 Valve" schematicId="PV7" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC7_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveMfc8" display="MFC8 Valve" schematicId="PV8" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC8_Valve" diCloseSensor="" diOpenSensor="" />
-
- </IoValves>
- <IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
- <IoMfc id="MfcGas1" display="Gas1" schematicId="MFC1" unit="sccm"
- aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC1_Pressure_SW"/>
- <IoMfc id="MfcGas2" display="Gas2" schematicId="MFC2" unit="sccm"
- aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC2_Pressure_SW"/>
- <IoMfc id="MfcGas3" display="Gas3" schematicId="MFC3" unit="sccm"
- aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC3_Pressure_SW"/>
- <IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
- aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC4_Pressure_SW"/>
- <IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
- aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC5_Pressure_SW"/>
- <IoMfc id="MfcGas6" display="Gas6" schematicId="MFC6" unit="sccm"
- aiFlow="AI_MFC6_Flow" aoFlow="AO_MFC6_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC6_Pressure_SW"/>
- <IoMfc id="MfcGas7" display="Gas7" schematicId="MFC7" unit="sccm"
- aiFlow="AI_MFC7_Flow" aoFlow="AO_MFC7_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC7_Pressure_SW"/>
- <IoMfc id="MfcGas8" display="Gas8" schematicId="MFC8" unit="sccm"
- aiFlow="AI_MFC8_Flow" aoFlow="AO_MFC8_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC8_Pressure_SW"/>
- <IoMfc id="MfcN2" display="N2" schematicId="N2" unit="sccm"
- aiFlow="AI_Turbo_Pump_N2_Flow" aoFlow="AO_Turbo_Pump_N2_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_PN2_Pressure_SW"/>
- <IoMfc id="MfcHe" display="He" schematicId="He" unit="sccm"
- aiFlow="AI_He_Flow" aoFlow="AO_He_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_He_Pressure_SW"/>
- </IoMfcs>
- <IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
- <IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" />
- <IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" />
- <IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" />
- <IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" />
- <IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
- <IoGasStick id="GasStick6" display="" mfc ="MfcGas6" downvalve="ValveMfc6" />
- <IoGasStick id="GasStick7" display="" mfc ="MfcGas7" downvalve="ValveMfc7" />
- <IoGasStick id="GasStick8" display="" mfc ="MfcGas8" downvalve="ValveMfc8" />
- <IoGasStick id="GasStickN2" display="" mfc ="MfcN2" downvalve="ValveTurboPumpPurge" />
- </IoGasSticks>
-
- <IoBacksideHes assembly="Venus_RT" classType="Venus_RT.Devices.IoBacksideHe">
- <IoBacksideHe id="BacksideHelium" display="" mfc="MfcHe" downvalve="ValvePVHe1" aoControlMode="AO_ESC_He_Control_Mode" aoPressureSP="AO_ESC_He_Pressure_Setpoint" />
- </IoBacksideHes>
- <IoSensors>
- <IoSensor id="SensorATMSwitch" display="ATM Switch" schematicId="" unit="" di="DI_PM_ATM_SW" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
- <IoSensor id="SensorLoadlockATMSwitch" display="Loadlock ATM Switch" schematicId="" unit="" di="DI_Loadlock_ATM_SW" isLowAsNormal="" textOutTrigValue="true"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="SensorVacSwitch" display="VAC Switch" schematicId="" unit="" di="DI_PM_VAC_SW" isLowAsNormal="" textOutTrigValue="true"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="SensorWaterFlowOk" display="Water Flow OK" schematicId="" unit="" di="DI_PCW_Flow_SW" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="sensor water flow abnormal" alarmText="" />
- <IoSensor id="SensorWaterLeakOk" display="Water Leak Ok" schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="Sensor water leak" alarmText="" />
- <IoSensor id="SensorCDAPressureOk" display="CDA pressure OK" schematicId="" unit="" di="DI_CDA_Pressure" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="Sensor CDA pressure abnormal" alarmText="" />
