| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Sorter.Common;using Venus_RT.Devices;using Aitex.Core.Common;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using Venus_Core;using Aitex.Core.RT.Log;using Aitex.Core.Util;using Venus_RT.Modules.PMs;using MECF.Framework.Common.Schedulers;using System.Collections.Generic;namespace Venus_RT.Modules.TM{    class MFPMSwapRoutine : ModuleRoutineBase, IRoutine    {        private enum SwapStep        {            WaitPMReady,            PreRotation,            OpenSlitDoor,            PickPrepare,            PickExtend,            DropDownWafer,            PickDelay,            PickRetract,            PlacePrepare,            PlaceExtend,            LiftUpWafer,            PlaceDelay,            PlaceRetract,            CloseSlitDoor,            NotifyDone,        }        private enum SwapWithHeaterStep        {            WaitPMReady,            PreRotation,            OpenSlitDoor,            PickPrepare,            Picking,            PlacePrepare,            Placing,            CloseSlitDoor,            NotifyDone,        }        private readonly JetTM _JetTM;        private readonly ITransferRobot _robot;        private int _swapingTimeout = 120 * 1000;        private int _placeDelayTime = 0;        private int _pickDelayTime = 0;        private ModuleName _targetModule;        private PMEntity _pmModule;        private int _targetSlot;        private Hand _pickHand;        private Hand _placeHand;        public MFPMSwapRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TMRobot)        {            _JetTM = tm;            _robot = robot;            Name = "Swap with PM";        }        public RState Start(params object[] objs)        {            if (!_robot.IsHomed)            {                LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");                return RState.Failed;            }            var swapItem = (Queue<MoveItem>)objs[0];            _targetModule = swapItem.Peek().SourceModule;            _targetSlot = swapItem.Peek().SourceSlot;            _pickHand = swapItem.Peek().RobotHand;            _placeHand = _pickHand == Hand.Blade2 ? Hand.Blade1 : Hand.Blade2;            if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))            {                _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);            }            else            {                LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for swap action");                return RState.Failed;            }            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_placeHand))            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_placeHand} has no wafer");                return RState.Failed;            }            if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_pickHand))            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_pickHand} has a wafer");                return RState.Failed;            }            if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as {_targetModule} Slot {_targetSlot + 1} has no wafer");                return RState.Failed;            }            var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);            if (wafer.ChuckState == EnumWaferChuckStatus.Chucked)            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick the wafer in {_targetModule} as the wafer is chucked");                return RState.Failed;            }            Reset();            _swapingTimeout = SC.GetValue<int>($"TM.SwapTimeout") * 1000;            _pickDelayTime = SC.GetValue<int>($"{_targetModule}.PickDelayTime");            _placeDelayTime = SC.GetValue<int>($"{_targetModule}.PlaceDelayTime");            return Runner.Start(Module, $"Swap with {_targetModule}");        }        public RState Monitor()        {            //Runner.Wait(SwapStep.WaitPMReady,       () => _pmModule.IsIdle,                             _delay_60s)            //    .RunIf(SwapStep.PreRotation,        _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm,              WaitRotateDone)            //    .Run(SwapStep.PickPrepare,          PickPrepare,                                        IsModuleReadyForPick)            //    .Run(SwapStep.PickExtend,           PickExtend,                                         WaitRobotExtendDone)            //    .Run(SwapStep.DropDownWafer,        NotifyPMPickWafer,                                  WaitPMWaferDropDown)            //    .Delay(SwapStep.PickDelay,          _pickDelayTime)            //    .Run(SwapStep.PickRetract,          PickRetract,                                        WaitRobotRetractDone)            //    .Run(SwapStep.PlacePrepare,         PlacePrepare,                                       IsModuleReadyForPlace)            //    .Run(SwapStep.PlaceExtend,          PlaceExtend,                                        WaitRobotExtendDone)            //    .Run(SwapStep.LiftUpWafer,          NotifyLiftUpWafer,                                  WaitPMWaferLiftUp)            //    .Delay(SwapStep.PlaceDelay,         _placeDelayTime)            //    .Run(SwapStep.PlaceRetract,         PlaceRetract,                                       WaitRobotRetractDone)            //    .End(SwapStep.NotifyDone,           NotifyPMDone,                                       _delay_50ms);            switch (_pmModule.ChamberType)            {                case JetChamber.Venus:                case JetChamber.Kepler2300:                    Runner.Wait(SwapStep.WaitPMReady,     () => _pmModule.IsIdle,                             _delay_60s)                          .RunIf(SwapStep.PreRotation,    _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone)                          .Run(SwapStep.OpenSlitDoor,     OpenPMSlitDoor,                                     OpenPMSlitDoorIsOK)                          .Run(SwapStep.PickPrepare,      PickPrepare,                                        IsModuleReadyForPick)                          .Run(SwapStep.PickExtend,       PickExtend,                                         WaitRobotExtendDone)                          .Run(SwapStep.DropDownWafer,    NotifyPMPickWafer,                                  WaitPMWaferDropDown)                          .Delay(SwapStep.PickDelay,                                                          _pickDelayTime)                          .Run(SwapStep.PickRetract,      PickRetract,                                        WaitRobotRetractDone)                          .Run(SwapStep.PlacePrepare,     PlacePrepare,                                       IsModuleReadyForPlace)                          .Run(SwapStep.PlaceExtend,      PlaceExtend,                                        WaitRobotExtendDone)                          .Run(SwapStep.LiftUpWafer,      