SchedulerPM.cs 16 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using Aitex.Core.RT.RecipeCenter;
  17. using Venus_RT.Modules;
  18. using Venus_RT.Modules.PMs;
  19. using MECF.Framework.Common.Equipment;
  20. using MECF.Framework.Common.Schedulers;
  21. using MECF.Framework.Common.SubstrateTrackings;
  22. using Venus_RT.Devices;
  23. using Venus_Core;
  24. using MECF.Framework.Common.DataCenter;
  25. using System.IO;
  26. namespace Venus_RT.Scheduler
  27. {
  28. public class SchedulerPM : SchedulerModule
  29. {
  30. public override bool IsAvailable
  31. {
  32. get { return _entity.IsIdle && (_entity.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode) && CheckTaskDone(); }
  33. }
  34. public override bool IsOnline
  35. {
  36. get { return _entity != null && _entity.IsOnline; }
  37. }
  38. public override bool IsError
  39. {
  40. get { return _entity.IsError; }
  41. }
  42. public bool IsIdle
  43. {
  44. get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() ; }
  45. }
  46. public TaskType Task => _task;
  47. private PMEntity _entity = null;
  48. private ModuleName _taskRobot;
  49. private EnumTransferType _taskTransferType;
  50. private Hand _taskBlade;
  51. private int _taskSlot;
  52. private int _entityTaskToken = (int)FSM_MSG.NONE;
  53. private DeviceTimer _timerProcess = new DeviceTimer();
  54. private JetPMBase _pm;
  55. private int _idleCleanOpt = 0;
  56. private int _idleCleanHourSetPoint;
  57. private int _idleCleanWaferSetPoint;
  58. private int _idleCleanWaferCount;
  59. private string _idleCleanRecipe;
  60. private DateTime _lastRunTime = new DateTime();
  61. private float _paramTemp;
  62. public float Temperature
  63. {
  64. get
  65. {
  66. //if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
  67. //{
  68. // return _pm.CoolantOutletTempFB;
  69. //}
  70. //return _pm.SubstrateTempFB;
  71. return _pm.CoolantOutletTempFB;
  72. }
  73. }
  74. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  75. {
  76. _entity = Singleton<RouteManager>.Instance.GetPM(chamber);
  77. _pm = DEVICE.GetDevice<JetPMBase>(Module.ToString());
  78. EventWaferArrived += WaferArrived;
  79. LoadIdleCleanOpt();
  80. }
  81. public void InitClean()
  82. {
  83. //DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  84. //DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  85. }
  86. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  87. {
  88. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  89. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  90. }
  91. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  92. {
  93. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  94. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  95. }
  96. public bool IsTemperatureReady(float temp)
  97. {
  98. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  99. }
  100. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  101. {
  102. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  103. _taskTransferType == type;
  104. }
  105. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  106. {
  107. _task = TaskType.PrepareTransfer;
  108. _taskRobot = robot;
  109. _taskSlot = slot;
  110. _taskTransferType = type;
  111. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  112. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  113. return _entityTaskToken != (int)FSM_MSG.NONE;
  114. }
  115. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  116. {
  117. _task = TaskType.PrepareTransfer;
  118. _taskRobot = robot;
  119. _taskSlot = slot;
  120. _taskBlade = blade;
  121. _taskTransferType = type;
  122. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  123. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  124. return _entityTaskToken != (int)FSM_MSG.NONE;
  125. }
  126. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  127. {
  128. _task = TaskType.PrepareTransfer;
  129. _taskRobot = robot;
  130. _taskSlot = slot;
  131. _taskBlade = blade;
  132. _taskTransferType = type;
  133. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  134. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  135. return _entityTaskToken != (int)FSM_MSG.NONE;
  136. }
  137. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  138. {
  139. StopWaitTransfer(robot);
  140. _task = TaskType.PostTransfer;
  141. _taskRobot = robot;
  142. _taskSlot = slot;
  143. _taskTransferType = type;
  144. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  145. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  146. return _entityTaskToken != (int)FSM_MSG.NONE;
  147. }
  148. public override bool PostTransfer(ModuleName robot)
  149. {
  150. StopWaitTransfer(robot);
  151. _task = TaskType.PostTransfer;
  152. _taskRobot = robot;
  153. _taskSlot = _inTransferSlot;
  154. _taskTransferType = _inTransferType;
  155. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  156. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  157. return _entityTaskToken != (int)FSM_MSG.NONE;
  158. }
  159. public override bool Process(string recipeName, bool isCleanRecipe, RecipeType recipeType, WaferInfo wafer)
  160. {
  161. bool withWafer;
  162. if (recipeType == RecipeType.Clean)
  163. {
  164. withWafer = false;
  165. }
  166. else
  167. {
  168. withWafer = true;
  169. }
  170. _task = TaskType.Process;
  171. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  172. if (RouteManager.IsATMMode)
  173. {
  174. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  175. _timerProcess.Start(time * 1000);
  176. EV.PostInfoLog("Scheduler", $"System run in ATM mode, process skipped, delay {time} seconds");
  177. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  178. return true;
  179. }
  180. else
  181. {
  182. if(isCleanRecipe)
  183. {
  184. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  185. }
  186. else
  187. {
  188. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, RecipeType.Process);
  189. }
  190. return _entityTaskToken != (int)FSM_MSG.NONE;
  191. }
  192. }
  193. public override bool Preheating(float temperature)
