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- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using System;
- using System.Collections.Generic;
- using System.Diagnostics;
- using System.Linq;
- using System.Reflection;
- using System.Text;
- using System.Threading.Tasks;
- using Venus_Core;
- using Venus_RT.Devices;
- using Venus_RT.Devices.PreAligner;
- using Venus_RT.Devices.VCE;
- using Venus_RT.Modules.PMs;
- namespace Venus_RT.Modules.TM.VenusEntity
- {
- public class SETMEntity : Entity, IModuleEntity
- {
- public enum STATE
- {
- Unknown,
- Init,
- Initializing,
- InitializingRB,
- Idle,
- Error,
- Pumping,
- Venting,
- Purging,
- Leakchecking,
- Picking,
- Placing,
- Swaping,
- PMPicking,
- PMPlacing,
- PMSwaping,
- Aligning,
- Mapping,
- Extending,
- Retracting,
- Swapping,
- Gotoing,
- ControllingPressure,
- }
- public enum MSG
- {
- Home,
- RobotHome,
- Online,
- Offline,
- Pump,
- Vent,
- Purge,
- CyclePurge,
- LeakCheck,
- Pick,
- Place,
- Swap,
- DoublePick,
- DoublePlace,
- DoubleSwap,
- PMPick,
- PMPlace,
- PMSwap,
- Extend,
- Retract,
- TMCycle,
- ControlPressure,
- Error,
- Abort,
- AbortControlPressure,
- Align,
- CreateJob,
- StartJob,
- Goto,
- }
- #region 公开变量
- public bool IsIdle
- {
- get { return fsm.State == (int)STATE.Idle; }
- }
- public bool IsError
- {
- get { return fsm.State == (int)STATE.Error; }
- }
- public bool IsInit
- {
- get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
- }
- public bool IsBusy
- {
- get { return !IsInit && !IsError && !IsIdle; }
- }
- public bool VCEIsATM => _tm.IsVCEATM;
- public bool TMIsATM => _tm.IsTMATM;
- public bool TMIsVAC => _tm.IsTMVAC;
- public bool VCEIsVAC => _tm.IsVCEVAC;
-
- public bool IsPMASlitDoorClosed => _tm.PMASlitDoorClosed;
- public bool IsPMBSlitDoorClosed => _tm.PMBSlitDoorClosed;
- public bool IsPMCSlitDoorClosed => _tm.PMCSlitDoorClosed;
- public bool IsVCESlitDoorClosed => _tm.VCESlitDoorClosed;
- public double VCEPressure => _tm.VCEPressure;
- public RState RobotStatus
- {
- get
- {
- if (_robot.Status != RState.Running)
- {
- if (_robotWatch.ElapsedMilliseconds < 100)
- return RState.Running;
- else
- return _robot.Status;
- }
- else
- return RState.Running;
- }
- }
- public bool IsOnline { get; internal set; }
- //public bool IsTMVac => _tm.IsTMVac;
- //public bool IsTMATM => _tm.IsTMATM;
- #endregion
- #region 私有变量
- private readonly HongHuTM _tm;
- private readonly ITransferRobot _robot;
- private readonly IPreAlign _vpa;
- private readonly SEMFHomeRoutine _homeRoutine;
- private readonly SEMFPickRoutine _pickRoutine;
- private readonly SEMFPlaceRoutine _placeRoutine;
- private readonly SEMFVentRoutine _ventRoutine;
- private readonly SEMFPumpRoutine _pumpRoutine;
- private readonly SEMFPMPickRoutine _pickpmRoutine;
- private readonly SEMFPMPlaceRoutine _placepmRoutine;
- private readonly SEMFSwapRoutine _swaproutine;
- private readonly SEMFPMSwapRoutine _pmswaproutine;
- private readonly SEMFPMRetractRoutine _pmRetractRoutine;
- private readonly SEMFPMExtendRoutine _pmExtendRoutine;
- //private readonly
- private bool startControlPressureFlag = true;
- private bool stopControlPressureFlag = false;
- private Stopwatch _robotWatch = new Stopwatch();
- private R_TRIG _robotIdleTrigger = new R_TRIG();
