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AdLinkEthercat
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 anno fa |
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EFEM
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8bb5f3f4f9
fixed loadport event notify;
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1 anno fa |
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EPD
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4ffafb6001
EFEM界面优化
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2 anni fa |
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EPDs
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4ffafb6001
EFEM界面优化
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2 anni fa |
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IODevices
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5c5936c32c
1.修复mfc verification单点ui不显示bug
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1 anno fa |
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PreAligner
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 anno fa |
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SMIF
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8436daeb68
Eliminate SE generation warning.
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1 anno fa |
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TM
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d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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1 anno fa |
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VCE
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 anno fa |
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AIRSYSChiller.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 anno fa |
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AdTecRF.cs
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e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 anno fa |
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AdixenTurboPump.cs
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b2406d6f78
1.添加signalTonwer ui界面
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1 anno fa |
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CometRF.cs
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c0ff9f251e
1.添加kepler2200B
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1 anno fa |
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DataDefine.cs
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 anno fa |
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DeviceManager.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 anno fa |
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ESC5HighVoltage.cs
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f3bd6b016b
添加部分efem功能
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2 anni fa |
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EdwardsPump.cs
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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2 anni fa |
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FinsPlc.cs
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c457973fa2
1.添加Revtech Match
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2 anni fa |
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JetEPDBase.cs
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4ffafb6001
EFEM界面优化
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2 anni fa |
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JetEfem.cs
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5fc13b3f0c
New Efem design
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2 anni fa |
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JetKepler2200APM.cs
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e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 anno fa |
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JetKepler2200BPM.cs
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e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 anno fa |
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JetKepler2300PM.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 anno fa |
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JetPMBase.cs
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1929a3510b
1.新版ui界面开发
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1 anno fa |
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JetVenusDEPM.cs
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f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 anno fa |
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JetVenusPM.cs
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1929a3510b
1.新版ui界面开发
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1 anno fa |
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JetVenusSEPM.cs
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f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 anno fa |
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JetVenusSEPMBase.cs
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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2 anni fa |
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LzMatch_Ethercat.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 anno fa |
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PendulumValve.cs
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 anno fa |
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PlasmaController.cs
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75710d35d8
RF Match.
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2 anni fa |
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RevtechMatch.cs
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b2406d6f78
1.添加signalTonwer ui界面
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1 anno fa |
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SMCChiller.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 anno fa |
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SkyPump.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 anno fa |
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TruPlasmaRF.cs
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4338503e2a
1.添加霍庭格RF Device
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1 anno fa |
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TruPlasmaRF_Ethercat.cs
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 anno fa |
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VirgoSignalTower.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 anno fa |
hecl
d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)