- <IoSensor id="N2PressureOk" display="N2 Pressure OK" schematicId="" unit="" di="DI_PN2_Pressure_SW" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="N2 Pressure Alarm" />
- <IoSensor id="GeneratorInterlock" display="RFG hardware interlock" schematicId="" unit="" di="DI_RF_Generator_Interlock" isLowAsNormal="" textOutTrigValue="false" infoText="Generator interlock" warningText="" alarmText="" />
- </IoSensors>
-
- <IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
- <IoPressureMeter id="ProcessGauge" display="Process Pressure" schematicId="" unit="mTorr"
- aiValue="AI_Process_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
- <IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
- aiValue="AI_Chamber_Pressure"
- diGaugeFail="DI_Chamber_VAC_Gauge_Alarm"
- scPrecision="ChamberPressureGaugePrecision"
- scOffset=""/>
- <IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
- aiValue="AI_Foreline_Pressure" diGaugeFail="DI_Foreline_Vacuum_Gauge_Alarm" scPrecision="" scOffset=""/>
- <IoPressureMeter id="ESCHeGauge" display="ESC He Pressure" schematicId="" unit="mTorr"
- aiValue="AI_ESC_He_Pressure" diGaugeFail="DI_ESC_He_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
- <IoPressureMeter id="LoadlockGauge" display="Loadlock Pressure" schematicId="" unit="mTorr"
- aiValue="AI_Loadlock_Pressure" diGaugeFail="DI_Loadlock_Vacuum_Gauge_Alarm" scPrecision="" scOffset=""/>
- </IoPressureMeters>
-
- <IoPumps assembly="Venus_RT" classType="Venus_RT.Devices.IoPump" IsEnabled = "False">
- <IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
- diBreakerState=""
- diRunning="DI_Pump_Running"
- diStart=""
- diStop=""
- diAlarm="DI_Pump_Alarm"
- diWarning="DI_Pump_Warning"
- diPumpTempAlarm=""
- diN2Alarm="DI_Pump_N2_Purge_Alarm"
- diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
- diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"
- doStart="DO_Pump_Start"
- doStop="DO_Pump_Stop"
- doWaterFlowAlarm=""
- doN2PressureAlarm=""
- aiWaterFlow=""
- aiN2Pressure=""
- aoN2PressureAlarmMaxValue=""
- aoN2PressureAlarmMinValue=""
- aoWaterFlowAlarmMaxValue=""
- aoWaterFlowAlarmMinValue=""
- scEnableDryPump="EnableDryPump"
- scEnableWaterFlow="PumpEnableWaterFlow"
- scWaterFlowMinValue="PumpWaterFlowMinValue"
- scWaterFlowMaxValue="PumpWaterFlowMaxValue"
- scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
- scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
- scEnableN2Pressure="PumpEnableN2Pressure"
- scN2PressureMinValue="PumpN2PressureMinValue"
- scN2PressureMaxValue="PumpN2PressureMaxValue"
- scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
- scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
- </IoPumps>
- <IoSignalTowers assembly="Venus_RT" classType="Venus_RT.Devices.IoSignalTower">
- <IoSignalTower id="SignalTower" display="" schematicId="" unit="" doRed="DO_Red_Light" doYellow="DO_Yellow_Light" doGreen="DO_Green_Light" doBlue="DO_Blue_Light" doBuzzer1="DO_Buzzer1" doBuzzer2="DO_Buzzer2"/>
- </IoSignalTowers>
- <IoPressureControls assembly="Venus_RT" classType="Venus_RT.Devices.IoPressureControl">
- <IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
- diLogicProcessGasFlowing=""
- scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
- scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
- scIsIndependentControl="IsIndependentControl"
- scIsBoostPumpInstalled="EnableBoosterPump"
- scTvInstalled="EnableThrottleValve"
- boost="" tv="ThrottleValve" drypump="MainPump"
- pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" loadlockMeter="LoadlockGauge" escHeGauge="ESCHeGauge"/>
- </IoPressureControls>
- <IoHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IoHeater">
- <IoHeater id="ValveHeater" display="Valve Heater" schematicId="" unit="℃"
- doPowerOn="DO_Valve_Heater_On"
- diDeviation="DI_Valve_TC_Deviation_out_of_range"
- diPowerOnFeedback="DI_Valve_Heater_On_FB"
- diControlTcBroken="DI_Valve_Control_TC_Broken_Alarm"
- diMonitorTcBroken="DI_Valve_Monitor_TC_Broken_Alarm"
- aoSetPoint="AO_Valve_Temperature_Setpoint"
- aoSetPointLimit="AO_Valve_Temp_Limit_Setpoint"