- private int _controlPressureCheckPoint = 100;
- private int _controlPressureSetPoint = 90;
- private int _controlFlowSetPoint = 90;
- #endregion
- public SETMEntity()
- {
- _tm = DEVICE.GetDevice<HongHuTM>("SETM");
- if(ModuleHelper.IsInstalled(ModuleName.TMRobot))
- _robot = new HongHuVR();
- _vpa = new HongHuVPA(ModuleName.VPA);
- _robotWatch = new Stopwatch();
-
- _homeRoutine = new SEMFHomeRoutine(_tm,_robot, _vpa);
- _pickRoutine = new SEMFPickRoutine(_tm,_robot, _vpa);
- _placeRoutine = new SEMFPlaceRoutine(_tm, _robot, _vpa);
- _pumpRoutine = new SEMFPumpRoutine(_tm, ModuleName.SETM);
- _ventRoutine = new SEMFVentRoutine(_tm, ModuleName.SETM);
- _pickpmRoutine = new SEMFPMPickRoutine(_tm, _robot);
- _placepmRoutine = new SEMFPMPlaceRoutine(_tm, _robot);
- _swaproutine = new SEMFSwapRoutine(_tm, _robot);
- _pmswaproutine = new SEMFPMSwapRoutine(_tm, _robot);
- _pmExtendRoutine = new SEMFPMExtendRoutine(_tm, _robot, _vpa);
- _pmRetractRoutine = new SEMFPMRetractRoutine(_tm, _robot, _vpa);
- InitFsmMap();
- }
- protected override bool Init()
- {
- DATA.Subscribe($"SETM.FsmState", () => ((STATE)fsm.State).ToString());
- DATA.Subscribe("SETM.RobotMoveAction", () => _robot.TMRobotMoveInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe("SETM.RobotMoveAction.ArmTarget", () => _robot.TMRobotMoveInfo.ArmTarget.ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe("SETM.RobotMoveAction.BladeTarget", () => _robot.TMRobotMoveInfo.BladeTarget, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe("SETM.RobotMoveAction.RobotAction", () => _robot.TMRobotMoveInfo.Action.ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- OP.Subscribe("SETM.Goto", (cmd, args) => RobotGoto(args));
- OP.Subscribe("SETM.Home", (cmd, args) => { PostMsg(MSG.Home); return true; });
- OP.Subscribe("SETM.Abort", (cmd, args) => { PostMsg(MSG.Abort); return true; });
- OP.Subscribe("SETM.Pick", (cmd, args) => { PostMsg(MSG.Pick, args); return true; });
- OP.Subscribe("SETM.Place", (cmd, args) => { PostMsg(MSG.Place, args); return true; });
- OP.Subscribe("SETM.Extend", (cmd, args) => { PostMsg(MSG.Extend, args); return true; });
- OP.Subscribe("SETM.Retract", (cmd, args) => { PostMsg(MSG.Retract, args); return true; });
-
- OP.Subscribe("SETM.PMPick", (cmd, args) => { PostMsg(MSG.PMPick, args); return true; });
- OP.Subscribe("SETM.PMPlace", (cmd, args) => { PostMsg(MSG.PMPlace, args); return true; });
- OP.Subscribe("SETM.PumpDown", (cmd, args) => { PostMsg(MSG.Pump); return true; });
- OP.Subscribe("SETM.Vent", (cmd, args) => { PostMsg(MSG.Vent); return true; });
- return true;
- }
- private void InitFsmMap()
- {
- fsm = new StateMachine<SETMEntity>("SETM", (int)STATE.Init, 50);
- AnyStateTransition(MSG.Error, fnError, STATE.Error);
- AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
- AnyStateTransition(MSG.Offline, fnOffline, FSM_STATE.SAME);
- AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
- //Home
- Transition(STATE.Initializing, FSM_MSG.TIMER, fnHomeTimeout, STATE.Idle);
- Transition(STATE.Initializing, MSG.Abort, fnAbortHome, STATE.Idle);
- //Pick
- Transition(STATE.Idle, MSG.Pick, fnStartPick, STATE.Picking);
- Transition(STATE.Picking, FSM_MSG.TIMER, fnPickTimeout, STATE.Idle);