  194. {
  195. _task = TaskType.Heating;
  196. _paramTemp = temperature;
  197. _entityTaskToken = _entity.InvokePreHeat(temperature);
  198. LogTaskStart(_task, $"preheat to {temperature}");
  199. return _entityTaskToken != (int)FSM_MSG.NONE;
  200. }
  201. public bool CheckTaskDone()
  202. {
  203. bool ret = false;
  204. switch (_task)
  205. {
  206. case TaskType.None:
  207. ret = true;
  208. break;
  209. case TaskType.PrepareTransfer:
  210. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
  211. break;
  212. case TaskType.PostTransfer:
  213. ret = _entity.CheckAcked(_entityTaskToken);
  214. break;
  215. case TaskType.Heating:
  216. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  217. break;
  218. case TaskType.Process:
  219. case TaskType.IdlePurgeProcess:
  220. case TaskType.IdleCleanProcess:
  221. case TaskType.PreJobProcess:
  222. case TaskType.CompleteJobProcess:
  223. if (RouteManager.IsATMMode)
  224. {
  225. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  226. if (ret)
  227. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  228. }
  229. else
  230. {
  231. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
  232. }
  233. break;
  234. }
  235. if (ret && _task != TaskType.None)
  236. {
  237. LogTaskDone(_task, "");
  238. _task = TaskType.None;
  239. }
  240. return ret;
  241. }
  242. public bool Monitor()
  243. {
  244. return true;
  245. }
  246. public void SetPMAuto()
  247. {
  248. _entity.SetAuto();
  249. }
  250. public bool IdlePurgeProcess(string recipeName)
  251. {
  252. _task = TaskType.IdlePurgeProcess;
  253. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  254. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  255. return _entityTaskToken != (int)FSM_MSG.NONE;
  256. }
  257. public bool IdleCleanProcess(string recipeName)
  258. {
  259. _task = TaskType.IdleCleanProcess;
  260. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  261. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  262. return _entityTaskToken != (int)FSM_MSG.NONE;
  263. }
  264. public void PreJobClean()
  265. {
  266. }
  267. public bool PreJobProcess(string recipeName)
  268. {
  269. _task = TaskType.PreJobProcess;
  270. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  271. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  272. return _entityTaskToken != (int)FSM_MSG.NONE;
  273. }
  274. public bool CompleteJobProcess(string recipeName)
  275. {
  276. _task = TaskType.CompleteJobProcess;
  277. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  278. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  279. return _entityTaskToken != (int)FSM_MSG.NONE;
  280. }
  281. private void WaferArrived(object sender, EventArgs e)
  282. {
  283. WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
  284. string recipeName = wafer.ProcessJob.Sequence.GetRecipe(Module);
  285. if(recipeName.Length > 0)
  286. {
  287. Process(recipeName, false, RecipeType.Process, wafer);
  288. }
  289. }
  290. #region clean task
  291. private void LoadIdleCleanOpt()
  292. {
  293. // Load Idle Clean Config
  294. _idleCleanOpt = SC.GetValue<int>($"{Module}.IdleClean.Option");
  295. _idleCleanHourSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  296. _idleCleanWaferSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanWaferCount");
  297. _idleCleanWaferCount = SC.GetValue<int>($"{Module}.IdleClean.WaferCountSinceLastClean");
  298. _idleCleanRecipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  299. string lastRun = SC.GetStringValue($"{Module}.IdleClean.LastRunTime");
  300. if (lastRun.Length > 10)
  301. {
  302. try
  303. {
  304. _lastRunTime = DateTime.Parse(lastRun);
  305. }
  306. catch (Exception _)
  307. {
  308. lastRun = string.Empty;
  309. }
  310. }
  311. if (lastRun.Length <= 10)
  312. {
  313. _lastRunTime = DateTime.Now;
  314. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  315. }
  316. // validate the idle clean recipe name
  317. string path = Path.Combine("Recipes", Module.ToString(), "Clean", $"{_idleCleanRecipe}.rcp");
  318. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  319. Recipe recipe = Recipe.Load(recipeContent);
  320. if (recipe == null)
  321. {
  322. _idleCleanRecipe = string.Empty;
  323. }
  324. }
  325. public void WaferProcessDone()
  326. {
  327. _lastRunTime = DateTime.Now;
  328. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  329. _idleCleanWaferCount++;
  330. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  331. }
  332. private void ResetIdleCleanCounter()
  333. {
  334. _lastRunTime = DateTime.Now;
  335. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  336. _idleCleanWaferCount = 0;
  337. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  338. }
  339. public bool RunIdleCleanTask()
  340. {
  341. if(_idleCleanOpt == 1)
  342. {
  343. TimeSpan span = DateTime.Now - _lastRunTime;
  344. if(span.TotalHours >= _idleCleanHourSetPoint)
  345. {
  346. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  347. ResetIdleCleanCounter();
  348. return true;
  349. }
  350. }
  351. else if(_idleCleanOpt == 2)
  352. {
  353. if(_idleCleanWaferCount >= _idleCleanWaferSetPoint)
  354. {
  355. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  356. ResetIdleCleanCounter();
  357. return true;
  358. }
  359. }
  360. return false;
  361. }
  362. public bool RunJobCleanTask(string jobCleanRecipe)
  363. {
  364. // validate the job clean recipe name
  365. //string recipeContent = RecipeFileManager.Instance.LoadRecipe(Module.ToString(), jobCleanRecipe, false);
  366. string path = Path.Combine( "Recipes", Module.ToString(),"Clean" , $"{jobCleanRecipe}.rcp");
  367. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  368. if (recipeContent.Length == 0)
  369. {
  370. return false;
  371. }
  372. Recipe recipe = Recipe.Load(recipeContent);
  373. if (recipe == null)
  374. {
  375. return false;
  376. }
  377. return Process(jobCleanRecipe, true, RecipeType.Clean, null);
  378. }
  379. #endregion
  380. }
  381. }