- aiFeedback="AI_Valve_Control_TC_Temp"
- aiMonitor="AI_Valve_Monitor_TC_Temp"
- scSetPointLimit="ValveHeaterSetPointLimit" />
- <IoHeater id="ForelineHeater" display="Foreline Heater" schematicId="" unit="℃"
- doPowerOn="DO_Foreline_Heater_On"
- diDeviation="DI_Foreline_TC_Deviation_out_of_range"
- diPowerOnFeedback="DI_Valve_Heater_On_FB"
- diControlTcBroken="DI_Foreline_Control_TC_Broken_Alarm"
- diMonitorTcBroken="DI_Foreline_Monitor_TC_Broken_Alarm"
- aoSetPoint="AO_Foreline_Temperature_Setpoint"
- aoSetPointLimit="AO_Foreline_Temp_Limit_Setpoint"
- aiFeedback="AI_Fline_Control_TC_Temp"
- aiMonitor="AI_Fline_Monitor_TC_Temp"
- scSetPointLimit="ForeLineHeaterSetPointLimit" />
- <IoHeater id="WallHeater" display="Wall Heater" schematicId="" unit="℃"
- doPowerOn="DO_CHB_Wall_Heater_On"
- diDeviation="DI_CHB_Wall_TC_Deviation_out_of_range"
- diPowerOnFeedback="DI_CHB_Wall_Heater_On_FB"
- diControlTcBroken="DI_CHB_Wall_Control_TC_Broken_Alarm"
- diMonitorTcBroken="DI_CHB_Wall_Monitor_TC_Broken_Alarm"
- aoSetPoint="AO_CHB_Wall_Temperature_Setpoint"
- aoSetPointLimit="AO_CHB_Wall_Temp_Limit_Setpoint"
- aiFeedback="AI_CHB_Wall_Control_TC_Temp"
- aiMonitor="AI_CHB_Wall_Monitor_TC_Temp"
- scSetPointLimit="WallHeaterSetPointLimit" />
- </IoHeaters>
- <IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
- <IoHeartbeat id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
- </IoHeartbeats>
- <IoResets>
- <IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
- </IoResets>
- <IoSetConfigs>
- <IoSetConfig id="SetProcessPressureOffset" display="" schematicId="" unit="" aoPressureOffset="AO_Process_Pressure_Offset_Value" />
- </IoSetConfigs>
- <IoStatisticss>
- <IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
- diMonitorSignal="DI_Generator_Power_Status"
- scLastPMTime="RfOnTimeLastPMTime"
- scTimeFromLastPM="RfOnTimeFromLastPM"
- scTimeTotal="RfOnTimeTotal"
- scEnableAlarm="RfOnTimeEnableAlarm"
- scPMInterval="RfOnTimePMInterval" />
- <IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
- diMonitorSignal="DI_Pump_Running"
- scLastPMTime="PumpOnTimeLastPMTime"
- scTimeFromLastPM="PumpOnTimeFromLastPM"
- scTimeTotal="PumpOnTimeTotal"
- scEnableAlarm="PumpOnTimeEnableAlarm"
- scPMInterval="PumpOnTimePMInterval" />
- </IoStatisticss>
- <IoPlcDateTimes>
- <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
- aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
- </IoPlcDateTimes>
- <IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
- <IoCylinder id="LiftPin" display="lifter Pin" schematicId="" unit="" doMotorRelay=""
- doON="DO_Lift_Pin_Up" doOFF="DO_Lift_Pin_Down" diON="DI_Lift_Pin_Up_POS" diOFF="DI_Lift_Pin_Down_POS" />
- <IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay=""
- doON="DO_Slit_Door_Open" doOFF="DO_Slit_Door_Close" diON="DI_Slit_Door_Open_POS" diOFF="DI_Slit_Door_Close_POS" />
- <IoCylinder id="LoadLockArm" display="LoadLock Arm" schematicId="" unit="" doMotorRelay=""
- doON="DO_Loadlock_Arm_Extend" doOFF="DO_Loadlock_Arm_Retract" diON="DI_Loadlock_Arm_Extend_POS" diOFF="DI_Loadlock_Arm_Retract_POS" />
- </IoCylinders>
- <IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
- <IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_PM_Lid_Closed" />
- <IoLid id="LidLoadlock" display="LidLoadlock" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_Loadlock_Lid_Closed" />
- </IoLids>
-
- <IoMessages assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoMessage">
- <IoMessage id="Messager" display="Messager" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_BaisRF_Enable" />
- </IoMessages>
- <IoPumpCtrls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPumpCtrl">
- <IoPumpCtrl id="PumpCtrl" display="Lid" schematicId="" unit="" aoPumpIOCTRLEnable="AO_Pump_IO_CTRL_Enable" doPumpRun="DO_Pump_Run" doPumpStop="DO_Pump_Stop" diDryPumpRunning="DI_Dry_Pump_Running" diBoosterPumpRunning="" diPumpRemoteStatus="DI_Pump_Remote_Status" diPumpAlarm="DI_Pump_Alarm"/>
- </IoPumpCtrls>
-
- </DeviceModelDefine>
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