- Transition(STATE.Picking, MSG.Abort, fnAbortPick, STATE.Idle);
- //Place
- Transition(STATE.Idle, MSG.Place, fnStartPlace, STATE.Placing);
- Transition(STATE.Placing, FSM_MSG.TIMER, fnPlaceTimeout, STATE.Idle);
- Transition(STATE.Placing, MSG.Abort, fnAbortPlace, STATE.Idle);
- //Pump
- Transition(STATE.Idle, MSG.Pump, fnStartPump, STATE.Pumping);
- Transition(STATE.Pumping, FSM_MSG.TIMER, fnPumpTimeout, STATE.Idle);
- Transition(STATE.Pumping, MSG.Abort, fnAbortPump, STATE.Idle);
- //Vent
- Transition(STATE.Idle, MSG.Vent, fnStartVent, STATE.Venting);
- Transition(STATE.Venting, FSM_MSG.TIMER, fnVentTimeout, STATE.Idle);
- Transition(STATE.Venting, MSG.Abort, fnAbortVent, STATE.Idle);
- //PMPick
- Transition(STATE.Idle, MSG.PMPick, fnStartPMPick, STATE.PMPicking);
- Transition(STATE.PMPicking, FSM_MSG.TIMER, fnPMPickTimeout, STATE.Idle);
- Transition(STATE.PMPicking, MSG.Abort, fnAbortPMPick, STATE.Idle);
- //PMPlace
- Transition(STATE.Idle, MSG.PMPlace, fnStartPMPlace, STATE.PMPlacing);
- Transition(STATE.PMPlacing, FSM_MSG.TIMER, fnPMPlaceTimeout, STATE.Idle);
- Transition(STATE.PMPlacing, MSG.Abort, fnAbortPMPlace, STATE.Idle);
- //PA align
- Transition(STATE.Idle, MSG.Align, fnStartAlign, STATE.Aligning);
- Transition(STATE.Aligning, FSM_MSG.TIMER, fnAlignTimeout, STATE.Idle);
- Transition(STATE.Aligning, MSG.Abort, fnAbortAlign, STATE.Idle);
- //Swap
- Transition(STATE.Idle, MSG.Swap, fnStartSwap, STATE.Swapping);
- Transition(STATE.Swapping, FSM_MSG.TIMER, fnSwapTimeout, STATE.Idle);
- Transition(STATE.Swapping, MSG.Abort, fnAbortSwap, STATE.Idle);
- //PM Swap
- Transition(STATE.Idle, MSG.PMSwap, fnStartPMSwap, STATE.PMSwaping);
- Transition(STATE.PMSwaping, FSM_MSG.TIMER, fnPMSwapTimeout, STATE.Idle);
- Transition(STATE.PMSwaping, MSG.Abort, fnAbortPMSwap, STATE.Idle);
- //Extend
- Transition(STATE.Idle, MSG.Extend, FnStartExtend, STATE.Extending);
- Transition(STATE.Extending, FSM_MSG.TIMER, FnExtend, STATE.Idle);
- Transition(STATE.Extending, MSG.Abort, FnAbortExtend, STATE.Idle);
- //Retract
- Transition(STATE.Idle, MSG.Retract, FnStartRetract, STATE.Retracting);
- Transition(STATE.Retracting, FSM_MSG.TIMER, FnRetract, STATE.Idle);
- Transition(STATE.Retracting, MSG.Abort, FnAbortRetract, STATE.Idle);
- //Control Pressure
- AnyStateTransition(FSM_MSG.TIMER, ControlPressureTimer_Elapsed, FSM_STATE.SAME);
- Running = true;
- }
- private bool RobotGoto(object[] param)
- {
- return _robot.Goto((ModuleName)param[0], (int)param[1], (Hand)param[2]);
- }
- private bool FnStartExtend(object[] param)
- {
- return _pmExtendRoutine.Start(param) == RState.Running;
- }
- private bool FnExtend(object[] param)
- {
- RState ret = _pmExtendRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortExtend(object[] param)
- {
- _pmExtendRoutine.Abort();
- return true;
- }
- private bool FnStartRetract(object[] param)
- {
- return _pmRetractRoutine.Start(param) == RState.Running;
- }
- private bool FnRetract(object[] param)
- {
- RState ret = _pmRetractRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortRetract(object[] param)
- {
- _pmRetractRoutine.Abort();
- return true;
- }
- private bool fnAbortPMSwap(object[] param)
- {
- _pmswaproutine.Abort();
- return true;
- }
- private bool fnPMSwapTimeout(object[] param)