NotifyLiftUpWafer,                                  WaitPMWaferLiftUp)                          .Delay(SwapStep.PlaceDelay,     _placeDelayTime)                          .Run(SwapStep.PlaceRetract,     PlaceRetract,                                       WaitRobotRetractDone)                          .Run(SwapStep.CloseSlitDoor,    ClosePMSlitDoor,                                    ClosePMSlitDoorIsOK)                          .End(SwapStep.NotifyDone, NotifyPMDone, _delay_50ms);                    break;                case JetChamber.Kepler2200A:                case JetChamber.Kepler2200B:                    Runner.Wait(SwapWithHeaterStep.WaitPMReady,    () => _pmModule.IsIdle,              _delay_60s)                          .RunIf(SwapWithHeaterStep.PreRotation,   _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone)                          .Run(SwapWithHeaterStep.OpenSlitDoor,    OpenPMSlitDoor,                      OpenPMSlitDoorIsOK)                          .Run(SwapWithHeaterStep.PickPrepare,     PickPrepare,                         IsModuleReadyForPick)                          .Run(SwapWithHeaterStep.Picking,         Picking,                             WaitPickDone)                          .Run(SwapWithHeaterStep.PlacePrepare,    PlacePrepare,                        IsModuleReadyForPlace)                          .Run(SwapWithHeaterStep.Placing,         Placing,                             WaitPlaceDone)                          .Run(SwapWithHeaterStep.CloseSlitDoor,   ClosePMSlitDoor,                     ClosePMSlitDoorIsOK)                          .End(SwapStep.NotifyDone,                NotifyPMDone,                        _delay_50ms);                    break;            }            return Runner.Status;        }        private bool PickPrepare()        {            _pmModule.PostMsg(PMEntity.MSG.PreparePick);            return true;        }        private bool OpenPMSlitDoor()        {            return _JetTM.TurnMFSlitDoor(_targetModule, true, out _);        }        private bool OpenPMSlitDoorIsOK()        {            return _JetTM.IsPMSlitdoorOpened(_targetModule);        }        private bool ClosePMSlitDoor()        {            return _JetTM.TurnMFSlitDoor(_targetModule, false, out _);        }        private bool ClosePMSlitDoorIsOK()        {            return _JetTM.IsPMSlitdoorClosed(_targetModule);        }        private bool IsModuleReadyForPick()        {            return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;            //return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick;        }        private bool PickExtend()        {            return _robot.PickExtend(_targetModule, _targetSlot, _pickHand);        }        private bool PickRetract()        {            return _robot.PickRetract(_targetModule, _targetSlot, _pickHand);        }        private bool PlacePrepare()        {            _pmModule.PostMsg(PMEntity.MSG.PreparePlace);            return true;        }        private bool IsModuleReadyForPlace()        {            return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place && _pmModule.IsSlitDoorOpen;            //return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place;        }        private bool PlaceExtend()        {            return _robot.PlaceExtend(_targetModule, _targetSlot, _placeHand);        }        private bool PlaceRetract()        {            return _robot.PlaceRetract(_targetModule, _targetSlot, _placeHand);        }        private bool WaitRobotExtendDone()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                return true;            }            else            {                Runner.Stop($"TM Robot Place Extend failed, {_robot.Status}");                return true;            }        }        private bool Picking()        {            return _robot.Pick(_targetModule, _targetSlot, _pickHand);        }        private bool WaitPickDone()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                                                //WaferManager.Instance.WaferMoved(ModuleName.TM, (int)_hand, _targetModule, _targetSlot);                WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_pickHand);                return true;            }            else            {                Runner.Stop($"TM Robot Picking failed, {_robot.Status}");                return true;            }        }        private bool Placing()        {            return _robot.Place(_targetModule, _targetSlot, _placeHand);        }        private bool WaitPlaceDone()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_placeHand, _targetModule, _targetSlot);                return true;            }            else            {                Runner.Stop($"TM Robot Place failed, {_robot.Status}");                return true;            }        }        private bool RotateArm()        {            _pmModule.PostMsg(PMEntity.MSG.PreparePick); // Notify PM to Serv pressure in advance for throughput enhancement            return _robot.Goto(_JetTM.PreRotateModules[_targetModule], 0, _placeHand);        }        private bool WaitRotateDone()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                return true;            }            else            {                Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}");                return true;            }        }        private bool NotifyPMPickWafer()        {            _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);            return true;        }        private bool WaitPMWaferDropDown()        {            if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)            {                WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_pickHand);                return true;            }            return false;        }        private bool WaitRobotRetractDone()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                return true;            }            else            {                Runner.Stop($"TM Robot Swap Retract failed, {_robot.Status}");                return true;            }        }        private bool NotifyLiftUpWafer()        {            _pmModule.PostMsg(PMEntity.MSG.LiftUpWafer);            return true;        }        private bool WaitPMWaferLiftUp()        {            if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)            {                WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_placeHand, _targetModule, _targetSlot);                return true;            }            return false;        }        private bool NotifyPMDone()        {            _pmModule.PostMsg(PMEntity.MSG.PlaceReady);            return true;        }        public void Abort()        {            _robot.Halt();        }    }}
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