| .. |
|
PM
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
1 年之前 |
|
TM
|
d331213da1
1.SETM Pressure Control update
|
1 年之前 |
|
ClusterGemModel.xml
|
60e9a04892
Simulator LP3 Update
|
1 年之前 |
|
DBModel.sql
|
df4447c2d2
PMhomeRoutine add VenusDE chambertype
|
1 年之前 |
|
DataGroup.xml
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 年之前 |
|
DeviceModel.xsd
|
d8e5f1dc2c
2022 last update
|
2 年之前 |
|
EquipmentVariables.xml
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 年之前 |
|
EventDefine.xml
|
3f9c41937a
update for event module enhancement
|
2 年之前 |
|
IoProviderConfig.xml
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 年之前 |
|
LogDefine.json
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 年之前 |
|
RecipeFormat.xml
|
9760d40cf7
port simulator
|
2 年之前 |
|
SESequenceFormat.xml
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 年之前 |
|
SequenceFormat.xml
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
|
1 年之前 |
|
SignalTower.xml
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 年之前 |
|
System.sccfg
|
d331213da1
1.SETM Pressure Control update
|
1 年之前 |
|
System_Kepler2200.sccfg
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 年之前 |
|
VenusPreProcess.py
|
64c7ef574e
log
|
2 年之前 |
hecl
d331213da1
1.SETM Pressure Control update