- {
- RState ret = _pmswaproutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool fnStartPMSwap(object[] param)
- {
- return _pmswaproutine.Start(param) == RState.Running;
- }
- private bool fnAbortSwap(object[] param)
- {
- _swaproutine.Abort();
- return true;
- }
- private bool fnSwapTimeout(object[] param)
- {
- RState ret = _swaproutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool fnStartSwap(object[] param)
- {
- return _swaproutine.Start(param) == RState.Running;
- }
- private bool fnStartAlign(object[] param)
- {
- if (float.TryParse(param[0].ToString(), out float angle))
- {
- return _vpa.Align();
- }
- else
- {
- LOG.Write(eEvent.ERR_TM,ModuleName.VPA,$"wrong angle, value is {param[0]}.");
- return false;
- }
- }
- private bool fnAlignTimeout(object[] param)
- {
- if (_vpa.Status == RState.End)
- {
- return true;
- }
- else if (_vpa.Status != RState.Running)
- {
- LOG.Write(eEvent.ERR_TM, ModuleName.VPA, $"PreAligner align failed: {_vpa.Status}");
- return true;
- }
- return false;
- }
- private bool fnAbortAlign(object[] param)
- {
- return true;
- }
- private bool fnAbortPMPlace(object[] param)
- {
- _placepmRoutine.Abort();
- return true;
- }
- private bool fnPMPlaceTimeout(object[] param)
- {
- RState ret = _placepmRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool fnStartPMPlace(object[] param)
- {
- return _placepmRoutine.Start(param) == RState.Running;
- }
- private bool fnAbortPMPick(object[] param)
- {
- _pickpmRoutine.Abort();
- return true;
- }
- private bool fnPMPickTimeout(object[] param)
- {
- RState ret = _pickpmRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool fnStartPMPick(object[] param)
- {
- return _pickpmRoutine.Start(param) == RState.Running;
- }
-
- private bool fnAbortVent(object[] param)
- {
- _ventRoutine.Abort();
- return true;
- }
- private bool fnVentTimeout(object[] param)
- {
- RState ret = _ventRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- _ventRoutine.Abort();
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool fnStartVent(object[] param)
- {
- return _ventRoutine.Start(param) == RState.Running;
- }
- private bool fnAbortPump(object[] param)
- {
- _pumpRoutine.Abort();
- return true;
- }
- private bool fnPumpTimeout(object[] param)
- {
- RState ret = _pumpRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- _pumpRoutine.Abort();
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool fnStartPump(object[] param)
- {
- return _pumpRoutine.Start(param) == RState.Running;
- }
- private bool fnAbortPlace(object[] param)
- {
- return true;
- }
- private bool fnPlaceTimeout(object[] param)
- {
- RState ret = _placeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool fnStartPlace(object[] param)
- {
- return _placeRoutine.Start(param) == RState.Running;
- }
- private bool fnAbortPick(object[] param)
- {
- _pickRoutine.Abort();
- return true;
- }
- private bool fnStartPick(object[] param)
- {
- return _pickRoutine.Start(param) == RState.Running;
- }
- private bool fnPickTimeout(object[] param)
- {
- RState ret = _pickRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool fnAbortHome(object[] param)
- {
- _homeRoutine.Abort();
- return true;
- }
- private bool fnHome(object[] param)
- {
