| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Venus_RT.Devices;using MECF.Framework.Common.Routine;using Venus_Core;namespace Venus_RT.Modules.PMs{    class StartDryPumpRoutine : PMRoutineBase, IRoutine    {        private enum DryPumpStep        {            kCheckForeLine,            kEnd,        }        private double _chamberForelinePressureThreshold;        private int _chamberForelinePressureTimeout;        public StartDryPumpRoutine(JetPMBase chamber) : base(chamber)        {            Name = "Start DryPump";        }        public RState Start(params object[] objs)        {            if (_chamber.IsPumpRunning)            {                Stop("泵已经运行");                return RState.Failed;            }            Reset();            _chamber.OpenValve(ValveType.FastPump, false);            _chamber.OpenValve(ValveType.SoftPump, false);            _chamberForelinePressureThreshold = SC.GetValue<double>($"{Module}.DryPump.ChamberForelinePressureThreshold");            _chamberForelinePressureTimeout = SC.GetValue<int>($"{Module}.DryPump.ChamberForelinePressureTimeout");            _chamber.TurnDryPump(true);                        return Runner.Start(Module, Name);        }        public RState Monitor()        {            Runner.Wait(DryPumpStep.kCheckForeLine, () => { return _chamber.ForelinePressure < _chamberForelinePressureThreshold; }, _chamberForelinePressureTimeout*1000)                .End(DryPumpStep.kEnd, NullFun, _delay_50ms);            return Runner.Status;        }        public void Abort()        {            _chamber.CloseValves();            _chamber.TurnDryPump(false);        }    }}
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