- if (fsm.State == (int)STATE.Init && param.Length > 0)//带参home
- {
- return false;
- }
- else
- return _homeRoutine.Start(param) == RState.Running;
- }
- private bool fnHomeTimeout(object[] param)
- {
- RState ret = _homeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool fnOffline(object[] param)
- {
- //IsOnline = false;
- //return true;
- throw new NotImplementedException();
- }
- private bool fnOnline(object[] param)
- {
- //IsOnline = true;
- //return true;
- throw new NotImplementedException();
- }
- private bool fnError(object[] param)
- {
- return true;
- }
- private bool ControlPressureTimer_Elapsed(object[] param)
- {
- // robot is idle
- // not atmmode
- //if (RouteManager.IsATMMode)
- //{
- // return true;
- //}
- //
- //if (true)
- //{
- // if (startControlPressureFlag == true)
- // {
- // //_tmControlPressureRoutine.Start(param);
- // _controlPressureCheckPoint = SC.GetValue<int>($"SETM.ControlPressureCheckPoint");
- // _controlPressureSetPoint = SC.GetValue<int>($"SETM.ControlPressureSetPoint");
- // _controlFlowSetPoint = SC.GetValue<int>($"SETM.TM_MFC1.DefaultSetPoint");
- // startControlPressureFlag = false;
- // stopControlPressureFlag = false;
- // _pumpRoutine.Start();
- // }
- // RState ret = _pumpRoutine.Monitor();
- // if (ret == RState.End && _tm.ChamberPressure <= _controlPressureCheckPoint)
- // {
- // if (stopControlPressureFlag == false)
- // {
- // stopControlPressureFlag = true;
- // _tm.TurnFastPumpValve(ModuleName.TM, true);
- // //_tm.TurnN2Valve(true);
- // //_tm.TurnPurgeValve(ModuleName.TM, true);
- // if (_tm.AllPMSlitDoorClosed)
- // {
- // _tm.SwitchTMPressureMode(true);
- // _tm.SetTMPressure(_controlPressureSetPoint);
- // }
- // else
- // {
- // _tm.SwitchTMPressureMode(false);
- // _tm.SetTMFlow(_controlFlowSetPoint);
- // }
- // if (_tm.PMASlitDoorClosed == false || _tm.PMBSlitDoorClosed == false || _tm.PMCSlitDoorClosed == false || _tm.PMDSlitDoorClosed == false)
- // {
- // _tm.SwitchTMPressureMode(false);
- // }
- // else
- // {
- // _tm.SwitchTMPressureMode(true);
- // }
- // }
- //
- // }
- //}
- //else
- //{
- // if (stopControlPressureFlag == true)
- // {
- // _tm.TurnFastPumpValve(ModuleName.TM, false);
- // //_tm.TurnN2Valve(false);
- // //_tm.TurnPurgeValve(ModuleName.TM, false);
- // //_tm.SetTMPressure(0);
- // _tm.SetTMFlow(0);
- // //startControlPressureFlag = true;
- // //stopControlPressureFlag = false;
- // }
- //
- // startControlPressureFlag = true;
- // stopControlPressureFlag = false;
- //}
- return true;
- }
- public bool Check(int msg, out string reason, params object[] args)
- {
- reason = "";
- return true;
- }
- public bool CheckAcked(int msg)
- {
- return fsm.CheckExecuted(msg);
- }
- public bool CheckToPostMessage(int msg, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- LOG.Write(eEvent.WARN_FSM_WARN, ModuleName.TM, $"TM is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
- return false;
- }
- Running = true;
- fsm.PostMsg(msg, args);
- return true;
- }
- public int Invoke(string function, params object[] args)
- {
- switch (function)
- {
- case "Home":
- CheckToPostMessage((int)MSG.Home);
- return (int)MSG.Home;
- }
- return (int)FSM_MSG.NONE;
- }
- }
- }
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